JP5786347B2 - 熱アシスト記録装置用の磁気記録媒体およびその製造方法 - Google Patents
熱アシスト記録装置用の磁気記録媒体およびその製造方法 Download PDFInfo
- Publication number
- JP5786347B2 JP5786347B2 JP2011020908A JP2011020908A JP5786347B2 JP 5786347 B2 JP5786347 B2 JP 5786347B2 JP 2011020908 A JP2011020908 A JP 2011020908A JP 2011020908 A JP2011020908 A JP 2011020908A JP 5786347 B2 JP5786347 B2 JP 5786347B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic recording
- layer
- magnetic
- recording medium
- nonmagnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title description 21
- 238000004519 manufacturing process Methods 0.000 title description 6
- 239000010410 layer Substances 0.000 claims description 249
- 239000000758 substrate Substances 0.000 claims description 28
- 239000000463 material Substances 0.000 claims description 24
- 239000003575 carbonaceous material Substances 0.000 claims description 18
- 239000011241 protective layer Substances 0.000 claims description 18
- 229910052799 carbon Inorganic materials 0.000 claims description 16
- 230000008878 coupling Effects 0.000 claims description 16
- 238000010168 coupling process Methods 0.000 claims description 16
- 238000005859 coupling reaction Methods 0.000 claims description 16
- 239000007788 liquid Substances 0.000 claims description 14
- 230000001050 lubricating effect Effects 0.000 claims description 14
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 9
- 239000013078 crystal Substances 0.000 description 24
- 239000000956 alloy Substances 0.000 description 17
- 230000017525 heat dissipation Effects 0.000 description 17
- 229910004298 SiO 2 Inorganic materials 0.000 description 16
- 229910045601 alloy Inorganic materials 0.000 description 15
- 230000001965 increasing effect Effects 0.000 description 15
- 229910010413 TiO 2 Inorganic materials 0.000 description 11
- 239000000696 magnetic material Substances 0.000 description 11
- 239000006249 magnetic particle Substances 0.000 description 11
- 239000010408 film Substances 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 9
- 229910052796 boron Inorganic materials 0.000 description 8
- 230000005415 magnetization Effects 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 6
- 229910019222 CoCrPt Inorganic materials 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 229910005335 FePt Inorganic materials 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000010687 lubricating oil Substances 0.000 description 4
- 238000001755 magnetron sputter deposition Methods 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 229910018979 CoPt Inorganic materials 0.000 description 3
- 239000010702 perfluoropolyether Substances 0.000 description 3
- 239000005341 toughened glass Substances 0.000 description 3
- 241000511976 Hoya Species 0.000 description 2
