JP5606213B2 - 液体吐出ヘッド用基板の製造方法 - Google Patents

液体吐出ヘッド用基板の製造方法 Download PDF

Info

Publication number
JP5606213B2
JP5606213B2 JP2010183153A JP2010183153A JP5606213B2 JP 5606213 B2 JP5606213 B2 JP 5606213B2 JP 2010183153 A JP2010183153 A JP 2010183153A JP 2010183153 A JP2010183153 A JP 2010183153A JP 5606213 B2 JP5606213 B2 JP 5606213B2
Authority
JP
Japan
Prior art keywords
substrate
manufacturing
discharge head
liquid discharge
electrode layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2010183153A
Other languages
English (en)
Japanese (ja)
Other versions
JP2011073440A (ja
JP2011073440A5 (enExample
Inventor
創太 竹内
剛矢 宇山
博和 小室
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2010183153A priority Critical patent/JP5606213B2/ja
Publication of JP2011073440A publication Critical patent/JP2011073440A/ja
Publication of JP2011073440A5 publication Critical patent/JP2011073440A5/ja
Application granted granted Critical
Publication of JP5606213B2 publication Critical patent/JP5606213B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14072—Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/18—Electrical connection established using vias

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2010183153A 2009-09-04 2010-08-18 液体吐出ヘッド用基板の製造方法 Active JP5606213B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010183153A JP5606213B2 (ja) 2009-09-04 2010-08-18 液体吐出ヘッド用基板の製造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2009204640 2009-09-04
JP2009204640 2009-09-04
JP2010183153A JP5606213B2 (ja) 2009-09-04 2010-08-18 液体吐出ヘッド用基板の製造方法

Publications (3)

Publication Number Publication Date
JP2011073440A JP2011073440A (ja) 2011-04-14
JP2011073440A5 JP2011073440A5 (enExample) 2013-09-12
JP5606213B2 true JP5606213B2 (ja) 2014-10-15

Family

ID=43648097

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010183153A Active JP5606213B2 (ja) 2009-09-04 2010-08-18 液体吐出ヘッド用基板の製造方法

Country Status (4)

Country Link
US (1) US8445298B2 (enExample)
JP (1) JP5606213B2 (enExample)
KR (1) KR101435239B1 (enExample)
CN (1) CN102009527B (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5701014B2 (ja) * 2010-11-05 2015-04-15 キヤノン株式会社 吐出素子基板の製造方法
JP5769560B2 (ja) * 2011-09-09 2015-08-26 キヤノン株式会社 液体吐出ヘッド用基体及びその製造方法
US10035346B2 (en) 2015-01-27 2018-07-31 Canon Kabushiki Kaisha Element substrate and liquid ejection head
JP6598658B2 (ja) * 2015-01-27 2019-10-30 キヤノン株式会社 液体吐出ヘッドの素子基板及び液体吐出ヘッド
EP3231007B1 (en) * 2015-01-30 2021-04-14 Hewlett-Packard Development Company, L.P. Atomic layer deposition passivation for via
JP6881967B2 (ja) * 2016-12-22 2021-06-02 キヤノン株式会社 基板の製造方法
JP7224782B2 (ja) * 2018-05-30 2023-02-20 キヤノン株式会社 液体吐出ヘッドおよびその製造方法
JP7237480B2 (ja) * 2018-06-29 2023-03-13 キヤノン株式会社 液体吐出ヘッドおよびその製造方法
US11161351B2 (en) * 2018-09-28 2021-11-02 Canon Kabushiki Kaisha Liquid ejection head

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05147223A (ja) * 1991-12-02 1993-06-15 Matsushita Electric Ind Co Ltd インクジエツトヘツド
JPH06312509A (ja) 1993-04-30 1994-11-08 Canon Inc インクジェット記録ヘッド、インクジェット記録ヘッドの製造方法および前記インクジェット記録ヘッドを備えたインクジェット記録装置
US5694684A (en) * 1994-06-10 1997-12-09 Canon Kabushiki Kaisha Manufacturing method for ink jet recording head
JPH09314607A (ja) * 1996-05-24 1997-12-09 Ricoh Co Ltd 射出成形用金型の調整方法ならびに金型調整用フィルムおよびその製造方法
US6790775B2 (en) * 2002-10-31 2004-09-14 Hewlett-Packard Development Company, L.P. Method of forming a through-substrate interconnect
EP1768847B1 (en) 2004-06-28 2009-08-12 Canon Kabushiki Kaisha Liquid discharge head manufacturing method, and liquid discharge head obtained using this method
US7926909B2 (en) * 2007-01-09 2011-04-19 Canon Kabushiki Kaisha Ink-jet recording head, method for manufacturing ink-jet recording head, and semiconductor device

Also Published As

Publication number Publication date
CN102009527B (zh) 2014-03-19
US8445298B2 (en) 2013-05-21
JP2011073440A (ja) 2011-04-14
KR20110025605A (ko) 2011-03-10
US20110059558A1 (en) 2011-03-10
CN102009527A (zh) 2011-04-13
KR101435239B1 (ko) 2014-08-28

Similar Documents

Publication Publication Date Title
JP5606213B2 (ja) 液体吐出ヘッド用基板の製造方法
JP2011073440A5 (enExample)
JP5361231B2 (ja) インクジェット記録ヘッド及び電子デバイス
JP5219439B2 (ja) インクジェット記録ヘッド用基板の製造方法
JP5566130B2 (ja) 液体吐出ヘッドの製造方法
JP5762200B2 (ja) 液体吐出ヘッド用基板の製造方法
US20080165222A1 (en) Ink-jet recording head, method for manufacturing ink-jet recording head, and semiconductor device
JP5495623B2 (ja) 基板の加工方法、液体吐出ヘッド用基板の製造方法および液体吐出ヘッドの製造方法
JP5769560B2 (ja) 液体吐出ヘッド用基体及びその製造方法
JP4979793B2 (ja) 液体吐出ヘッド用基板の製造方法
JP2009039928A (ja) 液体吐出ヘッドおよびその製造方法
JP4274554B2 (ja) 素子基板および液体吐出素子の形成方法
JP5701014B2 (ja) 吐出素子基板の製造方法
JPH10202889A (ja) インク噴射記録ヘッドの製造方法および記録装置
JP2006224596A (ja) インクジェット記録ヘッドおよびインクジェット記録ヘッドの製造方法
JP5744549B2 (ja) インクジェット記録ヘッドおよびインクジェット記録ヘッドの製造方法
JP3873166B2 (ja) サーマルインクジェットヘッド
JP6991760B2 (ja) シリコン基板の加工方法
JP5622653B2 (ja) インクジェットヘッドおよびインクジェットヘッドの製造方法
JP2019166658A (ja) 液体吐出ヘッド用基板の製造方法
JP2017185727A (ja) 液体吐出ヘッド用基板及びその製造方法
JP2002172781A (ja) インクジェットヘッド
KR20050121145A (ko) 잉크젯 헤드의 제조방법
JP2007283669A (ja) インクジェット記録ヘッド、インクジェット記録ヘッドの製造方法
KR20070033574A (ko) 모놀리틱 잉크젯 프린트헤드 및 이의 제조방법

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130725

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20130725

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20140221

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20140225

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140424

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20140430

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20140729

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20140826

R151 Written notification of patent or utility model registration

Ref document number: 5606213

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151