JP5807344B2 - 角速度センサ及び電子機器 - Google Patents

角速度センサ及び電子機器 Download PDF

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Publication number
JP5807344B2
JP5807344B2 JP2011040509A JP2011040509A JP5807344B2 JP 5807344 B2 JP5807344 B2 JP 5807344B2 JP 2011040509 A JP2011040509 A JP 2011040509A JP 2011040509 A JP2011040509 A JP 2011040509A JP 5807344 B2 JP5807344 B2 JP 5807344B2
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JP
Japan
Prior art keywords
angular velocity
frame
velocity sensor
beams
pendulum
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Expired - Fee Related
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JP2011040509A
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English (en)
Japanese (ja)
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JP2012177610A5 (enExample
JP2012177610A (ja
Inventor
本多　順一
順一 本多
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Sony Corp
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Sony Corp
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Application filed by Sony Corp filed Critical Sony Corp
Priority to JP2011040509A priority Critical patent/JP5807344B2/ja
Priority to US13/372,053 priority patent/US8833163B2/en
Priority to CN201210038714.2A priority patent/CN102650519B/zh
Publication of JP2012177610A publication Critical patent/JP2012177610A/ja
Publication of JP2012177610A5 publication Critical patent/JP2012177610A5/ja
Priority to US14/484,841 priority patent/US9885576B2/en
Application granted granted Critical
Publication of JP5807344B2 publication Critical patent/JP5807344B2/ja
Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
JP2011040509A 2011-02-25 2011-02-25 角速度センサ及び電子機器 Expired - Fee Related JP5807344B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2011040509A JP5807344B2 (ja) 2011-02-25 2011-02-25 角速度センサ及び電子機器
US13/372,053 US8833163B2 (en) 2011-02-25 2012-02-13 Angular velocity sensor
CN201210038714.2A CN102650519B (zh) 2011-02-25 2012-02-17 角速度传感器
US14/484,841 US9885576B2 (en) 2011-02-25 2014-09-12 Angular velocity sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011040509A JP5807344B2 (ja) 2011-02-25 2011-02-25 角速度センサ及び電子機器

Publications (3)

Publication Number Publication Date
JP2012177610A JP2012177610A (ja) 2012-09-13
JP2012177610A5 JP2012177610A5 (enExample) 2014-03-13
JP5807344B2 true JP5807344B2 (ja) 2015-11-10

Family

ID=46692583

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011040509A Expired - Fee Related JP5807344B2 (ja) 2011-02-25 2011-02-25 角速度センサ及び電子機器

Country Status (3)

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US (2) US8833163B2 (enExample)
JP (1) JP5807344B2 (enExample)
CN (1) CN102650519B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220236057A1 (en) * 2019-07-30 2022-07-28 Seiko Epson Corporation Vibrator Device, Electronic Apparatus, And Vehicle

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2392897B1 (en) * 2010-01-12 2014-06-11 Sony Corporation Angular velocity sensor, electronic device, and method for detecting angular velocity
JP5716827B2 (ja) * 2011-07-04 2015-05-13 株式会社村田製作所 振動子および振動ジャイロ
JP5810685B2 (ja) * 2011-07-05 2015-11-11 株式会社村田製作所 振動子および振動ジャイロ
JP5935901B2 (ja) * 2012-12-11 2016-06-15 株式会社村田製作所 角速度検出素子
JP2014205198A (ja) * 2013-04-10 2014-10-30 セイコーエプソン株式会社 ロボット、ロボット制御装置およびロボットシステム
JP6354122B2 (ja) 2013-06-05 2018-07-11 セイコーエプソン株式会社 ロボット
JP2014240789A (ja) * 2013-06-12 2014-12-25 ソニー株式会社 圧電デバイス及び電子機器
WO2015045621A1 (ja) 2013-09-26 2015-04-02 株式会社村田製作所 角速度検出素子
JP6323034B2 (ja) * 2014-01-28 2018-05-16 セイコーエプソン株式会社 機能素子、電子デバイス、電子機器、および移動体
US9846036B2 (en) * 2014-11-14 2017-12-19 Samsung Electro-Mechanics Co., Ltd. Angular velocity sensor
US10809061B2 (en) * 2016-01-27 2020-10-20 Hitachi, Ltd. Vibratory gyroscope including a plurality of inertial bodies
JP7024278B2 (ja) * 2017-09-21 2022-02-24 セイコーエプソン株式会社 物理量センサー、慣性計測装置、測位装置、携帯型電子機器、電子機器および移動体
JP7276008B2 (ja) * 2019-08-29 2023-05-18 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
CN115004549A (zh) 2020-01-28 2022-09-02 株式会社村田制作所 压电装置

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ES2056580T3 (es) * 1990-05-18 1994-10-01 British Aerospace Sensores inerciales.
JPH06147902A (ja) * 1992-11-04 1994-05-27 Murata Mfg Co Ltd 振動ジャイロ
US5656777A (en) * 1996-06-13 1997-08-12 Alliedsignal, Inc. Miniature box vibrating gyroscope
JP3780086B2 (ja) 1998-01-22 2006-05-31 Ｎｅｃトーキン株式会社 姿勢角度検出装置
JP3942762B2 (ja) * 1998-02-12 2007-07-11 日本碍子株式会社 振動子、振動型ジャイロスコープ、直線加速度計および回転角速度の測定方法
US6151964A (en) * 1998-05-25 2000-11-28 Citizen Watch Co., Ltd. Angular velocity sensing device
JP4498491B2 (ja) * 1998-05-25 2010-07-07 シチズンホールディングス株式会社 角速度検出素子
JP2000009473A (ja) * 1998-06-22 2000-01-14 Tokai Rika Co Ltd ２軸ヨーレートセンサ及びその製造方法
JP2000258165A (ja) * 1999-03-10 2000-09-22 Murata Mfg Co Ltd 角速度センサ
JP2000283765A (ja) 1999-03-30 2000-10-13 Matsushita Electric Ind Co Ltd 三脚音叉振動子および角速度センサ
JP4529203B2 (ja) * 1999-08-05 2010-08-25 パナソニック株式会社 角速度センサ
JP4292746B2 (ja) * 2002-02-15 2009-07-08 株式会社デンソー 角速度センサ
JP2007010452A (ja) * 2005-06-30 2007-01-18 Star Micronics Co Ltd 電磁駆動型角速度センサおよびその駆動回路
US7432189B2 (en) * 2005-11-30 2008-10-07 Lam Research Corporation Device with self aligned gaps for capacitance reduction
WO2009078284A1 (ja) * 2007-12-19 2009-06-25 Murata Manufacturing Co., Ltd. 角速度センサ
JP4631992B2 (ja) * 2008-01-07 2011-02-16 株式会社村田製作所 角速度センサ
EP2238460B1 (en) * 2008-02-05 2013-08-07 Invensense Inc. X-y axis dual-mass gyroscope with masses moving in opposite directions along z axis

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220236057A1 (en) * 2019-07-30 2022-07-28 Seiko Epson Corporation Vibrator Device, Electronic Apparatus, And Vehicle
US11940275B2 (en) * 2019-07-30 2024-03-26 Seiko Epson Corporation Vibrator device, electronic apparatus, and vehicle

Also Published As

Publication number Publication date
CN102650519A (zh) 2012-08-29
CN102650519B (zh) 2016-06-01
US20140373629A1 (en) 2014-12-25
US9885576B2 (en) 2018-02-06
US20120216613A1 (en) 2012-08-30
JP2012177610A (ja) 2012-09-13
US8833163B2 (en) 2014-09-16

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