JP5397171B2 - 振動型角速度センサ - Google Patents
振動型角速度センサ Download PDFInfo
- Publication number
- JP5397171B2 JP5397171B2 JP2009256089A JP2009256089A JP5397171B2 JP 5397171 B2 JP5397171 B2 JP 5397171B2 JP 2009256089 A JP2009256089 A JP 2009256089A JP 2009256089 A JP2009256089 A JP 2009256089A JP 5397171 B2 JP5397171 B2 JP 5397171B2
- Authority
- JP
- Japan
- Prior art keywords
- signal
- excitation
- vibration
- angular velocity
- velocity sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000005284 excitation Effects 0.000 claims description 61
- 238000001514 detection method Methods 0.000 claims description 30
- 230000003068 static effect Effects 0.000 claims description 27
- 238000004088 simulation Methods 0.000 claims description 5
- 230000002238 attenuated effect Effects 0.000 claims description 4
- 230000005484 gravity Effects 0.000 description 28
- 238000010586 diagram Methods 0.000 description 13
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 9
- 230000005279 excitation period Effects 0.000 description 7
- 230000006641 stabilisation Effects 0.000 description 7
- 238000011105 stabilization Methods 0.000 description 7
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 3
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 238000013016 damping Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 238000005530 etching Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009256089A JP5397171B2 (ja) | 2009-11-09 | 2009-11-09 | 振動型角速度センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009256089A JP5397171B2 (ja) | 2009-11-09 | 2009-11-09 | 振動型角速度センサ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011099818A JP2011099818A (ja) | 2011-05-19 |
| JP2011099818A5 JP2011099818A5 (enExample) | 2012-12-13 |
| JP5397171B2 true JP5397171B2 (ja) | 2014-01-22 |
Family
ID=44191099
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009256089A Expired - Fee Related JP5397171B2 (ja) | 2009-11-09 | 2009-11-09 | 振動型角速度センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5397171B2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101218991B1 (ko) * | 2010-08-06 | 2013-01-07 | 삼성전기주식회사 | 자이로 센서 구동 장치 |
| KR101237604B1 (ko) * | 2011-09-02 | 2013-02-26 | 한국기술교육대학교 산학협력단 | 자이로 센서 구동 장치 및 그 방법 |
| JP6067102B2 (ja) * | 2013-03-29 | 2017-01-25 | 旭化成株式会社 | 角速度センサ |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005308530A (ja) * | 2004-04-21 | 2005-11-04 | Denso Corp | 角速度・加速度複合センサ |
| JP2006226770A (ja) * | 2005-02-16 | 2006-08-31 | Seiko Instruments Inc | 力学量センサ |
| JP2007271320A (ja) * | 2006-03-30 | 2007-10-18 | Kyocera Corp | 加速度・角速度検出素子およびその製造方法、ならびに加速度・角速度測定装置 |
| JP4234734B2 (ja) * | 2006-07-05 | 2009-03-04 | 和廣 岡田 | 角速度センサ |
| JP5177740B2 (ja) * | 2007-10-11 | 2013-04-10 | 日本信号株式会社 | ジャイロセンサのドリフト抑制方法 |
| JP2009128164A (ja) * | 2007-11-22 | 2009-06-11 | Alps Electric Co Ltd | 加速度・角速度・磁気方位検出用複合センサ及びこれを用いた装置 |
-
2009
- 2009-11-09 JP JP2009256089A patent/JP5397171B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2011099818A (ja) | 2011-05-19 |
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