JP5741946B2 - 清浄気送風ユニット - Google Patents

清浄気送風ユニット Download PDF

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Publication number
JP5741946B2
JP5741946B2 JP2011207563A JP2011207563A JP5741946B2 JP 5741946 B2 JP5741946 B2 JP 5741946B2 JP 2011207563 A JP2011207563 A JP 2011207563A JP 2011207563 A JP2011207563 A JP 2011207563A JP 5741946 B2 JP5741946 B2 JP 5741946B2
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JP
Japan
Prior art keywords
substrate
clean air
air blowing
container
substrate container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2011207563A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013069882A (ja
Inventor
多通夫 中尾
多通夫 中尾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daifuku Co Ltd
Original Assignee
Daifuku Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daifuku Co Ltd filed Critical Daifuku Co Ltd
Priority to JP2011207563A priority Critical patent/JP5741946B2/ja
Priority to TW101128415A priority patent/TWI601918B/zh
Priority to KR1020120092907A priority patent/KR101916784B1/ko
Priority to CN201210353718.XA priority patent/CN103008319B/zh
Publication of JP2013069882A publication Critical patent/JP2013069882A/ja
Application granted granted Critical
Publication of JP5741946B2 publication Critical patent/JP5741946B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D2205/00—Venting means
    • B65D2205/02—Venting holes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
  • Ventilation (AREA)
JP2011207563A 2011-09-22 2011-09-22 清浄気送風ユニット Active JP5741946B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2011207563A JP5741946B2 (ja) 2011-09-22 2011-09-22 清浄気送風ユニット
TW101128415A TWI601918B (zh) 2011-09-22 2012-08-07 清淨氣體送風單元
KR1020120092907A KR101916784B1 (ko) 2011-09-22 2012-08-24 청정 공기 송풍 유닛
CN201210353718.XA CN103008319B (zh) 2011-09-22 2012-09-21 清洁气体送风单元

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011207563A JP5741946B2 (ja) 2011-09-22 2011-09-22 清浄気送風ユニット

Publications (2)

Publication Number Publication Date
JP2013069882A JP2013069882A (ja) 2013-04-18
JP5741946B2 true JP5741946B2 (ja) 2015-07-01

Family

ID=47957740

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011207563A Active JP5741946B2 (ja) 2011-09-22 2011-09-22 清浄気送風ユニット

Country Status (4)

Country Link
JP (1) JP5741946B2 (zh)
KR (1) KR101916784B1 (zh)
CN (1) CN103008319B (zh)
TW (1) TWI601918B (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112644841B (zh) * 2020-12-03 2022-09-09 Tcl华星光电技术有限公司 一种卡匣及自动化洁净仓储

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10321714A (ja) * 1997-05-20 1998-12-04 Sony Corp 密閉コンテナ並びに密閉コンテナ用雰囲気置換装置及び雰囲気置換方法
JP2002122382A (ja) * 2000-01-28 2002-04-26 Ebara Corp 基板容器
KR20010078077A (ko) * 2000-01-28 2001-08-20 마에다 시게루 기판용기
JP2005353862A (ja) 2004-06-11 2005-12-22 Sony Corp 基板収納搬送容器
JP4807579B2 (ja) * 2006-09-13 2011-11-02 株式会社ダイフク 基板収納設備及び基板処理設備
JP4953010B2 (ja) * 2006-09-13 2012-06-13 株式会社ダイフク 基板収納用の収納容器
JP4756372B2 (ja) * 2006-09-13 2011-08-24 株式会社ダイフク 基板処理方法
JP2010058802A (ja) * 2008-09-02 2010-03-18 Sharp Corp 基板収容ケース
KR101110621B1 (ko) * 2008-09-12 2012-02-28 가부시키가이샤 다이후쿠 기판용 수납 용기와 기판용 수납 용기를 위한 기판 반송 설비
JP5273479B2 (ja) * 2009-10-23 2013-08-28 株式会社ダイフク 基板用収納容器、及び、それを搬送する搬送設備

Also Published As

Publication number Publication date
CN103008319A (zh) 2013-04-03
KR20130032242A (ko) 2013-04-01
TWI601918B (zh) 2017-10-11
KR101916784B1 (ko) 2018-11-08
CN103008319B (zh) 2016-08-10
JP2013069882A (ja) 2013-04-18
TW201314139A (zh) 2013-04-01

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