- 238000003917 TEM image Methods 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910052707 ruthenium Inorganic materials 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000009751 slip forming Methods 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- -1 B 4 C Chemical class 0.000 description 1
- 229910003321 CoFe Inorganic materials 0.000 description 1
- 229910019233 CoFeNi Inorganic materials 0.000 description 1
- 241000052343 Dares Species 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 229910002367 SrTiO Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000001552 radio frequency sputter deposition Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910052702 rhenium Inorganic materials 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 229910000702 sendust Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/65—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition
- G11B5/657—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition containing inorganic, non-oxide compound of Si, N, P, B, H or C, e.g. in metal alloy or compound
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/66—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers
- G11B5/672—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers having different compositions in a plurality of magnetic layers, e.g. layer compositions having differing elemental components or differing proportions of elements
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/72—Protective coatings, e.g. anti-static or antifriction
- G11B5/726—Two or more protective coatings
- G11B5/7262—Inorganic protective coating
- G11B5/7264—Inorganic carbon protective coating, e.g. graphite, diamond like carbon or doped carbon
- G11B5/7266—Inorganic carbon protective coating, e.g. graphite, diamond like carbon or doped carbon comprising a lubricant over the inorganic carbon coating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
Description
[実施例1]
実施例1においては、非磁性基体、その上に順次設けられるCoZrNb軟磁性裏打ち層、NiCrMo/Ru中間層、三層構造のCoCrPt系グラニュラー磁気記録層(Ru交換結合制御層を含む)、C保護層、および液体潤滑層を有する垂直磁気記録媒体を作製した。
比較例2においては、磁気記録層の構成を以下の手順で行ったことを除いて、実施例1と同一の手順により磁気記録媒体を作製した。
具体的には、下磁気記録層として、第2表に記載のSiO2割合yと同じ割合のTiO2でCo70Cr10Pt20およびTiO2を混合した(100−y)体積%(Co70Cr10Pt20)−y体積%(TiO2)ターゲット(y=10〜50)を用いて、膜厚6nmのCoCrPt−TiO2層を形成した。その上に、交換結合制御層として膜厚0.1nmのRu層を形成した。さらに、上磁気記録層として、第2表に記載のSiO2割合yでCo80Cr15Pt5およびSiO2を混合した(100−y)体積%(Co80Cr15Pt5)−y体積%SiO2ターゲット(y=10〜50)を用いて、膜厚10nmのCoCrPt−SiO2層を形成した。
実施例3においては、非磁性基体、その上に順次設けられるCoZrNb軟磁性裏打ち層、NiCrMo/MgO中間層、規則化合金系FePtグラニュラー磁気記録層、C保護層、および液体潤滑層を有する垂直磁気記録媒体を作製した。
2 軟磁性裏打ち層
3 中間層
4、40 磁気記録層
4A、40A 磁性部
4B、40B 非磁性部
4−1 下磁気記録層
4−2 交換結合制御層
4−3 上磁気記録層
5 保護層
6 液体潤滑層
Claims (8)
- 熱アシスト記録装置用の磁気記録媒体であって、
該磁気記録媒体が、非磁性基体、磁気記録層、保護層、および液体潤滑層をこの順に含み、
該磁気記録層が、磁性部および該磁性部を取り囲む非磁性部からなるグラニュラー構造を有し、
該グラニュラー構造における該非磁性部が炭素系材料を含み、
該磁気記録媒体の表面が、算術平均粗さRaおよび粗さ曲線要素の平均長さRSmを有し、Ra/RSmが0.05以上0.15以下であり、
Raが0.45nm以上1.08nm以下、または、RSmが6.5nm以上8.8nm以下であることを特徴とする磁気記録媒体。 - 熱アシスト記録装置用の磁気記録媒体であって、
該磁気記録媒体が、非磁性基体、磁気記録層、保護層、および液体潤滑層をこの順に含み、
該磁気記録層が、下磁気記録層、交換結合制御層、および上磁気記録層をこの順に含み、
