JP5327233B2 - 半導体装置とその製造方法 - Google Patents
半導体装置とその製造方法 Download PDFInfo
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- JP5327233B2 JP5327233B2 JP2010547888A JP2010547888A JP5327233B2 JP 5327233 B2 JP5327233 B2 JP 5327233B2 JP 2010547888 A JP2010547888 A JP 2010547888A JP 2010547888 A JP2010547888 A JP 2010547888A JP 5327233 B2 JP5327233 B2 JP 5327233B2
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Description
まず、ウェハ100の表面にスパッタ法によって、第1層としてのTiN層131を形成する。図9は、本実施例に係るTiN層131、Al層132、Al−Si層133を形成するためのスパッタ装置36を概念的に示す図である。スパッタ装置36は、チャンバ34内に、バッキングプレート361と、ターゲット362と、ステージ343とを備えている。スパッタ装置36は、ターゲット362と、ステージ343上に載置するウェハとの間に高電圧を印加することが可能な構成となっている。ターゲット362とステージ343とは、チャンバ34内において対向しており、離間して配置されている。ステージ343には、温度センサが設置されており、ステージ343上に載置されるウェハ100の温度(基板温度)を検知することができる。
次に、ウェハ100の表面にスパッタ法によって、第2層としてのAl層132を形成する。具体的には、ターゲット362として用いる材料を高純度Alとし、ステージ343に設置された温度センサの検知値に基づき、基板温度が所定の温度となるように制御して、スパッタを行う。基板温度は、室温(25℃)以上300℃以下の範囲で設定することが好ましい。これによって、図5に示すように、TiN層131の表面にAl層132を形成することができる。Al層132は、層間絶縁膜16の段差を覆う程度の厚さに形成されており、Al層132の表面は平坦性が良い状態となっている。
次に、スパッタ法によって、第3層としてのAl−Si層133を形成する。具体的には、ターゲット362として用いる材料をAl−Si合金とし、ステージ343に設置された温度センサの検知値に基づき、基板温度が所定の温度となるように制御して、スパッタを行う。基板温度は、室温(25℃)以上300℃以下の範囲で設定することが好ましい。これによって、図6に示すように、Al層132の表面にAl−Si層133を形成することができる。Al層132の表面を平坦性が良い状態とすることによって、Al−Si層133の表面も平坦性が良い状態とすることができる。なお、平坦性の良いAl層132の表面にAl−Si層133を形成するため、Al−Si層133を低温でスパッタしても、Al−Si層133の表面の平坦性を確保することができる。Al−Si層133を低温でスパッタすることができるため、Siノジュールの発生が抑えられる。その結果、表面電極13と半導体基板11とのオーミック接合が確保される。
第3層であるAl−Si層133の表面に亜鉛(Zn)置換処理を行う。Zn置換処理では、100g/Lとなるように酸化亜鉛(ZnO)を500g/Lの水酸化ナトリウム(NaOH)溶液に溶解し、ジンケート処理液を調製する。このジンケート処理液中には、ジンケートイオンZnO2 2−が存在している。このジンケート処理液を用いて、ダブルジンケート処理を行う。
Zn置換膜が形成されたAl−Si層133の表面に、図8に示すように、第4層として、Ni層134を無電解めっきによって形成する。Ni層134の無電解めっきは、例えば、還元剤に次亜リン酸ナトリウムを用いるニッケル−リン合金(Ni−P)めっき等によって行うことができる。
Claims (2)
- 半導体基板と、その半導体基板の表面に積層されている表面電極とを備えており、
その表面電極の少なくとも一部が、半導体基板の表面側に形成された第1層と、第1層の表面側に形成された第2層と、第2層の表面に接する第3層と、第3層の表面側に形成された第4層と、を含んでおり、
前記第1層は、バリア金属層であり、
前記第2層は、Al層であり、
前記第3層は、Al−Si層、またはAl−Cu層、またはAl−Si−Cu層であり、
前記第4層は、はんだ接合層である半導体装置。 - 半導体基板と、半導体基板の表面に積層されている表面電極とを備えた半導体装置の製造方法であって、
半導体基板の表面にバリア金属によって第1層を形成する第1工程と、
前記第1工程の後に、第1層の表面にAlによって第2層を形成する第2工程と、
前記第2工程の後に、前記第2層の表面にAl−SiまたはAl−CuまたはAl−Si−Cuによって第3層を形成する第3工程と、
前記第3工程の後に、前記第3層の表面を亜鉛置換処理する第4工程と、
前記第4工程の後に、前記第3層の表面にはんだ接合層である第4層を無電解めっきによって形成する第5工程とを含む半導体装置の製造方法。
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JP5855361B2 (ja) * | 2011-05-31 | 2016-02-09 | 三菱電機株式会社 | 半導体装置 |
JP5684653B2 (ja) * | 2011-06-13 | 2015-03-18 | 株式会社Pfu | 画像読取装置 |
JP2017118060A (ja) * | 2015-12-25 | 2017-06-29 | ローム株式会社 | 半導体装置および半導体装置の製造方法 |
DE102016102493B3 (de) * | 2016-02-12 | 2017-07-20 | Infineon Technologies Ag | Halbleitervorrichtung mit einem temperatursensor, temperatursensor und verfahren zum herstellen einer halbleitervorrichtung mit einem temperatursensor |
CN108666287B (zh) * | 2017-04-01 | 2020-07-28 | 中芯国际集成电路制造(北京)有限公司 | 一种焊盘结构 |
JP6946922B2 (ja) * | 2017-10-18 | 2021-10-13 | 株式会社デンソー | 半導体装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01318236A (ja) * | 1988-06-17 | 1989-12-22 | Sanyo Electric Co Ltd | 半導体装置 |
JP2001284525A (ja) * | 2000-03-30 | 2001-10-12 | Denso Corp | 半導体チップおよび半導体装置 |
JP2002093742A (ja) * | 2000-09-18 | 2002-03-29 | National Institute Of Advanced Industrial & Technology | オーミック電極構造体、その製造方法、半導体装置及び半導体装置の製造方法 |
JP2007019412A (ja) * | 2005-07-11 | 2007-01-25 | Denso Corp | 半導体装置およびその製造方法 |
JP2008501246A (ja) * | 2004-05-28 | 2008-01-17 | インターナショナル レクティファイアー コーポレイション | 表面実装のためのフロント接点の形成 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1986006878A1 (en) * | 1985-05-10 | 1986-11-20 | Asahi Kasei Kogyo Kabushiki Kaisha | Magneto-electric converter element |
US4987562A (en) * | 1987-08-28 | 1991-01-22 | Fujitsu Limited | Semiconductor layer structure having an aluminum-silicon alloy layer |
JP2593965B2 (ja) * | 1991-01-29 | 1997-03-26 | 三菱電機株式会社 | 半導体装置 |
JPH0547764A (ja) | 1991-08-07 | 1993-02-26 | Ricoh Co Ltd | 半導体装置とその製造方法 |
EP1918991B1 (en) * | 1996-08-27 | 2017-04-05 | Nippon Steel & Sumitomo Metal Corporation | Semiconductor device provided with low melting point metal bumps |
JP3663786B2 (ja) * | 1996-10-14 | 2005-06-22 | ヤマハ株式会社 | 半導体チップの実装方法と実装構造 |
US6100194A (en) * | 1998-06-22 | 2000-08-08 | Stmicroelectronics, Inc. | Silver metallization by damascene method |
US6436816B1 (en) * | 1998-07-31 | 2002-08-20 | Industrial Technology Research Institute | Method of electroless plating copper on nitride barrier |
US6187680B1 (en) * | 1998-10-07 | 2001-02-13 | International Business Machines Corporation | Method/structure for creating aluminum wirebound pad on copper BEOL |
JP2000114302A (ja) * | 1998-10-08 | 2000-04-21 | Fuji Electric Co Ltd | 半導体装置 |
JP2000252313A (ja) | 1999-02-25 | 2000-09-14 | Sony Corp | メッキ被膜の形成方法および半導体装置の製造方法 |
US6703707B1 (en) | 1999-11-24 | 2004-03-09 | Denso Corporation | Semiconductor device having radiation structure |
US6693350B2 (en) | 1999-11-24 | 2004-02-17 | Denso Corporation | Semiconductor device having radiation structure and method for manufacturing semiconductor device having radiation structure |
TW517334B (en) * | 2000-12-08 | 2003-01-11 | Nec Corp | Method of forming barrier layers for solder bumps |
JP4372690B2 (ja) * | 2002-12-06 | 2009-11-25 | 株式会社タムラ製作所 | はんだバンプの形成方法及び装置 |
JP4203724B2 (ja) | 2003-03-04 | 2009-01-07 | 上村工業株式会社 | アルミニウム酸化皮膜用除去液及びアルミニウム又はアルミニウム合金の表面処理方法 |
JP2005314738A (ja) | 2004-04-28 | 2005-11-10 | Technic Japan Inc | アルミニウム表面への無電解めっき方法および無電解めっき用触媒 |
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01318236A (ja) * | 1988-06-17 | 1989-12-22 | Sanyo Electric Co Ltd | 半導体装置 |
JP2001284525A (ja) * | 2000-03-30 | 2001-10-12 | Denso Corp | 半導体チップおよび半導体装置 |
JP2002093742A (ja) * | 2000-09-18 | 2002-03-29 | National Institute Of Advanced Industrial & Technology | オーミック電極構造体、その製造方法、半導体装置及び半導体装置の製造方法 |
JP2008501246A (ja) * | 2004-05-28 | 2008-01-17 | インターナショナル レクティファイアー コーポレイション | 表面実装のためのフロント接点の形成 |
JP2007019412A (ja) * | 2005-07-11 | 2007-01-25 | Denso Corp | 半導体装置およびその製造方法 |
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DE112009005044B4 (de) | 2014-04-30 |
US20120104612A1 (en) | 2012-05-03 |
US8426972B2 (en) | 2013-04-23 |
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