JP5520289B2 - 前方照明（ｆｒｏｎｔｌｉｇｈｔｉｎｇ）を用いてディスプレイパネル上の欠陥の検出を向上させること - Google Patents

前方照明（ｆｒｏｎｔｌｉｇｈｔｉｎｇ）を用いてディスプレイパネル上の欠陥の検出を向上させること Download PDF

Info

Publication number
JP5520289B2
JP5520289B2 JP2011510678A JP2011510678A JP5520289B2 JP 5520289 B2 JP5520289 B2 JP 5520289B2 JP 2011510678 A JP2011510678 A JP 2011510678A JP 2011510678 A JP2011510678 A JP 2011510678A JP 5520289 B2 JP5520289 B2 JP 5520289B2
Authority
JP
Japan
Prior art keywords
light
voltage
surface illumination
defect
under test
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2011510678A
Other languages
English (en)
Japanese (ja)
Other versions
JP2011521264A (ja
Inventor
トゥート、ダニエル
ジョウンズ、ロイド
エルシャヒン、アティラ
チュン、ミョンチョル
ファム、セイヴィアー
ジュン、サム・ス
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Photon Dynamics Inc
Original Assignee
Photon Dynamics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Photon Dynamics Inc filed Critical Photon Dynamics Inc
Publication of JP2011521264A publication Critical patent/JP2011521264A/ja
Application granted granted Critical
Publication of JP5520289B2 publication Critical patent/JP5520289B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Theoretical Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • General Engineering & Computer Science (AREA)
  • Liquid Crystal (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP2011510678A 2008-05-21 2009-05-20 前方照明（ｆｒｏｎｔｌｉｇｈｔｉｎｇ）を用いてディスプレイパネル上の欠陥の検出を向上させること Active JP5520289B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US5503108P 2008-05-21 2008-05-21
US61/055,031 2008-05-21
PCT/US2009/044667 WO2009143237A1 (en) 2008-05-21 2009-05-20 Enhancement of detection of defects on display panels using front lighting

Publications (2)

Publication Number Publication Date
JP2011521264A JP2011521264A (ja) 2011-07-21
JP5520289B2 true JP5520289B2 (ja) 2014-06-11

Family

ID=41340523

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011510678A Active JP5520289B2 (ja) 2008-05-21 2009-05-20 前方照明（ｆｒｏｎｔｌｉｇｈｔｉｎｇ）を用いてディスプレイパネル上の欠陥の検出を向上させること

Country Status (5)

Country Link
JP (1) JP5520289B2 (ko)
KR (1) KR101610821B1 (ko)
CN (1) CN102037371B (ko)
TW (1) TWI497060B (ko)
WO (1) WO2009143237A1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109946589A (zh) * 2019-04-08 2019-06-28 京东方科技集团股份有限公司 一种检测显示面板电学不良的方法及装置

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8866899B2 (en) * 2011-06-07 2014-10-21 Photon Dynamics Inc. Systems and methods for defect detection using a whole raw image
TWM467880U (zh) * 2012-03-27 2013-12-11 Photon Dynamics Inc 用於對受測試電子器件進行電氣檢驗之裝置及包含電光調變器及調變器底座之電光調變器總成
KR101902500B1 (ko) * 2012-04-16 2018-10-01 삼성디스플레이 주식회사 유기 발광 표시 장치 및 그 테스트 방법
CN103940832A (zh) * 2013-01-17 2014-07-23 北京兆维电子(集团)有限责任公司 一种应用于平板显示屏自动光学检测的打光装置
KR101813784B1 (ko) 2016-02-04 2017-12-29 연세대학교 산학협력단 데이터 신호의 진폭을 이용한 광 변조기의 바이어스 제어 장치 및 방법
CN106056608A (zh) * 2016-06-01 2016-10-26 武汉精测电子技术股份有限公司 一种图像点线缺陷检测方法及装置
TWI717670B (zh) 2018-12-21 2021-02-01 財團法人工業技術研究院 發光二極體的檢測方法及檢測裝置
TWI739376B (zh) * 2019-12-13 2021-09-11 南臺學校財團法人南臺科技大學 光罩之保護膜的檢測方法及檢測系統
CN114930162A (zh) 2020-02-27 2022-08-19 深圳帧观德芯科技有限公司 相位对比成像法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3683053D1 (de) * 1986-10-23 1992-01-30 Ibm Verfahren zur kontaktfreien pruefung von platinen fuer integrierte schaltungen unter atmosphaerischen bedingungen.
US5124635A (en) * 1990-02-15 1992-06-23 Photon Dynamics, Inc. Voltage imaging system using electro-optics
AU6942998A (en) * 1997-03-31 1998-10-22 Microtherm, Llc Optical inspection module and method for detecting particles and defects on substrates in integrated process tools
KR100243134B1 (ko) * 1997-08-30 2000-02-01 윤종용 기록 재생용 광픽업 장치
JP4071331B2 (ja) * 1997-12-12 2008-04-02 フォトン・ダイナミクス・インコーポレーテッド 液晶駆動基板の検査装置及びその検査方法
US6529018B1 (en) * 1998-08-28 2003-03-04 International Business Machines Corporation Method for monitoring defects in polysilicon gates in semiconductor devices responsive to illumination by incident light
US20040076204A1 (en) * 2002-10-16 2004-04-22 Kruschwitz Brian E. External cavity organic laser
TW569479B (en) * 2002-12-20 2004-01-01 Ind Tech Res Inst White-light LED applying omnidirectional reflector
TWI281079B (en) * 2004-01-12 2007-05-11 Quanta Display Inc Method for inspecting defects on a display panel
TWI282852B (en) * 2005-10-26 2007-06-21 Chi Mei Optoelectronics Corp Detecting system for sensing a defect of a panel
TW200725015A (en) * 2005-12-21 2007-07-01 Chao-Chih Lai LCD panel defect inspection system
KR100788823B1 (ko) * 2006-01-23 2007-12-27 한국원자력연구원 표면 결함 정보 추출을 위한 레이저-초음파 검사 장치 및방법
KR20070099398A (ko) * 2006-04-03 2007-10-09 삼성전자주식회사 기판검사장치와 이를 이용한 기판검사방법
DE102006015714B4 (de) * 2006-04-04 2019-09-05 Applied Materials Gmbh Lichtunterstütztes Testen eines optoelektronischen Moduls
JP2007278928A (ja) * 2006-04-10 2007-10-25 Olympus Corp 欠陥検査装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109946589A (zh) * 2019-04-08 2019-06-28 京东方科技集团股份有限公司 一种检测显示面板电学不良的方法及装置

Also Published As

Publication number Publication date
KR101610821B1 (ko) 2016-04-20
KR20110015633A (ko) 2011-02-16
TWI497060B (zh) 2015-08-21
WO2009143237A1 (en) 2009-11-26
TW201003063A (en) 2010-01-16
CN102037371A (zh) 2011-04-27
CN102037371B (zh) 2015-11-25
JP2011521264A (ja) 2011-07-21

Similar Documents

Publication Publication Date Title
JP5520289B2 (ja) 前方照明（ｆｒｏｎｔｌｉｇｈｔｉｎｇ）を用いてディスプレイパネル上の欠陥の検出を向上させること
US8647163B2 (en) Method of manufacturing organic EL display
JP2009511898A (ja) 光導電によるトランジスタ・アレイの電気的検査
US20100237895A1 (en) System and method for characterizing solar cell conversion performance and detecting defects in a solar cell
KR101398692B1 (ko) 표시 장치의 수리 장치 및 그 방법
JP5519271B2 (ja) オプトエレクトロニックモジュールの光補助試験
EP0943951B1 (en) Optical surface inspection apparatus and inspecting method
CN108253898A (zh) 检测设备及使用该检测设备的检测方法
TWI583940B (zh) A manufacturing method of a display panel, an inspection apparatus, and a inspection method thereof
US20060267625A1 (en) Active matrix display circuit substrate, display panel including the same, inspection method thereof, and inspection device thereof
JP2010176966A (ja) 有機ｅｌ表示パネルの検査及びリペア装置
CN108982552A (zh) 光检测装置以及其操作方法
JP5045581B2 (ja) 発光装置の検査方法
JPWO2006120861A1 (ja) Ｔｆｔアレイ基板検査装置
JP2014107483A (ja) Ｏｂｉｒｃｈ検査方法及びｏｂｉｒｃｈ装置
JP3185906U (ja) 電子機器用検査装置
US7446555B2 (en) Apparatus to inspect TFT substrate and method of inspecting TFT substrate
JP2007279026A (ja) 基板検査装置とこれを用いた基板検査方法
JP2008083163A (ja) 表示デバイスの検査装置および検査方法
JP2001242041A (ja) 液晶表示パネルの評価装置及びその評価方法
JP5938692B2 (ja) 表示パネルの製造方法、その検査装置及び検査方法
KR20020034593A (ko) 전계검사장치
TW202323769A (zh) 用以改良準確缺陷位置報告之面板設計
CN117456959A (zh) 显示模组及其控制方法、显示装置
JP2010231928A (ja) 欠陥検査装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20101216

RD01 Notification of change of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7426

Effective date: 20101216

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20120425

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20130909

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20130917

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20131129

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20140311

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20140404

R150 Certificate of patent or registration of utility model

Ref document number: 5520289

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313113

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250