JP5732696B2 - 再構築ウエハの生産中にチップを位置付けするための方法 - Google Patents
再構築ウエハの生産中にチップを位置付けするための方法 Download PDFInfo
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Description
1 個別のチップを得るためウエハを切断する
2 接着性剛性支持体を準備する
3 切断されたチップを接着性剛性支持体に移動する
4 チップを樹脂内にモールドし、樹脂を重合する
5 接着性支持体を除去する
6 再構成ウエハ(RDL)上に層を再分配する
− チップ間の間隙を埋めるために、接着性支持体に結合されるチップの周りに、そして必要ならばチップ上に、樹脂を(流し込むまたはモールドする(圧縮モールドと呼ばれる)ことによって)堆積させる工程
− 硬化させるために樹脂を重合し、したがってチップが固定された取扱可能な剛性の基板を形成し、接着性基板を除去することができる工程
A)接着性支持体上でのチップの位置付けの不正確性であり、それは、高速で動作する最新の「ピックアンドプレイス」機器(「pick−and−place」equipment)で5μm程度
B)100ppm/℃の領域内で可逆だが高膨張性の接着性支持体
C)1000ppm/℃程度で重合中の樹脂の不可逆的除去
D)約16〜17ppm/℃で重合後の樹脂の不可逆的膨張
− 以下の工程も含むことを特徴とする、チップの第1のウエハを製作する工程と、
− チップのパッドの少なくとも1層の再分配層が、チップの相互接続のために設計された導電性トラック上に積層されたこのウエハの生産工程であって、この積層は主要RDL層に指定されている工程と、
− 各々がそのRDL層を備えた個別のチップを得るためにこの第1のウエハを切断する工程と、
− 後続工程の間平坦な状態を保持するため、そのRDL層を備えた個別のチップを十分に剛性な支持体に移動する工程であって、支持体は接着性層を備え、RDL層は接着性層上にある工程と、
− チップを封入するために樹脂を堆積させる工程と、
− 樹脂を重合する工程と、
− 剛性支持体を除去する工程と、
− 接着性層内に作製された開口部を通して、主要RDL層の導電性トラックを相互接続接触部まで接続するため、ミニRDLと呼ばれる単一の再分配層を堆積させる工程であって、ウエハは、そのRDL層を備えたチップ、重合樹脂およびミニRDLを備え、再構成ウエハとなる工程と、
を含む。
1 元のウエハ(または第1のウエハ)上に層(主要RDL)を再分配し、次いで個別のチップを得るためウエハを切断する
2 その接着性層を備えた剛性支持体を準備する
3 その主要RDLを備えた切断されたチップをこの支持体およびその接着性層に移動する
4 チップをモールドし、樹脂を重合する
5 支持体を除去する
6 接着性層内に可能な開口部のエッチングを施す
7 単一の相互接続層(ミニRDL)を再分配する
− 例えば、完全に重合する前に結合力を有する「SU8」エポキシ樹脂などの感光性の接着性層の状況。この材料は、第1の熱処理後にフォトエッチングを施し(例えばUVイメージング後)、疑似固体状およびペースト状にする。イメージングおよび現像後、レーザエッチングによってまたはプラズマエッチングによってエッチングを施し、所望の場所に開口部を得る。
− 感光性ではない接着性層の状況。この材料は、同じ様式で、全体に渡って同一の厚さで堆積され、その接着力を保持するよう事前重合される。この段階では、接着性層内の開口部は、レーザエッチングによってまたはプラズマエッチングによって作製される。
− マスクによって画定される開口部22に合わせて接着性層21を「燃焼する」ための酸素を用いるプラズマエッチング。この技法は、高精細なプリント回路に工業的にエッチングを施すために使用される。
− YAGまたはエキシマレーザによるレーザエッチング。この方法はプリント回路の製作に既に使用されている。
Claims (6)
- 接続パッド(10)を有するチップ(1)を備えた再構成ウエハ(100)を製作するための方法であって、
− 以下の工程も含むことを特徴とする、チップ(1)の第1のウエハを製作する工程
− 前記チップの前記パッド(10)の少なくとも2つの金属層の再分配層が、前記チップの相互接続のために設計された第1の導電性トラック(12)上に積層された前記ウエハの生産工程であって、積層は主要RDL層(14)に指定されている工程と、
− 各々が前記RDL層(14)を備えた個別のチップ(1)を得るために前記ウエハを切断する工程と、
− 後続工程の間平坦な状態を保持するため、前記RDL層(14)を備えた前記個別のチップを十分に剛性な支持体(20)に移動する工程であって、支持体は接着性層(21)を備え、前記RDL層(14)は前記接着性層(21)上にある工程と、
− 前記チップ(1)を封入するために樹脂(30)を堆積させる工程と、
− 前記樹脂を重合する工程と、
− 前記剛性支持体(20)を除去する工程と、
− 前記接着性層(21)内に作製された開口部(22)を通して、前記主要RDL層(14)の前記第1の導電性トラックを相互接続接触部まで接続するため、ミニRDL(24)と呼ばれる単一の再分配層を堆積させる工程であって、第2の導電性トラック(23)は、前記第1の導電性トラック(12)よりも広い幅であり、前記ウエハは、前記重合樹脂、前記RDL層を備えたチップおよび前記ミニRDLを備え、前記再構成ウエハ(100)となる工程と、
を含む方法。 - 前記チップを前記剛性支持体(20)に移動する前に、前記チップ(1)を検査および/またはバーンインする工程も含むことを特徴とする、請求項1に記載の再構成ウエハ(100)を製作するための方法。
- 前記チップを前記剛性支持体に移動する前に、前記接着性層(21)内の前記開口部(22)が作製されることを特徴とする、請求項1または2のいずれか一項に記載の再構成ウエハ(100)を製作するための方法。
- 前記接着性層(21)内の前記開口部(22)は前記支持体を除去する工程後に作製されることを特徴とする、請求項1または2に記載の再構成ウエハ(100)を製作するための方法。
- 前記ミニRDL(24)の導体(23)はT字形またはラテン十字形の形状を取ることを特徴とする、請求項1〜4のいずれか一項に記載の再構成ウエハ(100)を製作するための方法。
- 前記接着性層(21)は不可逆的結合性の材料であることを特徴とする、請求項1〜5のいずれか一項に記載の再構成ウエハ(100)を製作するための方法。
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FR0902871A FR2946795B1 (fr) | 2009-06-12 | 2009-06-12 | Procede de positionnement des puces lors de la fabrication d'une plaque reconstituee |
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PCT/EP2010/058277 WO2010142804A1 (fr) | 2009-06-12 | 2010-06-14 | Procede de positionnement des puces lors de la fabrication d'une plaque reconstituee |
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US8735220B2 (en) | 2014-05-27 |
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JP2012529762A (ja) | 2012-11-22 |
TWI497686B (zh) | 2015-08-21 |
WO2010142804A1 (fr) | 2010-12-16 |
FR2946795B1 (fr) | 2011-07-22 |
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