JP5415850B2 - 観察装置 - Google Patents
観察装置 Download PDFInfo
- Publication number
- JP5415850B2 JP5415850B2 JP2009162259A JP2009162259A JP5415850B2 JP 5415850 B2 JP5415850 B2 JP 5415850B2 JP 2009162259 A JP2009162259 A JP 2009162259A JP 2009162259 A JP2009162259 A JP 2009162259A JP 5415850 B2 JP5415850 B2 JP 5415850B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- light
- objective lens
- illumination
- beam splitter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005286 illumination Methods 0.000 claims description 87
- 230000010287 polarization Effects 0.000 claims description 85
- 238000003384 imaging method Methods 0.000 claims description 48
- 230000003287 optical effect Effects 0.000 claims description 28
- 230000005540 biological transmission Effects 0.000 description 18
- 238000000034 method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000002184 metal Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 206010016173 Fall Diseases 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
Images
Landscapes
- Microscoopes, Condenser (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009162259A JP5415850B2 (ja) | 2009-07-08 | 2009-07-08 | 観察装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009162259A JP5415850B2 (ja) | 2009-07-08 | 2009-07-08 | 観察装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011017875A JP2011017875A (ja) | 2011-01-27 |
| JP2011017875A5 JP2011017875A5 (enExample) | 2012-07-05 |
| JP5415850B2 true JP5415850B2 (ja) | 2014-02-12 |
Family
ID=43595715
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009162259A Expired - Fee Related JP5415850B2 (ja) | 2009-07-08 | 2009-07-08 | 観察装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5415850B2 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013161073A (ja) * | 2012-02-09 | 2013-08-19 | Topcon Corp | 波長選択光学素子及びこの波長選択光学素子を用いた顕微鏡及びこの波長選択光学素子を用いたデジタルカメラ |
| JP6095359B2 (ja) * | 2012-12-25 | 2017-03-15 | オリンパス株式会社 | 顕微鏡 |
| CN105807413B (zh) * | 2016-05-18 | 2018-11-02 | 麦克奥迪实业集团有限公司 | 一种基于光调制技术的落射金相显微镜 |
| JP6897712B2 (ja) * | 2019-03-29 | 2021-07-07 | カシオ計算機株式会社 | 照明装置、及び撮像装置 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3012681B2 (ja) * | 1990-10-24 | 2000-02-28 | オリンパス光学工業株式会社 | 倍率可変型光学装置 |
| JP2987218B2 (ja) * | 1991-02-05 | 1999-12-06 | オリンパス光学工業株式会社 | 倍率可変型光学装置 |
| JP2787678B2 (ja) * | 1992-04-24 | 1998-08-20 | 聡 河田 | 偏光顕微鏡 |
| JPH06229910A (ja) * | 1992-12-29 | 1994-08-19 | New Oji Paper Co Ltd | レターデーション測定方法 |
| JP3980722B2 (ja) * | 1997-04-03 | 2007-09-26 | 株式会社モリテックス | Ccdマイクロスコープ |
| JP3956942B2 (ja) * | 1998-09-18 | 2007-08-08 | 株式会社日立製作所 | 欠陥検査方法及びその装置 |
| JP2001154103A (ja) * | 1999-11-30 | 2001-06-08 | Mitsutoyo Corp | 光学器械の照明装置 |
| JP2002267932A (ja) * | 2001-03-12 | 2002-09-18 | Olympus Optical Co Ltd | 微分干渉顕微鏡 |
| JP2007163553A (ja) * | 2005-12-09 | 2007-06-28 | Tokyo Seimitsu Co Ltd | 顕微鏡、顕微鏡のための対物レンズユニット及び対物レンズ用アダプタ |
| JP4667313B2 (ja) * | 2006-07-10 | 2011-04-13 | 株式会社モリテックス | 偏光照明付観察装置 |
| CN101542352B (zh) * | 2006-11-22 | 2011-01-12 | 株式会社尼康 | 图像测量设备 |
| JP2008233608A (ja) * | 2007-03-22 | 2008-10-02 | Olympus Corp | 顕微鏡装置 |
-
2009
- 2009-07-08 JP JP2009162259A patent/JP5415850B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2011017875A (ja) | 2011-01-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3610837B2 (ja) | 試料表面の観察方法及びその装置並びに欠陥検査方法及びその装置 | |
| JP4625716B2 (ja) | 欠陥検査装置及び欠陥検査方法 | |
| WO2002023248A1 (fr) | Microscope confocal et procede de mesure de hauteur utilisant ledit microscope | |
| TWI591322B (zh) | Birefringence measurement apparatus, birefringence measurement method, film inspection apparatus, and film inspection method | |
| JP3762952B2 (ja) | 光学装置並びにそれを用いた画像測定装置及び検査装置 | |
| JP2008249386A (ja) | 欠陥検査装置および欠陥検査方法 | |
| JP5415850B2 (ja) | 観察装置 | |
| JP5012810B2 (ja) | 画像測定器 | |
| JP5035904B2 (ja) | 膜厚分布測定装置 | |
| JP5419293B2 (ja) | 検査装置 | |
| JP2013217703A (ja) | 検査装置 | |
| JP5068422B2 (ja) | 微細構造観察方法および欠陥検査装置 | |
| JP6085795B2 (ja) | 製品検査システム、製品検査方法及び製品検査装置 | |
| JP4901090B2 (ja) | 欠陥検査方法及び欠陥検出装置 | |
| WO2009133849A1 (ja) | 検査装置 | |
| JP2009282112A (ja) | 共焦点顕微鏡 | |
| JP2014240766A (ja) | 表面検査方法および表面検査装置 | |
| JP2012083125A (ja) | 端面検査装置 | |
| JP2006105780A5 (enExample) | ||
| JP3965325B2 (ja) | 微細構造観察方法、および欠陥検査装置 | |
| JP6903449B2 (ja) | 欠陥検査装置、および欠陥検査方法 | |
| JP2011017875A5 (enExample) | ||
| JP2009198205A (ja) | 干渉計 | |
| JP2005055447A (ja) | 欠陥検査方法及びその装置 | |
| JP2009265026A (ja) | 検査装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120518 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20120518 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20130205 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130820 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130924 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20131105 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20131114 |
|
| R151 | Written notification of patent or utility model registration |
Ref document number: 5415850 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R151 |
|
| S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |