JP5533889B2 - Cmp研磨液及び研磨方法 - Google Patents
Cmp研磨液及び研磨方法 Download PDFInfo
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- JP5533889B2 JP5533889B2 JP2011553771A JP2011553771A JP5533889B2 JP 5533889 B2 JP5533889 B2 JP 5533889B2 JP 2011553771 A JP2011553771 A JP 2011553771A JP 2011553771 A JP2011553771 A JP 2011553771A JP 5533889 B2 JP5533889 B2 JP 5533889B2
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- layer
- polishing liquid
- polishing
- cmp polishing
- metal
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- 238000005498 polishing Methods 0.000 title claims description 396
- 239000007788 liquid Substances 0.000 title claims description 206
- 238000000034 method Methods 0.000 title claims description 54
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 236
- 229910052751 metal Inorganic materials 0.000 claims description 179
- 239000002184 metal Substances 0.000 claims description 179
- 229910052763 palladium Inorganic materials 0.000 claims description 118
- 239000000758 substrate Substances 0.000 claims description 100
- 150000003839 salts Chemical class 0.000 claims description 87
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims description 86
- 235000011007 phosphoric acid Nutrition 0.000 claims description 59
- 239000006061 abrasive grain Substances 0.000 claims description 49
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims description 43
- NSPMIYGKQJPBQR-UHFFFAOYSA-N 4H-1,2,4-triazole Chemical compound C=1N=CNN=1 NSPMIYGKQJPBQR-UHFFFAOYSA-N 0.000 claims description 40
- 239000007800 oxidant agent Substances 0.000 claims description 38
- 239000004744 fabric Substances 0.000 claims description 27
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 19
- 150000003016 phosphoric acids Chemical class 0.000 claims description 17
- 229910021645 metal ion Inorganic materials 0.000 claims description 15
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims description 14
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 12
- KHIWWQKSHDUIBK-UHFFFAOYSA-N periodic acid Chemical compound OI(=O)(=O)=O KHIWWQKSHDUIBK-UHFFFAOYSA-N 0.000 claims description 11
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 10
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 10
- 239000000377 silicon dioxide Substances 0.000 claims description 7
- SXDBWCPKPHAZSM-UHFFFAOYSA-M bromate Inorganic materials [O-]Br(=O)=O SXDBWCPKPHAZSM-UHFFFAOYSA-M 0.000 claims description 6
- SXDBWCPKPHAZSM-UHFFFAOYSA-N bromic acid Chemical compound OBr(=O)=O SXDBWCPKPHAZSM-UHFFFAOYSA-N 0.000 claims description 6
- ICIWUVCWSCSTAQ-UHFFFAOYSA-M iodate Chemical compound [O-]I(=O)=O ICIWUVCWSCSTAQ-UHFFFAOYSA-M 0.000 claims description 6
- JRKICGRDRMAZLK-UHFFFAOYSA-L peroxydisulfate Chemical compound [O-]S(=O)(=O)OOS([O-])(=O)=O JRKICGRDRMAZLK-UHFFFAOYSA-L 0.000 claims description 6
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 claims description 5
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 claims description 5
- ACVYVLVWPXVTIT-UHFFFAOYSA-N phosphinic acid Chemical compound O[PH2]=O ACVYVLVWPXVTIT-UHFFFAOYSA-N 0.000 claims description 4
- ISIJQEHRDSCQIU-UHFFFAOYSA-N tert-butyl 2,7-diazaspiro[4.5]decane-7-carboxylate Chemical compound C1N(C(=O)OC(C)(C)C)CCCC11CNCC1 ISIJQEHRDSCQIU-UHFFFAOYSA-N 0.000 claims description 4
- TVZISJTYELEYPI-UHFFFAOYSA-N hypodiphosphoric acid Chemical compound OP(O)(=O)P(O)(O)=O TVZISJTYELEYPI-UHFFFAOYSA-N 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 301
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 80
