JP5717975B2 - 振動体及び振動波アクチュエータ - Google Patents

振動体及び振動波アクチュエータ Download PDF

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Publication number
JP5717975B2
JP5717975B2 JP2010082423A JP2010082423A JP5717975B2 JP 5717975 B2 JP5717975 B2 JP 5717975B2 JP 2010082423 A JP2010082423 A JP 2010082423A JP 2010082423 A JP2010082423 A JP 2010082423A JP 5717975 B2 JP5717975 B2 JP 5717975B2
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Prior art keywords
piezoelectric
ceramic substrate
layer
silicon dioxide
piezoelectric element
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Japanese (ja)
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JP2011217493A5 (enExample
JP2011217493A (ja
Inventor
丸山　裕
裕 丸山
猛 熊澤
猛 熊澤
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Canon Inc
Mino Ceramic Co Ltd
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Canon Inc
Mino Ceramic Co Ltd
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Priority to JP2010082423A priority Critical patent/JP5717975B2/ja
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Publication of JP2011217493A5 publication Critical patent/JP2011217493A5/ja
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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2010082423A 2010-03-31 2010-03-31 振動体及び振動波アクチュエータ Active JP5717975B2 (ja)

Priority Applications (1)

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JP2010082423A JP5717975B2 (ja) 2010-03-31 2010-03-31 振動体及び振動波アクチュエータ

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JP2010082423A JP5717975B2 (ja) 2010-03-31 2010-03-31 振動体及び振動波アクチュエータ

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JP2011217493A JP2011217493A (ja) 2011-10-27
JP2011217493A5 JP2011217493A5 (enExample) 2013-05-16
JP5717975B2 true JP5717975B2 (ja) 2015-05-13

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JP2010082423A Active JP5717975B2 (ja) 2010-03-31 2010-03-31 振動体及び振動波アクチュエータ

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5669443B2 (ja) 2010-05-31 2015-02-12 キヤノン株式会社 振動体とその製造方法及び振動波アクチュエータ
US9818925B2 (en) 2012-06-14 2017-11-14 Canon Kabushiki Kaisha Vibrating body, method of manufacturing the same and vibration type drive device
JP2014155350A (ja) 2013-02-08 2014-08-25 Canon Inc 振動体とその製造方法及び振動型駆動装置
JP2014170926A (ja) * 2013-02-08 2014-09-18 Canon Inc 振動体、その製造方法、及び振動型駆動装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3078832B2 (ja) * 1990-11-21 2000-08-21 株式会社フコク 振動波モータの圧電振動体
JPH1066360A (ja) * 1996-08-22 1998-03-06 Ricoh Co Ltd 接合型アクチュエータ
JPH10190081A (ja) * 1996-12-25 1998-07-21 Kyocera Corp 積層型圧電素子及びその製造方法
WO2005104257A1 (en) * 2004-04-23 2005-11-03 Agency For Science, Technology And Research Micro-electromechanical device
JP2007123483A (ja) * 2005-10-27 2007-05-17 Kyocera Corp 圧電アクチュエータ及び液体吐出装置
JP5023515B2 (ja) * 2006-03-06 2012-09-12 Ｔｄｋ株式会社 圧電素子の製造方法。
JP2009124791A (ja) * 2007-11-12 2009-06-04 Canon Inc 振動体及び振動波アクチュエータ

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JP2011217493A (ja) 2011-10-27

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