JP5582617B2 - 歪み層の緩和 - Google Patents
歪み層の緩和 Download PDFInfo
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- JP5582617B2 JP5582617B2 JP2011521480A JP2011521480A JP5582617B2 JP 5582617 B2 JP5582617 B2 JP 5582617B2 JP 2011521480 A JP2011521480 A JP 2011521480A JP 2011521480 A JP2011521480 A JP 2011521480A JP 5582617 B2 JP5582617 B2 JP 5582617B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
- H01L21/2003—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy characterised by the substrate
- H01L21/2007—Bonding of semiconductor wafers to insulating substrates or to semiconducting substrates using an intermediate insulating layer
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
- H01L21/3245—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering of AIIIBV compounds
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02422—Non-crystalline insulating materials, e.g. glass, polymers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02455—Group 13/15 materials
- H01L21/02458—Nitrides
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02538—Group 13/15 materials
- H01L21/0254—Nitrides
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02658—Pretreatments
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0095—Post-treatment of devices, e.g. annealing, recrystallisation or short-circuit elimination
Description
歪み材料層の一つの面上に第1のコンプライアント材料を有する第1の低粘度層を堆積させるステップと、
歪み材料層の他の面上に第2のコンプライアント材料を有する第2の低粘度層を堆積させて、第1のサンドイッチ構造を形成するステップと、
第1の低粘度層および第2の低粘度層のリフローが生じるように第1のサンドイッチ構造を加熱処理して、それによって少なくとも部分的に歪み材料層を緩和させるステップと、を含む。
Claims (11)
- 極性を有するIII/N材料を含むか該材料からなる歪み材料層を緩和する方法であって、
支持基板上にシード層を堆積したシード基板上に前記歪み材料層をヘテロエピタキシャル成長させるステップと、
第1の低粘度層を前記歪み材料層の一面上に堆積させるステップと、
前記歪み材料層を前記シード基板から取り外し、該歪み材料層を前記第1の低粘度層によって第1の基板に結合するステップと、
第2の低粘度層を前記歪み材料層の他の面上に堆積させるステップと、
前記第2の低粘度層に第2の基板を結合させて、サンドイッチ構造を形成するステップであって、前記サンドイッチ構造は、前記第1の基板と、前記第1の低粘度層と、前記歪み材料層と、前記第2の低粘度層と、前記第2の基板とを有する、ステップと、
前記第1の低粘度層および前記第2の低粘度層のリフローが引き起こされるように、前記サンドイッチ構造を加熱処理し、それによって前記歪み材料層を少なくとも部分的に緩和するステップと、
を含む方法。 - 前記第1の基板および前記第2の基板は、同一の材料あるいは互いの熱膨張係数の差が20%未満である材料で構成される、請求項1に記載の方法。
- 少なくとも部分的に緩和した前記歪み材料層の少なくとも一面を露出するために、前記サンドイッチ構造を加熱処理するステップの後、前記第1の基板と前記第2の基板の少なくとも一方と、それが結合された前記低粘度層を取り外すステップを更に含む、請求項1または2に記載の方法。
- 前記加熱処理の前に、前記歪み材料層をパターン形成し、それによって隙間によって分離された歪み材料島を形成するステップを更に有する、請求項1〜3のいずれか一項に記載の方法。
- 前記第2の低粘度層を前記歪み材料層上に堆積させるステップの前に、前記歪み材料層をパターン形成し、且つ、前記第2の低粘度層を前記歪み材料層上に堆積させるステップの後に、前記第2の低粘度層をパターン形成する、請求項4に記載の方法。
- 前記歪み材料層が、InGaNを含み、またはそれからなる、請求項1〜5のいずれか一項に記載の方法。
- 前記第1の低粘度層および/または前記第2の低粘度層が、ボロホスホシリケートガラス(BPSG)または、ホウ素またはリンを含むSiO2化合物を含み、またはそれからなる請求項1〜6のいずれか一項に記載の方法。
- 前記加熱処理が、少なくとも800℃の温度で行われる、請求項1〜7のいずれか一項に記載の方法。
- 前記第1の低粘度層および/または第2の低粘度層が、5質量%未満のホウ素を含む、請求項1〜8のいずれか一項に記載の方法。
- 前記第1の低粘度層および/または前記第2の低粘度層が、電磁放射を吸収する吸収層を備える、請求項1〜9のいずれか一項に記載の方法。
- 少なくとも部分的に緩和した前記歪み材料層が、極性III−N材料であり、前記ヘテロエピタキシャル成長が、III極性表面上で行われる、請求項1〜10のいずれか一項に記載の方法。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP08290757A EP2151856A1 (en) | 2008-08-06 | 2008-08-06 | Relaxation of strained layers |
EP08290757.7 | 2008-08-06 | ||
EP09290577.7 | 2009-07-21 | ||
EP09290577 | 2009-07-21 | ||
PCT/EP2009/005694 WO2010015401A2 (en) | 2008-08-06 | 2009-08-06 | Relaxation of strained layers |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011530181A JP2011530181A (ja) | 2011-12-15 |
JP5582617B2 true JP5582617B2 (ja) | 2014-09-03 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011521480A Active JP5582617B2 (ja) | 2008-08-06 | 2009-08-06 | 歪み層の緩和 |
Country Status (7)
Country | Link |
---|---|
US (2) | US20110143522A1 (ja) |
EP (1) | EP2324493B1 (ja) |
JP (1) | JP5582617B2 (ja) |
KR (1) | KR101227580B1 (ja) |
CN (2) | CN102113102B (ja) |
TW (1) | TWI457984B (ja) |
WO (1) | WO2010015401A2 (ja) |
Families Citing this family (8)
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- 2009-08-05 TW TW098126447A patent/TWI457984B/zh active
- 2009-08-06 EP EP09777696.7A patent/EP2324493B1/en active Active
- 2009-08-06 JP JP2011521480A patent/JP5582617B2/ja active Active
- 2009-08-06 US US13/056,572 patent/US20110143522A1/en not_active Abandoned
- 2009-08-06 CN CN2009801303085A patent/CN102113102B/zh active Active
- 2009-08-06 KR KR1020117003004A patent/KR101227580B1/ko active IP Right Grant
- 2009-08-06 CN CN201310012880.XA patent/CN103123895B/zh active Active
- 2009-08-06 WO PCT/EP2009/005694 patent/WO2010015401A2/en active Application Filing
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2012
- 2012-04-27 US US13/458,587 patent/US8481408B2/en active Active
Also Published As
Publication number | Publication date |
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CN103123895A (zh) | 2013-05-29 |
US20110143522A1 (en) | 2011-06-16 |
WO2010015401A3 (en) | 2010-05-14 |
KR20110050637A (ko) | 2011-05-16 |
KR101227580B1 (ko) | 2013-01-31 |
EP2324493A2 (en) | 2011-05-25 |
EP2324493B1 (en) | 2014-05-07 |
JP2011530181A (ja) | 2011-12-15 |
TW201023249A (en) | 2010-06-16 |
CN103123895B (zh) | 2016-01-20 |
TWI457984B (zh) | 2014-10-21 |
CN102113102A (zh) | 2011-06-29 |
US8481408B2 (en) | 2013-07-09 |
WO2010015401A2 (en) | 2010-02-11 |
CN102113102B (zh) | 2013-09-18 |
US20120214291A1 (en) | 2012-08-23 |
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