JP5415850B2 - 観察装置 - Google Patents

観察装置 Download PDF

Info

Publication number
JP5415850B2
JP5415850B2 JP2009162259A JP2009162259A JP5415850B2 JP 5415850 B2 JP5415850 B2 JP 5415850B2 JP 2009162259 A JP2009162259 A JP 2009162259A JP 2009162259 A JP2009162259 A JP 2009162259A JP 5415850 B2 JP5415850 B2 JP 5415850B2
Authority
JP
Japan
Prior art keywords
sample
light
objective lens
illumination
beam splitter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2009162259A
Other languages
English (en)
Japanese (ja)
Other versions
JP2011017875A5 (enExample
JP2011017875A (ja
Inventor
洋輔 谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP2009162259A priority Critical patent/JP5415850B2/ja
Publication of JP2011017875A publication Critical patent/JP2011017875A/ja
Publication of JP2011017875A5 publication Critical patent/JP2011017875A5/ja
Application granted granted Critical
Publication of JP5415850B2 publication Critical patent/JP5415850B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Microscoopes, Condenser (AREA)
JP2009162259A 2009-07-08 2009-07-08 観察装置 Expired - Fee Related JP5415850B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009162259A JP5415850B2 (ja) 2009-07-08 2009-07-08 観察装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009162259A JP5415850B2 (ja) 2009-07-08 2009-07-08 観察装置

Publications (3)

Publication Number Publication Date
JP2011017875A JP2011017875A (ja) 2011-01-27
JP2011017875A5 JP2011017875A5 (enExample) 2012-07-05
JP5415850B2 true JP5415850B2 (ja) 2014-02-12

Family

ID=43595715

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009162259A Expired - Fee Related JP5415850B2 (ja) 2009-07-08 2009-07-08 観察装置

Country Status (1)

Country Link
JP (1) JP5415850B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013161073A (ja) * 2012-02-09 2013-08-19 Topcon Corp 波長選択光学素子及びこの波長選択光学素子を用いた顕微鏡及びこの波長選択光学素子を用いたデジタルカメラ
JP6095359B2 (ja) * 2012-12-25 2017-03-15 オリンパス株式会社 顕微鏡
CN105807413B (zh) * 2016-05-18 2018-11-02 麦克奥迪实业集团有限公司 一种基于光调制技术的落射金相显微镜
JP6897712B2 (ja) * 2019-03-29 2021-07-07 カシオ計算機株式会社 照明装置、及び撮像装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3012681B2 (ja) * 1990-10-24 2000-02-28 オリンパス光学工業株式会社 倍率可変型光学装置
JP2987218B2 (ja) * 1991-02-05 1999-12-06 オリンパス光学工業株式会社 倍率可変型光学装置
JP2787678B2 (ja) * 1992-04-24 1998-08-20 聡 河田 偏光顕微鏡
JPH06229910A (ja) * 1992-12-29 1994-08-19 New Oji Paper Co Ltd レターデーション測定方法
JP3980722B2 (ja) * 1997-04-03 2007-09-26 株式会社モリテックス Ccdマイクロスコープ
JP3956942B2 (ja) * 1998-09-18 2007-08-08 株式会社日立製作所 欠陥検査方法及びその装置
JP2001154103A (ja) * 1999-11-30 2001-06-08 Mitsutoyo Corp 光学器械の照明装置
JP2002267932A (ja) * 2001-03-12 2002-09-18 Olympus Optical Co Ltd 微分干渉顕微鏡
JP2007163553A (ja) * 2005-12-09 2007-06-28 Tokyo Seimitsu Co Ltd 顕微鏡、顕微鏡のための対物レンズユニット及び対物レンズ用アダプタ
JP4667313B2 (ja) * 2006-07-10 2011-04-13 株式会社モリテックス 偏光照明付観察装置
CN101542352B (zh) * 2006-11-22 2011-01-12 株式会社尼康 图像测量设备
JP2008233608A (ja) * 2007-03-22 2008-10-02 Olympus Corp 顕微鏡装置

Also Published As

Publication number Publication date
JP2011017875A (ja) 2011-01-27

Similar Documents

Publication Publication Date Title
JP3610837B2 (ja) 試料表面の観察方法及びその装置並びに欠陥検査方法及びその装置
JP4625716B2 (ja) 欠陥検査装置及び欠陥検査方法
WO2002023248A1 (fr) Microscope confocal et procede de mesure de hauteur utilisant ledit microscope
TWI591322B (zh) Birefringence measurement apparatus, birefringence measurement method, film inspection apparatus, and film inspection method
JP3762952B2 (ja) 光学装置並びにそれを用いた画像測定装置及び検査装置
JP2008249386A (ja) 欠陥検査装置および欠陥検査方法
JP5415850B2 (ja) 観察装置
JP5012810B2 (ja) 画像測定器
JP5035904B2 (ja) 膜厚分布測定装置
JP5419293B2 (ja) 検査装置
JP2013217703A (ja) 検査装置
JP5068422B2 (ja) 微細構造観察方法および欠陥検査装置
JP6085795B2 (ja) 製品検査システム、製品検査方法及び製品検査装置
JP4901090B2 (ja) 欠陥検査方法及び欠陥検出装置
WO2009133849A1 (ja) 検査装置
JP2009282112A (ja) 共焦点顕微鏡
JP2014240766A (ja) 表面検査方法および表面検査装置
JP2012083125A (ja) 端面検査装置
JP2006105780A5 (enExample)
JP3965325B2 (ja) 微細構造観察方法、および欠陥検査装置
JP6903449B2 (ja) 欠陥検査装置、および欠陥検査方法
JP2011017875A5 (enExample)
JP2009198205A (ja) 干渉計
JP2005055447A (ja) 欠陥検査方法及びその装置
JP2009265026A (ja) 検査装置

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120518

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20120518

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20130205

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20130820

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130924

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20131105

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20131114

R151 Written notification of patent or utility model registration

Ref document number: 5415850

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees