JP5816434B2 - 薄膜バッテリーのための薄膜電解質 - Google Patents
薄膜バッテリーのための薄膜電解質 Download PDFInfo
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Description
本出願は、「Thin Film Electrolyte for Thin Film Batteries」という題で2008年1月23日に出願された米国仮特許出願第61/022,904号に関し、35 U.S.C.§119の下で、その利益を主張し、「Method for Sputter Targets for Electrolyte Films」という題で2008年12月19日に出願された米国特許出願第12/339,361号の一部継続出願であり、35 U.S.C.§120の下でその利益を主張し、この米国特許出願は、「Method for Sputter Targets for Electrolyte Films」という題で2007年12月21日に出願された米国仮特許出願第61/016,038号の35 U.S.C.§119の下での利益を主張し、上記のすべては、本明細書において、それら全体が参照によって援用される。
本発明は、例えば、好ましくは、より高い電力性能と、延ばされた薄膜バッテリーの貯蔵寿命と、電解質の製作方法とに役立つ増加したリチウムイオン伝導率を有する、ソリッドステートリチウムイオン薄膜電解質に関する。
Lipon(Lithium phosphorus oxynitride〜Li3.1PO3.3N0.5の化学式を有する強力なリチウムイオン薄膜電解質)電解質とともに構成されたソリッドステートリチウムイオン薄膜バッテリー(TFB)は、幅広い温度範囲にわたって許容可能な内部電池抵抗を示す一方で、非常に還元性の高い電極、例えば、金属リチウムアノードおよび非常に酸化性の高い電極、例えば、Li/Li+に対して4.2Vで荷電されたLi0.5CoO2カソードと接触して電気化学的安定性を示す。加えて、Liponは、すべての公知の室温のリチウムイオン電解質のうちで最も低い電子伝導率のうちの1つを有し、それによって、LiponのTFBに10年を超える貯蔵寿命と、周囲条件の下での年当たり極めて低い容量損失(<1%)を提供する。
σLi+=A/T*exp(−Ea/RT)
によって与えられ、ここでσLl+は、所与の温度T[K]におけるLi+イオン伝導率であり、Rは、気体定数を表し、係数Aは、理論的に最大の達成可能なLi+イオン伝導率に対する尺度である事前指数因子を示す。この伝導率は、Li+イオン伝導に対する活性化エンタルピーEa(Li+イオン伝導に対する電解質ネットワーク内の化学的障壁)が電解質のソリッドステートガラス(または結晶性)ネットワークの中に存在しない場合には、実現され得、次いで、この伝導率は、TFBが動作する下では、1つの電解質ネットワークの位置から別の電解質ネットワークの位置へのすべてのLi+イオンジャンプの試みが成功することを可能にし得る。
例1:本発明の具体的実施形態において、電解質のLi+イオン伝導率は、2つのサンドイッチ状の不活性金属電極を用いた伝導率テスト電池において実証される。電解質は、0.5eV未満の(Lipon Ea=0.514eVと比べて)改善された活性化エンタルピーEaを示し、改善された活性化エンタルピーEaは、25℃において5*10−6S/cmより大きいLi+イオン伝導率につながる。電解質は、0℃における1.48*10−6S/cmのLi+イオン伝導率を所有し、0℃における1.48*10−6S/cmのLi+イオン伝導率は、Lipon(2.95*10−7S/cm)のLi+イオン伝導率よりも5倍高く、−40℃(Lipon:8.1*10−9S/cm)において10倍高い。本発明の電解質は、電解質が壊れ、1*10−6S/cmよりも大きい実質的電子伝導率を示す前に、少なくとも、Li+/Liに対して0〜5.5Vからの電気化学的安定窓を有する。
Claims (15)
- ソリッドステートの無機電解質であって、
Li3(Sc2−xMx)(PO4−yNz)3によって記述される化学的組成物であって、ここでx≦2、z≦8/3、2y=3zであり、Mは、Al、YおよびAl1−aYaの群から選択され、ここでa<1である、化学的組成物、
Li8−3.5xP1.5xZr1−xO6−yNzによって記述される化学的組成物であって、ここでx≦0.8、z≦4かつ2y=3zである、化学的組成物、
Li8−3xLaxZrO6−yNzによって記述される化学的組成物であって、ここで0<x≦2、z≦4かつ2y=3zである、化学的組成物、又は
Li6−0.75xP1.75xZr2−2xO7−yNzによって記述される化学的組成物であって、ここでx≦0.8、z≦14/3かつ2y=3zである、化学的組成物
を含み、
該電解質は、0Å〜100Åの結晶化度を有し、
該電解質は、25℃で5×10−6S/cmより大きいリチウムイオン伝導率を有する、電解質。 - 金属リチウムアノードと反応しないようにさらに構成されている、請求項1に記載の電解質。
- +3.9Vの電位に荷電された正のカソードと反応しないようにさらに構成され、該電位は、金属リチウム基準電極と比較して測定される、請求項1に記載の電解質。
- 150℃までの周囲温度において熱的に安定であるようにさらに構成されている、請求項1に記載の電解質。