- 229910052759 nickel Inorganic materials 0.000 description 40
- 230000004888 barrier function Effects 0.000 description 34
- 239000010953 base metal Substances 0.000 description 31
- 230000000052 comparative effect Effects 0.000 description 28
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 22
- 229910052710 silicon Inorganic materials 0.000 description 22
- 239000010703 silicon Substances 0.000 description 22
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 21
- 229910044991 metal oxide Inorganic materials 0.000 description 20
- 150000004706 metal oxides Chemical class 0.000 description 20
- -1 nitrogen-containing heterocyclic compound Chemical class 0.000 description 20
- 239000008139 complexing agent Substances 0.000 description 19
- 238000002360 preparation method Methods 0.000 description 18
- 239000003795 chemical substances by application Substances 0.000 description 16
- 150000001875 compounds Chemical class 0.000 description 16
- 239000002253 acid Substances 0.000 description 15
- 229910017052 cobalt Inorganic materials 0.000 description 13
- 239000010941 cobalt Substances 0.000 description 13
- 229910052707 ruthenium Inorganic materials 0.000 description 13
- 229920003169 water-soluble polymer Polymers 0.000 description 13
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 12
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 11
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 11
- 229910052719 titanium Inorganic materials 0.000 description 11
- 239000010936 titanium Substances 0.000 description 11
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 10
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 9
- 229910052782 aluminium Inorganic materials 0.000 description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 9
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 9
- 239000004065 semiconductor Substances 0.000 description 9
- 229910052725 zinc Inorganic materials 0.000 description 9
- 239000011701 zinc Substances 0.000 description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 8
- 229920001577 copolymer Polymers 0.000 description 8
- 239000002245 particle Substances 0.000 description 8
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 8
- 229920002125 Sokalan® Polymers 0.000 description 7
- 229910052802 copper Inorganic materials 0.000 description 7
- 239000010949 copper Substances 0.000 description 7
- 150000002739 metals Chemical class 0.000 description 7
- 239000000178 monomer Substances 0.000 description 7
- 239000004584 polyacrylic acid Substances 0.000 description 7
- 239000011164 primary particle Substances 0.000 description 7
- 239000002904 solvent Substances 0.000 description 7
- 229910052715 tantalum Inorganic materials 0.000 description 7
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 7
- 230000002776 aggregation Effects 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 6
- 239000007853 buffer solution Substances 0.000 description 6
- XTVVROIMIGLXTD-UHFFFAOYSA-N copper(II) nitrate Chemical compound [Cu+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O XTVVROIMIGLXTD-UHFFFAOYSA-N 0.000 description 6
- CHPZKNULDCNCBW-UHFFFAOYSA-N gallium nitrate Chemical compound [Ga+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O CHPZKNULDCNCBW-UHFFFAOYSA-N 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 239000011163 secondary particle Substances 0.000 description 6
- SQGYOTSLMSWVJD-UHFFFAOYSA-N silver(1+) nitrate Chemical compound [Ag+].[O-]N(=O)=O SQGYOTSLMSWVJD-UHFFFAOYSA-N 0.000 description 6
