JP5504847B2 - スピン注入型磁気ランダムアクセスメモリ - Google Patents
スピン注入型磁気ランダムアクセスメモリ Download PDFInfo
- Publication number
- JP5504847B2 JP5504847B2 JP2009268296A JP2009268296A JP5504847B2 JP 5504847 B2 JP5504847 B2 JP 5504847B2 JP 2009268296 A JP2009268296 A JP 2009268296A JP 2009268296 A JP2009268296 A JP 2009268296A JP 5504847 B2 JP5504847 B2 JP 5504847B2
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- JP
- Japan
- Prior art keywords
- layer
- filter layer
- tunnel junction
- ferromagnetic
- mtj element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/161—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell
Description
12 ソース線
13 ビット線
14 双方向性書込/読出電圧発生器
15 センスアンプ
16 ワード線
20 積層型MTJ素子
21 第1MTJ素子
23,33 第1強磁性層
24,34 非磁性スペーサ層
25,35 第2強磁性層
22,32 フィルター層
26,36 トンネルバリア層
27,37 フリー層
28,29,38,39 反強磁性層
30 接続電極層
31 第2MTJ素子
41 p型シリコン基板
42 素子分離領域
43 ゲート絶縁膜
44 ワード線
45 n型ソース領域
46 n型ドレイン領域
47,52,54 層間絶縁膜
48,49,53,55 プラグ
50 ソース線
51 接続導体層
56 ビット線
60 積層型MTJ素子
61 下部電極
62 Ta膜
63 Ru膜
64 NiFe膜
65 Ta膜
66 第1MTJ素子
67,76 PtMn反強磁性層
68,77 フィルター層
69,78 CoFe層
70,79 Ru層
71,80 CoFeB層
72,81 MgOトンネル絶縁膜
73,82 CoFeBフリー層
74 接続電極層
75 第2MTJ素子
Claims (4)
- フリー層と、強磁性層/非磁性層/強磁性層の反強磁性結合構造を有するフィルター層と、前記フリー層と前記フィルター層との間に設けたトンネル絶縁膜とを有する磁性トンネル接合素子を直列に複数個積層し、且つ、前記各磁性トンネル接合素子の平面面積を同じにするとともに、
前記各磁性トンネル接合素子のフィルター層を構成する2層の強磁性層の膜厚差を、各磁性トンネル接合素子毎に異ならせることによって、平行化書込電流と反平行化書込電流のバランスを各磁性トンネル接合素子で互いに異ならせているスピン注入型磁気ランダムアクセスメモリ。 - 前記各磁性トンネル接合素子が、フリー層/トンネル絶縁層/フィルター層/反強磁性層からなるスピンバルブ膜構造、或いは、フリー層/トンネル絶縁層/フィルター層からなる擬似スピンバルブ膜構造のいずれかである請求項1に記載のスピン注入型磁気ランダムアクセスメモリ。
- 前記各磁性トンネル接合素子を構成するフリー層が、Co、Fe或いはNiのいずれかを最大成分とする面内磁化膜である請求項1または請求項2に記載のスピン注入型磁気ランダムアクセスメモリ。
- 前記各磁性トンネル接合素子のフィルター層を構成する非磁性層が、Ru、Ir、Rhのいずれか、或いは、これらの合金からなる請求項1乃至請求項3のいずれか1項に記載のスピン注入型磁気ランダムアクセスメモリ。
Priority Applications (1)
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JP2009268296A JP5504847B2 (ja) | 2009-11-26 | 2009-11-26 | スピン注入型磁気ランダムアクセスメモリ |
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JP2009268296A JP5504847B2 (ja) | 2009-11-26 | 2009-11-26 | スピン注入型磁気ランダムアクセスメモリ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011114108A JP2011114108A (ja) | 2011-06-09 |
JP5504847B2 true JP5504847B2 (ja) | 2014-05-28 |
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JP2009268296A Expired - Fee Related JP5504847B2 (ja) | 2009-11-26 | 2009-11-26 | スピン注入型磁気ランダムアクセスメモリ |
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JP (1) | JP5504847B2 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8625337B2 (en) | 2010-05-06 | 2014-01-07 | Qualcomm Incorporated | Method and apparatus of probabilistic programming multi-level memory in cluster states of bi-stable elements |
JP2013055088A (ja) * | 2011-08-31 | 2013-03-21 | Fujitsu Ltd | 磁気抵抗素子及び磁気記憶装置 |
JP5551129B2 (ja) * | 2011-09-07 | 2014-07-16 | 株式会社東芝 | 記憶装置 |
CN110323247B (zh) * | 2019-07-04 | 2021-08-31 | 中国科学院微电子研究所 | Mram器件及其制造方法及包括mram的电子设备 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6985385B2 (en) * | 2003-08-26 | 2006-01-10 | Grandis, Inc. | Magnetic memory element utilizing spin transfer switching and storing multiple bits |
KR100647319B1 (ko) * | 2005-02-05 | 2006-11-23 | 삼성전자주식회사 | 스핀 분극 전류를 이용한 멀티 비트 자기 메모리 소자와그 제조 및 구동 방법 |
US7453720B2 (en) * | 2005-05-26 | 2008-11-18 | Maglabs, Inc. | Magnetic random access memory with stacked toggle memory cells having oppositely-directed easy-axis biasing |
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- 2009-11-26 JP JP2009268296A patent/JP5504847B2/ja not_active Expired - Fee Related
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