KR101435239B1 - 액체 토출 헤드 기재를 제조하는 프로세스 - Google Patents

액체 토출 헤드 기재를 제조하는 프로세스 Download PDF

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Publication number
KR101435239B1
KR101435239B1 KR1020100083346A KR20100083346A KR101435239B1 KR 101435239 B1 KR101435239 B1 KR 101435239B1 KR 1020100083346 A KR1020100083346 A KR 1020100083346A KR 20100083346 A KR20100083346 A KR 20100083346A KR 101435239 B1 KR101435239 B1 KR 101435239B1
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KR
South Korea
Prior art keywords
electrode layer
insulating film
laser beam
substrate
hollow portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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KR1020100083346A
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English (en)
Korean (ko)
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KR20110025605A (ko
Inventor
소오따 다께우찌
마사야 우야마
히로까즈 고무로
Original Assignee
캐논 가부시끼가이샤
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Publication date
Application filed by 캐논 가부시끼가이샤 filed Critical 캐논 가부시끼가이샤
Publication of KR20110025605A publication Critical patent/KR20110025605A/ko
Application granted granted Critical
Publication of KR101435239B1 publication Critical patent/KR101435239B1/ko
Expired - Fee Related legal-status Critical Current
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14072—Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/18—Electrical connection established using vias

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
KR1020100083346A 2009-09-04 2010-08-27 액체 토출 헤드 기재를 제조하는 프로세스 Expired - Fee Related KR101435239B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009204640 2009-09-04
JPJP-P-2009-204640 2009-09-04

Publications (2)

Publication Number Publication Date
KR20110025605A KR20110025605A (ko) 2011-03-10
KR101435239B1 true KR101435239B1 (ko) 2014-08-28

Family

ID=43648097

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020100083346A Expired - Fee Related KR101435239B1 (ko) 2009-09-04 2010-08-27 액체 토출 헤드 기재를 제조하는 프로세스

Country Status (4)

Country Link
US (1) US8445298B2 (enExample)
JP (1) JP5606213B2 (enExample)
KR (1) KR101435239B1 (enExample)
CN (1) CN102009527B (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5701014B2 (ja) * 2010-11-05 2015-04-15 キヤノン株式会社 吐出素子基板の製造方法
JP5769560B2 (ja) * 2011-09-09 2015-08-26 キヤノン株式会社 液体吐出ヘッド用基体及びその製造方法
US10035346B2 (en) 2015-01-27 2018-07-31 Canon Kabushiki Kaisha Element substrate and liquid ejection head
JP6598658B2 (ja) * 2015-01-27 2019-10-30 キヤノン株式会社 液体吐出ヘッドの素子基板及び液体吐出ヘッド
EP3231007B1 (en) * 2015-01-30 2021-04-14 Hewlett-Packard Development Company, L.P. Atomic layer deposition passivation for via
JP6881967B2 (ja) * 2016-12-22 2021-06-02 キヤノン株式会社 基板の製造方法
JP7224782B2 (ja) * 2018-05-30 2023-02-20 キヤノン株式会社 液体吐出ヘッドおよびその製造方法
JP7237480B2 (ja) * 2018-06-29 2023-03-13 キヤノン株式会社 液体吐出ヘッドおよびその製造方法
US11161351B2 (en) * 2018-09-28 2021-11-02 Canon Kabushiki Kaisha Liquid ejection head

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05147223A (ja) * 1991-12-02 1993-06-15 Matsushita Electric Ind Co Ltd インクジエツトヘツド
JPH09314607A (ja) * 1996-05-24 1997-12-09 Ricoh Co Ltd 射出成形用金型の調整方法ならびに金型調整用フィルムおよびその製造方法
JP2004153269A (ja) * 2002-10-31 2004-05-27 Hewlett-Packard Development Co Lp 基板貫通の相互接続部を形成する方法
JP2009132133A (ja) * 2007-01-09 2009-06-18 Canon Inc インクジェット記録ヘッドおよびその製造方法、半導体デバイス

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06312509A (ja) 1993-04-30 1994-11-08 Canon Inc インクジェット記録ヘッド、インクジェット記録ヘッドの製造方法および前記インクジェット記録ヘッドを備えたインクジェット記録装置
US5694684A (en) * 1994-06-10 1997-12-09 Canon Kabushiki Kaisha Manufacturing method for ink jet recording head
EP1768847B1 (en) 2004-06-28 2009-08-12 Canon Kabushiki Kaisha Liquid discharge head manufacturing method, and liquid discharge head obtained using this method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05147223A (ja) * 1991-12-02 1993-06-15 Matsushita Electric Ind Co Ltd インクジエツトヘツド
JPH09314607A (ja) * 1996-05-24 1997-12-09 Ricoh Co Ltd 射出成形用金型の調整方法ならびに金型調整用フィルムおよびその製造方法
JP2004153269A (ja) * 2002-10-31 2004-05-27 Hewlett-Packard Development Co Lp 基板貫通の相互接続部を形成する方法
JP2009132133A (ja) * 2007-01-09 2009-06-18 Canon Inc インクジェット記録ヘッドおよびその製造方法、半導体デバイス

Also Published As

Publication number Publication date
CN102009527B (zh) 2014-03-19
US8445298B2 (en) 2013-05-21
JP2011073440A (ja) 2011-04-14
KR20110025605A (ko) 2011-03-10
US20110059558A1 (en) 2011-03-10
CN102009527A (zh) 2011-04-13
JP5606213B2 (ja) 2014-10-15

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