1282852 . 九、發明說明： 【發明所屬之技術領域】 本發明係提供-種檢導、統，尤指_觀來制面板缺陷之 檢测系統。 【先前技術】 平面顯示面板’例純晶φ域·顯示面板等⑽利用玻璃 譽基板為製造材料。在平面顯示面板的製造過程中，為了提高生產 效率’面板係_自動化的輸送裝置來搬運。而在某些特定製程 中’面板的完整與稍勤有魏A的料。糊來說，當面板 進行化學油沉積製程時’化學氣相沉積室喊滿高能量的無線 電波，若面板有缺角或破裂情形，則高能量之無線電波會產生電 弧打穿面板，並飾傷_搭_板之金職台。由於修復金屬 載台之成本相當高，且若造成停機聰失之起和麵將難以估 計。 、 …而在先别技術中，亚無—種檢測系統可以偵測面板缺陷並 予以警告或執行相對應措施，而輪細板之裝置亦無法自行侦測 面板之破片與否。因此先前技術將無法避免因面板缺陷而產生之 機台損毀或產能減少等問題。 【發明内容】 因此，本發明之主要目的，印是要提出—種酬測面板缺陷 5 1282852 題。 之檢剛系、统，以解決上述之問 技測系統包含一第—偵測器’設於相對於一面板輸送 訊f虎；一-立置’ !來於_到—面板之第—區域時產生一第一 用丈弟—偵測裔’設於相對於該面板輪送裝置之第-位置， =，到該面板之第二區域時產生一第二訊號;=制 訊號和^接於料—侧器和料二_8，料根據該第一 &該苐二訊號控制該檢測系統。 【實施方式】 凊參考第1圖，第1圖係本發明檢測系統1〇〇的示意圖。本 發明檢_統綱包含-第一觸發侧器削，一第二觸發侧器 190，—第一比對偵測器、120，一第二比對侧器、13〇，以及一控 姆置140。第-觸發偵測器11〇和第二觸發偵測器卿係分別設 於相對於一面板輸送裝置15〇之第一位置A與第二位置d，第一 比對偵測器120和第二比對偵測器13〇係分別設於相對於面板輸 送裝置150之第二位置b和第三位置c，控制裝置14〇係電連接 於第一及第二觸發偵測器110、190和第一及第二比對偵測器12〇、 130。第一及第二觸發偵測器11〇、190和第一及第二比對偵測器 120、130可於面板160通過其前方(下方)時產生訊號，而控制裝 置140可根據第一及第二觸發偵測器110、19〇和第一及第二比對 偵測器120、130產生之訊號來控制面板輸送裝置150或執行相對 應動作。 1282852 當面灰贈由面板輪送裝置⑼傳送往製程機台細進 士第—觸發偵麻19G將不動作’檢測祕觸的偵測動作 時:考第2圖至第4圖’第2圖係第4圖檢測系統⑽於面 ㈣端通過第-觸發偵測器11〇時侧面板缺陷之示意圖， 第3圖係第i圖檢測系統卿於面板_過第一觸發偵測請 和第二及第二比對侧器12〇、13〇時制面板缺陷之示意圖，第 4圖係第1圖檢測系統1〇〇於面板16〇後端通過第一觸發偵測器 110時偵測面板缺陷之示意圖。如圖所示，當面板10〇前端通過第 -觸發制器110下方時’第一觸發偵測器110會因侧到面板 160之中間而產生一觸發訊號。而當面板】6〇前端通過第一比對债 測器120和第二比對偵測器13〇下方時，第一比對_器12〇和 第二比對偵測器13〇會分別因偵測到面板16〇之邊緣而產生一第 一比對訊號和一第二比對訊號。由於面板16〇破裂大部分係發生 於面板160之邊緣’而發生於面板16〇中間之機率相當小，因此 控制裝置140係以觸發訊號為比較基準來比對第一比對訊號和第 二比對訊號。若面板160邊緣有破裂，則第一比對偵測器12〇或 第二比對偵測器130偵測面板160邊緣所產生的第一比對訊號或 弟一比對5孔说會改變’而與第一觸發偵測器no摘測面板160中 央所得到的觸發訊號不同，因此當控制裝置140發現此不同情況 發生時，則代表面板160邊緣可能有破裂。 然而，第一觸發偵測器110係設於第一比對偵測器120和第 7 1282852 二比對偵測器130之前方，因此當第一觸發偵測器110開始偵測 到面板160中間而產生觸發訊號時，第一比對偵測器120和第二 比對偵測器130會有一段時間因面板160尚未通過而無法產生第 一比對訊號和第二比對訊號。故控制裝置140會於接收到觸發訊 號時經過一前延遲時間(front delay time)後，才開始比對第一比對 訊號和第二比對訊號。相似地，當第一觸發偵測器110停止偵測 到面板160中間而無法傳送觸發訊號至控制裝置14〇時，第一比 對偵測器120和第二比對偵測器130會有一段時間因面板16〇尚 未離開偵測範圍而持續產生第一比對訊號和第二比對訊號。故控 制裝置140會於停止接收到觸發訊號時經過一後延遲時間(back delay time)後’才停止比對第一比對訊號和第二比對訊號，在後延 遲日守間内’即使觸發訊號已不存在，若第一比對訊號或第二比對 訊號有改變仍代表面板160邊緣可能有破裂。 相對地，當面板由製程機台200往面板輸送裝置端傳送時， 第一觸發偵測器110將不動作，而控制裝置140比對第二觸發偵 測器190的觸發訊號與第一及第二比對偵測器12〇、13〇的比對訊 號是否不同，以此結果判斷面板邊緣是否有破裂。 虽發現面板160邊緣可能有破裂時(亦即第一比對訊號或第二 比對訊號細發職不同），鋪裝置⑽會產生—控制訊號以執 行相對應動作’例如停止面板輸送裝置15G輪送面板謂，觸發一 蜂鳴器⑽發出警示聲音，或者觸發—警示㈣〇等等。如此面 !282852 : 板製程可於發現破片後即時停止，或者工程師可於發現問題時立 即排解以避免製程機台受損。 在第1圖的實施例中，第一與第二觸發偵測器110、190係設 於第一比對偵測器120和第二比對偵測器130之兩側，然而觸發 偵測器亦可和第一及第二比對偵測器120、130設於同一直線上。 請參考第5圖，第5圖係本發明另一檢測系統500的示意圖。由 響 於觸發偵測器51〇係和第一及第二比對偵測器520、530設於同一 直線上，因此控制裝置540可於接收到觸發訊號時立即比對第一 比對訊號和第二比對訊號。然而，若面板16〇於輸送過程中務微 歪斜，則觸發訊號、第一比對訊號和第二比對訊號之產生時間會 不一致，因此，除非提高輸送面板160時之精準度，否則極容易 造成檢測系統500的誤判。 另外’為了準確偵測面板160之缺陷並避免誤判，本發明檢 _ 測系統100可於事先經多次測試後再決定前延遲時間和後延遲時 間。舉例來說，檢測系統1〇〇可事先對十個面板進行债測以得到 觸發訊號和第一及第二比對訊號之產生時間之十個時間差，比較 後以其中最大值為第一量測值。檢測系統100亦可對十個面板進 行债測以得到觸發訊號和第一及第二比對訊號之消失時間之十個 時間差，比較後以其中最小值為第二量測值。前延遲時間之設定 必須大於第一量測值，而後延遲時間之設定必須小於第二量測 值，如此才不會造成誤判，測試越多面板可得到更精確之設定。 9 1282852 ..職遲_若输近第—量難麻板前方無法細到 之區域越 .、J她地’後延遲時間若越接近第二量測值則面板後方無法偵 測到之區域亦越小。 為增加姻面板缺陷的準確性，檢測系統1〇〇、的比對摘 測，數目亦可增加，並不只限於上述兩個，以上只以兩個比_ 測器為例方便說明，此外，觸發偵測器與比對偵測器的位置皆可 馨作調整以達到最佳的面板缺陷铜率，只要比對债測器的位置靠 近面板邊緣’而觸發偵測器則麵面板較不易發生缺陷的位置。 綜合以上所述，本發明提供一種用來偵測面板缺陷之檢測系 、、充100 500 ’檢測系統1〇〇、500可搭配面板輸送裝置來偵測 面板缺陷，當發面板160破片時’檢測系統1〇〇、5〇〇可執行相對 應動作例如停止面板輸送裝置150輸送面板，觸發一蜂鳴器 180發出警示聲音，或者觸發一警示燈17〇等等。 相杈於先前技術，本發明檢測系統1〇〇、5〇〇可用來於面板之 輸达過程中偵測面板缺陷，當發現面板有缺陷時，檢測系統⑽、 500 了立即停止面板製程，並通知工程師即時排解問題以避免製程 機台受損，相對地減少製程上的風險及成本，並進一步增加產能。 