JP2013128075A5 - Piezoelectric element, liquid ejecting head, liquid ejecting apparatus, ultrasonic device and sensor - Google Patents
Piezoelectric element, liquid ejecting head, liquid ejecting apparatus, ultrasonic device and sensor Download PDFInfo
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- JP2013128075A5 JP2013128075A5 JP2011277609A JP2011277609A JP2013128075A5 JP 2013128075 A5 JP2013128075 A5 JP 2013128075A5 JP 2011277609 A JP2011277609 A JP 2011277609A JP 2011277609 A JP2011277609 A JP 2011277609A JP 2013128075 A5 JP2013128075 A5 JP 2013128075A5
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- liquid ejecting
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上記課題を解決する本発明の態様は、圧電体層と前記圧電体層を挟む電極とを備えた圧電素子であって、前記圧電体層は、ビスマス、ランタン、鉄及びマンガンを含みペロブスカイト構造を有する複合酸化物からなり（１００）面に優先配向している第１圧電体層と、第１圧電体層上に設けられ、ビスマス、鉄、マンガン、バリウム及びチタンを含みペロブスカイト構造を有する複合酸化物からなり（１００）面に優先配向している第２圧電体層とを有することを特徴とする圧電素子にある。なお、本明細書における（１００）面の定義は、ペロブスカイト構造を擬立方晶とみなしたときの面方位のことであり、実際の対称性（例えば菱面対称）における面方位とは必ずしも一致しない。加えて、後述する（１１０）面、（１１１）面、（１００）配向、（１１０）配向も同様である。
かかる態様では、圧電体層を、ビスマス、ランタン、鉄及びマンガンを含みペロブスカイト構造を有する複合酸化物からなり（１００）面に優先配向している第１圧電体層上に、ビスマス、鉄、マンガン、バリウム及びチタンを含みペロブスカイト構造を有する複合酸化物からなり（１００）面に優先配向している第２圧電体層を設けた構成としているため、圧電体層のクラックの発生を抑制でき、また、湿度依存性を小さくすることができる。また、非鉛又は鉛の含有量を抑えられるため、環境への負荷を低減することができる。
An aspect of the present invention that solves the above problem is a piezoelectric element that includes a piezoelectric layer and an electrode that sandwiches the piezoelectric layer, and the piezoelectric layer includes bismuth, lanthanum, iron, and manganese and has a perovskite structure. A first piezoelectric layer made of a composite oxide having a preferential orientation on the (100) plane, and a composite oxide provided on the first piezoelectric layer and having a perovskite structure containing bismuth, iron, manganese, barium and titanium A piezoelectric element comprising a second piezoelectric layer made of a material and preferentially oriented on a (100) plane. The definition of the (100) plane in this specification is a plane orientation when the perovskite structure is regarded as a pseudo-cubic crystal, and does not necessarily match the plane orientation in actual symmetry (for example, rhombohedral symmetry). . In addition, the same applies to the (110) plane, (111) plane, (100) orientation, and (110) orientation described later.
In such an embodiment, the piezoelectric layer is made of bismuth, iron, manganese on the first piezoelectric layer made of a complex oxide having a perovskite structure containing bismuth, lanthanum, iron and manganese and preferentially oriented in the (100) plane. Since the second piezoelectric layer made of a complex oxide containing barium and titanium and having a perovskite structure is preferentially oriented on the (100) plane, the generation of cracks in the piezoelectric layer can be suppressed, and , Humidity dependency can be reduced. In addition, since the content of non-lead or lead can be suppressed, the burden on the environment can be reduced.
本発明の他の態様は、上記圧電素子を具備することを特徴とする液体噴射ヘッド、及び当該液体噴射ヘッドを具備することを特徴とする液体噴射装置にある。かかる態様では、クラックの発生が抑制され、また、湿度依存性が小さい圧電体層を有する圧電素子を具備するため、信頼性に優れた液体噴射ヘッド及び液体噴射装置となる。また、非鉛又は鉛の含有量が抑えられるため、環境への負荷を低減することができる。 According to another aspect of the invention, there is provided a liquid ejecting head including the piezoelectric element, and a liquid ejecting apparatus including the liquid ejecting head. In such an aspect, since the generation of cracks is suppressed and the piezoelectric element having the piezoelectric layer with low humidity dependency is provided , the liquid ejecting head and the liquid ejecting apparatus having excellent reliability are obtained. Moreover, since the lead-free or lead content is suppressed, the burden on the environment can be reduced.
さらに、他の態様は、上記圧電素子を具備することを特徴とする超音波デバイス、あるいは、上記圧電素子を具備するセンサーにある。かかる態様では、クラック発生が抑制され、また、温度依存性が小さい圧電素子を具備するため、信頼性に優れた超音波デバイス、あるいはセンサーが実現できる。また、非鉛又は鉛の含有量を抑えられるため、環境への負荷を低減することができる。 Furthermore, another aspect resides in an ultrasonic device including the piezoelectric element or a sensor including the piezoelectric element. In this aspect, since the generation of cracks is suppressed and the piezoelectric element having a small temperature dependency is provided, an ultrasonic device or sensor excellent in reliability can be realized. In addition, since the content of non-lead or lead can be suppressed, the burden on the environment can be reduced.
Claims (5)
前記圧電体層は、ビスマス、ランタン、鉄及びマンガンを含みペロブスカイト構造を有する複合酸化物からなり（１００）面に優先配向している第１圧電体層と、前記第１圧電体層上に設けられ、ビスマス、鉄、マンガン、バリウム及びチタンを含みペロブスカイト構造を有する複合酸化物からなり（１００）面に優先配向している第２圧電体層と、を有することを特徴とする圧電素子。 A piezoelectric element comprising a piezoelectric layer and electrodes sandwiching the piezoelectric layer,
The piezoelectric layer is formed of a composite oxide containing bismuth, lanthanum, iron, and manganese and having a perovskite structure and is preferentially oriented in the (100) plane, and is provided on the first piezoelectric layer. is, the piezoelectric element and having bismuth, iron, manganese, and the second piezoelectric layer is preferentially oriented to become a complex oxide having a perovskite structure containing barium and titanium (100) surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011277609A JP2013128075A (en) | 2011-12-19 | 2011-12-19 | Liquid injection head, liquid injection device and piezoelectric element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011277609A JP2013128075A (en) | 2011-12-19 | 2011-12-19 | Liquid injection head, liquid injection device and piezoelectric element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2013128075A JP2013128075A (en) | 2013-06-27 |
| JP2013128075A5 true JP2013128075A5 (en) | 2015-01-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| JP2011277609A Pending JP2013128075A (en) | 2011-12-19 | 2011-12-19 | Liquid injection head, liquid injection device and piezoelectric element |
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP6183600B2 (en) * | 2013-08-22 | 2017-08-23 | セイコーエプソン株式会社 | Piezoelectric element, liquid ejecting head, liquid ejecting apparatus, ultrasonic device, filter and sensor |
| JP6296227B2 (en) * | 2013-11-22 | 2018-03-20 | セイコーエプソン株式会社 | Liquid ejecting head, liquid ejecting apparatus, and piezoelectric element |
| US9136460B2 (en) * | 2014-01-29 | 2015-09-15 | Canon Kabushiki Kaisha | Piezoelectric element, method for manufacturing piezoelectric element, and electronic apparatus |
| JP6299338B2 (en) * | 2014-03-31 | 2018-03-28 | セイコーエプソン株式会社 | Piezoelectric element, liquid ejecting head, liquid ejecting apparatus and sensor |
| JP6679884B2 (en) * | 2015-10-30 | 2020-04-15 | セイコーエプソン株式会社 | Piezoelectric element, piezoelectric module, and electronic device |
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| JP5507097B2 (en) * | 2008-03-12 | 2014-05-28 | 富士フイルム株式会社 | Perovskite oxide and method for producing the same, piezoelectric body, piezoelectric element, and liquid ejection device |
| JP2010194742A (en) * | 2009-02-23 | 2010-09-09 | Fujifilm Corp | Liquid delivering apparatus |
| JP5375688B2 (en) * | 2010-03-16 | 2013-12-25 | セイコーエプソン株式会社 | Liquid ejecting head, piezoelectric element and piezoelectric actuator |
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