JP5796280B2 - 振動片、振動子及び発振器 - Google Patents
振動片、振動子及び発振器 Download PDFInfo
- Publication number
- JP5796280B2 JP5796280B2 JP2010163648A JP2010163648A JP5796280B2 JP 5796280 B2 JP5796280 B2 JP 5796280B2 JP 2010163648 A JP2010163648 A JP 2010163648A JP 2010163648 A JP2010163648 A JP 2010163648A JP 5796280 B2 JP5796280 B2 JP 5796280B2
- Authority
- JP
- Japan
- Prior art keywords
- coupling point
- arm
- vibrating
- resonator element
- extending direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000008878 coupling Effects 0.000 claims description 91
- 238000010168 coupling process Methods 0.000 claims description 91
- 238000005859 coupling reaction Methods 0.000 claims description 91
- 239000013078 crystal Substances 0.000 description 66
- 239000010453 quartz Substances 0.000 description 27
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 27
- 239000000853 adhesive Substances 0.000 description 7
- 230000001070 adhesive effect Effects 0.000 description 7
- 230000004048 modification Effects 0.000 description 7
- 238000012986 modification Methods 0.000 description 7
- 230000008859 change Effects 0.000 description 6
- 230000035939 shock Effects 0.000 description 5
- 238000013459 approach Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000005452 bending Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 239000003566 sealing material Substances 0.000 description 3
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 1
- 235000014676 Phragmites communis Nutrition 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- PSHMSSXLYVAENJ-UHFFFAOYSA-N dilithium;[oxido(oxoboranyloxy)boranyl]oxy-oxoboranyloxyborinate Chemical compound [Li+].[Li+].O=BOB([O-])OB([O-])OB=O PSHMSSXLYVAENJ-UHFFFAOYSA-N 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Landscapes
- Oscillators With Electromechanical Resonators (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010163648A JP5796280B2 (ja) | 2010-07-21 | 2010-07-21 | 振動片、振動子及び発振器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010163648A JP5796280B2 (ja) | 2010-07-21 | 2010-07-21 | 振動片、振動子及び発振器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012028899A JP2012028899A (ja) | 2012-02-09 |
| JP2012028899A5 JP2012028899A5 (enExample) | 2013-09-12 |
| JP5796280B2 true JP5796280B2 (ja) | 2015-10-21 |
Family
ID=45781342
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010163648A Expired - Fee Related JP5796280B2 (ja) | 2010-07-21 | 2010-07-21 | 振動片、振動子及び発振器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5796280B2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2014208251A1 (ja) * | 2013-06-26 | 2017-02-23 | 株式会社大真空 | 音叉型圧電振動片、および音叉型圧電振動子 |
| JP6340774B2 (ja) * | 2013-11-16 | 2018-06-13 | セイコーエプソン株式会社 | 振動素子、振動子、発振器、電子機器および移動体 |
| JP2021013132A (ja) * | 2019-07-09 | 2021-02-04 | セイコーエプソン株式会社 | 振動素子、振動子、電子機器、及び移動体 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3322153B2 (ja) * | 1997-03-07 | 2002-09-09 | セイコーエプソン株式会社 | 音叉型水晶振動片 |
| US6628048B2 (en) * | 2000-11-29 | 2003-09-30 | Samsung Electro-Mechanics Co., Ltd. | Crystal oscillator with improved shock resistance |
| JP2004208237A (ja) * | 2002-12-26 | 2004-07-22 | Seiko Epson Corp | 圧電デバイスと圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器 |
| JP4325240B2 (ja) * | 2003-03-26 | 2009-09-02 | セイコーエプソン株式会社 | 音叉型振動片および圧電デバイス |
