JP5841170B2 - 被覆工具 - Google Patents
被覆工具 Download PDFInfo
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- JP5841170B2 JP5841170B2 JP2013547210A JP2013547210A JP5841170B2 JP 5841170 B2 JP5841170 B2 JP 5841170B2 JP 2013547210 A JP2013547210 A JP 2013547210A JP 2013547210 A JP2013547210 A JP 2013547210A JP 5841170 B2 JP5841170 B2 JP 5841170B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- crystal
- αal
- protrusion
- ticn
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
- C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/36—Carbonitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/403—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
Description
装置:電界放出型透過電子顕微鏡(日立製H−9000UHR III)
測定条件:加速電圧300kV
試料作製:機械研磨+イオンミリングGATAN社製PIPS691型
針状結晶8の長さLを測定するには、図3に示すように突起7の先端と針状結晶8の先端とを結ぶ線分の長さLを測定する。また、針状結晶8の幅wを測定するには、上記長さLを測定した際の中間地点(位置)(1/2)Lの位置において、針状結晶8の被覆層6の成長方向の幅wを測定する。長さLの望ましい範囲は、100〜300nmであり、幅wの望ましい範囲は20〜40nmである。
(製造方法)
ここで、本発明の被覆工具を作製する方法について説明する。
まず、反応ガス組成として四塩化チタン(TiCl4)ガスを0.5〜10体積%、窒素(N2)ガスを10〜60体積%、残りが水素(H2)ガスからなる混合ガスを調整して反応チャンバ内に導入し、チャンバ内を800〜940℃、8〜50kPaの条件で下地層12であるTiN層を成膜する。
(断続切削条件)
被削材 :クロムモリブデン鋼 4本溝入り鋼材(SCM435)
工具形状:CNMG120412(全周)
切削速度:300m/分
送り速度:0.35mm/rev
切り込み:1.5mm
その他 :水溶性切削液使用
評価項目:欠損に至る衝撃回数
5000回時点で顕微鏡にて切刃の被覆層の剥離状態を観察
その後、さらに試験を継続して欠損した衝撃回数を評価した。
2 基体
3 TiCN層
4 αAl2O3層
6 被覆層
7 突起
8 針状結晶
9 突出粒子
10 αAl2O3結晶
11 表層
12 下地層
15 谷部
Claims (7)
- 基体の表面に、少なくともTiCN層とα型結晶のαAl2O3層を前記基体側から順に含む被覆層を設けてなり、前記被覆層の断面組織において、前記TiCN層と前記αAl2O3層との間には、前記TiCN層から前記αAl2O3層に向かってTiCN結晶からなる突起が複数設けられており、かつ、該突起の頂部から前記被覆層の成長方向に対して垂直な方向に、TiCNO結晶からなる針状結晶が伸びている被覆工具。
- 前記突起から、前記突起の頂部から前記被覆層の成長方向に対して垂直な方向に伸びている針状結晶以外の複数の他の結晶も伸びており、前記針状結晶は、前記突起から伸びる結晶の中で、前記被覆層の幅方向の長さが最も長い請求項1記載の被覆工具。
- 前記針状結晶と、前記突起の少なくとも一部の傾斜面との間にはαAl2O3結晶が存在している請求項1または2に記載の被覆工具。
- 前記突起間の谷部には(TibAl1−b)CNO(0.5≦b≦1)結晶からなる突出粒子が存在している請求項1に記載の被覆工具。
- 前記針状結晶において、前記突起に接触している端部とは反対の端部が先細りした形状である請求項1乃至4のいずれかに記載の被覆工具。
- 前記針状結晶中の窒素含有比率が前記突出粒子中の窒素含有比率よりも少ない請求項4または5に記載の被覆工具。
- 前記突起および前記針状結晶が双晶構造からなる請求項1乃至6のいずれかに記載の被覆工具。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013547210A JP5841170B2 (ja) | 2011-11-29 | 2012-11-29 | 被覆工具 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011260287 | 2011-11-29 | ||
JP2011260287 | 2011-11-29 | ||
JP2013547210A JP5841170B2 (ja) | 2011-11-29 | 2012-11-29 | 被覆工具 |