以上所述僅為本發明之較佳實施例，凡依本發明申請專利範 圍所做之均等變化與修飾，皆應屬本發明之涵蓋範圍。 1282852 【圖式簡單說明】 第1圖為本發明檢測系統的示意圖。 第2圖為第1圖檢測系統於面板前端通過第一觸發偵測器時 偵測面板缺陷之示意圖。 第3圖為第1圖檢測系統於面板通過第一觸發偵測器和第一 及第二比對偵測器時偵測面板缺陷之示意圖。 第4圖為第1圖檢測系統於面板後端通過第一觸發偵測器時 _ 偵測面板缺陷之示意圖。 第5圖為本發明另一檢測系統的示意圖。 【主要元件符號說明】 100, 500 檢測系統 120, 520 第一比對偵測器 140, 540 控制裝置 160 面板 180 蜂鳴器 200 製程機台 110,510 第一觸發偵测器 130, 530 第二比對谓測器 150 面板輸送裳置 170 警示燈 190 第二觸發偵測器 111282852 . Nine inventions: [Technical field to which the invention pertains] The present invention provides a detection system for a panel defect, in particular, a panel defect. [Prior Art] A flat display panel 'an example of a pure crystal φ domain·display panel or the like (10) is made of a glass substrate. In the manufacturing process of the flat display panel, in order to improve the production efficiency, the panel system is automated. In some specific processes, the panel is complete and slightly awaits Wei A. For the paste, when the panel is subjected to the chemical oil deposition process, the chemical vapor deposition chamber is full of high-energy radio waves. If the panel has a corner or crack, the high-energy radio waves will generate an arc through the panel and be decorated. Injury _ take _ plate of gold posts. The cost of repairing the metal stage is quite high, and it will be difficult to estimate if the downtime is lost. In the prior art, the sub-none detection system can detect panel defects and warn or perform corresponding measures, and the device of the thin plate cannot detect the fragmentation of the panel by itself. Therefore, the prior art will not be able to avoid problems such as damage to the machine or reduction in capacity due to panel defects. SUMMARY OF THE INVENTION Therefore, the main object of the present invention is to propose a compensation panel defect 5 1282852. The inspection system and the system to solve the above-mentioned technical test system include a first-detector set to transmit information relative to a panel; a-stand-up'! When the first use of the brother-detector is set in the first position relative to the panel of the panel, =, to the second area of the panel to generate a second signal; = signal and ^ connected The material-side device and the material _8 are controlled according to the first & the second signal. [Embodiment] Referring to Fig. 1, a first diagram is a schematic view of a detection system of the present invention. The invention includes a first trigger side device, a second trigger side device 190, a first comparison detector, 120, a second comparison side device, 13 〇, and a control device. 140. The first trigger detector 11 and the second trigger detector are respectively disposed at a first position A and a second position d relative to a panel transport device 15, the first comparison detector 120 and the second The comparison detectors 13 are respectively disposed at a second position b and a third position c relative to the panel transport device 150, and the control device 14 is electrically connected to the first and second trigger detectors 110, 190 and The first and second alignment detectors 12, 130. The first and second trigger detectors 11A, 190 and the first and second alignment detectors 120, 130 can generate signals when the panel 160 passes forward (downward) thereof, and the control device 140 can be based on the first The second trigger detectors 110, 19A and the first and second ratio detectors 120, 130 generate signals to control the panel transport device 150 or perform corresponding actions. 