- 238000004220 aggregation Methods 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 5
- 239000000956 alloy Substances 0.000 description 5
- 150000003863 ammonium salts Chemical class 0.000 description 5
- 150000001768 cations Chemical class 0.000 description 5
- 229910052742 iron Inorganic materials 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 5
- 238000007790 scraping Methods 0.000 description 5
- 229910052709 silver Inorganic materials 0.000 description 5
- 239000004332 silver Substances 0.000 description 5
- 238000003860 storage Methods 0.000 description 5
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 4
- 229910001252 Pd alloy Inorganic materials 0.000 description 4
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 4
- 230000009471 action Effects 0.000 description 4
- 239000008119 colloidal silica Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 229910052733 gallium Inorganic materials 0.000 description 4
- 238000000227 grinding Methods 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 229910052697 platinum Inorganic materials 0.000 description 4
- 230000007261 regionalization Effects 0.000 description 4
- 159000000000 sodium salts Chemical class 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- ONDPHDOFVYQSGI-UHFFFAOYSA-N zinc nitrate Chemical compound [Zn+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O ONDPHDOFVYQSGI-UHFFFAOYSA-N 0.000 description 4
- NWONKYPBYAMBJT-UHFFFAOYSA-L zinc sulfate Chemical compound [Zn+2].[O-]S([O-])(=O)=O NWONKYPBYAMBJT-UHFFFAOYSA-L 0.000 description 4
- 229910000368 zinc sulfate Inorganic materials 0.000 description 4
- 229960001763 zinc sulfate Drugs 0.000 description 4
- KLSJWNVTNUYHDU-UHFFFAOYSA-N Amitrole Chemical compound NC1=NC=NN1 KLSJWNVTNUYHDU-UHFFFAOYSA-N 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- 229910019142 PO4 Inorganic materials 0.000 description 3
- 229920002845 Poly(methacrylic acid) Polymers 0.000 description 3
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 3
- ZOIORXHNWRGPMV-UHFFFAOYSA-N acetic acid;zinc Chemical compound [Zn].CC(O)=O.CC(O)=O ZOIORXHNWRGPMV-UHFFFAOYSA-N 0.000 description 3
- DIZPMCHEQGEION-UHFFFAOYSA-H aluminium sulfate (anhydrous) Chemical compound [Al+3].[Al+3].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O DIZPMCHEQGEION-UHFFFAOYSA-H 0.000 description 3
- FOJJCOHOLNJIHE-UHFFFAOYSA-N aluminum;azane Chemical compound N.[Al+3] FOJJCOHOLNJIHE-UHFFFAOYSA-N 0.000 description 3
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 3
- 238000010790 dilution Methods 0.000 description 3
- 239000012895 dilution Substances 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 229940044658 gallium nitrate Drugs 0.000 description 3
- 239000000499 gel Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 229920001519 homopolymer Polymers 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
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- 230000007935 neutral effect Effects 0.000 description 3
- 150000007524 organic acids Chemical class 0.000 description 3
- 230000001590 oxidative effect Effects 0.000 description 3
- 239000010452 phosphate Substances 0.000 description 3
- 229920005575 poly(amic acid) Polymers 0.000 description 3
- GRLPQNLYRHEGIJ-UHFFFAOYSA-J potassium aluminium sulfate Chemical compound [Al+3].[K+].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O GRLPQNLYRHEGIJ-UHFFFAOYSA-J 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 229910001961 silver nitrate Inorganic materials 0.000 description 3
