JP5717743B2 - 太陽電池およびその製造方法、並びに太陽電池の製造装置 - Google Patents
太陽電池およびその製造方法、並びに太陽電池の製造装置 Download PDFInfo
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- JP5717743B2 JP5717743B2 JP2012525285A JP2012525285A JP5717743B2 JP 5717743 B2 JP5717743 B2 JP 5717743B2 JP 2012525285 A JP2012525285 A JP 2012525285A JP 2012525285 A JP2012525285 A JP 2012525285A JP 5717743 B2 JP5717743 B2 JP 5717743B2
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- 238000004519 manufacturing process Methods 0.000 title claims description 28
- LELOWRISYMNNSU-UHFFFAOYSA-N hydrogen cyanide Chemical compound N#C LELOWRISYMNNSU-UHFFFAOYSA-N 0.000 claims description 82
- 239000000758 substrate Substances 0.000 claims description 76
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 64
- 229910052710 silicon Inorganic materials 0.000 claims description 64
- 239000010703 silicon Substances 0.000 claims description 64
- 239000002904 solvent Substances 0.000 claims description 25
- 238000000034 method Methods 0.000 claims description 20
- 238000007654 immersion Methods 0.000 claims description 19
- XFXPMWWXUTWYJX-UHFFFAOYSA-N Cyanide Chemical compound N#[C-] XFXPMWWXUTWYJX-UHFFFAOYSA-N 0.000 claims description 18
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 15
- GPRLSGONYQIRFK-UHFFFAOYSA-N hydron Chemical compound [H+] GPRLSGONYQIRFK-UHFFFAOYSA-N 0.000 claims description 10
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 10
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 8
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 8
- 238000007598 dipping method Methods 0.000 claims description 7
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 6
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 6
- 229910021642 ultra pure water Inorganic materials 0.000 claims description 6
- 239000012498 ultrapure water Substances 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 4
- 150000002825 nitriles Chemical class 0.000 claims description 4
- 150000002576 ketones Chemical class 0.000 claims description 3
- 239000004408 titanium dioxide Substances 0.000 claims 2
- 239000000243 solution Substances 0.000 description 41
- 239000010408 film Substances 0.000 description 35
- 238000004140 cleaning Methods 0.000 description 21
- 230000007547 defect Effects 0.000 description 21
- 229910052751 metal Inorganic materials 0.000 description 19
- 239000002184 metal Substances 0.000 description 19
- 239000007864 aqueous solution Substances 0.000 description 18
- 239000010949 copper Substances 0.000 description 13
- 230000000694 effects Effects 0.000 description 11
- 238000011109 contamination Methods 0.000 description 9
- 239000004065 semiconductor Substances 0.000 description 9
- 230000008569 process Effects 0.000 description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 6
- 230000008034 disappearance Effects 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N ammonia Natural products N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 230000001737 promoting effect Effects 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 150000001335 aliphatic alkanes Chemical class 0.000 description 2
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 150000001879 copper Chemical class 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonium chloride Substances [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 1
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- -1 Ta 2 O 5 Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 235000011114 ammonium hydroxide Nutrition 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008033 biological extinction Effects 0.000 description 1
- OEYIOHPDSNJKLS-UHFFFAOYSA-N choline Chemical compound C[N+](C)(C)CCO OEYIOHPDSNJKLS-UHFFFAOYSA-N 0.000 description 1
- 229960001231 choline Drugs 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000012046 mixed solvent Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 239000008213 purified water Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