1282852 When the face gray gift is sent by the panel transfer device (9) to the process machine, the fine entry of the machine - triggering the detection of the hemp 19G will not operate. When detecting the detection of the secret touch: the second picture to the fourth picture 'the second picture 4 diagram detection system (10) on the face (four) end through the first-trigger detector 11 〇 side panel defect diagram, the third picture is the i-th map detection system in the panel _ over the first trigger detection please and second and 2 is a schematic diagram of the panel defects of the 12 〇 and 13 〇 sides of the side device, and FIG. 4 is a schematic diagram of detecting the panel defects when the rear end of the panel 16 通过 passes the first trigger detector 110. As shown, when the front end of the panel 10 is passed under the first triggering device 110, the first trigger detector 110 generates a trigger signal due to the middle of the panel 160. When the panel front end passes through the first comparison detector 120 and the second comparison detector 13 ,, the first comparison _ 12 〇 and the second comparison detector 13 分别A first alignment signal and a second comparison signal are generated by detecting the edge of the panel 16〇. Since the panel 16 〇 rupture mostly occurs at the edge of the panel 160 and the probability of occurrence in the middle of the panel 16 相当 is relatively small, the control device 140 compares the first comparison signal and the second ratio with the trigger signal as a comparison reference. For the signal. If the edge of the panel 160 is broken, the first comparison detector 12 or the second comparison detector 130 detects that the first alignment signal generated by the edge of the panel 160 or the comparison of the 5 holes is changed. The trigger signal obtained from the center of the first trigger detector no-measurement panel 160 is different. Therefore, when the control device 140 finds that the different situation occurs, the edge of the panel 160 may be broken. However, the first trigger detector 110 is disposed in front of the first comparison detector 120 and the seventh 1282852 second alignment detector 130, so when the first trigger detector 110 starts detecting the middle of the panel 160 When the trigger signal is generated, the first comparison detector 120 and the second comparison detector 130 may not generate the first comparison signal and the second comparison signal because the panel 160 has not passed yet. Therefore, the control device 140 will start comparing the first comparison signal and the second comparison signal after a front delay time is received after receiving the trigger signal. Similarly, when the first trigger detector 110 stops detecting the middle of the panel 160 and cannot transmit the trigger signal to the control device 14 , the first comparison detector 120 and the second comparison detector 130 have a segment. The time continues to generate the first comparison