- VXYADVIJALMOEQ-UHFFFAOYSA-K tris(lactato)aluminium Chemical compound CC(O)C(=O)O[Al](OC(=O)C(C)O)OC(=O)C(C)O VXYADVIJALMOEQ-UHFFFAOYSA-K 0.000 description 3
- 239000004246 zinc acetate Substances 0.000 description 3
- BNGXYYYYKUGPPF-UHFFFAOYSA-M (3-methylphenyl)methyl-triphenylphosphanium;chloride Chemical compound [Cl-].CC1=CC=CC(C[P+](C=2C=CC=CC=2)(C=2C=CC=CC=2)C=2C=CC=CC=2)=C1 BNGXYYYYKUGPPF-UHFFFAOYSA-M 0.000 description 2
- QWENRTYMTSOGBR-UHFFFAOYSA-N 1H-1,2,3-Triazole Chemical compound C=1C=NNN=1 QWENRTYMTSOGBR-UHFFFAOYSA-N 0.000 description 2
- GIXFALHDORQSOQ-UHFFFAOYSA-N 2,4,6,8-tetrahydroxy-1,3,5,7,2$l^{5},4$l^{5},6$l^{5},8$l^{5}-tetraoxatetraphosphocane 2,4,6,8-tetraoxide Chemical compound OP1(=O)OP(O)(=O)OP(O)(=O)OP(O)(=O)O1 GIXFALHDORQSOQ-UHFFFAOYSA-N 0.000 description 2
- LPZOCVVDSHQFST-UHFFFAOYSA-N 2-[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]-3-ethylpyrazol-1-yl]-1-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethanone Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C=1C(=NN(C=1)CC(=O)N1CC2=C(CC1)NN=N2)CC LPZOCVVDSHQFST-UHFFFAOYSA-N 0.000 description 2
- WPTCSQBWLUUYDV-UHFFFAOYSA-N 2-quinolin-2-ylquinoline Chemical compound C1=CC=CC2=NC(C3=NC4=CC=CC=C4C=C3)=CC=C21 WPTCSQBWLUUYDV-UHFFFAOYSA-N 0.000 description 2
- KFJDQPJLANOOOB-UHFFFAOYSA-N 2h-benzotriazole-4-carboxylic acid Chemical compound OC(=O)C1=CC=CC2=NNN=C12 KFJDQPJLANOOOB-UHFFFAOYSA-N 0.000 description 2
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 229910000531 Co alloy Inorganic materials 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 2
- 229910000929 Ru alloy Inorganic materials 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 229910001362 Ta alloys Inorganic materials 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- 229910001069 Ti alloy Inorganic materials 0.000 description 2
- 150000007513 acids Chemical class 0.000 description 2
- 229910052783 alkali metal Inorganic materials 0.000 description 2
- 150000001340 alkali metals Chemical class 0.000 description 2
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 2
- 150000001342 alkaline earth metals Chemical class 0.000 description 2
- 229940037003 alum Drugs 0.000 description 2
- VSCWAEJMTAWNJL-UHFFFAOYSA-K aluminium trichloride Chemical compound Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 description 2
- 150000001450 anions Chemical class 0.000 description 2
- 229910052788 barium Inorganic materials 0.000 description 2
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 2
- IOJUPLGTWVMSFF-UHFFFAOYSA-N benzothiazole Chemical compound C1=CC=C2SC=NC2=C1 IOJUPLGTWVMSFF-UHFFFAOYSA-N 0.000 description 2
- 229910052791 calcium Inorganic materials 0.000 description 2
- 239000011575 calcium Substances 0.000 description 2
- 150000001735 carboxylic acids Chemical class 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 150000001869 cobalt compounds Chemical class 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- YEOCHZFPBYUXMC-UHFFFAOYSA-L copper benzoate Chemical compound [Cu+2].[O-]C(=O)C1=CC=CC=C1.[O-]C(=O)C1=CC=CC=C1 YEOCHZFPBYUXMC-UHFFFAOYSA-L 0.000 description 2
- 229910000365 copper sulfate Inorganic materials 0.000 description 2
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- 238000005227 gel permeation chromatography Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 150000004820 halides Chemical class 0.000 description 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 2
