CN102650519B - 角速度传感器 - Google Patents

角速度传感器 Download PDF

Info

Publication number
CN102650519B
CN102650519B CN201210038714.2A CN201210038714A CN102650519B CN 102650519 B CN102650519 B CN 102650519B CN 201210038714 A CN201210038714 A CN 201210038714A CN 102650519 B CN102650519 B CN 102650519B
Authority
CN
China
Prior art keywords
frame
angular velocity
velocity sensor
pendulum
plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201210038714.2A
Other languages
English (en)
Chinese (zh)
Other versions
CN102650519A (zh
Inventor
本多顺一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Semiconductor Solutions Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Publication of CN102650519A publication Critical patent/CN102650519A/zh
Application granted granted Critical
Publication of CN102650519B publication Critical patent/CN102650519B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
CN201210038714.2A 2011-02-25 2012-02-17 角速度传感器 Expired - Fee Related CN102650519B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011-040509 2011-02-25
JP2011040509A JP5807344B2 (ja) 2011-02-25 2011-02-25 角速度センサ及び電子機器

Publications (2)

Publication Number Publication Date
CN102650519A CN102650519A (zh) 2012-08-29
CN102650519B true CN102650519B (zh) 2016-06-01

Family

ID=46692583

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201210038714.2A Expired - Fee Related CN102650519B (zh) 2011-02-25 2012-02-17 角速度传感器

Country Status (3)

Country Link
US (2) US8833163B2 (enExample)
JP (1) JP5807344B2 (enExample)
CN (1) CN102650519B (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011086633A1 (ja) * 2010-01-12 2011-07-21 ソニー株式会社 角速度センサ、電子機器及び角速度の検出方法
CN103620343B (zh) * 2011-07-04 2016-06-08 株式会社村田制作所 振子及振动陀螺仪
JP5810685B2 (ja) * 2011-07-05 2015-11-11 株式会社村田製作所 振動子および振動ジャイロ
WO2014091976A1 (ja) * 2012-12-11 2014-06-19 株式会社村田製作所 角速度検出素子
JP2014205198A (ja) * 2013-04-10 2014-10-30 セイコーエプソン株式会社 ロボット、ロボット制御装置およびロボットシステム
JP6354122B2 (ja) 2013-06-05 2018-07-11 セイコーエプソン株式会社 ロボット
JP2014240789A (ja) * 2013-06-12 2014-12-25 ソニー株式会社 圧電デバイス及び電子機器
WO2015045621A1 (ja) 2013-09-26 2015-04-02 株式会社村田製作所 角速度検出素子
JP6323034B2 (ja) * 2014-01-28 2018-05-16 セイコーエプソン株式会社 機能素子、電子デバイス、電子機器、および移動体
US9846036B2 (en) * 2014-11-14 2017-12-19 Samsung Electro-Mechanics Co., Ltd. Angular velocity sensor
JP6514790B2 (ja) * 2016-01-27 2019-05-15 株式会社日立製作所 ジャイロスコープ
JP7024278B2 (ja) * 2017-09-21 2022-02-24 セイコーエプソン株式会社 物理量センサー、慣性計測装置、測位装置、携帯型電子機器、電子機器および移動体
JP7251385B2 (ja) * 2019-07-30 2023-04-04 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
JP7276008B2 (ja) * 2019-08-29 2023-05-18 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
WO2021153491A1 (ja) * 2020-01-28 2021-08-05 株式会社村田製作所 圧電デバイス

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000081336A (ja) * 1998-05-25 2000-03-21 Citizen Watch Co Ltd 角速度検出素子
JP2000258165A (ja) * 1999-03-10 2000-09-22 Murata Mfg Co Ltd 角速度センサ
JP2001050751A (ja) * 1999-08-05 2001-02-23 Matsushita Electric Ind Co Ltd 角速度センサ
JP2003240557A (ja) * 2002-02-15 2003-08-27 Denso Corp 角速度センサ
JP2007010452A (ja) * 2005-06-30 2007-01-18 Star Micronics Co Ltd 電磁駆動型角速度センサおよびその駆動回路
TW200942776A (en) * 2007-12-19 2009-10-16 Murata Manufacturing Co Angular velocity sensor
CN101910789A (zh) * 2008-01-07 2010-12-08 株式会社村田制作所 角速度传感器

