JP5833760B2 - 個別の消去ゲートを有するスプリットゲート不揮発性フローティングゲートメモリセルを製造する方法及びそれによって製造されたメモリセル - Google Patents
個別の消去ゲートを有するスプリットゲート不揮発性フローティングゲートメモリセルを製造する方法及びそれによって製造されたメモリセル Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title description 5
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 58
- 229920005591 polysilicon Polymers 0.000 claims description 58
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 44
- 238000000034 method Methods 0.000 claims description 27
- 239000000377 silicon dioxide Substances 0.000 claims description 18
- 239000000758 substrate Substances 0.000 claims description 18
- 230000008878 coupling Effects 0.000 claims description 17
- 238000010168 coupling process Methods 0.000 claims description 17
- 238000005859 coupling reaction Methods 0.000 claims description 17
- 235000012239 silicon dioxide Nutrition 0.000 claims description 17
- 125000006850 spacer group Chemical group 0.000 claims description 15
- 238000005530 etching Methods 0.000 claims description 13
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 6
- 230000000873 masking effect Effects 0.000 claims description 6
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical group N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 6
- 239000002131 composite material Substances 0.000 claims description 5
- 230000005641 tunneling Effects 0.000 claims description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 8
- 238000000151 deposition Methods 0.000 description 7
- 239000011810 insulating material Substances 0.000 description 3
- 230000008021 deposition Effects 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000005689 Fowler Nordheim tunneling Effects 0.000 description 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- FRIKWZARTBPWBN-UHFFFAOYSA-N [Si].O=[Si]=O Chemical compound [Si].O=[Si]=O FRIKWZARTBPWBN-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000002784 hot electron Substances 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/788—Field effect transistors with field effect produced by an insulated gate with floating gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42324—Gate electrodes for transistors with a floating gate
- H01L29/42328—Gate electrodes for transistors with a floating gate with at least one additional gate other than the floating gate and the control gate, e.g. program gate, erase gate or select gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/401—Multistep manufacturing processes
- H01L29/4011—Multistep manufacturing processes for data storage electrodes
- H01L29/40114—Multistep manufacturing processes for data storage electrodes the electrodes comprising a conductor-insulator-conductor-insulator-semiconductor structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66825—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a floating gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66833—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a charge trapping gate insulator, e.g. MNOS transistors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/30—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Non-Volatile Memory (AREA)
