JP5324130B2 - Light irradiation device - Google Patents

Light irradiation device Download PDF

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JP5324130B2
JP5324130B2 JP2008134032A JP2008134032A JP5324130B2 JP 5324130 B2 JP5324130 B2 JP 5324130B2 JP 2008134032 A JP2008134032 A JP 2008134032A JP 2008134032 A JP2008134032 A JP 2008134032A JP 5324130 B2 JP5324130 B2 JP 5324130B2
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opening
irradiation
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closing means
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JP2009283662A (en
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順一 竹内
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Lintec Corp
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes

Abstract

The present invention discloses an ultraviolet irradiation device (10) which ultraviolizes a shone thing while taking a semiconductor chip (W) stuck with a ultraviolet constrictive type adhesive film (S), and the invention can move on a casing (14) when set collected in a sliding mechanism (15); the casing (14) is provided with a ultraviolet irradiation unit (11), and the adhesive film (S) is ultraviolized as irradiated surface when the sliding mechanism (15) moves in the direction bestrides an irradiation port (12) of the casing (14); the casing (14) is provided with a switch mechanism (17) which follows movement of the sliding mechanism (15) to open an irradiation port (12).

Description

本発明は光照射装置に係り、更に詳しくは、被照射体に対して光を効率良く照射することができる光照射装置に関する。   The present invention relates to a light irradiation apparatus, and more particularly to a light irradiation apparatus capable of efficiently irradiating light to an irradiated object.

半導体ウエハ（以下、単に、「ウエハ」と称する）の処理装置においては、ウエハの回路面に保護用の接着シートを貼付して裏面研削を行ったり、ダイシングテープを貼付して複数のチップに個片化したりする処理が行われる。このような処理に使用される接着シートには、接着剤に紫外線硬化型（光反応型）のものが採用されており、上記のような処理の後、紫外線照射装置により接着剤を硬化させることによって接着力を弱めて、ウエハが破損しないように容易に剥離が行えるようになっている。   In a processing apparatus for a semiconductor wafer (hereinafter simply referred to as “wafer”), a protective adhesive sheet is applied to the circuit surface of the wafer to perform back surface grinding, or a dicing tape is applied to a plurality of chips. A process of tidy up is performed. The adhesive sheet used for such treatment employs an ultraviolet curing type (photoreactive type) adhesive, and after the treatment as described above, the adhesive is cured by an ultraviolet irradiation device. As a result, the adhesive force is weakened so that the wafer can be easily peeled away so as not to break.

前記紫外線照射装置としては、例えば、特許文献１に開示されている。同文献における紫外線照射装置は、接着シートを介してウエハがリングフレームに一体化された被照射体を吸着保持する吸着機構と、上部が開放するとともに底部がガラス類で構成されたハウジングと、前記底部の下方から紫外線を照射する光源とを備えている。被照射体は、ハウジングを吸着機構で閉塞することで当該ハウジング内に位置するようになっており、この状態で、前記底部から紫外線を透過させて被照射体に照射するようになっている。
特開２００４−２８１４３０号公報 For example, Patent Document 1 discloses the ultraviolet irradiation device. The ultraviolet irradiation device in the document includes an adsorption mechanism for adsorbing and holding an irradiated object in which a wafer is integrated into a ring frame via an adhesive sheet, a housing having an upper portion opened and a bottom portion made of glass, And a light source for irradiating ultraviolet rays from below the bottom. The irradiated body is positioned in the housing by closing the housing with an adsorption mechanism, and in this state, the irradiated body is irradiated with ultraviolet rays from the bottom.
JP 2004-281430 A

しかしながら、特許文献１に開示された紫外線照射装置にあっては、底部の全領域を透過する紫外線により接着シートの接着剤を硬化させる構成、つまり、一括若しくは全面照射であるため、光源から相対的に離れた部位の照度を確保すべく高出力ランプを使用しなければならず、装置が大型化するとともに消費電力が多くなってランニングコストが高騰する、という不都合がある。従って、被照射体の平面積が大きいときは、それに対応して広い領域に紫外線を照射することのできるランプが必要となり、これが汎用性を低下させる要因となる。   However, in the ultraviolet irradiation device disclosed in Patent Document 1, the adhesive of the adhesive sheet is cured by ultraviolet rays that are transmitted through the entire area of the bottom portion, that is, because the irradiation is performed all at once or relative to the light source. In order to ensure the illuminance of the part far away, a high-power lamp must be used, and there is a disadvantage that the apparatus becomes larger and the power consumption increases and the running cost increases. Accordingly, when the plane area of the irradiated object is large, a lamp capable of irradiating ultraviolet rays over a corresponding wide area is required, which causes a decrease in versatility.

