JP5582990B2 - 測定装置 - Google Patents

測定装置 Download PDF

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Publication number
JP5582990B2
JP5582990B2 JP2010273941A JP2010273941A JP5582990B2 JP 5582990 B2 JP5582990 B2 JP 5582990B2 JP 2010273941 A JP2010273941 A JP 2010273941A JP 2010273941 A JP2010273941 A JP 2010273941A JP 5582990 B2 JP5582990 B2 JP 5582990B2
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JP
Japan
Prior art keywords
frequency
signal
decimation
measurement
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2010273941A
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English (en)
Japanese (ja)
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JP2012122850A (ja
JP2012122850A5 (enExample
Inventor
芳幸 岡田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
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Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2010273941A priority Critical patent/JP5582990B2/ja
Priority to US13/309,641 priority patent/US8868379B2/en
Publication of JP2012122850A publication Critical patent/JP2012122850A/ja
Publication of JP2012122850A5 publication Critical patent/JP2012122850A5/ja
Application granted granted Critical
Publication of JP5582990B2 publication Critical patent/JP5582990B2/ja
Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02045—Interferometers characterised by particular imaging or detection techniques using the Doppler effect
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2010273941A 2010-12-08 2010-12-08 測定装置 Expired - Fee Related JP5582990B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2010273941A JP5582990B2 (ja) 2010-12-08 2010-12-08 測定装置
US13/309,641 US8868379B2 (en) 2010-12-08 2011-12-02 Measurement apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010273941A JP5582990B2 (ja) 2010-12-08 2010-12-08 測定装置

Publications (3)

Publication Number Publication Date
JP2012122850A JP2012122850A (ja) 2012-06-28
JP2012122850A5 JP2012122850A5 (enExample) 2014-01-30
JP5582990B2 true JP5582990B2 (ja) 2014-09-03

Family

ID=46199089

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010273941A Expired - Fee Related JP5582990B2 (ja) 2010-12-08 2010-12-08 測定装置

Country Status (2)

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US (1) US8868379B2 (enExample)
JP (1) JP5582990B2 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5936478B2 (ja) * 2012-08-03 2016-06-22 キヤノン株式会社 計測装置、リソグラフィー装置、および物品の製造方法
JP2014109481A (ja) * 2012-11-30 2014-06-12 Canon Inc 計測方法及び計測装置
JP2014206419A (ja) 2013-04-11 2014-10-30 キヤノン株式会社 計測装置、それを用いた物品の製造方法
EP2853905B1 (en) * 2013-09-30 2018-09-19 Airbus Defence and Space Limited Phase angle measurement using residue number system analogue-to-digital conversion
CN104457581B (zh) * 2014-08-28 2017-03-22 深圳奥比中光科技有限公司 一种全场z向位移测量系统
US9762256B2 (en) * 2015-04-16 2017-09-12 Maxlinear, Inc. Digital-to-analog converter (DAC) with enhanced dynamic element matching (DEM) and calibration
JP6195649B2 (ja) * 2016-06-29 2017-09-13 三菱電機株式会社 自走式掃除機
EP3539012B1 (en) * 2016-11-11 2025-05-14 Oxford University Innovation Limited Method and system for tracking sinusoidal wave parameters from a received signal that includes noise
JP7040386B2 (ja) * 2018-09-27 2022-03-23 沖電気工業株式会社 光ファイバ歪み及び温度測定装置並びに光ファイバ歪み及び温度測定方法
US11378686B2 (en) * 2018-12-26 2022-07-05 Texas Instruments Incorporated Ultrasonic echo processing in presence of Doppler shift
CN113189721A (zh) * 2021-05-19 2021-07-30 深圳市爱得乐电子有限公司 光电混合模块

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0749922B2 (ja) * 1987-08-05 1995-05-31 松下電器産業株式会社 光計測装置
DE4014516C2 (de) * 1990-05-07 1993-11-04 Ant Nachrichtentech Anordnung zum ermitteln von spektrallinienamplituden des ausgangssignals eines ringinterferometers
US5249030A (en) 1991-12-06 1993-09-28 Zygo Corporation Method and apparatus for determining the position of a moving body and the time of the position measurement
JPH09229718A (ja) * 1996-02-27 1997-09-05 Oki Electric Ind Co Ltd 干渉型光ファイバセンサの変調・復調方法
US7428685B2 (en) 2002-07-08 2008-09-23 Zygo Corporation Cyclic error compensation in interferometry systems
US7576868B2 (en) * 2007-06-08 2009-08-18 Zygo Corporation Cyclic error compensation in interferometry systems
JP2010002244A (ja) * 2008-06-19 2010-01-07 Mitsutoyo Corp レーザ干渉測長装置及びレーザ干渉測長方法

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Publication number Publication date
JP2012122850A (ja) 2012-06-28
US8868379B2 (en) 2014-10-21
US20120147382A1 (en) 2012-06-14

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