該下磁気記録層および該上磁気記録層が、磁性部および該磁性部を取り囲む非磁性部からなるグラニュラー構造を有し、
該下磁気記録層および該上磁気記録層の少なくとも一方の該グラニュラー構造の該非磁性部は、炭素系材料を含み、
該磁気記録媒体の表面が、算術平均粗さRaおよび粗さ曲線要素の平均長さRSmを有し、Ra/RSmが0.05以上0.15以下であり、
Raが0.45nm以上1.08nm以下、または、RSmが6.5nm以上8.8nm以下であることを特徴とする磁気記録媒体。 - 該磁気記録媒体の表面において、該磁性部に対して該非磁性部が凹であることを特徴とする請求項1または2に記載の磁気記録媒体。
- 該グラニュラー構造における該非磁性部の割合が15体積%以上30体積%以下であることを特徴とする請求項1〜3のいずれかに記載の磁気記録媒体。
- 該炭素系材料がCであることを特徴とする請求項1〜4のいずれかに記載の磁気記録媒体。
- 該グラニュラー構造における該非磁性部の割合が20体積%以上30体積%以下であることを特徴とする請求項1〜5のいずれかに記載の磁気記録媒体。
- 該炭素系材料がB4Cであることを特徴とする請求項1〜4のいずれかに記載の磁気記録媒体。
- 該非磁性基体と該磁気記録層との間に、軟磁性裏打ち層、中間層およびヒートシンク層からなる群から選択される1つまたは複数の層をさらに含むことを特徴とする請求項1〜7のいずれかに記載の磁気記録媒体。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011020908A JP5786347B2 (ja) | 2011-02-02 | 2011-02-02 | 熱アシスト記録装置用の磁気記録媒体およびその製造方法 |
US13/347,695 US9263075B2 (en) | 2011-02-02 | 2012-01-10 | Magnetic recording medium for heat-assisted recording device and manufacturing method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011020908A JP5786347B2 (ja) | 2011-02-02 | 2011-02-02 | 熱アシスト記録装置用の磁気記録媒体およびその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012160242A JP2012160242A (ja) | 2012-08-23 |
JP5786347B2 true JP5786347B2 (ja) | 2015-09-30 |
Family
ID=46577609
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011020908A Active JP5786347B2 (ja) | 2011-02-02 | 2011-02-02 | 熱アシスト記録装置用の磁気記録媒体およびその製造方法 |
Country Status (2)
Country | Link |
---|---|
US (1) | US9263075B2 (ja) |
JP (1) | JP5786347B2 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9269480B1 (en) * | 2012-03-30 | 2016-02-23 | WD Media, LLC | Systems and methods for forming magnetic recording media with improved grain columnar growth for energy assisted magnetic recording |
MY167287A (en) * | 2012-12-06 | 2018-08-15 | Fuji Electric Co Ltd | Perpendicular magnetic recording medium |
CN104885154B (zh) * | 2012-12-27 | 2018-10-12 | 佳能安内华股份有限公司 | 磁记录介质及其制造方法 |
WO2015111384A1 (ja) * | 2014-01-23 | 2015-07-30 | 富士電機株式会社 | 垂直磁気記録媒体 |
MY164347A (en) * | 2014-05-12 | 2017-12-15 | Fuji Electric Co Ltd | Method for manufacturing perpendicular magnetic recording medium |
US9558777B2 (en) * | 2014-11-26 | 2017-01-31 | HGST Netherlands B.V. | Heat assisted magnetic recording (HAMR) media having a highly ordered crystalline structure |
WO2017046991A1 (ja) * | 2015-09-17 | 2017-03-23 | 富士電機株式会社 | 垂直磁気記録媒体 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020146592A1 (en) * | 1994-11-11 | 2002-10-10 | Masaaki Futamoto | Magnetic recording medium and magnetic storage device using the same |
JP3318204B2 (ja) | 1996-05-31 | 2002-08-26 | 財団法人電気磁気材料研究所 | 垂直磁化膜およびその製造法ならびに 垂直磁気記録媒体 |
JP4288825B2 (ja) | 2000-03-30 | 2009-07-01 | 株式会社島津製作所 | 液体クロマトグラフ |
JP2001291230A (ja) | 2000-03-31 | 2001-10-19 | Sony Corp | 磁気記録媒体及びその製造方法 |
JP2002222517A (ja) * | 2001-01-25 | 2002-08-09 | Sony Corp | 磁気記録媒体 |
JP3684231B2 (ja) * | 2003-02-28 | 2005-08-17 | 株式会社東芝 | 磁気記録媒体及び磁気記録再生装置 |