［発明の目的］
本発明は、このような不都合に着目して案出されたものであり、その目的は、部分照射により、紫外線等の光を被照射体に対して効率よく照射し、消費電力を軽減しつつランニングコストを抑制し、しかも、光の外部への漏れを防止することのできる光照射装置を提供することにある。 [Object of invention]
The present invention has been devised by paying attention to such inconveniences, and its purpose is to efficiently irradiate the irradiated object with light such as ultraviolet rays by partial irradiation while reducing power consumption. An object of the present invention is to provide a light irradiation device capable of suppressing running cost and preventing leakage of light to the outside.

前記目的を達成するため、本発明は、光反応型の接着シートが貼付若しくは仮着された被照射体に光を照射する光照射装置において、
内部に光照射ユニットを備えるとともに、光を照射する照射口を備えたハウジングと、前記照射口を横断する方向に相対移動可能に設けられるとともに、前記被照射体を受容する受容口を有するスライド手段と、前記被照射体を保持するとともに、前記受容口を通じて被照射体をスライド手段の内部に配置させたときに当該スライド手段に係合して受容口を閉塞する保持手段と、前記照射口を開閉する開閉手段と、この開閉手段を所定方向に付勢する付勢手段とを備え、前記開閉手段は、前記付勢手段によって前記照射口を常時開放する方向に付勢されているとともに、前記スライド手段の移動に追従して前記照射口を開閉する、という構成を採っている。 In order to achieve the above object, the present invention provides a light irradiation apparatus for irradiating light to an irradiated object to which a photoreactive adhesive sheet is attached or temporarily attached.
A slide means having a light irradiation unit therein, a housing having an irradiation port for irradiating light, and a receiving port for receiving the irradiated object, and being provided so as to be relatively movable in a direction transverse to the irradiation port. Holding means for holding the irradiated body and engaging the sliding means when the irradiated body is disposed inside the sliding means through the receiving port, and closing the receiving port; An opening / closing means for opening and closing; and an urging means for urging the opening / closing means in a predetermined direction, wherein the opening / closing means is urged by the urging means in a direction to always open the irradiation port, and The irradiation opening is opened and closed following the movement of the sliding means.

本発明において、前記開閉手段は、前記スライド手段の移動方向に沿って前記光照射ユニットを中間に挟むように配置された第１及び第２の開閉手段を含み、これら開閉手段は、前記スライド手段が紫外線照射待機位置から紫外線照射完了位置に向かって照射口を横断する際に、第１の開閉手段が照射口を次第に開放する方向に移動する一方、第２の開閉手段が照射口を次第に閉塞する方向に移動する、という構成を採用することが好ましい。   In the present invention, the opening / closing means includes first and second opening / closing means arranged so as to sandwich the light irradiation unit in the middle along the moving direction of the sliding means, and the opening / closing means includes the sliding means. When the irradiation crosses the irradiation port from the ultraviolet irradiation standby position toward the ultraviolet irradiation completion position, the first opening / closing means moves in a direction to gradually open the irradiation port, while the second opening / closing means gradually closes the irradiation port. It is preferable to adopt a configuration of moving in a moving direction.

また、前記開閉手段は、前記光照射ユニットの側方に単一配置とされ、当該開閉手段は、前記スライド手段が紫外線照射待機位置から紫外線照射完了位置に向かって照射口を横断する際に、前記照射口を次第に開放する方向に移動する構成を採ってもよい。   Further, the opening and closing means is a single arrangement on the side of the light irradiation unit, the opening and closing means, when the slide means crosses the irradiation port from the ultraviolet irradiation standby position toward the ultraviolet irradiation completion position, You may take the structure which moves to the direction which opens the said irradiation opening gradually.

更に、本発明は、前記開閉手段の位置を検出する位置検出手段を含み、前記照射口の開閉が適性に行われないときに、所定の信号を外部に出力するように設けることができる。   Furthermore, the present invention can include a position detection unit that detects a position of the opening / closing unit, and can output a predetermined signal to the outside when the irradiation port is not properly opened / closed.

本発明によれば、スライド手段の移動に追従して開閉手段が照射口を開閉する構成であるため、被照射体を受容したスライド手段が照射口を横断する際に、当該照射口を開放して紫外線を照射しつつ部分照射を行うことができる。従って、従来のような一括若しくは全面照射を行う必要がなくなり、高出力ランプを使用することなく、光の出力は従来装置に比べて小さくても足りるようになり、省エネルギータイプの光照射装置を提供することが可能となる。しかも、開閉手段は、被照射体に対する光照射に必要な領域以外を閉塞するため、紫外線等の有害な光が外部へ漏れることを防止でき、当該光が作業者の目に入ってしまうような不都合も回避可能となる。
また、開閉手段を単一とした構成では、ハウジングの小型化を達成することができ、特に、光照射面積が小さい被照射体を対象とした場合に実益をもたらす。
更に、検知手段を設けた構成では、開閉手段の意図しない動作不良が生じて紫外線の照射が適性に行われない、といった不都合を回避することができる。 According to the present invention, since the opening / closing means opens and closes the irradiation port following the movement of the slide means, the irradiation port is opened when the slide means receiving the irradiated object crosses the irradiation port. Thus, partial irradiation can be performed while irradiating ultraviolet rays. Therefore, it is not necessary to perform batch or whole-surface irradiation as in the past, and the light output can be smaller than that of the conventional device without using a high-power lamp, providing an energy-saving light irradiation device. It becomes possible to do. Moreover, since the opening / closing means closes the area other than that necessary for light irradiation to the irradiated object, harmful light such as ultraviolet rays can be prevented from leaking to the outside, and the light enters the eyes of the operator. Inconvenience can be avoided.
In addition, the configuration with a single opening / closing means can achieve a reduction in the size of the housing, and is particularly beneficial when an object to be irradiated having a small light irradiation area is targeted.
Furthermore, in the configuration provided with the detection means, it is possible to avoid the inconvenience that an unintentional malfunction of the opening / closing means occurs and ultraviolet rays are not properly irradiated.

