JP5534611B2 - ヒータ - Google Patents
ヒータ Download PDFInfo
- Publication number
- JP5534611B2 JP5534611B2 JP2011100617A JP2011100617A JP5534611B2 JP 5534611 B2 JP5534611 B2 JP 5534611B2 JP 2011100617 A JP2011100617 A JP 2011100617A JP 2011100617 A JP2011100617 A JP 2011100617A JP 5534611 B2 JP5534611 B2 JP 5534611B2
- Authority
- JP
- Japan
- Prior art keywords
- heater
- heating element
- cooling air
- flow path
- spacer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Control Of Resistance Heating (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
- Wire Bonding (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011100617A JP5534611B2 (ja) | 2011-04-28 | 2011-04-28 | ヒータ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011100617A JP5534611B2 (ja) | 2011-04-28 | 2011-04-28 | ヒータ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012234876A JP2012234876A (ja) | 2012-11-29 |
| JP2012234876A5 JP2012234876A5 (enExample) | 2013-11-28 |
| JP5534611B2 true JP5534611B2 (ja) | 2014-07-02 |
Family
ID=47434942
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011100617A Active JP5534611B2 (ja) | 2011-04-28 | 2011-04-28 | ヒータ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5534611B2 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6529865B2 (ja) * | 2015-08-31 | 2019-06-12 | 株式会社イチネンジコー | ヒータ |
| JP6680930B2 (ja) * | 2019-05-15 | 2020-04-15 | 株式会社イチネンジコー | ヒータ |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2850895B2 (ja) * | 1997-02-25 | 1999-01-27 | 日本電気株式会社 | ボンディングヘッド |
| JP4675727B2 (ja) * | 2005-09-08 | 2011-04-27 | アスリートFa株式会社 | 電子部品の接合ヘッドおよび電子部品の接合装置 |
| JP4631796B2 (ja) * | 2006-05-22 | 2011-02-16 | パナソニック株式会社 | 電子部品の熱圧着装置 |
| JP2008034666A (ja) * | 2006-07-31 | 2008-02-14 | Yokogawa Electric Corp | ピックアップ装置 |
-
2011
- 2011-04-28 JP JP2011100617A patent/JP5534611B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2012234876A (ja) | 2012-11-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6560150B2 (ja) | ウエハ載置装置 | |
| JP7558886B2 (ja) | 保持装置 | |
| US9530929B2 (en) | Lift-off method | |
| KR102331072B1 (ko) | 웨이퍼 지지대 | |
| TW201820528A (zh) | 晶圓載置台 | |
| JP4941305B2 (ja) | 接合装置 | |
| TWI788497B (zh) | 靜電吸盤裝置 | |
| TW201330761A (zh) | 散熱構造體、功率模組、散熱構造體的製造方法及功率模組的製造方法 | |
| JP2006517341A (ja) | 高周波電極および温度調節手段が組込まれた静電チャック | |
| JP5534611B2 (ja) | ヒータ | |
| JP2015185552A (ja) | 温度調整装置 | |
| JP2012199358A (ja) | チップ加熱ヘッド | |
| JP6678458B2 (ja) | 静電チャック | |
| JP6296770B2 (ja) | 基板載置装置 | |
| JP2018022875A (ja) | ウェーハの加工方法 | |
| TWI608550B (zh) | Viscous crystal device and method | |
| JP6457905B2 (ja) | ヒータ | |
| JP2850895B2 (ja) | ボンディングヘッド | |
| JP6529865B2 (ja) | ヒータ | |
| JP6680930B2 (ja) | ヒータ | |
| US7719108B2 (en) | Enhanced reliability semiconductor package | |
| JP2012019096A (ja) | 半導体チップの接合方法及び半導体チップの接合装置 | |
| JP2004158547A (ja) | ヒータ | |
| JP3633442B2 (ja) | 半導体装置の製造方法及びその製造装置 | |
| JP2001135667A (ja) | バンプ形成方法及びこれに用いられる型、半導体装置及びその製造方法、回路基板並びに電子機器 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20131016 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20131016 |
|
| A871 | Explanation of circumstances concerning accelerated examination |
Free format text: JAPANESE INTERMEDIATE CODE: A871 Effective date: 20131016 |
|
| A975 | Report on accelerated examination |
Free format text: JAPANESE INTERMEDIATE CODE: A971005 Effective date: 20131030 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20140213 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140218 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140331 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20140418 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140421 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 5534611 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
| R370 | Written measure of declining of transfer procedure |
Free format text: JAPANESE INTERMEDIATE CODE: R370 |
|
| S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
| S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |