JP5749712B2 - 効果的且つ効率的な設計を有するバック接点型太陽電池及び対応するパターニング法 - Google Patents
効果的且つ効率的な設計を有するバック接点型太陽電池及び対応するパターニング法 Download PDFInfo
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- JP5749712B2 JP5749712B2 JP2012511904A JP2012511904A JP5749712B2 JP 5749712 B2 JP5749712 B2 JP 5749712B2 JP 2012511904 A JP2012511904 A JP 2012511904A JP 2012511904 A JP2012511904 A JP 2012511904A JP 5749712 B2 JP5749712 B2 JP 5749712B2
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Description
シリコンを含む裸の半導体層に沿って複数のドーパント源をパターン形成することにより、パターン形成された半導体層を形成すること;そして
パターン形成された半導体層全体を光ビーム走査することにより、ドーパント源から半導体層内にドーパントをドライブインして、複数のn−ドープされた領域及び複数のp−ドープされた領域を形成すること
を含む、半導体層をドープする方法に関する。
バック接点型太陽電池が、電池の裏面全体にわたってp−ドープ及びn−ドープされた領域又は接点のパターンを有している。ドープ接点のパターン及び特性は、下記の費用効果的な加工アプローチと相俟って、高い電池効率を達成するように設計されている。裏面構造は、電流コレクタによってドープ接点から電流を収穫するのを可能にする要素のスタックを有している。半導体層の上側には誘電層を配置することができ、そして電流コレクタと連携する金属部分が、適切なドープ接点に接触するように、誘電層を通って延びている。電力収穫要素の構造はまた、薄いシリコンフォイルに沿って配置するのに適している。
改善加工アプローチは、太陽電池の電流収穫構成部分の形成を可能にする。これらは、バック接点型太陽電池の形成に効果的に適用することができるが、これらの加工工程は、他の太陽電池デザインに対しても有用であり得る。具体的には、レーザー駆動式のドーパント・ドライブインが、特定のデザインに沿って効果的なドープ接点を形成することができる。これらのドープ接点は、半導体の表面に沿った隣接するストライプを効果的に含むことができる。電流コレクタとドープ接点との間の電気的接続のために、不動態化層を貫く窓の地点を選択するためにレーザーパターン形成を利用することもできる。また、電池の2つの極に対応する電気的に分離された電流コレクタを提供するために、電流コレクタをパターン形成する際に、エネルギービーム、例えばレーザービームを使用することもできる。これらの加工アプローチは、単独又は組み合わせで用いられて、妥当な費用で優れた性能を有する電池を形成するための効果的なアプローチを提供する。
いくつかの態様の場合、パターン上に複数パスのレーザーを施すことにより連続ドープ接点を形成するように最終的なオーバラップを提供する場合には、隣接するスポットをオーバラップしないように離隔させることができる。単一走査の隣接するパルスがオーバラップするか否かとは無関係に、いくつかの態様では、より低いパルス・エネルギー密度を使用し、そして線又はその他のパターン形状上で複数回にわたって走査することが望ましいことが判った。複数パス・アプローチが、結果として、基板及びより平らな線に与える損傷を少なくすることができる。いくつかの態様の場合、より望ましい結果を得るために、表面の同じパターン上に施す光ビームは2パス、3パス、4パス、5パス又は6パス以上であることが望ましい場合がある。より低い出力で複数パスを行う結果、ドーピング完了後の表面をより平滑にすることができる。
特許請求の範囲に含まれる本発明の概念に加えて、本出願はまた次のような発明概念に関する。
複数の選択個所のエッチング・レジストを除去するために、これらの選択個所でエネルギービームを使用してポリマーをアブレートすることにより、ポリマーエッチング・レジスト層をパターン形成すること;そして
無機層を貫く窓を形成するためにエッチングを行うこと
を含む、無機層を通る開口を選択的にエッチングする方法。
平均厚が約5μm〜約100μmのSi半導体フォイルの第1の表面上にドープされた領域を形成する工程、ここで半導体フォイルは第1の表面と、第1の表面と対向する第2の表面とを有しており、そして半導体フォイルの第2の表面はポリマーでガラス構造に付着されている;
ドープされた領域を占める第1の表面上に誘電層を堆積させる工程;
そして
誘電層上に金属電流コレクタをパターン形成する工程、ここで金属電流コレクタの一部は誘電層を通してドープされた領域との接点を形成する;
を含み、
以上の加工工程は約200℃を上回る温度までポリマーを加熱しない、
半導体をベースとするデバイスを形成する方法。
シリコン/ゲルマニウムを含む裸の半導体層に沿って複数のドーパント源をパターン形成することにより、パターン形成された半導体層を形成する工程;そして
パターン形成された半導体層全体を光ビーム走査することにより、ドーパント源から半導体層内にドーパントをドライブインし、これにより、複数のn−ドープされた領域及び複数のp−ドープされた領域を形成する工程
を含む、半導体層をドープする方法。
