JP5384305B2 - ワーク搬送装置 - Google Patents

ワーク搬送装置 Download PDF

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Publication number
JP5384305B2
JP5384305B2 JP2009262990A JP2009262990A JP5384305B2 JP 5384305 B2 JP5384305 B2 JP 5384305B2 JP 2009262990 A JP2009262990 A JP 2009262990A JP 2009262990 A JP2009262990 A JP 2009262990A JP 5384305 B2 JP5384305 B2 JP 5384305B2
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JP
Japan
Prior art keywords
workpiece
gas
holding plate
outer peripheral
guide surface
Prior art date
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Expired - Fee Related
Application number
JP2009262990A
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English (en)
Japanese (ja)
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JP2011108879A (ja
JP2011108879A5 (enExample
Inventor
智博 渡邉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koganei Corp
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Koganei Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Koganei Corp filed Critical Koganei Corp
Priority to JP2009262990A priority Critical patent/JP5384305B2/ja
Publication of JP2011108879A publication Critical patent/JP2011108879A/ja
Publication of JP2011108879A5 publication Critical patent/JP2011108879A5/ja
Application granted granted Critical
Publication of JP5384305B2 publication Critical patent/JP5384305B2/ja
Expired - Fee Related legal-status Critical Current
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  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2009262990A 2009-11-18 2009-11-18 ワーク搬送装置 Expired - Fee Related JP5384305B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009262990A JP5384305B2 (ja) 2009-11-18 2009-11-18 ワーク搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009262990A JP5384305B2 (ja) 2009-11-18 2009-11-18 ワーク搬送装置

Publications (3)

Publication Number Publication Date
JP2011108879A JP2011108879A (ja) 2011-06-02
JP2011108879A5 JP2011108879A5 (enExample) 2012-11-29
JP5384305B2 true JP5384305B2 (ja) 2014-01-08

Family

ID=44232040

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009262990A Expired - Fee Related JP5384305B2 (ja) 2009-11-18 2009-11-18 ワーク搬送装置

Country Status (1)

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JP (1) JP5384305B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017017750A1 (ja) * 2015-07-27 2017-02-02 株式会社ニレコ 青果物把持具
JP6954786B2 (ja) * 2017-08-10 2021-10-27 株式会社前川製作所 食品用ロボットハンド
JP7219426B2 (ja) * 2020-02-19 2023-02-08 Smc株式会社 非接触搬送装置
NL2026836B1 (en) * 2020-11-05 2022-06-27 Laundry Robotics B V Device and method for picking up at least part of a textile item.

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58143989A (ja) * 1982-02-15 1983-08-26 株式会社日立製作所 搬送装置
JPH02305740A (ja) * 1989-05-17 1990-12-19 Sony Corp 基板搬送装置
JPH10181879A (ja) * 1996-12-26 1998-07-07 Koganei Corp 搬送装置
JP2000191137A (ja) * 1998-12-28 2000-07-11 Nippon Electric Glass Co Ltd 板状物の非接触搬送装置
JP2002231786A (ja) * 2001-02-01 2002-08-16 Koganei Corp 搬送装置
JP4342331B2 (ja) * 2004-02-09 2009-10-14 株式会社コガネイ 非接触搬送装置
JP2006160434A (ja) * 2004-12-06 2006-06-22 Nippon Dempa Kogyo Co Ltd 非接触搬送装置
JP2007067054A (ja) * 2005-08-30 2007-03-15 Fluoro Mechanic Kk ベルヌーイチャック
JP2009032981A (ja) * 2007-07-27 2009-02-12 Ihi Corp 非接触搬送装置

Also Published As

Publication number Publication date
JP2011108879A (ja) 2011-06-02

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