以下、本発明の好ましい実施の形態について図面を参照しながら説明する。   Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.

図１には、本発明が紫外線照射装置に適用された実施形態に係る概略斜視図が示され、図２には、その一部を断面視した概略正面図が示され、図３には図２のＡ矢視断面図が示されている。これらの図において、光照射装置としての紫外線照射装置１０は、被照射体としての光反応型（紫外線硬化型）の接着シートＳが仮着されたウエハＷに光（紫外線）を照射する装置として構成とされている。この紫外線照射装置１０は、内部に紫外線照射ユニット１１が配置されているとともに上面に紫外線の照射口１２が設けられたハウジング１４と、このハウジング１４に移動可能に支持されたスライド手段１５と、ウエハＷを保持する保持手段１６と、ハウジング１４内に設けられた一対の開閉手段１７と、これら開閉手段１７が前記照射口１２を常時開放する方向に付勢する一対の付勢手段１８と、開閉手段１７の位置を検出する位置検出手段１９とを備えて構成されている。   FIG. 1 shows a schematic perspective view according to an embodiment in which the present invention is applied to an ultraviolet irradiation device, FIG. 2 shows a schematic front view of a part thereof, and FIG. 2 is a cross-sectional view taken along arrow A. In these drawings, an ultraviolet irradiation apparatus 10 as a light irradiation apparatus is an apparatus that irradiates light (ultraviolet rays) to a wafer W temporarily attached with a photoreactive (ultraviolet curable) adhesive sheet S as an irradiated body. It is configured. The ultraviolet irradiation device 10 includes a housing 14 in which an ultraviolet irradiation unit 11 is disposed and an ultraviolet irradiation port 12 provided on the upper surface, slide means 15 movably supported by the housing 14, and a wafer. A holding means 16 for holding W; a pair of opening / closing means 17 provided in the housing 14; a pair of urging means 18 for urging the opening 12 to always open the irradiation port 12; Position detecting means 19 for detecting the position of the means 17 is provided.

前記紫外線照射ユニット１１は、光源をなす水銀ランプ２０と、当該水銀ランプ２０から発光される紫外線を集光させて接着シートＳに照射するための反射面を形成する反射フード２１とからなる。水銀ランプ２０は、ハウジング１４のＹ軸方向に沿って配置され、反射フード２１は、図２に示されるように、断面が水銀ランプ２０に沿う略Ｕ字形状（放物面形状）に設けられている。この反射フード２１は、水銀ランプ２０からの紫外線を内側の曲面により反射させ、接着シートＳに対して、Ｙ軸方向に沿う所定幅のライン状の部分照射となるように構成されている。   The ultraviolet irradiation unit 11 includes a mercury lamp 20 that forms a light source, and a reflective hood 21 that forms a reflective surface for collecting the ultraviolet light emitted from the mercury lamp 20 and irradiating the adhesive sheet S. The mercury lamp 20 is disposed along the Y-axis direction of the housing 14, and the reflection hood 21 is provided in a substantially U shape (parabolic shape) whose cross section is along the mercury lamp 20 as shown in FIG. 2. ing. The reflection hood 21 is configured to reflect the ultraviolet rays from the mercury lamp 20 by the curved surface on the inner side and to irradiate the adhesive sheet S with a line-shaped partial irradiation having a predetermined width along the Y-axis direction.

前記ハウジング１４は、略直方体状の本体２３と、この本体２３の上面２３Ａに設けられた照射口１２と、Ｘ軸方向に延びるガイドレール２５とを含み、照射口１２は、反射フード２１の上部開口領域に略対応した形状に形成されている。   The housing 14 includes a substantially rectangular parallelepiped main body 23, an irradiation port 12 provided on the upper surface 23 </ b> A of the main body 23, and a guide rail 25 extending in the X-axis direction. It is formed in a shape substantially corresponding to the opening region.

