CN102313976B - 显微镜自聚焦装置及相配的自聚焦用光阑 - Google Patents
显微镜自聚焦装置及相配的自聚焦用光阑 Download PDFInfo
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- CN102313976B CN102313976B CN201110170597.0A CN201110170597A CN102313976B CN 102313976 B CN102313976 B CN 102313976B CN 201110170597 A CN201110170597 A CN 201110170597A CN 102313976 B CN102313976 B CN 102313976B
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/241—Devices for focusing
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/241—Devices for focusing
- G02B21/245—Devices for focusing using auxiliary sources, detectors
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Microscoopes, Condenser (AREA)
- Automatic Focus Adjustment (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102010030430.1 | 2010-06-23 | ||
| DE102010030430.1A DE102010030430B4 (de) | 2010-06-23 | 2010-06-23 | Triangulierende Autofokuseinrichtung für Mikroskope und Verwendungen hiervon |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102313976A CN102313976A (zh) | 2012-01-11 |
| CN102313976B true CN102313976B (zh) | 2015-08-19 |
Family
ID=45115737
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110170597.0A Active CN102313976B (zh) | 2010-06-23 | 2011-06-23 | 显微镜自聚焦装置及相配的自聚焦用光阑 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US8829402B2 (https=) |
| JP (1) | JP5841750B2 (https=) |
| CN (1) | CN102313976B (https=) |
| DE (1) | DE102010030430B4 (https=) |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102011075809A1 (de) * | 2011-05-13 | 2012-11-15 | Carl Zeiss Microimaging Gmbh | Verfahren und Vorrichtung zum Festlegen eines z-Bereiches in einer Probe, in dem ein z-Stapel der Probe mittels eines Mikroskops aufzunehmen ist |
| DE102011082756A1 (de) * | 2011-09-15 | 2013-03-21 | Leica Microsystems (Schweiz) Ag | Autofokussierverfahren und -einrichtung für ein Mikroskop |
| US10455137B2 (en) * | 2014-07-28 | 2019-10-22 | Orbotech Ltd. | Auto-focus system |
| DE102014110606B4 (de) * | 2014-07-28 | 2017-10-19 | Leica Microsystems Cms Gmbh | Mikroskop mit einer Strahlteileranordnung |
| DE102017218449B3 (de) | 2017-10-16 | 2019-02-21 | Leica Microsystems Cms Gmbh | Mikroskopieverfahren mit Fokusstabilisierung, Recheneinheit, Mikroskopsystem und Computerprogrammprodukt |
| DE102018105442A1 (de) * | 2018-03-09 | 2019-09-12 | Carl Zeiss Microscopy Gmbh | Kameramodul für ein Mikroskop und Verfahren zu dessen Betrieb |
| DE102018126009B4 (de) * | 2018-10-19 | 2022-05-19 | Leica Microsystems Cms Gmbh | Verfahren und Mikroskop zur Bestimmung der Dicke eines Deck- oder Tragglases |
| DE102018125995A1 (de) | 2018-10-19 | 2020-04-23 | Leica Microsystems Cms Gmbh | Verfahren und Mikroskop zur Bestimmung einer Verkippung eines Deckglases |
| DE102018126011A1 (de) | 2018-10-19 | 2020-04-23 | Leica Microsystems Cms Gmbh | Verfahren zur Bestimmung des Brechungsindex eines optischen Mediums in einem Mikroskop und Mikroskop |
| DE102018126002B4 (de) | 2018-10-19 | 2020-10-08 | Leica Microsystems Cms Gmbh | Verfahren und Mikroskop zur Bestimmung des Brechungsindex eines optischen Mediums |
| DE102018131427B4 (de) | 2018-12-07 | 2021-04-29 | Leica Microsystems Cms Gmbh | Verfahren zur automatischen Positionsermittlung auf einer Probenanordnung und entsprechendes Mikroskop, Computerprogramm und Computerprogrammprodukt |
| DE102019109832B3 (de) | 2019-04-12 | 2020-04-23 | Leica Microsystems Cms Gmbh | Lichtblattmikroskop und Verfahren zum Erfassen einer Messgröße |
| US11086118B2 (en) * | 2019-04-29 | 2021-08-10 | Molecular Devices, Llc | Self-calibrating and directional focusing systems and methods for infinity corrected microscopes |
| EP4528353A3 (de) | 2020-09-01 | 2025-09-17 | BMG Labtech GmbH | Autofokussystem für eine optische mess- oder mikroskopievorrichtung, verfahren zur fokuseinstellung bei einer optischen mess- oder mikroskopievorrichtung sowie optische mess- oder mikroskopievorrichtung |
| CN113267884B (zh) * | 2021-05-24 | 2022-06-28 | 凌云光技术股份有限公司 | 一种多层自动对焦的方法及系统 |
| EP4194918A1 (en) | 2021-12-10 | 2023-06-14 | Leica Microsystems CMS GmbH | Method for controlling microscopic imaging and corresponding microscope control arrangement and microscope |
| JPWO2024106237A1 (https=) * | 2022-11-15 | 2024-05-23 | ||
| DE102023107032A1 (de) * | 2023-03-21 | 2024-09-26 | Carl Zeiss Microscopy Gmbh | Mikroskop und Verfahren zum Autofokussieren |
