JP5790023B2 - 電子部品の製造方法 - Google Patents
電子部品の製造方法 Download PDFInfo
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- JP5790023B2 JP5790023B2 JP2011039561A JP2011039561A JP5790023B2 JP 5790023 B2 JP5790023 B2 JP 5790023B2 JP 2011039561 A JP2011039561 A JP 2011039561A JP 2011039561 A JP2011039561 A JP 2011039561A JP 5790023 B2 JP5790023 B2 JP 5790023B2
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- thermoplastic resin
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- H—ELECTRICITY
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- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
- H01L23/433—Auxiliary members in containers characterised by their shape, e.g. pistons
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4871—Bases, plates or heatsinks
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
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- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
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- H01L2224/8319—Arrangement of the layer connectors prior to mounting
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Description
第1実施形態による電子部品及びその製造方法について図1乃至図12を用いて説明する。
λcnt×Tcnt>λcoat×Tcoat×100
の関係を満たすことが望ましい。
第2実施形態による電子部品及びその製造方法について図13を用いて説明する。
本発明の第3実施形態による電子機器及びその製造方法について図14乃至図17を用いて説明する。
上記実施形態に限らず種々の変形が可能である。
前記放熱材料上に、吸取紙を配置する工程と、
前記熱可塑性樹脂の融解温度よりも高い温度で熱処理を行い、複数の前記線状構造体上の前記熱可塑性樹脂を前記吸取紙により吸い取る工程と、
前記吸取紙を除去する工程と、
冷却して前記熱可塑性樹脂を固化し、前記放熱材料を前記第1の基板に接着する工程と
を有することを特徴とする電子部品の製造方法。
前記放熱材料を配置する工程では、前記充填層から露出した複数の前記線状構造体の一端部が前記第1の基板に直に接するように、前記放熱材料を前記第1の基板上に配置する
ことを特徴とする電子部品の製造方法。
前記放熱材料を前記第1の基板に接着する工程の後に、複数の前記線状構造体の他端部を前記充填層から露出させる工程を更に有する
ことを特徴とする電子部品の製造方法。
前記熱処理により、前記熱可塑性樹脂を前記第1の基板の表面まで浸透させる
ことを特徴とする電子部品の製造方法。
前記放熱材料を配置する工程の後、前記吸取紙を配置する工程の前に、
前記熱可塑性樹脂の融解温度よりも高い温度で熱処理を行い、前記熱可塑性樹脂を前記第1の基板の表面まで浸透させる工程を更に有する
ことを特徴とする電子部品の製造方法。
前記吸取紙上から圧力を印加しながら前記熱処理を行う
ことを特徴とする電子部品の製造方法。
前記第1の基板上に前記放熱材料を配置する工程の前に、
第2の基板上に、複数の前記線状構造体を成長する工程と、
複数の前記線状構造体上に、前記熱可塑性樹脂のシートを配置する工程と、
前記熱可塑性樹脂の融解温度よりも高い温度で熱処理を行い、前記シートを複数の前記線状構造体間に浸透させ、前記充填層を形成する工程と、
複数の前記線状構造体及び前記充填層を前記第2の基板から剥離し、前記放熱材料を得る工程とを更に有する
ことを特徴とする電子部品の製造方法。
前記充填層を形成する工程では、前記第2の基板に達しないように前記シートを複数の前記線状構造体間に浸透させる
ことを特徴とする電子部品の製造方法。
複数の前記線状構造体の前記他端部に、前記熱可塑性樹脂よりも熱伝導率の高い被膜が形成されている
ことを特徴とする電子部品の製造方法。
前記第1の基板は、放熱部品である
ことを特徴とする電子部品の製造方法。
前記第1の基板の前記放熱材料が配置される領域に凹部を形成する工程を更に有する
ことを特徴とする電子部品の製造方法。
前記第1の基板と前記第2の基板は、同じ基板である
ことを特徴とする電子部品の製造方法。
前記放熱板上に形成された放熱材料とを有し、
前記放熱材料は、一端部が前記放熱板に直に接続された複数の炭素元素の線状構造体と、前記放熱板に接して形成され、複数の前記線状構造体間に配置された熱可塑性樹脂の充填層と、前記充填層から露出した複数の前記線状構造体の他端部に形成され、前記熱可塑性樹脂よりも熱伝導率の高い被膜とを有する
ことを特徴とする電子部品。
前記放熱板は、前記放熱材料が配置される領域に凹部を有する
ことを特徴とする電子部品。
12…触媒金属膜
14,36…カーボンナノチューブ
16…被膜
18…熱可塑性樹脂シート
20…充填層
22…カーボンナノチューブシート
24…放熱板
26…吸取紙
28…凹部
32…突起状電極
34…半導体素子
38…ヒートスプレッダ
40…有機シーラント
42…電子部品
Claims (6)
- 第1の基板上に、複数の炭素元素の線状構造体と、複数の前記線状構造体間に配置された熱可塑性樹脂の充填層とを有する放熱材料を配置する工程と、
前記熱可塑性樹脂の融解温度よりも高い温度で熱処理を行い、前記熱可塑性樹脂を前記第1の基板の表面まで浸透させる工程と、
前記放熱材料上に、吸取紙を配置する工程と、
前記熱可塑性樹脂の融解温度よりも高い温度で熱処理を行い、複数の前記線状構造体上の前記熱可塑性樹脂を前記吸取紙により吸い取る工程と、
前記吸取紙を除去する工程と、
冷却して前記熱可塑性樹脂を固化し、前記放熱材料を前記第1の基板に接着する工程と
を有することを特徴とする電子部品の製造方法。 - 請求項1記載の電子部品の製造方法において、
前記放熱材料を配置する工程では、前記充填層から露出した複数の前記線状構造体の一端部が前記第1の基板に直に接するように、前記放熱材料を前記第1の基板上に配置する
ことを特徴とする電子部品の製造方法。 - 請求項1又は2記載の電子部品の製造方法において、
前記放熱材料を前記第1の基板に接着する工程の後に、複数の前記線状構造体の他端部を前記充填層から露出させる工程を更に有する
ことを特徴とする電子部品の製造方法。 - 請求項1乃至3のいずれか1項に記載の電子部品の製造方法において、
前記吸取紙上から圧力を印加しながら前記熱処理を行う
ことを特徴とする電子部品の製造方法。 - 請求項1乃至4のいずれか1項に記載の電子部品の製造方法において、
前記第1の基板上に前記放熱材料を配置する工程の前に、
第2の基板上に、複数の前記線状構造体を成長する工程と、
複数の前記線状構造体上に、前記熱可塑性樹脂のシートを配置する工程と、
前記熱可塑性樹脂の融解温度よりも高い温度で熱処理を行い、前記シートを複数の前記線状構造体間に浸透させ、前記充填層を形成する工程と、
複数の前記線状構造体及び前記充填層を前記第2の基板から剥離し、前記放熱材料を得る工程とを更に有する
ことを特徴とする電子部品の製造方法。 - 請求項1乃至5のいずれか1項に記載の電子部品の製造方法において、
複数の前記線状構造体の前記他端部に、前記熱可塑性樹脂よりも熱伝導率の高い被膜が形成されている
ことを特徴とする電子部品の製造方法。
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