JP2011217493A5 - - Google Patents
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- Publication number
- JP2011217493A5 JP2011217493A5 JP2010082423A JP2010082423A JP2011217493A5 JP 2011217493 A5 JP2011217493 A5 JP 2011217493A5 JP 2010082423 A JP2010082423 A JP 2010082423A JP 2010082423 A JP2010082423 A JP 2010082423A JP 2011217493 A5 JP2011217493 A5 JP 2011217493A5
- Authority
- JP
- Japan
- Prior art keywords
- ceramic substrate
- piezoelectric element
- vibrating body
- body according
- silicon dioxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 16
- 239000000919 ceramic Substances 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 15
- 235000012239 silicon dioxide Nutrition 0.000 claims description 8
- 239000000377 silicon dioxide Substances 0.000 claims description 8
- 239000000463 material Substances 0.000 claims 2
- 239000000843 powder Substances 0.000 claims 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims 1
- 229910052797 bismuth Inorganic materials 0.000 claims 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 1
- 229910010271 silicon carbide Inorganic materials 0.000 claims 1
- 238000005245 sintering Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010082423A JP5717975B2 (ja) | 2010-03-31 | 2010-03-31 | 振動体及び振動波アクチュエータ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010082423A JP5717975B2 (ja) | 2010-03-31 | 2010-03-31 | 振動体及び振動波アクチュエータ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011217493A JP2011217493A (ja) | 2011-10-27 |
| JP2011217493A5 true JP2011217493A5 (enExample) | 2013-05-16 |
| JP5717975B2 JP5717975B2 (ja) | 2015-05-13 |
Family
ID=44946657
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010082423A Active JP5717975B2 (ja) | 2010-03-31 | 2010-03-31 | 振動体及び振動波アクチュエータ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5717975B2 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5669443B2 (ja) | 2010-05-31 | 2015-02-12 | キヤノン株式会社 | 振動体とその製造方法及び振動波アクチュエータ |
| US9818925B2 (en) | 2012-06-14 | 2017-11-14 | Canon Kabushiki Kaisha | Vibrating body, method of manufacturing the same and vibration type drive device |
| JP2014155350A (ja) | 2013-02-08 | 2014-08-25 | Canon Inc | 振動体とその製造方法及び振動型駆動装置 |
| JP2014170926A (ja) * | 2013-02-08 | 2014-09-18 | Canon Inc | 振動体、その製造方法、及び振動型駆動装置 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3078832B2 (ja) * | 1990-11-21 | 2000-08-21 | 株式会社フコク | 振動波モータの圧電振動体 |
| JPH1066360A (ja) * | 1996-08-22 | 1998-03-06 | Ricoh Co Ltd | 接合型アクチュエータ |
| JPH10190081A (ja) * | 1996-12-25 | 1998-07-21 | Kyocera Corp | 積層型圧電素子及びその製造方法 |
| WO2005104257A1 (en) * | 2004-04-23 | 2005-11-03 | Agency For Science, Technology And Research | Micro-electromechanical device |
| JP2007123483A (ja) * | 2005-10-27 | 2007-05-17 | Kyocera Corp | 圧電アクチュエータ及び液体吐出装置 |
| JP5023515B2 (ja) * | 2006-03-06 | 2012-09-12 | Ｔｄｋ株式会社 | 圧電素子の製造方法。 |
| JP2009124791A (ja) * | 2007-11-12 | 2009-06-04 | Canon Inc | 振動体及び振動波アクチュエータ |
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2010
- 2010-03-31 JP JP2010082423A patent/JP5717975B2/ja active Active