- 150000002466 imines Chemical class 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 2
- BAUYGSIQEAFULO-UHFFFAOYSA-L iron(2+) sulfate (anhydrous) Chemical compound [Fe+2].[O-]S([O-])(=O)=O BAUYGSIQEAFULO-UHFFFAOYSA-L 0.000 description 2
- MVFCKEFYUDZOCX-UHFFFAOYSA-N iron(2+);dinitrate Chemical compound [Fe+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O MVFCKEFYUDZOCX-UHFFFAOYSA-N 0.000 description 2
- VCJMYUPGQJHHFU-UHFFFAOYSA-N iron(3+);trinitrate Chemical compound [Fe+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O VCJMYUPGQJHHFU-UHFFFAOYSA-N 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 229910001463 metal phosphate Inorganic materials 0.000 description 2
- IYRGXJIJGHOCFS-UHFFFAOYSA-N neocuproine Chemical compound C1=C(C)N=C2C3=NC(C)=CC=C3C=CC2=C1 IYRGXJIJGHOCFS-UHFFFAOYSA-N 0.000 description 2
- 229910000510 noble metal Inorganic materials 0.000 description 2
- XNGIFLGASWRNHJ-UHFFFAOYSA-L phthalate(2-) Chemical compound [O-]C(=O)C1=CC=CC=C1C([O-])=O XNGIFLGASWRNHJ-UHFFFAOYSA-L 0.000 description 2
- 229920000570 polyether Polymers 0.000 description 2
- KVOIJEARBNBHHP-UHFFFAOYSA-N potassium;oxido(oxo)alumane Chemical compound [K+].[O-][Al]=O KVOIJEARBNBHHP-UHFFFAOYSA-N 0.000 description 2
- 239000010970 precious metal Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 150000003304 ruthenium compounds Chemical class 0.000 description 2
- 238000004062 sedimentation Methods 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 229910052712 strontium Inorganic materials 0.000 description 2
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 2
- 150000003482 tantalum compounds Chemical class 0.000 description 2
- AWDBHOZBRXWRKS-UHFFFAOYSA-N tetrapotassium;iron(6+);hexacyanide Chemical compound [K+].[K+].[K+].[K+].[Fe+6].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-] AWDBHOZBRXWRKS-UHFFFAOYSA-N 0.000 description 2
- 150000003609 titanium compounds Chemical class 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 229920002554 vinyl polymer Polymers 0.000 description 2
- JIAARYAFYJHUJI-UHFFFAOYSA-L zinc dichloride Chemical compound [Cl-].[Cl-].[Zn+2] JIAARYAFYJHUJI-UHFFFAOYSA-L 0.000 description 2
- AYWSZYFQXSLSFY-UHFFFAOYSA-N 1,2-dihydrotriazine-5,6-dithione Chemical compound SC1=CN=NN=C1S AYWSZYFQXSLSFY-UHFFFAOYSA-N 0.000 description 1
- MTJWENBBFKEQMK-UHFFFAOYSA-N 1,3-dihydro-1,2,4-triazol-2-amine Chemical compound NN1CN=CN1 MTJWENBBFKEQMK-UHFFFAOYSA-N 0.000 description 1
- YHMYGUUIMTVXNW-UHFFFAOYSA-N 1,3-dihydrobenzimidazole-2-thione Chemical compound C1=CC=C2NC(S)=NC2=C1 YHMYGUUIMTVXNW-UHFFFAOYSA-N 0.000 description 1
- UOFGSWVZMUXXIY-UHFFFAOYSA-N 1,5-Diphenyl-3-thiocarbazone Chemical compound C=1C=CC=CC=1N=NC(=S)NNC1=CC=CC=C1 UOFGSWVZMUXXIY-UHFFFAOYSA-N 0.000 description 1
- XIOUDVJTOYVRTB-UHFFFAOYSA-N 1-(1-adamantyl)-3-aminothiourea Chemical compound C1C(C2)CC3CC2CC1(NC(=S)NN)C3 XIOUDVJTOYVRTB-UHFFFAOYSA-N 0.000 description 1
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- 150000003464 sulfur compounds Chemical class 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 150000003536 tetrazoles Chemical class 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- CDMIYIVDILNBIJ-UHFFFAOYSA-N triazinane-4,5,6-trithione Chemical compound SC1=NN=NC(S)=C1S CDMIYIVDILNBIJ-UHFFFAOYSA-N 0.000 description 1
- UNXRWKVEANCORM-UHFFFAOYSA-N triphosphoric acid Chemical compound OP(O)(=O)OP(O)(=O)OP(O)(O)=O UNXRWKVEANCORM-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 150000003658 tungsten compounds Chemical class 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- GPPXJZIENCGNKB-UHFFFAOYSA-N vanadium Chemical compound [V]#[V] GPPXJZIENCGNKB-UHFFFAOYSA-N 0.000 description 1