signal and the second comparison signal because the panel 16 has not left the detection range. Therefore, the control device 140 stops the comparison of the first comparison signal and the second comparison signal after a delay delay is received after receiving the trigger signal, and then triggers in the post-delay daytime. The signal does not exist. If the first comparison signal or the second comparison signal changes, it still indicates that the edge of the panel 160 may be broken. In contrast, when the panel is transferred from the processing machine 200 to the panel transport device, the first trigger detector 110 will not operate, and the control device 140 compares the trigger signals of the second trigger detector 190 with the first and the first The comparison signals of the two detectors 12〇 and 13〇 are different, and the result is whether the edge of the panel is broken. Although it is found that the edge of the panel 160 may be broken (that is, the first comparison signal or the second comparison signal is different), the paving device (10) generates a control signal to perform a corresponding action, such as stopping the panel conveyor 15G wheel. Send the panel, trigger a buzzer (10) to give a warning sound, or trigger - warning (four) 〇 and so on. In this way! 282852: The board process can be stopped immediately after the film is found, or the engineer can immediately solve the problem to avoid damage to the process machine. In the embodiment of FIG. 1 , the first and second trigger detectors 110 , 190 are disposed on both sides of the first comparison detector 120 and the second comparison detector 130 , but the trigger detector is The first and second alignment detectors 120, 130 may also be disposed on the same line. Please refer to FIG. 5, which is a schematic diagram of another detection system 500 of the present invention. Since the trigger detector 51 and the first and second alignment detectors 520, 530 are disposed on the same line, the control device 540 can directly compare the first comparison signal and the trigger signal when receiving the trigger signal. The second comparison signal. However, if the panel 16 is slightly skewed during the transportation process, the generation time of the trigger signal, the first comparison signal, and the second comparison signal may be inconsistent, and therefore, unless the accuracy of the transport panel 160 is improved, it is extremely easy. The misjudgment of the detection system 500 is caused. In addition, in order to accurately detect the defects of the panel 160 and avoid misjudgment, the inspecting system 100 of the present invention can determine the pre-delay time and the post-delay time after a plurality of tests in advance. For example, the detection system 1 may perform a debt test on ten panels in advance to obtain ten time differences between the trigger signal and the generation time of the first and second comparison signals, and compare the maximum measurement to the first measurement. value. The detection system 100 can also perform debt measurement on ten panels to obtain ten time differences between the trigger signal and the disappearance time of the first and second comparison signals, and compare the minimum value to the second