JP2005071525A (ja) * | 2003-08-27 | 2005-03-17 | Fujitsu Ltd | 垂直磁気記録媒体および磁気記憶装置 |
JP2005190517A (ja) * | 2003-12-24 | 2005-07-14 | Hitachi Global Storage Technologies Netherlands Bv | 垂直磁気記録媒体及び磁気記憶装置 |
JP2005196874A (ja) * | 2004-01-07 | 2005-07-21 | Fuji Electric Device Technology Co Ltd | 磁気記録媒体およびその製造方法 |
US8241766B2 (en) * | 2006-01-20 | 2012-08-14 | Seagate Technology Llc | Laminated exchange coupling adhesion (LECA) media for heat assisted magnetic recording |
JP2008052869A (ja) * | 2006-08-28 | 2008-03-06 | Hitachi Global Storage Technologies Netherlands Bv | 熱アシスト磁気記録媒体、及び磁気記録再生装置 |
KR101344407B1 (ko) | 2007-09-21 | 2013-12-26 | 후지 덴키 가부시키가이샤 | 자기기록매체 |
JP2009140562A (ja) * | 2007-12-06 | 2009-06-25 | Hitachi Global Storage Technologies Netherlands Bv | 垂直磁気記録媒体及び磁気記憶装置 |
JP5015901B2 (ja) * | 2008-12-01 | 2012-09-05 | 昭和電工株式会社 | 熱アシスト磁気記録媒体及び磁気記録再生装置 |
US8268462B2 (en) * | 2008-12-22 | 2012-09-18 | Seagate Technology Llc | Hybrid grain boundary additives |
JP5332676B2 (ja) | 2009-02-09 | 2013-11-06 | 富士電機株式会社 | 磁気記録媒体 |
-
2011
- 2011-02-02 JP JP2011020908A patent/JP5786347B2/ja active Active
-
2012
- 2012-01-10 US US13/347,695 patent/US9263075B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
JP2012160242A (ja) | 2012-08-23 |
US20120196154A1 (en) | 2012-08-02 |
US9263075B2 (en) | 2016-02-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5670638B2 (ja) | 熱アシスト磁気記録媒体及び磁気記録再生装置 | |
JP5807944B2 (ja) | 垂直磁気記録媒体の製造方法 | |
JP5880686B2 (ja) | 熱アシスト磁気記録用の磁気記録媒体 | |
JP5786347B2 (ja) | 熱アシスト記録装置用の磁気記録媒体およびその製造方法 | |
JP6014385B2 (ja) | 磁気記録媒体及び磁気記録再生装置 | |
JP5332676B2 (ja) | 磁気記録媒体 | |
JP5413389B2 (ja) | 垂直磁気記録媒体 | |
JP5938224B2 (ja) | 磁気記録媒体及び磁気記録再生装置 | |
JP2006155861A (ja) | 垂直磁気記録媒体及びその製造方法並びに磁気記録再生装置 | |
JP2015005317A (ja) | 磁気記録媒体、磁気記憶装置 | |
JPWO2009014205A1 (ja) | 垂直磁気記録媒体、その製造方法および磁気記録再生装置 | |
JP2010061724A (ja) | 垂直磁気記録媒体 | |
JP5923152B2 (ja) | 熱アシスト磁気記録媒体及び磁気記録再生装置 | |
JP5782819B2 (ja) | 垂直磁気記録媒体 | |
JP5325945B2 (ja) | 垂直磁気記録媒体及び磁気記録再生装置 | |
JP2008276859A (ja) | 磁気記録媒体、その製造方法および磁気記録再生装置 | |
JP6416041B2 (ja) | 垂直磁気記録媒体及び磁気記録再生装置 | |
JP2006004527A (ja) | 垂直磁気記録媒体およびその製造方法 | |
JP6451011B2 (ja) | 垂直磁気記録媒体及び磁気記録再生装置 | |
JP5796883B2 (ja) | 熱アシスト磁気記録媒体及び磁気記録再生装置 | |
JP5685983B2 (ja) | 磁気記録媒体 | |
JP2008226312A (ja) | 垂直磁気記録媒体、その製造方法および磁気記録再生装置 | |
JP2007273050A (ja) | 垂直磁気記録媒体の製造方法 | |
JP5455188B2 (ja) | 垂直磁気記録媒体の製造方法 | |
JP5401147B2 (ja) | 垂直磁気記録媒体の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20140114 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140909 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20141110 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20150428 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20150609 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20150630 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20150713 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5786347 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |