JP5424273B2 - 熱電変換素子 - Google Patents
熱電変換素子 Download PDFInfo
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- JP5424273B2 JP5424273B2 JP2010516830A JP2010516830A JP5424273B2 JP 5424273 B2 JP5424273 B2 JP 5424273B2 JP 2010516830 A JP2010516830 A JP 2010516830A JP 2010516830 A JP2010516830 A JP 2010516830A JP 5424273 B2 JP5424273 B2 JP 5424273B2
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- 238000006243 chemical reaction Methods 0.000 title claims description 54
- 230000005291 magnetic effect Effects 0.000 claims description 67
- 230000005418 spin wave Effects 0.000 claims description 29
- 230000005355 Hall effect Effects 0.000 claims description 22
- 230000005290 antiferromagnetic effect Effects 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 11
- 230000005294 ferromagnetic effect Effects 0.000 claims description 7
- 230000005415 magnetization Effects 0.000 claims description 7
- 230000005293 ferrimagnetic effect Effects 0.000 claims description 6
- 229910052797 bismuth Inorganic materials 0.000 claims description 4
- 229910052737 gold Inorganic materials 0.000 claims description 4
- 229910052763 palladium Inorganic materials 0.000 claims description 4
- 229910052697 platinum Inorganic materials 0.000 claims description 4
- 229910052709 silver Inorganic materials 0.000 claims description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 23
- 238000010586 diagram Methods 0.000 description 15
- 239000002184 metal Substances 0.000 description 11
- 229910052751 metal Inorganic materials 0.000 description 11
- 239000013078 crystal Substances 0.000 description 9
- 230000000694 effects Effects 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- 238000004544 sputter deposition Methods 0.000 description 9
- 239000000203 mixture Substances 0.000 description 8
- 230000005678 Seebeck effect Effects 0.000 description 5
- 230000008859 change Effects 0.000 description 5
- 238000004804 winding Methods 0.000 description 5
- 101100167360 Drosophila melanogaster chb gene Proteins 0.000 description 4
- 239000002223 garnet Substances 0.000 description 4
- 230000003993 interaction Effects 0.000 description 4
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 3
- 239000002772 conduction electron Substances 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 239000003989 dielectric material Substances 0.000 description 3
- 239000000696 magnetic material Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000010248 power generation Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000003302 ferromagnetic material Substances 0.000 description 2
- JSUIEZRQVIVAMP-UHFFFAOYSA-N gallium iron Chemical compound [Fe].[Ga] JSUIEZRQVIVAMP-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- MTRJKZUDDJZTLA-UHFFFAOYSA-N iron yttrium Chemical compound [Fe].[Y] MTRJKZUDDJZTLA-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910000480 nickel oxide Inorganic materials 0.000 description 2
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 229910052727 yttrium Inorganic materials 0.000 description 2
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 2
- 229920002799 BoPET Polymers 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000002902 ferrimagnetic material Substances 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 230000005676 thermoelectric effect Effects 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
- 239000002918 waste heat Substances 0.000 description 1
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Classifications
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G49/00—Compounds of iron
- C01G49/009—Compounds containing, besides iron, two or more other elements, with the exception of oxygen or hydrogen
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G49/00—Compounds of iron
- C01G49/0018—Mixed oxides or hydroxides
- C01G49/0054—Mixed oxides or hydroxides containing one rare earth metal, yttrium or scandium
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N15/00—Thermoelectric devices without a junction of dissimilar materials; Thermomagnetic devices, e.g. using the Nernst-Ettingshausen effect
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2002/00—Crystal-structural characteristics
- C01P2002/70—Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data
- C01P2002/77—Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data by unit-cell parameters, atom positions or structure diagrams
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/42—Magnetic properties
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geology (AREA)
- Hall/Mr Elements (AREA)
- Compounds Of Iron (AREA)
Description
Z=S2 ×(σ/κ) ・・・(1)
と表される。また、起電力Vの発生方向は温度勾配▽Tと平行方向になる。
Z=Ss 2 ×(σs /κ ) ・・・(2)
と表される。
なお、反強磁性誘電体は、典型的には酸化ニッケルやFeOが挙げられるが、磁性誘電体の大半は反強磁性誘電体である。
また、磁性誘電体層の厚さとしては、強磁性体或いはフェリ磁性体としての特性を発現するための厚さであれば良く、そのためには、5nm以上の厚さにすれば良い。
なお、逆スピンホール効果部材の膜厚は任意であるが、厚くしすぎるとバックフロー電流により効率が悪くなるので、20nm以下にすることが望ましい。一方、あまり薄すぎると高抵抗になり、逆スピンホール効果部材におけるジュール熱の発生量が増大するので、5nm以上の厚さにすることが望ましい。
次いで、図3(c)に示すように、電気炉中において、例えば、550℃で5分間加熱する仮焼成によって酸化物層13とする。
例えば、上記の各実施例においては、逆スピンホール効果部材としてPtを用いているが、Ptに限られるものではなく、Ptと同様にスピン軌道相互作用の大きなPdや、Au、Ag、Biや、その他のf軌道を有する元素を用いても良い。
Claims (8)
- 磁性誘電体からなる熱スピン波スピン流発生部材の少なくとも一端側に逆スピンホール効果部材を設け、前記熱スピン波スピン流発生部材に温度勾配を設けるとともに磁場印加手段により磁場を印加して前記逆スピンホール効果部材において熱スピン波スピン流を電圧に変換して取り出す熱電変換素子。
- 前記磁性誘電体が、フェリ磁性誘電体、強磁性誘電体或いは反強磁性誘電体のいずれかからなる請求項1記載の熱電変換素子。
- 前記磁性誘電体がフェリ磁性誘電体或いは強磁性誘電体からなるとともに、前記磁場印加手段が前記磁性誘電体に接してその磁化方向を固定する反強磁性層である請求項1または2に記載の熱電変換素子。
- 前記磁性誘電体が、Y3 Fe5-x Gax O12(但し、x<5)からなる請求項1乃至3のいずれか1項に記載の熱電変換素子。
- 前記逆スピンホール効果部材が、Pt、Au、Pd、Ag、Bi、或いは、f軌道を有する元素のいずれかからなる請求項1乃至4のいずれか1項に記載の熱電変換素子。
- 前記磁性誘電体の膜厚が5nm以上であるとともに、前記逆スピンホール効果部材の膜厚が5nm〜20nmである請求項5に記載の熱電変換素子。
- 前記逆スピンホール効果部材を、前記熱スピン波スピン流発生部材に設けた前記温度勾配の方向に沿った異なった位置に複数箇所設けた請求項1乃至6のいずれか1項に記載の熱電変換素子。
- 磁性誘電体からなる熱スピン波スピン流発生部材の少なくとも一端側に逆スピンホール効果部材を設け、前記熱スピン波スピン流発生部材に温度勾配を設けるとともに磁場印加手段により磁場を印加して前記逆スピンホール効果部材において熱スピン波スピン流を電圧に変換して取り出す複数の前記温度勾配の方向と直交する方向の長さが互いに異なる熱電変換要素を、前記温度勾配の方向と直交する方向の長さの順にフレキシブル基板上に固着するとともに、互いに隣接する前記逆スピンホール効果部材を順次直列接続し、前記フレキシブル基板を巻回した熱電変換素子。
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JP2010516830A JP5424273B2 (ja) | 2008-06-12 | 2009-06-05 | 熱電変換素子 |
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JP2008153781 | 2008-06-12 | ||
JP2008153781 | 2008-06-12 | ||
PCT/JP2009/060317 WO2009151000A1 (ja) | 2008-06-12 | 2009-06-05 | 熱電変換素子 |
JP2010516830A JP5424273B2 (ja) | 2008-06-12 | 2009-06-05 | 熱電変換素子 |
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JPWO2009151000A1 JPWO2009151000A1 (ja) | 2011-11-17 |
JP5424273B2 true JP5424273B2 (ja) | 2014-02-26 |
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US (1) | US8604571B2 (ja) |
JP (1) | JP5424273B2 (ja) |
WO (1) | WO2009151000A1 (ja) |
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WO2011118374A1 (ja) * | 2010-03-25 | 2011-09-29 | 日本電気株式会社 | 熱型センサ及びプラットフォーム |
JP5585314B2 (ja) * | 2010-04-30 | 2014-09-10 | 国立大学法人東北大学 | 熱電変換素子及び熱電変換装置 |
JP5630230B2 (ja) * | 2010-11-17 | 2014-11-26 | 日本電気株式会社 | 熱電変換素子 |
EP2674982B1 (en) * | 2011-02-09 | 2020-08-19 | Nec Corporation | Thermoelectric conversion element, method for producing thermoelectric conversion element, and thermoelectric conversion method |
WO2012153642A1 (ja) * | 2011-05-09 | 2012-11-15 | 日本電気株式会社 | 位置検出装置 |
EP2717319A4 (en) * | 2011-05-23 | 2014-12-10 | Nec Corp | ELEMENT FOR THERMOELECTRIC CONVERSION AND PROCESS FOR THERMOELECTRIC CONVERSION |
WO2012169509A1 (ja) * | 2011-06-07 | 2012-12-13 | 日本電気株式会社 | 熱電変換素子 |
CN103597735B (zh) | 2011-06-09 | 2017-01-18 | 日本电气株式会社 | 热电转换设备 |
JP6057182B2 (ja) * | 2011-07-15 | 2017-01-11 | 日本電気株式会社 | 磁性体素子用の積層体及びこの積層体を備えた熱電変換素子並びにその製造方法 |
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JPWO2013047253A1 (ja) * | 2011-09-27 | 2015-03-26 | 日本電気株式会社 | 熱電変換素子及びその製造方法 |
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CN105981116B (zh) * | 2013-10-01 | 2019-09-06 | 埃1023公司 | 磁增强的能量存储系统及方法 |
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JP6336331B2 (ja) * | 2014-05-23 | 2018-06-06 | 株式会社デンソー | 熱電変換素子 |
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JPWO2009151000A1 (ja) | 2011-11-17 |
US20110084349A1 (en) | 2011-04-14 |
WO2009151000A1 (ja) | 2009-12-17 |
US8604571B2 (en) | 2013-12-10 |
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