前記スライド手段１５は、スライド本体２６と、このスライド本体２６のＸ軸方向両側に設けられたスライダ２７とにより構成されている。スライド本体２６は、ウエハＷを受容する略円形の受容口２９を備えた頂壁２８と、この頂壁２８の外周から垂下した側壁３０とを含んで下部が開放口３０となる形状に設けられている。また、スライダ２７は、ガイドレール２５に沿って移動可能とされ、これにより、スライド本体２６は紫外線照射待機位置Ｐ１（図２参照）と、紫外線照射完了位置Ｐ２（図７参照）との間において、照射口１２を横断する方向に相対移動可能に設けられている。   The slide means 15 includes a slide main body 26 and sliders 27 provided on both sides of the slide main body 26 in the X-axis direction. The slide body 26 includes a top wall 28 having a substantially circular receiving port 29 for receiving the wafer W and a side wall 30 depending from the outer periphery of the top wall 28, and is provided in a shape in which the lower part is an open port 30. ing. The slider 27 is movable along the guide rail 25, whereby the slide body 26 is located between the ultraviolet irradiation standby position P1 (see FIG. 2) and the ultraviolet irradiation completion position P2 (see FIG. 7). , And can be moved relative to each other in the direction crossing the irradiation port 12.

前記スライド本体２６において、図３中左端側の側壁３０の中央部には、Ｌ型ブラケット３３が設けられており、当該ブラケット３３の上部平面部には、保持手段１６との相対位置を決定する位置決め穴３３Ａが形成されている。また、スライド本体２６は、紫外線照射待機位置Ｐ１にあるときに、ストッパ３５を介して位置規制されるようになっている。このストッパ３５は、図３中左側壁３０に設けられたストッパ片３６と、シリンダ３７とにより構成されている。   In the slide body 26, an L-shaped bracket 33 is provided at the center of the side wall 30 on the left end side in FIG. 3, and the relative position with respect to the holding means 16 is determined on the upper flat portion of the bracket 33. A positioning hole 33A is formed. Further, the position of the slide body 26 is regulated via the stopper 35 when it is at the ultraviolet irradiation standby position P1. The stopper 35 includes a stopper piece 36 provided on the left side wall 30 in FIG.

前記保持手段１６は、支持基板３９と、当該支持基板３９よりも小径に設けられるとともに、図示しない減圧ポンプに接続されウエハＷの形状に対応した吸着プレート４０と、支持基板３９の上面側に連結されてＹ軸方向に延びるアーム４１と、当該アーム４１をＺ軸方向に移動可能に支持するＺ軸ロボット４２と、このＺ軸ロボット４２をＸ軸方向に移動可能に支持するＸ軸ロボット４３とを備えて構成されている。吸着プレート４０は、下面側を吸着面として図示しない吸着孔が設けられ、ウエハＷを吸着保持可能になっている。なお、ハウジング１４の隣接位置には、ウエハＷの支持テーブル４５が配置されている。また、アーム４１の下面側には係合ピン４７が突設され、位置決め穴３３Ａに係脱するようになっており、係合状態において、吸着プレート４０及びウエハＷがスライド本体２６内に位置し、支持基板３９がスライド本体２６に係合して受容口２９を閉塞する。   The holding means 16 is provided with a support substrate 39, a diameter smaller than that of the support substrate 39, and connected to a suction plate 40 corresponding to the shape of the wafer W connected to a decompression pump (not shown) and an upper surface side of the support substrate 39. An arm 41 that extends in the Y-axis direction, a Z-axis robot 42 that supports the arm 41 movably in the Z-axis direction, and an X-axis robot 43 that supports the Z-axis robot 42 movably in the X-axis direction. It is configured with. The suction plate 40 is provided with suction holes (not shown) with the lower surface side as the suction surface, and can hold the wafer W by suction. A support table 45 for the wafer W is disposed adjacent to the housing 14. An engaging pin 47 projects from the lower surface side of the arm 41 so as to be engaged with and disengaged from the positioning hole 33A. In the engaged state, the suction plate 40 and the wafer W are positioned in the slide body 26. The support substrate 39 engages with the slide body 26 and closes the receiving port 29.

前記開閉手段１７は、図２に示されるように、紫外線照射ユニット１１を中間に挟んで対称配置された第１の開閉手段１７Ａと、右側に配置された第２の開閉手段１７Ｂとにより構成されている。また、付勢手段１８は、各開閉手段１７Ａ、１７Ｂを付勢する第１、第２の付勢手段１８Ａ、１８Ｂにより構成されている。なお、第２の開閉手段１７Ｂ及び第２の付勢手段１８Ｂについては、第１の開閉手段１７Ａ及び第２の付勢手段１８Ａの末尾符号「Ａ」を「Ｂ」に置き換えれば説明できるため説明を簡略化する。   As shown in FIG. 2, the opening / closing means 17 is composed of a first opening / closing means 17A arranged symmetrically with the ultraviolet irradiation unit 11 in between, and a second opening / closing means 17B arranged on the right side. ing. The urging means 18 includes first and second urging means 18A and 18B that urge the opening / closing means 17A and 17B. The second opening / closing means 17B and the second urging means 18B can be explained by replacing the suffix “A” of the first opening / closing means 17A and the second urging means 18A with “B”. To simplify.

