JP5367323B2 - 半導体装置および半導体装置の製造方法 - Google Patents
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Description
10 SOI基板
11 シリコン基板層
12 BOX層
13 SOI層
14 層間絶縁膜
16 電極パッド
20 センサ回路
30 貫通電極
33 めっき膜
34 貫通孔
40 裏面配線
41 裏面電極パッド
43 外部端子
43a 電位固定用外部端子
50 基板コンタクト
51 コンタクト開孔
Claims (11)
- 半導体基板層と表面に半導体素子が形成された半導体層との間に絶縁層を有するSOI基板と、前記半導体基板層の裏面側の表面に絶縁膜を介して設けられて前記半導体素子に電気的に接続された少なくとも1つの外部端子と、を含む半導体装置であって、
前記絶縁膜を貫通し、前記半導体基板層に電気的に接続された導電膜からなるコンタクト部と、
前記半導体基板層の裏面側の表面上に前記絶縁膜を介して設けられて前記コンタクト部に接続された電位固定用外部端子と、を含むことを特徴とする半導体装置。 - 前記半導体基板層と前記コンタクト部との間の電気的接続はショットキーコンタクトであることを特徴とする請求項1に記載の半導体装置。
- 前記コンタクト部は前記電位固定用外部端子の直下に設けられていることを特徴とする請求項1又は2に記載の半導体装置。
- 前記半導体層の前記半導体素子形成面側に設けられて前記半導体素子に電気的に接続された電極パッドと、前記SOI基板を貫通し前記電極パッドと電気的に接続された貫通電極と、前記半導体基板層の裏面側の表面上に前記絶縁膜を介して設けられて前記貫通電極と前記外部端子とを電気的に接続する裏面配線と、を更に含むことを特徴とする請求項1乃至3のいずれか1つに記載の半導体装置。
- 前記電位固定用外部端子は、前記貫通電極を介して前記半導体素子に電気的に接続されていることを特徴とする請求項4に記載の半導体装置。
- 複数の前記SOI基板の各々はその厚み方向に積層され、前記外部端子を介して積層方向に互いに電気的に接続されていることを特徴とする請求項4に記載の半導体装置。
- 前記半導体素子は受光素子を含み、
前記SOI基板の上に、前記受光素子を覆って設けられた光透過性の支持基板を更に有することを特徴とする請求項1乃至6のいずれか1つに記載の半導体装置。 - 半導体基板層と表面に半導体素子が形成された半導体層との間に酸化膜を有するSOI基板と、前記半導体層の前記半導体素子形成面側に設けられて前記半導体素子に電気的に接続された電極パッドと、前記SOI基板を貫通し前記電極パッドと電気的に接続された貫通電極と、前記半導体基板層の裏面側の表面上に絶縁膜を介して設けられて前記貫通電極に電気的に接続された外部端子と、を含む半導体装置の製造方法であって、
前記半導体基板層の裏面側の表面から前記電極パッドに達する貫通孔を形成する工程と、
前記半導体基板層の裏面側の表面上と前記貫通孔の内壁を覆うように前記絶縁膜を形成する工程と、
前記絶縁膜を選択的にエッチングして前記貫通孔の底面において前記電極パッドを露出させる工程と、
前記絶縁膜を選択的にエッチングして前記半導体基板層の表面にコンタクト開孔を形成して前記半導体基板層の一部を露出させる工程と、
前記半導体基板層の裏面側の表面上と前記貫通孔の内壁を覆うように導電膜を形成して前記貫通電極を形成するとともに前記コンタクト開孔において露出している前記半導体基板層に電気的に接続されたコンタクト部を形成する工程と、
前記半導体基板層の裏面側の表面上の前記導電膜にパターニングを施して前記外部端子を形成するとともに前記コンタクト部に電気的に接続された電位固定用外部端子を形成する工程と、を含むことを特徴とする半導体装置の製造方法。 - 前記半導体基板層の裏面側の表面上に前記外部端子のいずれかと前記電位固定用外部端子とを電気的に接続する裏面配線を形成する工程を更に含むことを特徴とする請求項8に記載の半導体装置の製造方法。
- 前記外部端子および前記電位固定用外部端子を形成する工程は、
前記半導体基板層の裏面側の表面上の前記導電膜にパターニングを施して前記貫通電極および前記コンタクト部にそれぞれ電気的に接続された裏面配線および裏面電極パッドを形成する工程と、
前記半導体基板層の裏面側の表面上に前記裏面電極パッドの形成部分に開口部を有するソルダーレジストを形成する工程と、
前記ソルダーレジストの開口部において露出している前記裏面電極パッドに半田バンプを形成する工程と、を含むことを特徴とする請求項8又は9に記載の半導体装置の製造方法。 - その裏面側から半導体基板層、絶縁層、半導体層が順次積層されて成る半導体基板であって、前記半導体基板の表面でありかつ前記半導体層の表面に半導体素子及び前記半導体素子と電気的に接続された電極パッドが形成されて成る半導体基板を準備する工程と、
前記半導体基板の前記裏面から、前記電極パッドに達する貫通孔を形成する工程と、
前記半導体基板の裏面、前記貫通孔の内壁、及び前記電極パッドを覆うように絶縁膜を形成する工程と、
前記の絶縁膜の一部を除去して前記電極パッドを露出させる工程と、
前記の絶縁膜の一部を除去して前記半導体基板層の一部を露出させる工程と、
前記電極パッドの露出部に電気的に接続される第1の配線を形成すると共に、前記半導体基板層の露出部と電気的に接続される第2の配線を形成する工程と、
前記半導体基板の前記裏面上に、前記第1の配線と電気的に接続された第1の外部端子を形成する工程と、
前記半導体基板の前記裏面上に、前記第2の配線と電気的に接続された第2の外部端子を形成する工程と、を有することを特徴とする半導体装置の製造方法。
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JP5371381B2 (ja) * | 2008-11-05 | 2013-12-18 | ラピスセミコンダクタ株式会社 | 半導体装置および半導体装置の製造方法 |
JP5525314B2 (ja) * | 2009-05-02 | 2014-06-18 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP4987928B2 (ja) * | 2009-09-24 | 2012-08-01 | 株式会社東芝 | 半導体装置の製造方法 |
JP4989773B1 (ja) * | 2011-05-16 | 2012-08-01 | 株式会社東芝 | 半導体発光素子 |
US8604576B2 (en) * | 2011-07-19 | 2013-12-10 | Opitz, Inc. | Low stress cavity package for back side illuminated image sensor, and method of making same |
TWI569400B (zh) * | 2012-06-11 | 2017-02-01 | 精材科技股份有限公司 | 晶片封裝體及其形成方法 |
US8816383B2 (en) * | 2012-07-06 | 2014-08-26 | Invensas Corporation | High performance light emitting diode with vias |