- H01L31/02168—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells the coatings being antireflective or having enhancing optical properties for the solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/546—Polycrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Sustainable Development (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Sustainable Energy (AREA)
- Photovoltaic Devices (AREA)
Description
本実施形態では、図1に示す構造を備える太陽電池を、シアン(CN)濃度が2700ppm(0.27wt%)であって、水素イオン濃度指数(pH値)が10に調整されたシアン化水素(HCN)水溶液中に浸漬する前後における変換効率の変化を調べた。
本実施形態の太陽電池300は、第1の実施形態における単結晶シリコン基板10を多結晶シリコン基板310に代え、反射防止膜330として窒化シリコン膜を採用し、その窒化シリコン膜を形成する順序を変更したこと以外は第1の実施形態と同様に行われた。従って、第1の実施形態と重複する説明は省略され得る。
本実施形態の太陽電池は、第2の実施形態におけるHCN水溶液中への浸漬処理が、pn接合が形成される前に行われる点を除き、第2の実施形態と同様に行われた。従って、第1及び第2の実施形態と重複する説明は省略され得る。
なお、上述の実施形態では、反射防止膜として二酸化チタン(TiO2)膜や窒化シリコン膜が用いられていたが、反射防止膜はこれに限定されない。例えば、SiO2、Al2O3、Ta2O5、MgO、ZrO2、又は前述の各酸化物の複合材や、SiO,SiONも、反射防止膜として適用され得る。特に、第2実施形態で採用した窒化シリコン膜のような緻密な膜を反射防止膜とする場合は、そのような反射防止膜が形成される前にシアン含有溶液による処理が行われることが、欠陥消滅を促進する観点から好ましい。
20,320 n型拡散層
30,330 反射防止膜
40 表面電極
50 裏面電極
100,200,300 太陽電池
Claims (10)
- シアン(CN)濃度が100ppm超5%以下であって、水素イオン濃度指数(pH)が、7超9.5未満であり、かつ5℃以上50℃以下のシアン含有溶液内に、シリコン表面が直接前記シアン含有溶液に曝されるようにシリコン基板又は前記シリコン基板から形成される太陽電池を浸漬する浸漬工程を含む、
太陽電池の製造方法。 - シアン(CN)濃度が100ppm超5%以下であって、水素イオン濃度指数(pH)が、9.5以上14以下であり、かつ5℃以上50℃以下のシアン含有溶液内に、窒化シリコン又は二酸化チタンからなる反射防止膜によってシリコン表面が直接前記シアン含有溶液に曝されないようにシリコン基板又は前記シリコン基板から形成される太陽電池を浸漬する浸漬工程を含む、
太陽電池の製造方法。 - 前記シアン(CN)濃度が、300ppm以上0.5%以下である、
請求項1又は請求項2に記載の太陽電池の製造方法。 - 前記シアン含有溶液の温度が、25℃以上40℃以下である、
請求項1乃至請求項3のいずれか1項に記載の太陽電池の製造方法。 - 前記シアン含有溶液の溶媒が、シアン化水素を、純水、超純水、アルコール系溶媒、ケトン系溶媒、ニトリル系溶媒、及びエーテル系溶媒の群から選ばれる少なくとも1種類の溶媒である、
請求項1乃至請求項3のいずれか1項に記載の太陽電池の製造方法。 - 前記シリコン基板が、単結晶シリコン又は多結晶シリコンである、
請求項1乃至請求項3のいずれか1項に記載の太陽電池の製造方法。 - シアン(CN)濃度が100ppm超5%以下であって、水素イオン濃度指数(pH)が、7超9.5未満であり、かつ5℃以上50℃以下のシアン含有溶液内に、シリコン表面が直接前記シアン含有溶液に曝されるようにシリコン基板又は前記シリコン基板から形成される太陽電池を浸漬する浸漬処理部を備える、
太陽電池の製造装置。 - シアン(CN)濃度が100ppm超5%以下であって、水素イオン濃度指数(pH)が、9.5以上14以下であり、かつ5℃以上50℃以下のシアン含有溶液内に、窒化シリコン又は二酸化チタンからなる反射防止膜によってシリコン表面が直接前記シアン含有溶液に曝されないようにシリコン基板又は前記シリコン基板から形成される太陽電池を浸漬する浸漬処理部を備える、
太陽電池の製造装置。 - 前記シアン(CN)濃度が、300ppm以上0.5%以下である、
請求項7又は請求項8に記載の太陽電池の製造装置。 - 前記シアン含有溶液の温度が、25℃以上40℃以下である、
請求項7乃至請求項9のいずれか1項に記載の太陽電池の製造装置。
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PCT/JP2010/062420 WO2012011188A1 (ja) | 2010-07-23 | 2010-07-23 | 太陽電池およびその製造方法、並びに太陽電池の製造装置 |
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JPWO2012011188A1 JPWO2012011188A1 (ja) | 2013-09-09 |
JP5717743B2 true JP5717743B2 (ja) | 2015-05-13 |
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JP (1) | JP5717743B2 (ja) |
TW (1) | TWI544653B (ja) |
WO (1) | WO2012011188A1 (ja) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001015772A (ja) * | 1999-06-30 | 2001-01-19 | Hikari Kobayashi | 半導体装置の製造方法 |
JP2004342723A (ja) * | 2003-05-14 | 2004-12-02 | Japan Science & Technology Agency | 光電変換半導体装置、その製造方法及び製造方法で用いる処理装置 |
JP2005039198A (ja) * | 2003-06-24 | 2005-02-10 | Japan Science & Technology Agency | 半導体装置の洗浄方法、洗浄溶液の製造方法ならびに半導体装置製造用機器の洗浄方法および洗浄装置 |
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JPH01290267A (ja) * | 1988-05-18 | 1989-11-22 | Fuji Electric Co Ltd | 光電変換素子の製造方法 |
JP3160205B2 (ja) * | 1996-09-02 | 2001-04-25 | 科学技術振興事業団 | 半導体装置の製造方法およびその製造装置 |
JP2001339084A (ja) * | 2000-05-29 | 2001-12-07 | Sanyo Electric Co Ltd | 半導体装置及びその製造方法 |
JP2007073545A (ja) * | 2005-09-02 | 2007-03-22 | Tsukuba Semi Technology:Kk | 半導体デバイスの結晶質改善方法 |
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- 2010-07-23 WO PCT/JP2010/062420 patent/WO2012011188A1/ja active Application Filing
- 2010-07-23 JP JP2012525285A patent/JP5717743B2/ja not_active Expired - Fee Related
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2001015772A (ja) * | 1999-06-30 | 2001-01-19 | Hikari Kobayashi | 半導体装置の製造方法 |
JP2004342723A (ja) * | 2003-05-14 | 2004-12-02 | Japan Science & Technology Agency | 光電変換半導体装置、その製造方法及び製造方法で用いる処理装置 |
JP2005039198A (ja) * | 2003-06-24 | 2005-02-10 | Japan Science & Technology Agency | 半導体装置の洗浄方法、洗浄溶液の製造方法ならびに半導体装置製造用機器の洗浄方法および洗浄装置 |
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WO2012011188A1 (ja) | 2012-01-26 |
TW201212272A (en) | 2012-03-16 |
JPWO2012011188A1 (ja) | 2013-09-09 |
TWI544653B (zh) | 2016-08-01 |
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