- 229960000314 zinc acetate Drugs 0.000 description 1
- 239000011592 zinc chloride Substances 0.000 description 1
- 235000005074 zinc chloride Nutrition 0.000 description 1
- 239000011576 zinc lactate Substances 0.000 description 1
- 229940050168 zinc lactate Drugs 0.000 description 1
- 235000000193 zinc lactate Nutrition 0.000 description 1
- LRXTYHSAJDENHV-UHFFFAOYSA-H zinc phosphate Chemical compound [Zn+2].[Zn+2].[Zn+2].[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O LRXTYHSAJDENHV-UHFFFAOYSA-H 0.000 description 1
- 229910000165 zinc phosphate Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Images
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/32115—Planarisation
- H01L21/3212—Planarisation by chemical mechanical polishing [CMP]
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
- B24B37/044—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor characterised by the composition of the lapping agent
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- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1409—Abrasive particles per se
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
- C09K3/1463—Aqueous liquid suspensions
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30625—With simultaneous mechanical treatment, e.g. mechanico-chemical polishing
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
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- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
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- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
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Description
金属塩は、第8、11、12及び13族からなる群より選択される少なくとも一種の金属を含む金属塩である。金属塩としては、第8及び13族からなる群より選択される少なくとも一種の金属を含む金属塩が好ましい。また、これらの金属塩は水和物であっても構わない。金属塩はCMP研磨液中で電離し、金属イオンを生じ、これがパラジウム層、ニッケル層の研磨速度を向上させる効果を有する。このため、金属塩はCMP研磨液に溶解していることが好ましい。
CMP研磨液は、錯化剤として1,2,4−トリアゾールを含有する。錯化剤は、金属に配位し錯体を形成することができる物質である。1,2,4−トリアゾールは、後述するリン酸類と共に、パラジウムに対して錯体を形成すると考えられ、ここで形成された錯体が研磨されやすいために良好な研磨速度が得られるものと推定される。また、含窒素化合物であればパラジウムと錯体を形成できると考えられるが、本発明者らの検討によれば、1,2,4−トリアゾール以外の化合物では、パラジウム層に対する研磨速度を向上させることはできない。例えば、1,2,4−トリアゾールに代えて、構造の類似する1,2,3−トリアゾールや、3−アミノ−1,2,4−トリアゾールを使用しても、パラジウム層に対する良好な研磨速度を得ることは難しい。
CMP研磨液は、リン酸類を含有する。リン酸類は、後述する酸化剤によって酸化された金属を、錯化及び/又は溶解することによって金属層の研磨を促進すると考えられ、パラジウムに対する酸化金属溶解剤としての機能を有するものと推定される。
CMP研磨液に含まれる酸化剤は、基体に層を形成する等のために用いられる金属に対する酸化剤である。酸化剤としては、金属を酸化しうる酸化剤として知られているものが使用できる。酸化剤としては、具体的には、過酸化水素(H2O2)、過ヨウ素酸、過ヨウ素酸塩、ヨウ素酸塩、臭素酸塩及び過硫酸塩からなる群より選択される少なくとも一種が好ましく、その中でも過酸化水素が更に良好な研磨速度が得られる点でより好ましい。過ヨウ素酸塩、ヨウ素酸塩、臭素酸塩及び過硫酸塩としては、アンモニウム塩、カリウム塩が挙げられる。これらの酸化剤は、1種類を単独で又は2種類以上混合して用いることができる。
砥粒としては、具体的には、ヒュームドシリカ、コロイダルシリカ等のシリカ、ヒュームドアルミナ、遷移アルミナ等のアルミナ、ジルコニア、チタニア、セリアなどが挙げられ、中でもアルミナ及びシリカが好ましく、研磨速度を高速に保ちながら研磨傷の発生を抑制できる点で、シリカがより好ましく、コロイダルシリカが更に好ましい。これらの砥粒は、1種類を単独で又は2種類以上混合して用いることができる。
D1=6/(ρ×V) ・・・(1)
式(1)において、D1は平均一次粒子径(単位:m)、ρは粒子の密度(単位:kg/m3)、Vは粒子のBET比表面積(単位:m2/g)を示す。
D1=2.727×10−6/V (m)
=2727/V (nm) ・・・(2)
CMP研磨液は、金属防食剤を更に含有することもできる。金属防食剤は、金属層のエッチングを抑止し、ディッシングに対する特性を向上させる化合物である。
CMP研磨液は、研磨後の平坦性を向上できる点で、水溶性ポリマを更に含有することができる。前記の観点から、水溶性ポリマの重量平均分子量は、500以上であることが好ましく、1500以上であることがより好ましく、5000以上であることが更に好ましい。水溶性ポリマの重量平均分子量は、特に制限されないが、優れた溶解性の観点から、500万以下が好ましい。一方、重量平均分子量が500未満では、高い研磨速度が発現しにくい傾向にある。
使用機器:日立L−6000型〔株式会社日立製作所製〕
カラム:ゲルパックGL−R420+ゲルパックGL−R430+ゲルパックGL−R440〔日立化成工業株式会社製 計3本〕
溶離液:テトラヒドロフラン
測定温度:40℃
流量:1.75ml/min.