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0461761B1 (en) * 1990-05-18 1994-06-22 British Aerospace Public Limited Company Inertial sensors
JPH06147902A (ja) * 1992-11-04 1994-05-27 Murata Mfg Co Ltd 振動ジャイロ
US5656777A (en) * 1996-06-13 1997-08-12 Alliedsignal, Inc. Miniature box vibrating gyroscope
JP3780086B2 (ja) 1998-01-22 2006-05-31 Ｎｅｃトーキン株式会社 姿勢角度検出装置
JP3942762B2 (ja) * 1998-02-12 2007-07-11 日本碍子株式会社 振動子、振動型ジャイロスコープ、直線加速度計および回転角速度の測定方法
US6151964A (en) * 1998-05-25 2000-11-28 Citizen Watch Co., Ltd. Angular velocity sensing device
JP2000009473A (ja) * 1998-06-22 2000-01-14 Tokai Rika Co Ltd ２軸ヨーレートセンサ及びその製造方法
JP2000283765A (ja) 1999-03-30 2000-10-13 Matsushita Electric Ind Co Ltd 三脚音叉振動子および角速度センサ
US7432189B2 (en) * 2005-11-30 2008-10-07 Lam Research Corporation Device with self aligned gaps for capacitance reduction
CN101939653B (zh) * 2008-02-05 2014-12-03 因文森斯公司 具有垂直集成的电子器件和晶片级密封式封装的x-y轴双质量块音叉陀螺仪

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000081336A (ja) * 1998-05-25 2000-03-21 Citizen Watch Co Ltd 角速度検出素子
JP2000258165A (ja) * 1999-03-10 2000-09-22 Murata Mfg Co Ltd 角速度センサ
JP2001050751A (ja) * 1999-08-05 2001-02-23 Matsushita Electric Ind Co Ltd 角速度センサ
JP2003240557A (ja) * 2002-02-15 2003-08-27 Denso Corp 角速度センサ
JP2007010452A (ja) * 2005-06-30 2007-01-18 Star Micronics Co Ltd 電磁駆動型角速度センサおよびその駆動回路
TW200942776A (en) * 2007-12-19 2009-10-16 Murata Manufacturing Co Angular velocity sensor
CN101910789A (zh) * 2008-01-07 2010-12-08 株式会社村田制作所 角速度传感器

Also Published As

Publication number Publication date
US8833163B2 (en) 2014-09-16
US9885576B2 (en) 2018-02-06
US20140373629A1 (en) 2014-12-25
CN102650519A (zh) 2012-08-29
JP2012177610A (ja) 2012-09-13
US20120216613A1 (en) 2012-08-30
JP5807344B2 (ja) 2015-11-10

Similar Documents

Publication Publication Date Title
CN102650519B (zh) 角速度传感器
JP5724817B2 (ja) 角速度センサ及び電子機器
JP6614157B2 (ja) センサ素子、ジャイロセンサ及び電子機器
JP5822177B2 (ja) ジャイロセンサー、電子機器
CN102889888B (zh) 振动陀螺元件、陀螺传感器及电子设备
US10001372B2 (en) Angular velocity detection device
JPWO2018016190A1 (ja) ジャイロセンサ、信号処理装置、電子機器およびジャイロセンサの制御方法
JP2012242240A (ja) ジャイロセンサー、電子機器
JP6146592B2 (ja) 物理量センサー、電子機器
JP2012112819A (ja) 振動ジャイロ
WO2018092449A1 (ja) ジャイロセンサ及び電子機器
JP6702053B2 (ja) ジャイロセンサ及び電子機器
JP2011127913A (ja) 振動ジャイロ
WO2017204057A1 (ja) ジャイロセンサ及び電子機器

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C41 Transfer of patent application or patent right or utility model
TR01 Transfer of patent right

Effective date of registration: 20160906

Address after: Kanagawa, Japan

Patentee after: SONY SEMICONDUCTOR SOLUTIONS Corp.

Address before: Tokyo, Japan

Patentee before: Sony Corp.

CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20160601

Termination date: 20220217

CF01 Termination of patent right due to non-payment of annual fee