前記第１の開閉手段１７Ａは、ハウジング１４の照射口１２を閉塞可能な大きさに設けけられるとともに、起立部５１Ａを有する開閉プレート５０Ａにより構成されている。起立部５１Ａは、スライド本体２６の側壁３０の内面に当接可能な高さに設けられている。   The first opening / closing means 17A is provided with a size capable of closing the irradiation port 12 of the housing 14, and is configured by an opening / closing plate 50A having an upright portion 51A. The upright portion 51 </ b> A is provided at a height that can contact the inner surface of the side wall 30 of the slide body 26.

前記第１の付勢手段１８Ａはエアシリンダ５３Ａにより構成され、このエアシリンダ５３Ａのスライダ５４Ａに開閉プレート５０Ａが支持され、当該開閉プレート５０Ａを図２中矢印ａ方向に常に付勢するようになっている。これにより開閉プレート５０Ａは、スライド本体２６が図２中左側に移動することを条件に、スライド本体２６に追従して開閉プレート５０Ａが移動して照射口１２を開放する。   The first urging means 18A is constituted by an air cylinder 53A, and an opening / closing plate 50A is supported by a slider 54A of the air cylinder 53A, and always urges the opening / closing plate 50A in the direction of arrow a in FIG. ing. As a result, the opening / closing plate 50A opens the irradiation port 12 by moving the opening / closing plate 50A following the slide body 26 on the condition that the slide body 26 moves to the left in FIG.

一方、前記第２の開閉手段１７Ｂを構成する開閉プレート５０Ｂは、図２中矢印ｂ方向に付勢されている。これにより開閉プレート５０Ｂは、スライド本体２６が図２中左側に移動することを条件に、右側壁３０に起立部５１Ｂが係合しスライド本体２６に追従して開閉プレート５０Ｂが移動して照射口１２を閉塞する。   On the other hand, the opening / closing plate 50B constituting the second opening / closing means 17B is urged in the direction of arrow b in FIG. Thereby, the opening / closing plate 50B is moved on the condition that the slide body 26 moves to the left side in FIG. 12 is closed.

前記位置検出手段１９は、シリンダ５３Ａの左右両側に配置されたオートスイッチからなり、開放位置検出スイッチ６０Ａと、閉塞位置検出スイッチ６１Ａとを含む。開放位置検出スイッチ６０Ａは、開閉プレート５０Ａが開放位置（図６参照）に達したときにスライダ５４Ａを検出して図示しない制御装置に信号を出力する。一方、閉塞位置検出スイッチ６１Ａは、開閉プレート５０Ａが閉塞位置（図２参照）に達したときにスライダ５４Ａを検出して同様に信号を出力するようになっている。なお、制御装置は、スライド本体２６が所定の条件下に位置するときに、前記スイッチ６０Ａ、６１Ａからの信号が入力されなければ外部に所定の信号を出力する。   The position detecting means 19 is composed of auto switches arranged on both the left and right sides of the cylinder 53A, and includes an open position detecting switch 60A and a closing position detecting switch 61A. The open position detection switch 60A detects the slider 54A and outputs a signal to a control device (not shown) when the open / close plate 50A reaches the open position (see FIG. 6). On the other hand, the closing position detection switch 61A detects the slider 54A and similarly outputs a signal when the opening / closing plate 50A reaches the closing position (see FIG. 2). The control device outputs a predetermined signal to the outside when the slide body 26 is positioned under a predetermined condition, unless a signal is input from the switches 60A and 61A.

次に、本実施形態に係る紫外線照射方法について、図４ないし図７をも参照しながら説明する。   Next, the ultraviolet irradiation method according to the present embodiment will be described with reference to FIGS.

所定の処理が施された接着シートＳ付ウエハＷが図示しない移載アーム等を介して支持テーブル４５の上面に移載されると、Ｘ、Ｚ軸ロボット４３、４２を介して吸着プレート４０がウエハＷを吸着保持してスライド本体２６の真上に移動する。その後、Ｚ軸ロボット４２を介して吸着プレート４０が所定量下降することで、ウエハＷがスライド本体２６内に受容され、受容口２９を閉塞する。この時、ピン４７がブラケット３３の位置決め穴３３Ａに係合する。ピン４７とブラケット３３との係合が図示しない検知手段によって検知されると、ストッパ３５によるスライド本体２６の固定が解除されるとともに、前記閉塞位置検出スイッチ６１Ａ及び開放位置検出スイッチ６０Ｂがそれぞれスライダ５４Ａ、５４Ｂを検知していることを条件として、以後の制御に移行する。   When the wafer W with the adhesive sheet S subjected to the predetermined processing is transferred onto the upper surface of the support table 45 via a transfer arm or the like (not shown), the suction plate 40 is moved via the X and Z axis robots 43 and 42. The wafer W is sucked and held and moved directly above the slide body 26. Thereafter, the suction plate 40 is lowered by a predetermined amount via the Z-axis robot 42, whereby the wafer W is received in the slide body 26 and closes the receiving port 29. At this time, the pin 47 engages with the positioning hole 33 </ b> A of the bracket 33. When the engagement between the pin 47 and the bracket 33 is detected by a detection means (not shown), the fixing of the slide body 26 by the stopper 35 is released, and the closing position detecting switch 61A and the opening position detecting switch 60B are respectively connected to the slider 54A. , 54B is detected, and the process proceeds to the subsequent control.

