JP5691398B2 - 載置台、形状測定装置、及び形状測定方法 - Google Patents

載置台、形状測定装置、及び形状測定方法 Download PDF

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JP5691398B2
JP5691398B2 JP2010240964A JP2010240964A JP5691398B2 JP 5691398 B2 JP5691398 B2 JP 5691398B2 JP 2010240964 A JP2010240964 A JP 2010240964A JP 2010240964 A JP2010240964 A JP 2010240964A JP 5691398 B2 JP5691398 B2 JP 5691398B2
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mounting table
surface plate
mounting
test object
axis
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JP2012093236A5 (enExample
JP2012093236A (ja
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進也 丸山
進也 丸山
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Nikon Corp
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Nikon Corp
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  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP2010240964A 2010-10-27 2010-10-27 載置台、形状測定装置、及び形状測定方法 Active JP5691398B2 (ja)

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JP2012093236A JP2012093236A (ja) 2012-05-17
JP2012093236A5 JP2012093236A5 (enExample) 2013-12-12
JP5691398B2 true JP5691398B2 (ja) 2015-04-01

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Families Citing this family (5)

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Publication number Priority date Publication date Assignee Title
CN103175479B (zh) * 2013-02-06 2015-11-18 北京东方计量测试研究所 钢球测量工装和钢球直径测试仪以及钢球直径测量方法
DE102013204581A1 (de) * 2013-03-15 2014-09-18 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren zur Korrektur einer Winkelabweichung beim Betrieb eines Koordinatenmessgeräts
JP2016097459A (ja) * 2014-11-19 2016-05-30 ファナック株式会社 回転軸中心位置計測用治具および該治具を用いた回転軸中心位置計測方法
CN110319746B (zh) * 2019-06-10 2022-04-15 西安爱德华测量设备股份有限公司 一种基于自动化机精密加工的机床外工况模拟机测量方法
JP7373970B2 (ja) * 2019-11-06 2023-11-06 オークマ株式会社 工作機械の誤差補正方法及び工作機械

Family Cites Families (5)

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JP2005300248A (ja) * 2004-04-08 2005-10-27 Mitsutoyo Corp 載置テーブル、表面性状測定機および表面性状測定方法
JP2007044802A (ja) * 2005-08-09 2007-02-22 Okuma Corp 多軸工作機械における旋回軸中心測定方法
JP4324159B2 (ja) * 2005-12-08 2009-09-02 キヤノン株式会社 光学素子の測定方法および治具
JP4480769B2 (ja) * 2008-01-11 2010-06-16 パナソニック株式会社 形状測定方法
JP5332009B2 (ja) * 2008-05-12 2013-11-06 株式会社ミツトヨ 形状測定装置、及び形状測定方法

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