| JP4356366B2 (ja) * | 2003-06-10 | 2009-11-04 | セイコーエプソン株式会社 | 圧電振動片、圧電振動片の製造方法および圧電振動子、圧電振動子を搭載した電子機器 |
| JP4020031B2 (ja) * | 2003-06-27 | 2007-12-12 | セイコーエプソン株式会社 | 圧電振動片と圧電振動片を利用した圧電デバイス、ならびに圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器 |
| JP2005094724A (ja) * | 2003-09-17 | 2005-04-07 | Herutsu Kk | 音叉型水晶振動子 |
| JP4211578B2 (ja) * | 2003-11-13 | 2009-01-21 | セイコーエプソン株式会社 | 圧電振動片とその製造方法、ならびに圧電デバイスおよび圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器 |
| JP4214412B2 (ja) * | 2004-10-21 | 2009-01-28 | セイコーエプソン株式会社 | 圧電振動片と圧電デバイスならびにジャイロセンサ |
| JP5115092B2 (ja) * | 2006-08-18 | 2013-01-09 | セイコーエプソン株式会社 | 圧電振動片、圧電デバイス、及び発振器 |
| JP2008060952A (ja) * | 2006-08-31 | 2008-03-13 | Kyocera Kinseki Corp | 音叉型水晶振動板とその製造方法 |
| ATE453954T1 (de) * | 2007-07-19 | 2010-01-15 | Eta Sa Mft Horlogere Suisse | Piezoelektrischer resonator mit optimierten bewegungsfähigkeiten |
| JP5175128B2 (ja) * | 2008-04-04 | 2013-04-03 | 日本電波工業株式会社 | 音叉型圧電振動片および圧電デバイス |
| JP4594412B2 (ja) * | 2008-05-22 | 2010-12-08 | 日本電波工業株式会社 | 圧電振動片および圧電デバイス |
| JP2010130124A (ja) * | 2008-11-26 | 2010-06-10 | Epson Toyocom Corp | 屈曲振動子、屈曲振動子の製造方法、屈曲振動デバイス |
-
2010
- 2010-07-21 JP JP2010163648A patent/JP5796280B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2012028899A (ja) | 2012-02-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5617392B2 (ja) | 振動片、振動子及び発振器 | |
| JP4985960B2 (ja) | 振動片及び振動子 | |
| JP5652122B2 (ja) | 振動片、振動デバイス及び電子機器 | |
| JP4207873B2 (ja) | 圧電振動片および圧電デバイス | |
| JP2011239132A (ja) | 振動片、振動子及び発振器 | |
| JP5565158B2 (ja) | 振動片、振動子、発振器、および電子機器 | |
| JP2010147625A (ja) | 圧電振動子 | |
| JP5732728B2 (ja) | 振動片、振動子及び発振器 | |
| JP4265499B2 (ja) | 圧電振動片および圧電デバイス | |
| CN102629860A (zh) | 振动片、振子、振荡器以及电子设备 | |
| JP5533213B2 (ja) | 振動片、振動子及び発振器 | |
| JP5796280B2 (ja) | 振動片、振動子及び発振器 | |
| JP4548148B2 (ja) | 圧電振動片および圧電デバイス | |
| JP5045054B2 (ja) | 圧電デバイス | |
| JP5589517B2 (ja) | 振動片、振動子及び発振器 | |
| JP6137277B2 (ja) | 振動片、振動子及び発振器 | |
| JP2012023428A (ja) | 振動片、振動子及び発振器 | |
| JP5585240B2 (ja) | 振動片及び振動デバイス | |
| JP5621285B2 (ja) | 振動片、振動子および発振器 | |
| JP5552836B2 (ja) | 圧電振動片、圧電振動子及び発振器 | |
| JP5839083B2 (ja) | 振動片、振動子及び発振器 | |
| JP2011223228A (ja) | 振動片、振動子及び発振器 | |
| JP5494175B2 (ja) | 圧電振動片及び圧電デバイス | |
| JP5725116B2 (ja) | 振動片、振動子及び発振器 | |
| JP5057122B2 (ja) | 圧電振動片および圧電振動子 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20130719 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130729 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20140210 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140225 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140423 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140819 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20141016 |
|
| RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7423 Effective date: 20141016 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20150224 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20150422 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20150721 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20150803 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 5796280 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| LAPS | Cancellation because of no payment of annual fees |