Ｘ軸ロボット４３が駆動することにより、図５に示されるように、スライド本体２６がＸ軸方向に沿って左側に移動を開始する。すると、開閉プレート５０Ａが第１の付勢手段１８Ａの付勢力によってスライド本体２６に追従移動して照射口１２を次第に開放し、紫外線照射ユニット１１によりライン状に収束された紫外線が接着シートＳに照射され、当該接着シートＳの接着剤を硬化反応させる。   When the X-axis robot 43 is driven, the slide body 26 starts to move to the left along the X-axis direction as shown in FIG. Then, the opening / closing plate 50A is moved following the slide body 26 by the urging force of the first urging means 18A to gradually open the irradiation port 12, and the ultraviolet rays converged in a line shape by the ultraviolet irradiation unit 11 are applied to the adhesive sheet S. Irradiated to cause the adhesive of the adhesive sheet S to undergo a curing reaction.

図６に示されるように、スライド本体２６が更に移動すると、起立部５１Ａが照射口１２に当接するとともに、右側壁３０が起立部５１Ｂに当接して開閉プレート５０Ｂが左側に移動を開始し、照射口１２から外部に紫外線が漏れることがないように、スライド本体２６と相互に作用して照射口１２を次第に閉塞することとなる。なお、この開閉プレート５０Ａの開放動作において、スライド本体２６の左側壁３０が照射口１２の左端を通り過ぎた時点で、スライダ５４Ａが開放位置検出スイッチ６０Ａによって検出されないときは、開閉プレート５０Ａが移動を停止し、紫外線が接着シートＳに照射されずに処理が完了してしまうことになる。そこで、制御手段は上記のような所定条件において、開放位置検出スイッチ６０Ａからの信号入力がないときに、警告手段（回転灯やブザー）等の外部装置を作動させる信号を出力し、オペレータ等に異常を知らせるようになっている。   As shown in FIG. 6, when the slide body 26 further moves, the upright portion 51A comes into contact with the irradiation port 12, the right side wall 30 comes into contact with the upright portion 51B, and the opening / closing plate 50B starts moving to the left side. The irradiation port 12 is gradually closed by interacting with the slide body 26 so that ultraviolet rays do not leak outside from the irradiation port 12. In the opening operation of the opening / closing plate 50A, when the slider 54A is not detected by the opening position detection switch 60A when the left side wall 30 of the slide body 26 passes the left end of the irradiation port 12, the opening / closing plate 50A moves. It stops, and the process is completed without irradiating the adhesive sheet S with ultraviolet rays. Therefore, the control means outputs a signal for operating an external device such as a warning means (a rotating lamp or a buzzer) when there is no signal input from the open position detection switch 60A under the predetermined conditions as described above, to the operator or the like. Announce the abnormality.

スライド本体２６が更に移動して、図７に示される紫外線照射完了位置Ｐ２に達することで、紫外線照射が完了する。この紫外線照射完了位置Ｐ２は、紫外線照射ユニット１１を中心としたときに、紫外線照射待機位置Ｐ１と線対称位置に設定されている。   When the slide body 26 further moves and reaches the ultraviolet irradiation completion position P2 shown in FIG. 7, the ultraviolet irradiation is completed. The ultraviolet irradiation completion position P2 is set to a position symmetrical with the ultraviolet irradiation standby position P1 when the ultraviolet irradiation unit 11 is at the center.

その後、スライド手段１５は、上記の動作と逆の動作を行って、保持手段１６を介して紫外線照射待機位置Ｐ１に復帰され、ストッパ３５によって固定される。この復帰動作中にも紫外線が接着シートＳに照射され、開閉プレート５０Ｂの開放動作において、スライド本体２６の右側壁３０が照射口１２の右端を通り過ぎた時点で、スライダ５４Ｂが開放位置検出スイッチ６０Ｂによって検出されないときは、上記同様、警告手段等を介してオペレータ等に異常を知らせるようになっている。次いで、紫外線照射済みのウエハＷは、保持手段１６によって支持テーブル４５に移載され、図示しない移載アームを介して次工程に移載される。そして、次に紫外線照射を行うための新たなウエハが支持テーブル４５に移載された後、上記同様の動作が繰り返されることで、順次紫外線照射が行われる。   Thereafter, the slide means 15 performs an operation reverse to the above operation, returns to the ultraviolet irradiation standby position P1 via the holding means 16, and is fixed by the stopper 35. During this return operation, ultraviolet rays are applied to the adhesive sheet S, and when the right side wall 30 of the slide body 26 passes the right end of the irradiation port 12 in the opening operation of the opening / closing plate 50B, the slider 54B is opened by the opening position detection switch 60B. If not detected, the operator is notified of the abnormality via a warning means or the like as described above. Next, the wafer W that has been irradiated with ultraviolet rays is transferred to the support table 45 by the holding means 16 and transferred to the next step via a transfer arm (not shown). Then, after a new wafer for next ultraviolet irradiation is transferred to the support table 45, the same operation is repeated, so that the ultraviolet irradiation is sequentially performed.