CN103700617B (zh) * | 2013-11-04 | 2016-01-20 | 中国航天科技集团公司第九研究院第七七一研究所 | 基于soi衬底高可靠性的tsv工艺方法 |
US9667900B2 (en) | 2013-12-09 | 2017-05-30 | Optiz, Inc. | Three dimensional system-on-chip image sensor package |
JP6299406B2 (ja) * | 2013-12-19 | 2018-03-28 | ソニー株式会社 | 半導体装置、半導体装置の製造方法、及び電子機器 |
JP6423685B2 (ja) | 2014-10-23 | 2018-11-14 | キヤノン株式会社 | 電子部品、モジュール及びカメラ |
FR3046874B1 (fr) * | 2016-01-15 | 2018-04-13 | Soitec | Procede de fabrication de structures semi-conductrices incluant une couche a haute resistivite, et structures semi-conductrices apparentees |
US10535585B2 (en) * | 2017-08-23 | 2020-01-14 | Semiconductor Components Industries, Llc | Integrated passive device and fabrication method using a last through-substrate via |
US10741523B2 (en) * | 2018-10-11 | 2020-08-11 | Advanced Semiconductor Engineering, Inc. | Semiconductor package device and method of manufacturing the same |
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JPH07335811A (ja) | 1994-06-10 | 1995-12-22 | Nippondenso Co Ltd | 半導体装置 |
JPH0818004A (ja) * | 1994-06-29 | 1996-01-19 | Hitachi Ltd | 半導体装置とその製法 |
JPH0964198A (ja) * | 1995-08-30 | 1997-03-07 | Denso Corp | 半導体集積回路装置 |
JP3075204B2 (ja) * | 1997-02-28 | 2000-08-14 | 日本電気株式会社 | 半導体装置の製造方法 |
JPH11354631A (ja) * | 1998-06-11 | 1999-12-24 | Nec Kansai Ltd | 半導体装置 |
EP1020920B1 (en) * | 1999-01-11 | 2010-06-02 | Sel Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having a driver TFT and a pixel TFT on a common substrate |
EP1031873A3 (en) * | 1999-02-23 | 2005-02-23 | Sel Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and fabrication method thereof |
US7821065B2 (en) * | 1999-03-02 | 2010-10-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising a thin film transistor comprising a semiconductor thin film and method of manufacturing the same |
JP3713418B2 (ja) * | 2000-05-30 | 2005-11-09 | 光正 小柳 | 3次元画像処理装置の製造方法 |
JP2005353997A (ja) * | 2004-06-14 | 2005-12-22 | Ricoh Co Ltd | 半導体装置及びその製造方法 |
JP4501633B2 (ja) * | 2004-10-28 | 2010-07-14 | ソニー株式会社 | 固体撮像素子とその製造方法 |
US7268410B1 (en) * | 2005-01-24 | 2007-09-11 | National Semiconductor Corporation | Integrated switching voltage regulator using copper process technology |
KR100672995B1 (ko) * | 2005-02-02 | 2007-01-24 | 삼성전자주식회사 | 이미지 센서의 제조 방법 및 그에 의해 형성된 이미지 센서 |
JP2006289520A (ja) * | 2005-04-06 | 2006-10-26 | Toshiba Corp | Mems技術を使用した半導体装置 |
JP4533283B2 (ja) * | 2005-08-29 | 2010-09-01 | 新光電気工業株式会社 | 半導体装置の製造方法 |
US7781781B2 (en) * | 2006-11-17 | 2010-08-24 | International Business Machines Corporation | CMOS imager array with recessed dielectric |
FR2910707B1 (fr) * | 2006-12-20 | 2009-06-12 | E2V Semiconductors Soc Par Act | Capteur d'image a haute densite d'integration |
JP2008205091A (ja) * | 2007-02-19 | 2008-09-04 | Fujifilm Corp | 電子デバイス及びその製造方法並びに電子デバイス用シリコン基板 |
US7855153B2 (en) * | 2008-02-08 | 2010-12-21 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US7919348B2 (en) * | 2008-06-13 | 2011-04-05 | Aptina Imaging Corporation | Methods for protecting imaging elements of photoimagers during back side processing |
US7875948B2 (en) * | 2008-10-21 | 2011-01-25 | Jaroslav Hynecek | Backside illuminated image sensor |
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