検出器:L−3300RI〔株式会社日立製作所製〕
CMP研磨液は、水を含むことができる。水としては、特に制限されないが、脱イオン水、イオン交換水、超純水等が好ましい。CMP研磨液における水の含有量は、上記含有成分の含有量の残部でよい。なお、CMP研磨液は、必要に応じて水以外の溶媒、例えばエタノール、グリコール、アセトン、エステル等の極性溶媒等を更に含有してもよい。
CMP研磨液のpHは、パラジウム層のCMP研磨速度を更に向上させることができるという観点から、1以上12以下であることが好ましい。所定のCMP研磨速度を確保できる傾向があり、更に実用的なCMP研磨液となり得ることから、CMP研磨液のpHの上限は、6以下であることがより好ましく、5以下であることが更に好ましく、4以下であることが極めて好ましく、3未満であることが特に好ましい。
上述した各成分を組み合わせて含有するCMP研磨液は、例えば、(A)通常タイプ、(B)濃縮タイプ、及び(C)2液タイプに分類でき、タイプによってそれぞれ調製法及び使用法が相違する。(A)通常タイプは、研磨時に希釈等の前処理をせずに酸化剤を添加するだけでそのまま使用できる研磨液である。(B)濃縮タイプは、保管や輸送の利便性を考慮し、(A)通常タイプと比較して含有成分を濃縮した研磨液である。(C)2液タイプは、保管時や輸送時には一定の成分を含む液Aと、他の成分を含む液Bとに分けた状態としておき、使用に際してこれらの液A及び液Bを混合して使用する研磨液である。
以上説明したCMP研磨液を用いることで、基板の研磨が可能となる。すなわち、本実施形態の研磨方法は、パラジウム層を有する基板の当該パラジウム層側に研磨布を対向配置し、パラジウム層と研磨布との間にCMP研磨液を供給しながら、少なくともパラジウム層を研磨布で研磨する工程を備える。本実施形態の研磨方法は、パラジウム層を研磨する工程を備えていればよく、パラジウム層と共にニッケル層や下地金属層を同時に研磨してもよく、パラジウム層とニッケル層や下地金属層とを逐次的に研磨してもよい。パラジウム層と共にニッケル層や下地金属層を同時に研磨する場合には、パラジウム層と共にニッケル層や下地金属層が被研磨面に露出していればよい。
(CMP研磨液作製方法)
実施例1〜15及び比較例1〜15で用いるCMP研磨液は、CMP研磨液の全質量基準で、砥粒としてコロイダルシリカ(平均一次粒子径15nm、平均二次粒子径43nm、固形分(砥粒含有量に相当)20質量%:扶桑化学工業株式会社製 PL−3[商品名])を10質量%、金属塩として表1,2に示す化合物を0〜0.088質量%(金属分として50ppm。なお、ppmとは質量比である。以下同じ。)、酸化金属溶解剤として表1,2に示す化合物を0〜5質量%、錯化剤として表1,2に示す化合物を0〜0.5質量%、酸化剤として30%過酸化水素水を10質量%、残部に純水を含有するように調製した。砥粒以外の含有成分を純水に溶解し、ここに砥粒を混合、撹拌してCMP研磨液を調製した。これらのCMP研磨液を用いて下記の研磨条件で被研磨基板の研磨を行った。
測定温度:25±5℃
測定装置:電気化学計器株式会社製、型番PHL−40
測定方法:標準緩衝液(フタル酸塩pH緩衝液、pH:4.01(25℃);中性りん酸塩pH緩衝液、pH6.86(25℃))を用いて2点校正した後、電極を研磨液に入れて、2分以上経過して安定した後のpHを上記測定装置により測定した。
研磨装置:Mirra(APPLIED MATERIALS社製)
CMP研磨液流量:200mL/分
被研磨基板:厚さ0.3μmのパラジウム層をシリコン基板上にスパッタ法で形成した基板