従って、このような実施形態によれば、スライド本体２６内に受容されたウエハＷが照射口１２の上方を横断する方向に移動する際に、閉塞された空間内でウエハＷに紫外線を照射することができる、いう効果を得る。   Therefore, according to such an embodiment, when the wafer W received in the slide body 26 moves in a direction crossing the irradiation port 12, the wafer W is irradiated with ultraviolet rays in the closed space. The effect that can be.

以上のように、本発明を実施するための最良の構成、方法等は、前記記載で開示されているが、本発明は、これに限定されるものではない。
すなわち、本発明は、主に特定の実施形態に関して特に図示、説明されているが、本発明の技術的思想及び目的の範囲から逸脱することなく、以上説明した実施形態に対し、形状、位置若しくは配置等に関し、必要に応じて当業者が様々な変更を加えることができるものである。 As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this.
In other words, the present invention has been illustrated and described mainly with respect to specific embodiments, but without departing from the scope of the technical idea and object of the present invention, the shape, position, or With respect to the arrangement and the like, those skilled in the art can make various changes as necessary.

例えば、本発明に係る紫外線照射装置１０を構成する各部の相対位置、すなわちレイアウトは図示構成例に限定されるものではなく、ハウジング１４と保持手段１６等を上下若しくは左右に反転させたり、上下方向に向けたりすることも可能である。従って、方向を示す用語は、装置各部のレイアウトの変更によって下面、下部、上下等になり得るものとなり、これら変更した態様は本発明と均等なものとして含まれる。   For example, the relative position of each part constituting the ultraviolet irradiation apparatus 10 according to the present invention, that is, the layout is not limited to the illustrated configuration example, and the housing 14 and the holding means 16 etc. are reversed up and down or left and right, It is also possible to point to. Accordingly, the term indicating the direction can be the lower surface, the lower portion, the upper and lower sides, and the like by changing the layout of each part of the apparatus, and these changed modes are included as equivalent to the present invention.

また、前記実施形態では、保持手段１６がＸ軸方向に沿って移動することでスライド手段１５がハウジング１４上を移動する構成としたが、ハウジング１４や、それら両方を移動可能に設けてスライド手段１５との相対移動を行うように構成してもよい。この場合、ハウジング１４を移動可能に支持する適宜な移動手段を設ければ足りる。   In the above embodiment, the slide means 15 moves on the housing 14 when the holding means 16 moves along the X-axis direction. However, the slide means is provided by movably providing the housing 14 or both of them. You may comprise so that relative movement with 15 may be performed. In this case, it is sufficient to provide an appropriate moving means for supporting the housing 14 so as to be movable.

また、前記実施形態では、紫外線を照射することによって接着シートＳの接着剤を硬化させる場合を説明したが、感熱接着性の接着シートをウエハＷに仮着し、これを加熱することで当該接着シートをウエハＷに強力に貼付する装置等にも適用することが可能である。この場合の光としては、赤外線等が例示できる。   In the above embodiment, the case where the adhesive of the adhesive sheet S is cured by irradiating ultraviolet rays has been described. However, the heat-sensitive adhesive sheet is temporarily attached to the wafer W, and the adhesive is heated by heating the adhesive sheet. The present invention can also be applied to an apparatus for strongly attaching a sheet to the wafer W. Examples of light in this case include infrared rays.

更に、被照射体はウエハＷに限定されるものではなく、ガラス板、鋼板、または、樹脂板等、その他のものも対象とすることができ、半導体ウエハは、シリコンウエハや化合物ウエハであってもよい。   Further, the irradiated object is not limited to the wafer W, and other objects such as a glass plate, a steel plate, or a resin plate can be targeted. The semiconductor wafer is a silicon wafer or a compound wafer. Also good.

また、紫外線照射ユニット１１の光源としては、水銀ランプの他、ハロゲンランプ、蛍光灯、メタルハライドランプ、発光ダイオード等の採用を妨げない。   Further, as the light source of the ultraviolet irradiation unit 11, the adoption of a halogen lamp, a fluorescent lamp, a metal halide lamp, a light emitting diode, etc. in addition to a mercury lamp is not hindered.