| CN119148373A (zh) * | 2024-10-08 | 2024-12-17 | 江苏集萃苏科思科技有限公司 | 用于自动对焦传感器的中继系统、传感器、系统以及方法 |
| CN119986957B (zh) * | 2025-02-08 | 2025-10-24 | 浙江大学 | 一种适用于半透明晶圆的自动对焦系统和厚度测量系统 |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4517666A (en) * | 1981-06-22 | 1985-05-14 | Tokyo Shibaura Denki Kabushiki Kaisha | Optical head |
| US4595829A (en) * | 1982-05-25 | 1986-06-17 | Ernst Leitz Wetzlar Gmbh | Apparatus for automatically focusing objects to be viewed in optical instruments |
| US5136149A (en) * | 1990-04-23 | 1992-08-04 | Dainippon Screen Mfg. Co., Ltd. | Method of focusing optical head on object body and automatic focusing device for optical inspection system including tilt detection |
| US5925874A (en) * | 1996-06-29 | 1999-07-20 | Carl-Zeiss-Stiftung | Microscope with an autofocus arrangement having a variable magnification system |
| US6091075A (en) * | 1997-06-04 | 2000-07-18 | Hitachi, Ltd. | Automatic focus detection method, automatic focus detection apparatus, and inspection apparatus |
| JP2004251984A (ja) * | 2003-02-18 | 2004-09-09 | Jasco Corp | オートフォーカス装置 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2102922C3 (de) | 1971-01-22 | 1978-08-24 | Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar | Anordnung zum selbsttätigen Fokussieren auf in optischen Geräten zu betrachtende Objekte |
| AT353497B (de) * | 1972-05-23 | 1979-11-12 | Leitz Ernst Gmbh | Vorrichtung an mikroskopen, zum automatischen fokussieren des geraetes auf unterschiedliche objekt-ebenen |
| JP3226299B2 (ja) * | 1991-08-09 | 2001-11-05 | オリンパス光学工業株式会社 | 焦点検出装置 |
| JPH07134242A (ja) * | 1993-11-10 | 1995-05-23 | Olympus Optical Co Ltd | 焦点検出装置 |
| IL111229A (en) * | 1994-10-10 | 1998-06-15 | Nova Measuring Instr Ltd | Autofocusing microscope |
| JPH10301018A (ja) * | 1997-04-23 | 1998-11-13 | Olympus Optical Co Ltd | 顕微鏡写真用合焦装置 |
| JPH1152224A (ja) * | 1997-06-04 | 1999-02-26 | Hitachi Ltd | 自動焦点検出方法およびその装置並びに検査装置 |
| JPH1164719A (ja) * | 1997-08-22 | 1999-03-05 | Nikon Corp | 焦点検出手段を備えた顕微鏡および変位計測装置 |
| US20030184856A1 (en) * | 2002-04-02 | 2003-10-02 | Nikon Corporation | Focus point detection device and microscope using the same |
| JP4370554B2 (ja) * | 2002-06-14 | 2009-11-25 | 株式会社ニコン | オートフォーカス装置およびオートフォーカス付き顕微鏡 |
| DE10234757B4 (de) * | 2002-07-30 | 2004-08-26 | Leica Microsystems Semiconductor Gmbh | Autofokusmodul für Mikroskopbasierte Systeme |
| US7345814B2 (en) | 2003-09-29 | 2008-03-18 | Olympus Corporation | Microscope system and microscope focus maintaining device for the same |
| JP4690132B2 (ja) * | 2005-07-13 | 2011-06-01 | オリンパス株式会社 | 焦点検出装置 |
| JP2007163738A (ja) * | 2005-12-13 | 2007-06-28 | Nikon Corp | 自動焦点調節機構を備えた光学装置 |
| DE102008044509A1 (de) * | 2008-09-09 | 2010-03-11 | Vistec Semiconductor Systems Gmbh | Vorrichtung und Verfahren zur Bestimmung der Fokusposition |
-
2010
- 2010-06-23 DE DE102010030430.1A patent/DE102010030430B4/de active Active
-
2011
- 2011-06-20 JP JP2011136142A patent/JP5841750B2/ja active Active
- 2011-06-21 US US13/165,770 patent/US8829402B2/en active Active
- 2011-06-23 CN CN201110170597.0A patent/CN102313976B/zh active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4517666A (en) * | 1981-06-22 | 1985-05-14 | Tokyo Shibaura Denki Kabushiki Kaisha | Optical head |
| US4595829A (en) * | 1982-05-25 | 1986-06-17 | Ernst Leitz Wetzlar Gmbh | Apparatus for automatically focusing objects to be viewed in optical instruments |
| US5136149A (en) * | 1990-04-23 | 1992-08-04 | Dainippon Screen Mfg. Co., Ltd. | Method of focusing optical head on object body and automatic focusing device for optical inspection system including tilt detection |
| US5925874A (en) * | 1996-06-29 | 1999-07-20 | Carl-Zeiss-Stiftung | Microscope with an autofocus arrangement having a variable magnification system |
| US6091075A (en) * | 1997-06-04 | 2000-07-18 | Hitachi, Ltd. | Automatic focus detection method, automatic focus detection apparatus, and inspection apparatus |
| JP2004251984A (ja) * | 2003-02-18 | 2004-09-09 | Jasco Corp | オートフォーカス装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| US8829402B2 (en) | 2014-09-09 |
| DE102010030430B4 (de) | 2015-01-29 |
| JP5841750B2 (ja) | 2016-01-13 |
| US20110317260A1 (en) | 2011-12-29 |
| JP2012008566A (ja) | 2012-01-12 |
| DE102010030430A1 (de) | 2011-12-29 |
| CN102313976A (zh) | 2012-01-11 |
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