JP5570688B2 - 微細レジストパターン形成方法及びナノインプリントモールド構造 - Google Patents

微細レジストパターン形成方法及びナノインプリントモールド構造 Download PDF

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Publication number
JP5570688B2
JP5570688B2 JP2007170485A JP2007170485A JP5570688B2 JP 5570688 B2 JP5570688 B2 JP 5570688B2 JP 2007170485 A JP2007170485 A JP 2007170485A JP 2007170485 A JP2007170485 A JP 2007170485A JP 5570688 B2 JP5570688 B2 JP 5570688B2
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Japan
Prior art keywords
pattern
mask
mold
substrate
conductive film
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JP2007170485A
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English (en)
Japanese (ja)
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JP2009010188A (ja
JP2009010188A5 (enExample
Inventor
雅人 廣島
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PS4 Luxco SARL
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PS4 Luxco SARL
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Priority to JP2007170485A priority Critical patent/JP5570688B2/ja
Priority to US12/155,651 priority patent/US7922960B2/en
Publication of JP2009010188A publication Critical patent/JP2009010188A/ja
Publication of JP2009010188A5 publication Critical patent/JP2009010188A5/ja
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G03F7/2014—Contact or film exposure of light sensitive plates such as lithographic plates or circuit boards, e.g. in a vacuum frame
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/887—Nanoimprint lithography, i.e. nanostamp

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
JP2007170485A 2007-06-28 2007-06-28 微細レジストパターン形成方法及びナノインプリントモールド構造 Expired - Fee Related JP5570688B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2007170485A JP5570688B2 (ja) 2007-06-28 2007-06-28 微細レジストパターン形成方法及びナノインプリントモールド構造
US12/155,651 US7922960B2 (en) 2007-06-28 2008-06-06 Fine resist pattern forming method and nanoimprint mold structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007170485A JP5570688B2 (ja) 2007-06-28 2007-06-28 微細レジストパターン形成方法及びナノインプリントモールド構造

Publications (3)

Publication Number Publication Date
JP2009010188A JP2009010188A (ja) 2009-01-15
JP2009010188A5 JP2009010188A5 (enExample) 2011-05-12
JP5570688B2 true JP5570688B2 (ja) 2014-08-13

Family

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Family Applications (1)

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JP2007170485A Expired - Fee Related JP5570688B2 (ja) 2007-06-28 2007-06-28 微細レジストパターン形成方法及びナノインプリントモールド構造

Country Status (2)

Country Link
US (1) US7922960B2 (enExample)
JP (1) JP5570688B2 (enExample)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4393244B2 (ja) * 2004-03-29 2010-01-06 キヤノン株式会社 インプリント装置
US8518633B2 (en) 2008-01-22 2013-08-27 Rolith Inc. Large area nanopatterning method and apparatus
WO2009094009A1 (en) * 2008-01-22 2009-07-30 Rolith, Inc. Large area nanopatterning method and apparatus
JP5132647B2 (ja) * 2009-09-24 2013-01-30 株式会社東芝 パターン形成方法
JP5419634B2 (ja) * 2009-10-26 2014-02-19 株式会社東芝 パターン形成方法
EP2609467A4 (en) 2010-08-23 2014-07-30 Rolith Inc MASK FOR NEAR FIELD LITHOGRAPHY AND ITS MANUFACTURE
JP2012069687A (ja) * 2010-09-22 2012-04-05 Toshiba Corp パターンの形成方法、電子デバイスの製造方法、および電子デバイス
KR101234150B1 (ko) 2010-12-20 2013-02-18 엘지이노텍 주식회사 대면적 미세 패턴 형성용 인쇄판 및 그의 제조 방법
JP5909046B2 (ja) * 2011-03-09 2016-04-26 株式会社東芝 近接場露光方法
JP5733747B2 (ja) * 2011-03-23 2015-06-10 学校法人早稲田大学 微細パターンを表面に有する物品の製造方法
US10292806B2 (en) * 2013-01-11 2019-05-21 Bvw Holding Ag Implantable superhydrophobic surfaces
JP6060796B2 (ja) * 2013-04-22 2017-01-18 大日本印刷株式会社 インプリントモールド及びダミーパターン設計方法
KR102214830B1 (ko) * 2014-05-02 2021-02-10 삼성전자주식회사 마스터 몰드 제조 방법
KR102288981B1 (ko) * 2017-04-17 2021-08-13 에스케이하이닉스 주식회사 임프린트 템플레이트 및 임프린트 패턴 형성 방법
US11067726B2 (en) * 2018-04-23 2021-07-20 Facebook Technologies, Llc Gratings with variable depths for waveguide displays
KR102157961B1 (ko) * 2019-04-29 2020-09-18 연세대학교 산학협력단 컬러 필터를 위한 멀티 도메인 나노 패턴 형성 장치 및 방법
JP7337670B2 (ja) * 2019-11-15 2023-09-04 キヤノン株式会社 インプリント装置、インプリント方法、および、物品の製造方法
JP7345843B2 (ja) * 2020-03-04 2023-09-19 国立研究開発法人産業技術総合研究所 マイクロウェル付きナノピラー構造基板、および、その製造方法
CN111522206B (zh) * 2020-04-29 2021-09-21 中国科学院光电技术研究所 一种基于反射式光场增强的微纳光印制造方法
JP2024001577A (ja) * 2022-06-22 2024-01-10 キオクシア株式会社 テンプレート、パターン形成方法、および半導体装置の製造方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6046422B2 (ja) * 1978-12-07 1985-10-16 東京応化工業株式会社 新規なフオトレジスト組成物
US4732841A (en) * 1986-03-24 1988-03-22 Fairchild Semiconductor Corporation Tri-level resist process for fine resolution photolithography
EP2264524A3 (en) * 2000-07-16 2011-11-30 The Board of Regents of The University of Texas System High-resolution overlay alignement methods and systems for imprint lithography
US20030217804A1 (en) * 2002-05-24 2003-11-27 Guo Lingjie J. Polymer micro-ring resonator device and fabrication method
JP4572406B2 (ja) 2004-04-16 2010-11-04 独立行政法人理化学研究所 リソグラフィーマスク
US7682755B2 (en) 2004-04-16 2010-03-23 Riken Lithography mask and optical lithography method using surface plasmon
JP4674105B2 (ja) * 2005-03-25 2011-04-20 独立行政法人科学技術振興機構 回路パターン転写装置及び方法
JP4246174B2 (ja) * 2005-04-01 2009-04-02 独立行政法人科学技術振興機構 ナノインプリント方法及び装置
JP4290177B2 (ja) * 2005-06-08 2009-07-01 キヤノン株式会社 モールド、アライメント方法、パターン形成装置、パターン転写装置、及びチップの製造方法
JP2007095859A (ja) * 2005-09-28 2007-04-12 Japan Science & Technology Agency リソグラフィ方法
WO2008047447A1 (en) * 2006-10-20 2008-04-24 Fujitsu Limited Stamper for transferring pattern, method for manufacturing magnetic recording medium by using the stamper, and the magnetic recording medium
JP4922774B2 (ja) * 2007-01-26 2012-04-25 株式会社東芝 パターン形成方法及びパターン形成用モールド

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Publication number Publication date
US7922960B2 (en) 2011-04-12
JP2009010188A (ja) 2009-01-15
US20090001634A1 (en) 2009-01-01

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