CN102009527B - 制造液体排出头基材的方法 - Google Patents

制造液体排出头基材的方法 Download PDF

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Publication number
CN102009527B
CN102009527B CN201010269391.9A CN201010269391A CN102009527B CN 102009527 B CN102009527 B CN 102009527B CN 201010269391 A CN201010269391 A CN 201010269391A CN 102009527 B CN102009527 B CN 102009527B
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CN
China
Prior art keywords
base material
electrode layer
dielectric film
laser
parylene
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201010269391.9A
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English (en)
Chinese (zh)
Other versions
CN102009527A (zh
Inventor
竹内创太
宇山刚矢
小室博和
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of CN102009527A publication Critical patent/CN102009527A/zh
Application granted granted Critical
Publication of CN102009527B publication Critical patent/CN102009527B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14072—Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/18—Electrical connection established using vias

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
CN201010269391.9A 2009-09-04 2010-08-31 制造液体排出头基材的方法 Expired - Fee Related CN102009527B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009204640 2009-09-04
JP2009-204640 2009-09-04

Publications (2)

Publication Number Publication Date
CN102009527A CN102009527A (zh) 2011-04-13
CN102009527B true CN102009527B (zh) 2014-03-19

Family

ID=43648097

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201010269391.9A Expired - Fee Related CN102009527B (zh) 2009-09-04 2010-08-31 制造液体排出头基材的方法

Country Status (4)

Country Link
US (1) US8445298B2 (enExample)
JP (1) JP5606213B2 (enExample)
KR (1) KR101435239B1 (enExample)
CN (1) CN102009527B (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5701014B2 (ja) * 2010-11-05 2015-04-15 キヤノン株式会社 吐出素子基板の製造方法
JP5769560B2 (ja) * 2011-09-09 2015-08-26 キヤノン株式会社 液体吐出ヘッド用基体及びその製造方法
JP6598658B2 (ja) * 2015-01-27 2019-10-30 キヤノン株式会社 液体吐出ヘッドの素子基板及び液体吐出ヘッド
US10035346B2 (en) 2015-01-27 2018-07-31 Canon Kabushiki Kaisha Element substrate and liquid ejection head
EP3231007B1 (en) * 2015-01-30 2021-04-14 Hewlett-Packard Development Company, L.P. Atomic layer deposition passivation for via
JP6881967B2 (ja) 2016-12-22 2021-06-02 キヤノン株式会社 基板の製造方法
JP7224782B2 (ja) * 2018-05-30 2023-02-20 キヤノン株式会社 液体吐出ヘッドおよびその製造方法
JP7237480B2 (ja) * 2018-06-29 2023-03-13 キヤノン株式会社 液体吐出ヘッドおよびその製造方法
US11161351B2 (en) * 2018-09-28 2021-11-02 Canon Kabushiki Kaisha Liquid ejection head

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5694684A (en) * 1994-06-10 1997-12-09 Canon Kabushiki Kaisha Manufacturing method for ink jet recording head
CN1976811A (zh) * 2004-06-28 2007-06-06 佳能株式会社 排液头的制造方法和使用这一方法获得的排液头

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05147223A (ja) * 1991-12-02 1993-06-15 Matsushita Electric Ind Co Ltd インクジエツトヘツド
JPH06312509A (ja) 1993-04-30 1994-11-08 Canon Inc インクジェット記録ヘッド、インクジェット記録ヘッドの製造方法および前記インクジェット記録ヘッドを備えたインクジェット記録装置
JPH09314607A (ja) * 1996-05-24 1997-12-09 Ricoh Co Ltd 射出成形用金型の調整方法ならびに金型調整用フィルムおよびその製造方法
US6790775B2 (en) * 2002-10-31 2004-09-14 Hewlett-Packard Development Company, L.P. Method of forming a through-substrate interconnect
US7926909B2 (en) * 2007-01-09 2011-04-19 Canon Kabushiki Kaisha Ink-jet recording head, method for manufacturing ink-jet recording head, and semiconductor device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5694684A (en) * 1994-06-10 1997-12-09 Canon Kabushiki Kaisha Manufacturing method for ink jet recording head
CN1976811A (zh) * 2004-06-28 2007-06-06 佳能株式会社 排液头的制造方法和使用这一方法获得的排液头

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JP特开平6-312509A 1994.11.08

Also Published As

Publication number Publication date
KR20110025605A (ko) 2011-03-10
US8445298B2 (en) 2013-05-21
JP5606213B2 (ja) 2014-10-15
JP2011073440A (ja) 2011-04-14
KR101435239B1 (ko) 2014-08-28
CN102009527A (zh) 2011-04-13
US20110059558A1 (en) 2011-03-10

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Granted publication date: 20140319

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