研磨布:独立気泡を持つ発泡ポリウレタン樹脂(ローム・アンド・ハース・ジャパン株式会社製、型番IC1000)
研磨圧力:29.4kPa(4psi)
基板と研磨定盤との相対速度:36m/分
研磨時間:1分
洗浄:CMP処理後、超音波水による洗浄を行った後、スピンドライヤで乾燥させた。
研磨速度:前記条件で研磨及び洗浄したパラジウム層の研磨速度(パラジウム研磨速度:PdRR)を次式より求めた。
(PdRR)=(研磨前後でのパラジウム層の膜厚差(nm))/(研磨時間(分))
研磨前後でのパラジウム層の膜厚差は、パラジウム層の電気抵抗値から換算して求めた。
実施例7、実施例11及び比較例11で使用したCMP研磨液を用いて下記所定の基板を研磨し、本発明の研磨液がパラジウム以外の金属を研磨できることを確認した。被研磨基板を下記の各基板に変えた以外は実験1と同様にして研磨を行い、研磨速度を求めた。
タンタル基板:厚さ0.3μmの窒化タンタル層をシリコン基板上に形成した基板
チタン基板:厚さ0.3μmのチタン層をシリコン基板上に形成した基板
コバルト基板:厚さ0.3μmのコバルト層をシリコン基板上に形成した基板
ルテニウム基板:厚さ0.3μmのルテニウム層をシリコン基板上に形成した基板
Claims (9)
- 第8、11、12及び13族からなる群より選択される少なくとも一種の金属を含む金属塩と、1,2,4−トリアゾールと、リン酸類と、酸化剤と、砥粒とを含有し、
前記リン酸類が、リン酸、次リン酸、亜リン酸及び次亜リン酸並びにこれらの縮合体、及び、これらの塩からなる群より選ばれる少なくとも一種であり、
前記金属塩の含有量が、金属イオンがCMP研磨液1kgにつき2×10 −4 mol以上となる量である、CMP研磨液。 - 前記酸化剤として過酸化水素、過ヨウ素酸、過ヨウ素酸塩、ヨウ素酸塩、臭素酸塩及び過硫酸塩からなる群より選択される少なくとも一種を含有する、請求項1に記載のCMP研磨液。
- 前記砥粒が、アルミナ、シリカ、ジルコニア、チタニア及びセリアからなる群より選択される少なくとも一種を含む、請求項1又は2に記載のCMP研磨液。
- 前記砥粒の含有量がCMP研磨液の全質量基準で0.1〜10質量%である、請求項1〜3のいずれか一項に記載のCMP研磨液。
- パラジウム層を研磨するための請求項1〜4のいずれか一項に記載のCMP研磨液。
- パラジウム層を有する基板の当該パラジウム層と研磨布との間にCMP研磨液を供給しながら、少なくとも前記パラジウム層を前記研磨布で研磨する工程を備え、
前記CMP研磨液が、第8、11、12及び13族からなる群より選択される少なくとも一種の金属を含む金属塩と、1,2,4−トリアゾールと、リン酸類と、酸化剤と、砥粒とを含有し、
前記リン酸類が、リン酸、次リン酸、亜リン酸及び次亜リン酸並びにこれらの縮合体、及び、これらの塩からなる群より選ばれる少なくとも一種であり、
前記金属塩の含有量が、金属イオンがCMP研磨液1kgにつき2×10 −4 mol以上となる量である、研磨方法。 - 前記CMP研磨液が、前記酸化剤として過酸化水素、過ヨウ素酸、過ヨウ素酸塩、ヨウ素酸塩、臭素酸塩及び過硫酸塩からなる群より選択される少なくとも一種を含有する、請求項6に記載の研磨方法。
- 前記砥粒が、アルミナ、シリカ、ジルコニア、チタニア及びセリアからなる群より選択される少なくとも一種を含む、請求項6又は7に記載の研磨方法。
- 前記砥粒の含有量が前記CMP研磨液の全質量基準で0.1〜10質量%である、請求項6〜8のいずれか一項に記載の研磨方法。
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