- 150℃までの周囲温度において金属リチウムと反応しないようにさらに構成されている、請求項1に記載の電解質。
- 正のカソード材料と反応しないようにさらに構成され、該正のカソード材料は、150℃までの周囲温度において+3.9Vの電位に荷電され、該電位は、金属リチウム基準電極と比較して測定される、請求項1に記載の電解質。
- 5μmよりも小さい前記電解質の厚さを含む、請求項1に記載の電解質。
- 前記電解質は、
第一の電解質の化学的組成物を含む第一の電解質−電極界面と、
第二の電解質の化学的組成物を含む第二の電解質−電極界面と
をさらに含み、該第一の電解質の化学的組成物と該第二の電解質の化学的組成物とは、異なる化学的組成物である、請求項1に記載の電解質。 - ソリッドステートの無機電解質を製作する方法であって、該方法は、
真空チャンバーを提供することと、
該チャンバーの中で少なくとも1つの堆積基板を提供することと、
該チャンバーの中で少なくとも1つの堆積標的を提供することであって、該少なくとも1つの堆積標的は、少なくとも1つの標的材料を備えていることと、
該真空チャンバーの中で堆積ガス雰囲気を提供することと、
該少なくとも1つの標的材料を該堆積ガス雰囲気の中に蒸発させることと、
堆積材料を該堆積ガス雰囲気の中に形成することと、
該堆積材料を該少なくとも1つの堆積基板に堆積させることと
を包含し、
該電解質は、0〜100Åの結晶化度を有し、
該堆積された材料は、25℃で5×10−6S/cmより大きいリチウムイオン伝導率を有し、
該堆積材料は、
Li3(Sc2−xMx)(PO4−yNz)3によって記述される化学的組成物であって、ここでx≦2、z≦8/3、2y=3zであり、Mは、Al、YおよびAl1−aYaの群から選択され、ここでa<1である、化学的組成物、
Li8−3.5xP1.5xZr1−xO6−yNzによって記述される化学的組成物であって、ここでx≦0.8、z≦4かつ2y=3zである、化学的組成物、
Li8−3xLaxZrO6−yNzによって記述される化学的組成物であって、ここで0<x≦2、z≦4かつ2y=3zである、化学的組成物、又は
Li6−0.75xP1.75xZr2−2xO7−yNzによって記述される化学的組成物であって、ここでx≦0.8、z≦14/3かつ2y=3zである、化学的組成物
を有する、方法。 - 前記蒸発ステップは、RFマグネトロンスパッター堆積プロセスを包含する、請求項9に記載の方法。
- 前記堆積ガス雰囲気は、アルゴン、窒素、酸素、およびそれらの任意の混合物の群から選択される材料を含む、請求項9に記載の方法。
- 前記電解質は、150℃までの周囲温度において熱的に安定している、請求項9に記載の方法。
- 前記電解質は、150℃までの周囲温度において金属リチウムと反応しない、請求項9に記載の方法。
- 前記電解質は、正のカソード材料と反応せず、該正のカソード材料は、150℃までの周囲温度において少なくとも+3.9Vの電位に荷電され、該電位は、金属リチウム基準電極と比較して測定される、請求項9に記載の方法。
- 前記形成するステップは、前記堆積中に前記堆積材料を変えることをさらに包含する、請求項9に記載の方法。
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Application Number | Priority Date | Filing Date | Title |
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US2290408P | 2008-01-23 | 2008-01-23 | |
US61/022,904 | 2008-01-23 | ||
PCT/US2009/031815 WO2009094524A1 (en) | 2008-01-23 | 2009-01-23 | Thin film electrolyte for thin film batteries |
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EP3182500B1 (en) * | 2012-04-18 | 2018-06-13 | Applied Materials, Inc. | Pinhole-free solid state electrolytes with high ionic conductivity |
JP6165546B2 (ja) * | 2013-08-09 | 2017-07-19 | 株式会社日立製作所 | 固体電解質および全固体リチウムイオン二次電池 |
FR3023302B1 (fr) * | 2014-07-01 | 2016-07-15 | I-Ten | Batterie entierement solide comprenant un electrolyte solide a base de phosphate lithie, stable au contact de l'anode |
JP5873533B2 (ja) | 2014-07-16 | 2016-03-01 | 三井金属鉱業株式会社 | リチウムイオン電池用硫化物系固体電解質 |
JP6455529B2 (ja) | 2015-02-02 | 2019-01-23 | 富士通株式会社 | 固体電解質、及び全固体電池 |
