JP5563777B2 - 半導体装置および半導体基板、並びに半導体装置の製造方法 - Google Patents
半導体装置および半導体基板、並びに半導体装置の製造方法 Download PDFInfo
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- JP5563777B2 JP5563777B2 JP2009069015A JP2009069015A JP5563777B2 JP 5563777 B2 JP5563777 B2 JP 5563777B2 JP 2009069015 A JP2009069015 A JP 2009069015A JP 2009069015 A JP2009069015 A JP 2009069015A JP 5563777 B2 JP5563777 B2 JP 5563777B2
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Description
図1(a)〜(d)は本実施形態の半導体装置を示す図である。図1(a)は金属層俯瞰図、図1(b)は図1(a)の断面線Ibにおける断面図を示したものである。図1(c)ははんだボールを搭載した金属層俯瞰図、図1(d)はリフロー後の上面図を示したものである。
図5(a)〜(b)及び図6(a)〜(b)は本実施形態の半導体装置を示す図である。図5(a)は金属層俯瞰図、図5(b)は図5(a)の断面線Vbにおける断面図を示したものである。図6(a)は第2の保護膜の俯瞰図、図6(b)は図6(a)の断面線VIbにおける断面図を示したものである。
2 電極パッド
3 保護膜
31 第1の保護膜
32 第2の保護膜
33 枝部
41 金属層
42 溝部
43 ボール保持部
5 フラックス
6 はんだボール
7 バンプ
Claims (12)
- 複数の電極パッドを備えた半導体基板と、前記半導体基板上面を覆いかつ前記電極パッドを露出するように開口部を有する保護膜と、前記開口部から露出した前記電極パッド上に形成された金属層と、前記金属層上に形成された、はんだからなるバンプとを備えた半導体装置であって、
前記金属層はその中心部から外周部に向かって放射状に形成された複数の溝部を備え、
前記金属層の溝部の幅は前記金属層の中心部から外周部にかけて徐々に細くなるよう形成されていることを特徴とする半導体装置。 - 複数の電極パッドを備えた半導体基板と、前記半導体基板上面を覆いかつ前記電極パッドを露出するように開口部を有する第1の保護膜と、前記開口部から露出した電極パッド上に形成された第2の保護膜と、前記開口部上に形成された金属層と、前記金属層上に形成された、はんだからなるバンプとを備えた半導体装置であって、
前記第2の保護膜は前記電極パッドの中心部から外周部に向かって放射状に形成された複数の枝部を備え、
前記金属層はその中心部から外周部に向かって放射状に形成された複数の溝部を備え、
前記金属層の溝部は前記第2の保護膜の枝部の形状に沿って形成されており、
前記金属層の溝部の幅は前記金属層の中心部から外周部にかけて徐々に細くなるよう形成されていることを特徴とする半導体装置。 - 前記第2の保護膜の枝部は前記電極パッドの開口部の中心部より外周部の方が細く形成されていることを特徴とする請求項2に記載の半導体装置。
- 前記第1の保護膜と前記第2の保護膜とは前記開口部端において連結していることを特徴とする請求項2または3に記載の半導体装置。
- 前記金属層において、隣接する二つの前記金属層の溝部によって区切られた部分は厚み方向に弓なりとなっていることを特徴とする請求項1から4のうちいずれか1項に記載の半導体装置。
- 複数の電極パッドと、前記電極パッドを露出するように開口部を有する保護膜と、前記開口部から露出した前記電極パッド上に形成され、且つ上方にはんだからなるバンプが搭載される金属層とを備えた半導体基板であって、
前記金属層はその中心部から外周部に向かって放射状に形成された複数の溝部を備え、
前記金属層の溝部の幅は前記金属層の中心部から外周部にかけて徐々に細くなるよう形成されていることを特徴とする半導体基板。 - 複数の電極パッドを備えた半導体基板を有する半導体装置の製造方法であって、
前記半導体基板上面を覆うように保護膜を形成する工程と、
前記電極パッドを露出するように開口部を形成する工程と、
前記開口部から露出した前記電極パッド上に金属層を形成する工程と、
前記金属層の中心部から外周部に向かって放射状に複数の溝部を形成する工程と、
前記金属層上に、はんだからなるバンプを形成する工程とを備え、
前記金属層の溝部の幅は前記金属層の中心部から外周部にかけて徐々に細くなるよう形成することを特徴とする半導体装置の製造方法。 - 前記金属層を無電解めっき法で形成することを特徴とする請求項7に記載の半導体装置の製造方法。
- 複数の電極パッドを備えた半導体基板を有する半導体装置の製造方法であって、
前記半導体基板上面を覆うように第1の保護膜を形成する工程と、
前記電極パッドを露出するように開口部を形成する工程と、
前記開口部に前記電極パッドの中心部から外周部に向かって放射状に形成された複数の枝部を有する第2の保護膜を形成する工程と、
無電解めっき法により、前記開口部から露出した前記電極パッド上に、前記第2の保護膜の枝部の形状に沿って中心部から外周部に向かって放射状に伸びる複数の溝部を有する金属層を形成する工程と、
前記金属層上に、はんだからなるバンプを形成する工程とを備え、
前記金属層の溝部の幅は前記金属層の中心部から外周部にかけて徐々に細くなるよう形成することを特徴とする半導体装置の製造方法。 - 前記第1の保護膜と前記第2の保護膜とを前記開口部端において連結するように形成することを特徴とする請求項9に記載の半導体装置の製造方法。
- 前記第1の保護膜と前記第2の保護膜とを同じ工程で形成することを特徴とする請求項9または10のうちいずれか1項に記載の半導体装置の製造方法。
- 前記金属層において、隣接する二つの前記金属層の溝部によって区切られた部分を厚み方向に弓なりとなるように形成することを特徴とする請求項7から11のうちいずれか1項に記載の半導体装置の製造方法。
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PCT/JP2010/001137 WO2010106740A1 (ja) | 2009-03-19 | 2010-02-22 | 半導体装置および半導体基板、並びに半導体装置の製造方法 |
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