PCT/JP2012/080900 WO2013081047A1 (ja) | 2011-11-29 | 2012-11-29 | 被覆工具 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2013081047A1 JPWO2013081047A1 (ja) | 2015-04-27 |
JP5841170B2 true JP5841170B2 (ja) | 2016-01-13 |
Family
ID=48535497
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013547210A Active JP5841170B2 (ja) | 2011-11-29 | 2012-11-29 | 被覆工具 |
Country Status (2)
Country | Link |
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JP (1) | JP5841170B2 (ja) |
WO (1) | WO2013081047A1 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6016271B2 (ja) * | 2013-03-29 | 2016-10-26 | 住友電工ハードメタル株式会社 | 表面被覆窒化硼素焼結体工具 |
JP6016270B2 (ja) * | 2013-03-29 | 2016-10-26 | 住友電工ハードメタル株式会社 | 表面被覆窒化硼素焼結体工具 |
JP6016269B2 (ja) * | 2013-03-29 | 2016-10-26 | 住友電工ハードメタル株式会社 | 表面被覆窒化硼素焼結体工具 |
CN108698136B (zh) * | 2016-02-24 | 2021-03-23 | 京瓷株式会社 | 覆盖工具 |
JP6241630B1 (ja) * | 2016-07-01 | 2017-12-06 | 株式会社タンガロイ | 被覆切削工具 |
WO2019146784A1 (ja) * | 2018-01-29 | 2019-08-01 | 京セラ株式会社 | 被覆工具およびこれを備えた切削工具 |
JP7037581B2 (ja) * | 2018-01-29 | 2022-03-16 | 京セラ株式会社 | 被覆工具およびそれを備えた切削工具 |
CN111902230B (zh) * | 2018-01-29 | 2023-08-11 | 京瓷株式会社 | 涂层刀具和具备它的切削刀具 |
JP7301970B2 (ja) * | 2019-07-29 | 2023-07-03 | 京セラ株式会社 | 被覆工具およびそれを備えた切削工具 |
JP7141601B2 (ja) * | 2019-12-19 | 2022-09-26 | 株式会社タンガロイ | 被覆切削工具 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3250134B2 (ja) * | 1995-12-25 | 2002-01-28 | 三菱マテリアル株式会社 | 耐チッピング性のすぐれた表面被覆超硬合金製切削工具 |
US6447890B1 (en) * | 1997-06-16 | 2002-09-10 | Ati Properties, Inc. | Coatings for cutting tools |
SE527346C2 (sv) * | 2003-04-24 | 2006-02-14 | Seco Tools Ab | Skär med beläggning av skikt av MTCVD-Ti (C,N) med styrd kornstorlek och morfologi och metod för att belägga skäret |
JP2004148503A (ja) * | 2003-12-26 | 2004-05-27 | Hitachi Metals Ltd | 酸化アルミニウム被覆工具 |
JP2005271123A (ja) * | 2004-03-24 | 2005-10-06 | Tungaloy Corp | 被覆部材 |
JP2007229821A (ja) * | 2006-02-27 | 2007-09-13 | Kyocera Corp | 表面被覆切削工具 |
JP5317722B2 (ja) * | 2009-01-28 | 2013-10-16 | 京セラ株式会社 | 表面被覆切削工具 |
-
2012
- 2012-11-29 JP JP2013547210A patent/JP5841170B2/ja active Active
- 2012-11-29 WO PCT/JP2012/080900 patent/WO2013081047A1/ja active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2013081047A1 (ja) | 2013-06-06 |
JPWO2013081047A1 (ja) | 2015-04-27 |
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