JP5534601B2 - 切削液供給装置 - Google Patents

切削液供給装置 Download PDF

Info

Publication number
JP5534601B2
JP5534601B2 JP2010176014A JP2010176014A JP5534601B2 JP 5534601 B2 JP5534601 B2 JP 5534601B2 JP 2010176014 A JP2010176014 A JP 2010176014A JP 2010176014 A JP2010176014 A JP 2010176014A JP 5534601 B2 JP5534601 B2 JP 5534601B2
Authority
JP
Japan
Prior art keywords
cutting fluid
tank
oxidizing gas
supply
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2010176014A
Other languages
English (en)
Japanese (ja)
Other versions
JP2012035353A (ja
JP2012035353A5 (enExample
Inventor
治道 廣瀬
正泰 安部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Mechatronics Corp
Original Assignee
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Priority to JP2010176014A priority Critical patent/JP5534601B2/ja
Publication of JP2012035353A publication Critical patent/JP2012035353A/ja
Publication of JP2012035353A5 publication Critical patent/JP2012035353A5/ja
Application granted granted Critical
Publication of JP5534601B2 publication Critical patent/JP5534601B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Auxiliary Devices For Machine Tools (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Physical Water Treatments (AREA)
  • Treatment Of Water By Oxidation Or Reduction (AREA)
JP2010176014A 2010-08-05 2010-08-05 切削液供給装置 Expired - Fee Related JP5534601B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010176014A JP5534601B2 (ja) 2010-08-05 2010-08-05 切削液供給装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010176014A JP5534601B2 (ja) 2010-08-05 2010-08-05 切削液供給装置

Publications (3)

Publication Number Publication Date
JP2012035353A JP2012035353A (ja) 2012-02-23
JP2012035353A5 JP2012035353A5 (enExample) 2013-09-12
JP5534601B2 true JP5534601B2 (ja) 2014-07-02

Family

ID=45847924

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010176014A Expired - Fee Related JP5534601B2 (ja) 2010-08-05 2010-08-05 切削液供給装置

Country Status (1)

Country Link
JP (1) JP5534601B2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5769155B2 (ja) * 2013-03-18 2015-08-26 伊藤 幸男 工作機械の加工装置
KR101467084B1 (ko) * 2013-03-28 2014-12-01 이엽신 질소 가스를 이용한 공구 냉각 장치 및 공구 냉각 방법
CN105082242B (zh) 2015-08-03 2016-11-30 京东方科技集团股份有限公司 一种基板切割系统
JP6741977B2 (ja) * 2016-05-24 2020-08-19 パナソニックIpマネジメント株式会社 三次元構造体の貫通流路を研磨するための方法およびデバイス
JP7165079B2 (ja) * 2019-03-12 2022-11-02 日本タングステン株式会社 加工用クーラント供給機構、および、加工用クーラントの供給方法
JP7446844B2 (ja) * 2020-02-12 2024-03-11 キヤノン株式会社 ウルトラファインバブル生成装置
CN111285455A (zh) * 2020-02-20 2020-06-16 苏州微凯流体设备有限公司 一种废切削液乳化液的氧化处理装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3699140B2 (ja) * 1994-10-18 2005-09-28 ダイオーエンジニアリング株式会社 加圧浮上分離装置
JP2003039274A (ja) * 2001-07-30 2003-02-12 Aisin Seiki Co Ltd 切削液供給装置
JP2005097454A (ja) * 2003-09-26 2005-04-14 Enomoto Bea Co Ltd 切削液及び切削液供給装置
JP5162773B2 (ja) * 2007-03-30 2013-03-13 地方独立行政法人山口県産業技術センター 微粉体回収装置

Also Published As

Publication number Publication date
JP2012035353A (ja) 2012-02-23

Similar Documents

Publication Publication Date Title
JP5534601B2 (ja) 切削液供給装置
JP2008212788A (ja) 洗浄装置及び洗浄方法
JP4360407B2 (ja) 洗浄装置及び洗浄方法
WO2009107386A1 (ja) 飽和水生成器及び飽和水又は飽和液体を生成する装置
JP4826851B2 (ja) 洗浄装置
JP2006314902A (ja) 船舶バラスト水の処理装置
JP5989338B2 (ja) 処理液生成装置、処理液生成方法、基板処理装置及び基板処理方法
CN102326234B (zh) 基板的处理装置以及处理方法
JP2009188116A (ja) 基板の処理装置及び処理方法
JP2016112477A (ja) マイクロバブル発生装置
JP2012182441A (ja) 基板処理装置および基板処理方法
JP2018015747A (ja) 微細気泡洗浄装置
JP5435688B2 (ja) 基板処理装置および基板処理方法
JP5490938B2 (ja) 基板処理装置
TWI391333B (zh) 含表面活性劑的水的處理方法及處理裝置
JP4449643B2 (ja) プラスチックレンズの洗浄方法
JP2012210616A (ja) 送液装置及び送液方法
JP2009160588A (ja) 洗浄装置及び洗浄方法
JP7417703B1 (ja) 高濃度過飽和気泡水生成部を備えた処理装置
JP2008098439A (ja) 洗浄水供給ユニットおよび基板洗浄装置
JP2014069160A (ja) 気液混合方法、気液混合装置および微細気泡を含む気液混合流体を用いた洗浄方法
JP2018001143A (ja) 管内洗浄装置および管内洗浄方法
JP2019037965A (ja) マイクロナノバブル発生装置及びマイクロナノバブルの発生方法
JP2007000854A (ja) 酸素ガスの溶解方法および溶解装置
JP2013010173A (ja) 送液装置及び送液方法

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130801

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20130801

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20140306

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20140417

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20140421

R150 Certificate of patent or registration of utility model

Ref document number: 5534601

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

LAPS Cancellation because of no payment of annual fees