JP2011217493A5 - - Google Patents

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JP2011217493A5
JP2011217493A5 JP2010082423A JP2010082423A JP2011217493A5 JP 2011217493 A5 JP2011217493 A5 JP 2011217493A5 JP 2010082423 A JP2010082423 A JP 2010082423A JP 2010082423 A JP2010082423 A JP 2010082423A JP 2011217493 A5 JP2011217493 A5 JP 2011217493A5
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Prior art keywords
ceramic substrate
piezoelectric element
vibrating body
body according
silicon dioxide
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JP2010082423A
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Japanese (ja)
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JP5717975B2 (en
JP2011217493A (en
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Publication of JP2011217493A5 publication Critical patent/JP2011217493A5/ja
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Description

本発明は、つぎのように構成した振動体とその振動体を備えた振動波アクチュエータを提供する。
本発明の振動体は、セラミックス基板に、一つまたは複数の圧電層と電極層とを有する圧電素子を固定し、前記圧電素子の振動エネルギーによって前記セラミックス基板を振動させ、振動を出力する振動体であって、
前記圧電素子が固定される側の前記セラミックス基板の表面部と、前記圧電素子との間に二酸化ケイ素を含有する領域を備え、
前記二酸化ケイ素を含有する領域を介し、前記セラミックス基板に前記圧電素子が固定されていることを特徴とする。
The present invention provides a vibrating body configured as follows and a vibration wave actuator including the vibrating body.
Vibrator of the present invention, the ceramic substrate, and fixing the piezoelectric element and a one or more piezoelectric layers and electrode layers, wherein by vibrating the ceramic substrate by the vibration energy of the piezoelectric element, and outputs a vibration vibration Body,
A region containing silicon dioxide between the surface portion of the ceramic substrate to which the piezoelectric element is fixed and the piezoelectric element;
The piezoelectric element is fixed to the ceramic substrate through the region containing silicon dioxide.

Claims (9)

セラミックス基板に、一つまたは複数の圧電層と電極層とを有する圧電素子を固定し、前記圧電素子の振動エネルギーによって前記セラミックス基板を振動させ、振動を出力する振動体であって、
前記圧電素子が固定される側の前記セラミックス基板の表面部と、前記圧電素子との間に二酸化ケイ素を含有する領域を備え、
前記二酸化ケイ素を含有する領域を介し、前記セラミックス基板に前記圧電素子が固定されていることを特徴とする振動体。 The ceramic substrate, and fixing the piezoelectric element and a one or more piezoelectric layers and electrode layers, wherein by vibrating the ceramic substrate by the vibration energy of the piezoelectric element, a vibrating member for outputting a vibration,
A region containing silicon dioxide between the surface portion of the ceramic substrate to which the piezoelectric element is fixed and the piezoelectric element;
A vibrating body, wherein the piezoelectric element is fixed to the ceramic substrate through a region containing silicon dioxide. 前記セラミック基板の表面部が前記二酸化ケイ素を含有する領域を含むことを特徴とする請求項１に記載の振動体。   The vibrating body according to claim 1, wherein a surface portion of the ceramic substrate includes a region containing the silicon dioxide. 前記セラミックス基板の表面部における前記二酸化ケイ素を含有する領域において、前記セラミックス基板の表面部の表面側の二酸化ケイ素の濃度が、前記セラミックス基板の表面部の内部側の二酸化ケイ素の濃度よりも高いことを特徴とする請求項２に記載の振動体。 In the region containing the silicon dioxide in the surface portion of the ceramic substrate, the concentration of silicon dioxide on the surface side of the surface portion of the ceramic substrate, higher than the concentration of the internal side of the silicon dioxide surface portions of the ceramic substrate The vibrating body according to claim 2. 前記圧電素子は、粉末を焼結して形成された接合層を有し、前記接合層が前記セラミックス基板に固定されていることを特徴とする請求項１に記載の振動体。 The piezoelectric element, the powder has a bonding layer formed by sintering, the vibrating body according to claim 1, wherein the bonding layer is characterized in that it is fixed to the ceramic substrate. 前記接合層は、前記圧電素子の圧電層と主成分が同じ材料によって形成されていることを特徴とする請求項４に記載の振動体。   The vibrating body according to claim 4, wherein the bonding layer is made of the same material as a main component of the piezoelectric layer of the piezoelectric element. 前記圧電素子の圧電層は、鉛またはビスマスを含んだ圧電材料によって形成されていることを特徴とする請求項５に記載の振動体。   The vibrating body according to claim 5, wherein the piezoelectric layer of the piezoelectric element is formed of a piezoelectric material containing lead or bismuth. 前記圧電素子は、ガラス粉末が添加された電極層を有し、前記電極層が前記セラミックス基板に固定されていることを特徴とする請求項１に記載の振動体。 The piezoelectric element has an electrode layer glass powder is added, the vibrating body according to claim 1, wherein the electrode layer is characterized in that it is fixed to the ceramic substrate. 前記セラミックス基板は、アルミナまたは炭化ケイ素を主成分とするセラミックスによって形成されていることを特徴とする請求項１乃至７のいずれか１項に記載の振動体。   The vibrating body according to any one of claims 1 to 7, wherein the ceramic substrate is made of a ceramic mainly composed of alumina or silicon carbide. 請求項１乃至８のいずれか１項記載の振動体を備えていることを特徴とする振動波アクチュエータ。   A vibration wave actuator comprising the vibrating body according to claim 1.
JP2010082423A 2010-03-31 2010-03-31 Vibration body and vibration wave actuator Active JP5717975B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010082423A JP5717975B2 (en) 2010-03-31 2010-03-31 Vibration body and vibration wave actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010082423A JP5717975B2 (en) 2010-03-31 2010-03-31 Vibration body and vibration wave actuator

Publications (3)

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JP2011217493A JP2011217493A (en) 2011-10-27
JP2011217493A5 true JP2011217493A5 (en) 2013-05-16
JP5717975B2 JP5717975B2 (en) 2015-05-13

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JP2010082423A Active JP5717975B2 (en) 2010-03-31 2010-03-31 Vibration body and vibration wave actuator

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5669443B2 (en) * 2010-05-31 2015-02-12 キヤノン株式会社 Vibrating body, manufacturing method thereof, and vibration wave actuator
US9818925B2 (en) 2012-06-14 2017-11-14 Canon Kabushiki Kaisha Vibrating body, method of manufacturing the same and vibration type drive device
JP2014155350A (en) 2013-02-08 2014-08-25 Canon Inc Vibrator, manufacturing method thereof and vibration-type driving device
JP2014170926A (en) * 2013-02-08 2014-09-18 Canon Inc Vibration body, manufacturing method thereof, and vibration type drive device

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3078832B2 (en) * 1990-11-21 2000-08-21 株式会社フコク Piezoelectric vibrator for vibration wave motor
JPH1066360A (en) * 1996-08-22 1998-03-06 Ricoh Co Ltd Junction-type actuator
JPH10190081A (en) * 1996-12-25 1998-07-21 Kyocera Corp Multilayer piezo-electric transducer and its manufacture
CN100568568C (en) * 2004-04-23 2009-12-09 新加坡科技研究局 Microelectromechanicdevices devices
JP2007123483A (en) * 2005-10-27 2007-05-17 Kyocera Corp Piezoelectric actuator and liquid discharger
JP5023515B2 (en) * 2006-03-06 2012-09-12 Ｔｄｋ株式会社 A method for manufacturing a piezoelectric element.
JP2009124791A (en) * 2007-11-12 2009-06-04 Canon Inc Vibrator and vibration wave actuator

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