金属が誘電層を貫く窓を通って半導体と接触する個所で、半導体とともに金属電流コレクタの個所をレーザーアニーリングすることを含む、太陽電池内部の電気的接続を形成する方法。
この例は、レーザーアニーリングによってシリコン・ウェハー内にn型及びp型領域を形成する方法を記述する。
この例は、ポリマーエッチング・レジストのレーザーアブレーションを利用して、無機誘電層をパターン形成することを記述する。
この例は、レーザーアブレーションを用いた誘電層のパターン形成を実証する。アブレーションにおいて、レーザーパラメータは、下側のシリコン層を著しく損傷することなしに誘電層を貫く窓を形成するために選択される。
この例は、電流コレクタの形成のためのアルミニウムをパターン形成するために、ポリマーエッチング・レジストのレーザーアブレーションを用いることもできることを実証する。
この例は、誘電層で被覆されたシリコン基板上の金属層状構造において形状をパターン形成する非フォトリソグラフィ・プロセスを記述する。
この例は、ドーパントをシリコン材料内へ、赤外線レーザーをストライプに沿って走査した状態でドライブインすることによって深いドープされた領域が形成された太陽電池構造全体の特定の態様及びその結果としての性能を記述する。
Claims (7)
- 元素ケイ素、元素ゲルマニウム、シリコン−ゲルマニウム合金、又はこれらのブレンドを含む半導体層と、該半導体層の表面に沿って互いに同じ高さに位置するn−ドープされた領域及びp−ドープされた領域とを含む光起電力電池であって、
該ドープされた領域がそれぞれ、平均幅よりも少なくとも10倍大きい平均長さの比を有するストライプを含む、該表面に沿った平面状の広がりを有しており、
該ドープされた領域は、接点の厚さの上側10%の平均ドーパント濃度が、該接点の上側から該接点深さの20〜30%の位置における平均ドーパント濃度よりも少なくとも4倍高く、そして
該ドープされた領域のそれぞれの平均深さが100nm〜5μmであり、該n−ドープされた領域と該p−ドープされた領域とのエッジ間距離が、1つ又は2つ以上の個所で5μm〜500μmの値である、光起電力電池。 - 該元素ケイ素/ゲルマニウムが、1立方センチメートル当たりの原子数1×1014〜1×1016の濃度で、n型ドーパント又はp型ドーパントを含む、請求項1に記載の光起電力電池。
- 該半導体層の平均厚が、5μm〜300μmである、請求項1に記載の光起電力電池。
- 該ドープされた領域の平均厚が、250nm〜2.5μmである、請求項1に記載の光起電力電池。
- n−ドープされた領域と隣接するp−ドープされた領域との間の距離が、1つ又は2つ以上の個所で20μm〜200μmの値である、請求項1に記載の光起電力電池。
- 該ドープされた領域の平均ドーパント濃度が、1.0×1018〜5×1020である、請求項1に記載の光起電力電池。
- 該ドープされた領域のそれぞれが、平均幅よりも少なくとも15倍大きい平均長さの比を有するストライプを含む、該表面に沿った平面状の広がりを有している、請求項1に記載の光起電力電池。
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2009
- 2009-05-20 US US12/469,441 patent/US20100294349A1/en not_active Abandoned
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- 2010-05-13 KR KR1020117029040A patent/KR20120031004A/ko not_active Application Discontinuation
- 2010-05-13 CN CN201080022069.4A patent/CN102428573B/zh not_active Expired - Fee Related
- 2010-05-13 JP JP2012511904A patent/JP5749712B2/ja not_active Expired - Fee Related
- 2010-05-13 WO PCT/US2010/034762 patent/WO2010135153A2/en active Application Filing
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CN102428573A (zh) | 2012-04-25 |
KR20120031004A (ko) | 2012-03-29 |
CN102428573B (zh) | 2016-09-14 |
JP2015144291A (ja) | 2015-08-06 |
TWI553889B (zh) | 2016-10-11 |
WO2010135153A2 (en) | 2010-11-25 |
US20140106551A1 (en) | 2014-04-17 |
CN106128943A (zh) | 2016-11-16 |
WO2010135153A3 (en) | 2011-03-10 |
US20100294349A1 (en) | 2010-11-25 |
TW201108430A (en) | 2011-03-01 |
TW201642484A (zh) | 2016-12-01 |
JP2012527772A (ja) | 2012-11-08 |
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