- Semiconductor Memories (AREA)
Description
30 第1の絶縁層
50 不揮発性メモリセル
70 窒化珪素
124 ポリシリコン層
Claims (8)
- 上面を有する第1の導電型の単一結晶質基板と、
前記上面に沿って前記基板にある第2の導電型の第1の領域と、
前記第1の領域から離間して前記上面に沿って前記基板にある前記第2の導電型の第2の領域と、
前記第1の領域と前記第2の領域の間のチャンネル領域と、
前記第1の領域の間近で前記チャンネル領域の第1の部分の上に位置決めされ、第1の絶縁層によって該チャンネル領域から離間したワード線ゲートと、
前記チャンネル領域の別の一部の上に位置決めされたフローティングゲートであって、該フローティングゲートが、第2の絶縁層によって該チャンネル領域から分離された下面と、該下面の反対側の上面とを有し、該フローティングゲートが、前記ワード線ゲートに隣接するがそこから分離された第1の側壁と、該第1の側壁の反対側の第2の側壁とを有し、該第2の側壁及び該上面が、鋭い縁部を形成し、該第2の側壁が、該第1の側壁よりも長さが大きく、該上面が、該第1の側壁から該第2の側壁まで上方に傾斜した湾曲形状を有する前記フローティングゲートと、該第1の側壁の反対側の第2の側壁とを有し、
前記フローティングゲートの前記上面の上に位置決めされ、かつそこから第3の絶縁層によって絶縁された結合ゲートであって、
前記ワード線ゲートに隣接するがそれから分離された第1の側壁と、前記フローティングゲートの前記上方に傾斜した上面の上方に配設されかつ、前記結合ゲートの前記第1の側壁から前記結合ゲートの第2の側壁に向かって上方に傾斜した湾曲形状を有する少なくとも1つの部分を有する結合ゲートと、
前記フローティングゲートの前記第2の側壁に隣接して位置決めされた消去ゲートであって、前記第2の領域の上に位置決めされてそこから絶縁された前記消去ゲートであって、前記フローティングゲートの一部分に覆い被さっている消去ゲートと、
を含むことを特徴とする不揮発性メモリセル。 - 不揮発性メモリセルを製作する方法であって、
第1のポリシリコン層を単一結晶質基板上の第1の絶縁層上に形成する段階と、
ハードマスクを前記第1のポリシリコン層の上に該ハードマスクが該第1のポリシリコン層の一部分の上に位置決めされるように形成する段階と、
前記第1のポリシリコン層を該ポリシリコンの上面が前記ハードマスクから離れる方向に下向きに傾斜するように湾曲した手法でエッチングする段階と、
第2の絶縁層を前記第1のポリシリコン層の上に形成する段階と、
第2のポリシリコン層を前記第2の絶縁層上に形成する段階であって、前記第2のポリシリコン層が下面を有し、該下面の一部が前記第1のポリシリコン層の前記上方に傾斜した表面の上方に配置されかつ、湾曲した手法で前記ハードマスクから離れる方向に下向きに傾斜する下面を有する、前記第2のポリシリコン層を前記第2の絶縁層上に形成する段階と、
前記第2のポリシリコン層、前記第2の絶縁層、及び前記第1のポリシリコン層をマスキングして切断する段階と、
前記ハードマスクを除去する段階と、
前記ハードマスクが除去された領域で前記第1のポリシリコン層をエッチングする段階と、
前記第1のポリシリコン層がエッチングされた前記領域で該第1のポリシリコン層の上にトンネリング層を形成する段階と、
前記第1のポリシリコンがエッチングされた前記領域に、かつ前記第2のポリシリコン層、前記第2の絶縁層、及び前記第1のポリシリコン層が切断された位置に隣接する部分に消去ゲートを形成する段階と、
ソース領域及びドレイン領域を前記基板に形成する段階と、
を含むことを特徴とする方法。 - 前記ハードマスクは、窒化珪素であることを特徴とする請求項2に記載の方法。
- 前記第1の絶縁層は、二酸化珪素であることを特徴とする請求項2に記載の方法。
- 前記第2の絶縁層は、二酸化珪素、窒化珪素、及び二酸化珪素の複合絶縁層であることを特徴とする請求項2に記載の方法。
- 前記トンネリング層は、二酸化珪素であることを特徴とする請求項2に記載の方法。
- 前記エッチングする段階は、前記第2の絶縁層の間近の前記第1のポリシリコン層の表面とエッチングされた該第1のポリシリコン層との間の該第1のポリシリコン層に鋭い縁部を形成することを特徴とする請求項2に記載の方法。
- 前記マスキングして切断する段階は、
犠牲層を形成する段階と、
前記犠牲層を異方的にエッチングし、前記ハードマスクに隣接して犠牲スペーサを形成する段階と、
マスキングして切断するために前記犠牲スペーサを使用する段階と、
を更に含む、
ことを特徴とする請求項2に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2011102470648A CN102956643A (zh) | 2011-08-24 | 2011-08-24 | 制造非易失浮栅存储单元的方法和由此制造的存储单元 |
CN201110247064.8 | 2011-08-24 | ||
PCT/US2012/050022 WO2013028358A1 (en) | 2011-08-24 | 2012-08-08 | A method of making a split gate non-volatile floating gate memory cell having a separate erase gate, and a memory cell made thereby |
Publications (2)
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JP2014524670A JP2014524670A (ja) | 2014-09-22 |
JP5833760B2 true JP5833760B2 (ja) | 2015-12-16 |
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JP2014527170A Active JP5833760B2 (ja) | 2011-08-24 | 2012-08-08 | 個別の消去ゲートを有するスプリットゲート不揮発性フローティングゲートメモリセルを製造する方法及びそれによって製造されたメモリセル |
Country Status (7)
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US (1) | US9190532B2 (ja) |
EP (1) | EP2748842A4 (ja) |
JP (1) | JP5833760B2 (ja) |
KR (1) | KR101537915B1 (ja) |
CN (1) | CN102956643A (ja) |
TW (1) | TWI466240B (ja) |
WO (1) | WO2013028358A1 (ja) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10312246B2 (en) * | 2014-08-08 | 2019-06-04 | Silicon Storage Technology, Inc. | Split-gate flash memory cell with improved scaling using enhanced lateral control gate to floating gate coupling |
US9917165B2 (en) * | 2015-05-15 | 2018-03-13 | Taiwan Semiconductor Manufacturing Co., Ltd. | Memory cell structure for improving erase speed |
US10141321B2 (en) * | 2015-10-21 | 2018-11-27 | Silicon Storage Technology, Inc. | Method of forming flash memory with separate wordline and erase gates |
WO2017184315A1 (en) * | 2016-04-20 | 2017-10-26 | Silicon Storage Technology, Inc. | Method of forming pairs of three-gate non-volatile flash memory cells using two polysilicon deposition steps |
CN107305892B (zh) * | 2016-04-20 | 2020-10-02 | 硅存储技术公司 | 使用两个多晶硅沉积步骤来形成三栅极非易失性闪存单元对的方法 |
CN107342288B (zh) * | 2016-04-29 | 2020-08-04 | 硅存储技术公司 | 分裂栅型双位非易失性存储器单元 |
JP6716022B2 (ja) * | 2016-05-17 | 2020-07-01 | シリコン ストーリッジ テクノロージー インコーポレイテッドSilicon Storage Technology, Inc. | 個々のメモリセルが読み出し、プログラミング、及び消去される3ゲートフラッシュメモリセルアレイ |
CN107425003B (zh) * | 2016-05-18 | 2020-07-14 | 硅存储技术公司 | 制造分裂栅非易失性闪存单元的方法 |
CN108122920B (zh) * | 2017-12-13 | 2019-03-26 | 武汉新芯集成电路制造有限公司 | 提高浮栅型闪存擦除效率的方法以及浮栅型闪存 |
US10418451B1 (en) * | 2018-05-09 | 2019-09-17 | Silicon Storage Technology, Inc. | Split-gate flash memory cell with varying insulation gate oxides, and method of forming same |
US10762966B2 (en) * | 2018-10-30 | 2020-09-01 | Globalfoundries Singapore Pte. Ltd. | Memory arrays and methods of forming the same |
CN112185815A (zh) * | 2019-07-04 | 2021-01-05 | 硅存储技术公司 | 形成具有间隔物限定的浮栅和离散地形成的多晶硅栅的分裂栅闪存存储器单元的方法 |
US11545583B2 (en) | 2021-02-05 | 2023-01-03 | Semiconductor Components Industries, Llc | Process of forming an electronic device including a non-volatile memory cell |
JP2024511318A (ja) * | 2021-03-11 | 2024-03-13 | シリコン ストーリッジ テクノロージー インコーポレイテッド | 改善した制御ゲートの容量結合を備えたスプリットゲート型フラッシュメモリセル及びその製造方法 |
CN115083912A (zh) | 2021-03-11 | 2022-09-20 | 硅存储技术股份有限公司 | 带改善控制栅电容耦合的分裂栅存储器单元及其制造方法 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05335588A (ja) * | 1992-05-28 | 1993-12-17 | Sony Corp | 不揮発性メモリー装置及び不揮発性メモリー装置の製造方法 |
TWI223407B (en) * | 2001-10-17 | 2004-11-01 | Silicon Storage Tech Inc | Self aligned method of forming a semiconductor memory array of floating gate memory cells with buried bit-line and raised source line, and a memory array made thereby |
US6917069B2 (en) | 2001-10-17 | 2005-07-12 | Silicon Storage Technology, Inc. | Semiconductor memory array of floating gate memory cells with buried bit-line and vertical word line transistor |
US6525369B1 (en) | 2002-05-13 | 2003-02-25 | Ching-Yuan Wu | Self-aligned split-gate flash memory cell and its contactless flash memory arrays |
KR100509828B1 (ko) | 2002-09-19 | 2005-08-24 | 동부아남반도체 주식회사 | 스플리트형 플래시 메모리 셀의 게이트 전극 및 그 제조방법 |
US6747310B2 (en) | 2002-10-07 | 2004-06-08 | Actrans System Inc. | Flash memory cells with separated self-aligned select and erase gates, and process of fabrication |
US6806531B1 (en) * | 2003-04-07 | 2004-10-19 | Silicon Storage Technology, Inc. | Non-volatile floating gate memory cell with floating gates formed in cavities, and array thereof, and method of formation |
TW589720B (en) * | 2003-07-10 | 2004-06-01 | Powerchip Semiconductor Corp | Split gate flash memory and manufacturing method thereof |
US7358134B2 (en) * | 2003-09-15 | 2008-04-15 | Powerchip Semiconductor Corp. | Split gate flash memory cell and manufacturing method thereof |
JP2006093707A (ja) | 2004-09-22 | 2006-04-06 | Samsung Electronics Co Ltd | 半導体素子及びその製造方法 |
KR100621553B1 (ko) * | 2004-09-22 | 2006-09-19 | 삼성전자주식회사 | 비휘발성 메모리 소자 및 그 제조방법 |
KR100614644B1 (ko) | 2004-12-30 | 2006-08-22 | 삼성전자주식회사 | 비휘발성 기억소자, 그 제조방법 및 동작 방법 |
TWI284415B (en) | 2005-10-26 | 2007-07-21 | Promos Technologies Inc | Split gate flash memory cell and fabrication method thereof |
US20090039410A1 (en) * | 2007-08-06 | 2009-02-12 | Xian Liu | Split Gate Non-Volatile Flash Memory Cell Having A Floating Gate, Control Gate, Select Gate And An Erase Gate With An Overhang Over The Floating Gate, Array And Method Of Manufacturing |
US8008702B2 (en) * | 2008-02-20 | 2011-08-30 | Taiwan Semiconductor Manufacturing Company, Ltd. | Multi-transistor non-volatile memory element |
-
2011
- 2011-08-24 CN CN2011102470648A patent/CN102956643A/zh active Pending
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2012
- 2012-08-08 JP JP2014527170A patent/JP5833760B2/ja active Active
- 2012-08-08 US US14/240,440 patent/US9190532B2/en active Active
- 2012-08-08 WO PCT/US2012/050022 patent/WO2013028358A1/en active Application Filing
- 2012-08-08 KR KR1020147007040A patent/KR101537915B1/ko active IP Right Grant
- 2012-08-08 EP EP12826205.2A patent/EP2748842A4/en not_active Withdrawn
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Also Published As
Publication number | Publication date |
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WO2013028358A1 (en) | 2013-02-28 |
KR20140053340A (ko) | 2014-05-07 |
TW201322377A (zh) | 2013-06-01 |
US9190532B2 (en) | 2015-11-17 |
JP2014524670A (ja) | 2014-09-22 |
EP2748842A1 (en) | 2014-07-02 |
EP2748842A4 (en) | 2015-07-29 |
US20140217489A1 (en) | 2014-08-07 |
KR101537915B1 (ko) | 2015-07-17 |
TWI466240B (zh) | 2014-12-21 |
CN102956643A (zh) | 2013-03-06 |
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