JP5343164B2 - インターポーザー及びそれを用いた電子装置 - Google Patents
インターポーザー及びそれを用いた電子装置 Download PDFInfo
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- JP5343164B2 JP5343164B2 JP2012509439A JP2012509439A JP5343164B2 JP 5343164 B2 JP5343164 B2 JP 5343164B2 JP 2012509439 A JP2012509439 A JP 2012509439A JP 2012509439 A JP2012509439 A JP 2012509439A JP 5343164 B2 JP5343164 B2 JP 5343164B2
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- inorganic insulating
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- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49827—Via connections through the substrates, e.g. pins going through the substrate, coaxial cables
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Description
以下に、本発明の第1実施形態に係るインターポーザーを含む電子装置を、図面に基づいて詳細に説明する。
回折法で測定することにより、該測定値と結晶相領域の体積比との相対的関係を示す検量線を作成する。次に、測定対象である調査試料をX線回折法で測定し、該測定値と検量線とを比較して、該測定値から結晶相領域の体積比を算出することにより、調査資料の結晶相領域の体積比が測定される。
なお、第1樹脂層18aは、厚みが第1無機絶縁層17aの例えば0.1倍以上0.9倍以下に設定されている。また、第1樹脂層18aは、平面方向及び厚み方向への熱膨張率が例えば第1無機絶縁層17aの2倍以上7倍以下に設定され、且つ、ヤング率が第1無機絶縁層17aの0.03倍以上0.3倍以下に設定されている。
(1)コア基板6を作製する。具体的には、例えば以下のように行う。
(3)図3(a)に示すように、銅箔15xと、該銅箔15x上に形成された無機絶縁層17と、を有する絶縁シート20を作製する。具体的には、例えば以下のように行う。
(6)第2バンプ5bを介して配線基板3にインターポーザー4を実装し、第1バンプ5aを介してインターポーザー4に電子部品2を実装することにより、図1(a)に示した電子装置1を作製することができる。
次に、本発明の第2実施形態に係るインターポーザーを含む電子装置を、図5に基づいて詳細に説明する。なお、上述した第1実施形態と同様の構成に関しては、記載を省略する。
次に、本発明の第3実施形態に係るインターポーザーを含む電子装置を、図7に基づいて詳細に説明する。なお、上述した第1及び第2実施形態と同様の構成に関しては、記載を省略する。
次に、本発明の第4実施形態に係るインターポーザーを含む電子装置を、図8及び図9に基づいて詳細に説明する。なお、上述した第1、第2及び第3実施形態と同様の構成に関しては、記載を省略する。
2 電子部品
3 配線基板
4 インターポーザー
5a 第1バンプ
5b 第2バンプ
5c 第3バンプ
6 コア基板
7 ビルドアップ部
8 樹脂基板
9 スルーホール導体
10 絶縁体
11 絶縁層
12 配線層
13 ビア導体
14 基体
15a 第1導電層
15b 第2導電層
16 貫通導体
17a 第1無機絶縁層
17b 第2無機絶縁層
18a 第1樹脂層
18b 第2樹脂層
19a 第1無機絶縁粒子
19b 第2無機絶縁粒子
19c 第3無機絶縁粒子
19d 第4無機絶縁粒子
20 絶縁シート
21 積層板
22 基材
23 貫通電極
24 繊維
25 無機絶縁部材
26 粉砕粒子
27 充填部
28 被覆部
29 接続部
Claims (10)
- 厚み方向に沿った貫通孔を有する基体と、該貫通孔に配された貫通導体と、前記基体の主面に当接し、前記貫通導体に電気的に接続された第1導電層と、を備え、
前記基体は、厚み方向に沿って互いに離間した第1及び第2無機絶縁層と、該第1及び第2無機絶縁層の間に介在され、前記第1及び第2無機絶縁層に当接された第1樹脂層と、前記第1導電層が当接する最外層に配された第2樹脂層と、を有し、
前記第1樹脂層は、厚み方向及び平面方向への熱膨張率が前記第1及び第2無機絶縁層よりも大きく、
前記第2樹脂層は、前記第1導電層及び前記第1無機絶縁層に当接しつつ前記第1導電層及び前記第1無機絶縁層の間に介在されており、厚み及びヤング率が前記第1樹脂層よりも小さいことを特徴とするインターポーザー。 - 請求項1に記載のインターポーザーにおいて、
前記第1及び第2無機絶縁層は、粒径が3nm以上110nm以下である、互いに結合した第1無機絶縁粒子を含むことを特徴とするインターポーザー。 - 請求項2に記載のインターポーザーにおいて、
前記第1及び第2無機絶縁層は、粒径が0.5μm以上5μm以下である、前記第1無機絶縁粒子を介して互いに接着された第2無機絶縁粒子をさらに含むことを特徴とするインターポーザー。 - 請求項2に記載のインターポーザーにおいて、
前記第1無機絶縁粒子は、アモルファス状態の酸化ケイ素からなることを特徴とするインターポーザー。 - 請求項1に記載のインターポーザーにおいて、
前記第1樹脂層は、厚みが前記第1及び第2無機絶縁層よりも小さいことを特徴とするインターポーザー。 - 請求項1に記載のインターポーザーにおいて、
前記第1樹脂層は、平面方向への熱膨張率が厚み方向への熱膨張率よりも小さい基材を含むことを特徴とするインターポーザー。 - 請求項6に記載のインターポーザーにおいて、
前記基材は、複数の繊維と、隣接する該繊維同士の近接箇所にて該隣接する繊維それぞれに接続した無機絶縁部材とを有することを特徴とするインターポーザー。 - 請求項1に記載のインターポーザーにおいて、
前記貫通導体は、前記貫通孔に充填されていることを特徴とするインターポーザー。 - 配線基板と、
該配線基板上に実装される電子部品と、
前記配線基板と前記電子部品との間に介在して、前記配線基板及び前記電子部品を電気的に接続する請求項1に記載のインターポーザーと、を備えたことを特徴とする電子装置。 - 厚み方向に離間した第1及び第2電子部品と、
前記第1及び第2電子部品の間に介在して、前記第1及び第2電子部品を電気的に接続する請求項1に記載のインターポーザーと、を備えたことを特徴とする電子装置。
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US8975529B2 (en) | 2015-03-10 |
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