measurement value. The setting of the front delay time must be greater than the first measurement value, and the setting of the delay time must be less than the second measurement value, so that no misjudgment is caused. The more the test panel, the more accurate the setting can be. 9 1282852 .. Occupational delay _ If you lose near the first - the amount of the area that can not be seen in front of the difficult board, the more the delay time after the delay is closer to the second measurement, the area that cannot be detected behind the panel The smaller. In order to increase the accuracy of the defect of the panel, the number of comparisons of the detection system can be increased, and the number can be increased. It is not limited to the above two. The above is only a case of two ratio detectors, and in addition, triggering The position of the detector and the comparison detector can be adjusted to achieve the best panel defect copper ratio. As long as the position of the detector is close to the edge of the panel, and the detector is triggered, the panel is less prone to defects. s position. In summary, the present invention provides a detection system for detecting panel defects, and a charging 100 500 'detection system 1 〇〇, 500 can be used with a panel transport device to detect panel defects, and when the panel 160 is fragmented, 'detection The system 1〇〇, 5〇〇 can perform corresponding actions such as stopping the panel transport device 150 to transport the panel, triggering a buzzer 180 to sound a warning sound, or triggering a warning light 17 or the like. In contrast to the prior art, the detection system 1〇〇, 5〇〇 of the present invention can be used to detect panel defects during the panel's delivery process. When the panel is found to be defective, the detection system (10), 500 immediately stops the panel process, and Inform engineers to solve problems immediately to avoid damage to the process machine, relatively reduce the risk and cost of the process, and further increase production capacity. The above are only the preferred embodiments of the present invention, and all changes and modifications made to the scope of the present invention should fall within the scope of the present invention. 1282852 [Simple description of the drawings] Fig. 1 is a schematic view of the detection system of the present invention. Figure 2 is a schematic diagram of the detection of the defect of the panel when the front end of the panel passes the first trigger detector in the first figure. Figure 3 is a schematic diagram of the detection system defect detected by the detection system when the panel passes the first trigger detector and the first and second comparison detectors. Figure 4 is a schematic diagram of the detection panel defect when the detection system passes through the first trigger detector at the rear end of the panel. Figure 5 is a schematic illustration of another detection system of the present invention. [Main component symbol description] 100, 500 detection system 120, 520 first comparison detector 140, 540 control device 160 panel 180 buzzer 200 process machine 110, 510 first trigger detector 130, 530 second comparison Predictor 150 panel transport skirt 170 warning light 190 second trigger detector 11