FR3040241A1 (fr) * | 2016-01-27 | 2017-02-24 | Commissariat Energie Atomique | Batterie electrochimique au lithium comprenant un electrolyte solide specifique |
CN107579275B (zh) * | 2016-07-04 | 2022-02-11 | 松下知识产权经营株式会社 | 含有氧氮化物的固体电解质和使用它的二次电池 |
JP6667141B2 (ja) * | 2016-07-04 | 2020-03-18 | パナソニックIpマネジメント株式会社 | 酸窒化物を含む固体電解質、及びそれを用いた二次電池 |
CN107863533A (zh) * | 2017-09-30 | 2018-03-30 | 中国科学院青岛生物能源与过程研究所 | 一种玻璃态的氧化物电解质材料 |
FR3080957B1 (fr) | 2018-05-07 | 2020-07-10 | I-Ten | Electrodes mesoporeuses pour dispositifs electrochimiques en couches minces |
CN113151790B (zh) * | 2021-02-05 | 2022-06-07 | 电子科技大学 | 离子/电子共导体薄膜及其制备方法、固态电池及电动车 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000033409A1 (fr) * | 1998-12-03 | 2000-06-08 | Sumitomo Electric Industries, Ltd. | Accumulateur au lithium |
JP4016344B2 (ja) * | 1998-12-03 | 2007-12-05 | 住友電気工業株式会社 | リチウム二次電池 |
DE60112109D1 (de) * | 2000-03-24 | 2005-08-25 | Cymbet Corp | Gehäuse für die anordnung und anordnungen mit integrierter batterie |
KR100682883B1 (ko) * | 2002-11-27 | 2007-02-15 | 삼성전자주식회사 | 고체 전해질, 그의 제조방법 및 이를 채용한 리튬전지 및 박막전지 |
JP2004228029A (ja) * | 2003-01-27 | 2004-08-12 | Matsushita Electric Ind Co Ltd | 電気化学素子とその製法およびその製造装置 |
US20070141468A1 (en) * | 2003-04-03 | 2007-06-21 | Jeremy Barker | Electrodes Comprising Mixed Active Particles |
WO2005001983A1 (ja) * | 2003-06-27 | 2005-01-06 | Matsushita Electric Industrial Co., Ltd. | 固体電解質およびそれを用いた全固体電池 |
JP3677509B2 (ja) * | 2003-06-27 | 2005-08-03 | 松下電器産業株式会社 | 固体電解質およびそれを用いた全固体電池 |
DE102004010892B3 (de) * | 2004-03-06 | 2005-11-24 | Christian-Albrechts-Universität Zu Kiel | Chemisch stabiler fester Lithiumionenleiter |
US7632607B2 (en) * | 2004-10-21 | 2009-12-15 | Panasonic Corporation | Negative electrode for battery and battery using the same |
JP2006120437A (ja) * | 2004-10-21 | 2006-05-11 | Matsushita Electric Ind Co Ltd | 固体電解質電池 |
KR101101001B1 (ko) * | 2005-01-19 | 2011-12-29 | 아리조나 보드 오브 리전트스, 아리조나주의 아리조나 주립대 대행법인 | 술폰계 전해질을 갖는 전류 생성 장치 |
US7553582B2 (en) * | 2005-09-06 | 2009-06-30 | Oak Ridge Micro-Energy, Inc. | Getters for thin film battery hermetic package |
WO2007042394A1 (en) * | 2005-10-13 | 2007-04-19 | Nv Bekaert Sa | A method to deposit a coating by sputtering |
CN100362683C (zh) * | 2006-01-23 | 2008-01-16 | 浙江大学 | 全固态微型锂电池电解质的制备方法 |
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