更に、開閉手段１７は、少なくとも、第１の開閉手段１７Ａのみの単一配置としてもよく、この場合には、ハウジング１４のＸ軸方向に沿う長さを短寸化して全体をコンパクトに形成することが可能となる。   Furthermore, the opening / closing means 17 may be at least a single arrangement of only the first opening / closing means 17A. In this case, the length along the X-axis direction of the housing 14 is shortened to form the whole compactly. It becomes possible.

また、スライド手段１５は、それ自体を単軸ロボットのスライダに連結して自走型としてもよい。   The slide means 15 may be self-propelled by connecting itself to a slider of a single axis robot.

更に、位置検出手段１９は、開放位置検出スイッチ６０Ａ、６０Ｂのみで構成してもよく、当該スイッチ類は、オートスイッチ以外の種々のスイッチを採用することができる。   Further, the position detection means 19 may be constituted by only the open position detection switches 60A and 60B, and various switches other than the auto switch can be adopted as the switches.

また、スライド本体２６内をガラス等の紫外線透過可能な部材で仕切り、支持基板３９で受容口２９を閉塞したときに、密閉状態として窒素パージを行うようにしてもよい。これにより、紫外線硬化型の接着シートＳが酸素阻害を受けて硬化不良を起こすことを防止することができる。   Further, the inside of the slide main body 26 may be partitioned by a member such as glass that can transmit ultraviolet light, and when the receiving port 29 is closed by the support substrate 39, a nitrogen purge may be performed in a sealed state. Thereby, it is possible to prevent the ultraviolet curable adhesive sheet S from being cured due to oxygen inhibition.

本実施形態に係る紫外線照射装置の概略斜視図。The schematic perspective view of the ultraviolet irradiation device concerning this embodiment. 前記紫外線照射装置の一部を断面した概略正面図。The schematic front view which carried out the cross section of a part of said ultraviolet irradiation device. 図３のＡ矢視断面図。FIG. 4 is a cross-sectional view taken along arrow A in FIG. 3. ウエハがスライド本体内に受容された状態を示す動作説明図。Operation | movement explanatory drawing which shows the state in which the wafer was received in the slide main body. スライド手段が照射口を横断する方向に移動した状態を示す動作説明図。Operation | movement explanatory drawing which shows the state which the slide means moved to the direction which crosses an irradiation opening. スライド手段が図５よりも更に移動した状態を示す動作説明図。Operation | movement explanatory drawing which shows the state which the slide means moved further than FIG. スライド手段が紫外線照射完了位置に移動した状態を示す動作説明図。Operation | movement explanatory drawing which shows the state which the slide means moved to the ultraviolet irradiation completion position.

符号の説明Explanation of symbols

１０ 紫外線照射装置（光照射装置）
１１ 紫外線照射ユニット
１２ 照射口
１４ ハウジング
１５ スライド手段
１６ 保持手段
１７ 開閉手段
１７Ａ 第１の開閉手段
１７Ｂ 第２の開閉手段
１８ 付勢手段
１９ 位置検出手段
２９ 受容口
Ｐ１ 紫外線照射待機位置
Ｐ２ 紫外線照射完了位置
Ｓ 接着シート（被照射体）
Ｗ 半導体ウエハ（被照射体） 10 Ultraviolet irradiation device (light irradiation device)
DESCRIPTION OF SYMBOLS 11 Ultraviolet irradiation unit 12 Irradiation port 14 Housing 15 Slide means 16 Holding means 17 Opening / closing means 17A First opening / closing means 17B Second opening / closing means 18 Energizing means 19 Position detection means 29 Receiving port P1 Ultraviolet irradiation standby position P2 Ultraviolet irradiation completion Position S Adhesive sheet (irradiated body)
W Semiconductor wafer (object to be irradiated)

Claims (4)

光反応型の接着シートが貼付若しくは仮着された被照射体に光を照射する光照射装置において、
内部に光照射ユニットを備えるとともに、光を照射する照射口を備えたハウジングと、前記照射口を横断する方向に相対移動可能に設けられるとともに、前記被照射体を受容する受容口を有するスライド手段と、前記被照射体を保持するとともに、前記受容口を通じて被照射体をスライド手段の内部に配置させたときに当該スライド手段に係合して受容口を閉塞する保持手段と、前記照射口を開閉する開閉手段と、この開閉手段を所定方向に付勢する付勢手段とを備え、
前記開閉手段は、前記付勢手段によって前記照射口を常時開放する方向に付勢されているとともに、前記スライド手段の移動に追従して前記照射口を開閉することを特徴とする光照射装置。 In a light irradiation apparatus that irradiates light to an irradiated object to which a photoreactive adhesive sheet is attached or temporarily attached,
A slide means having a light irradiation unit therein, a housing having an irradiation port for irradiating light, and a receiving port for receiving the irradiated object, and being provided so as to be relatively movable in a direction transverse to the irradiation port. Holding means for holding the irradiated body and engaging the sliding means when the irradiated body is disposed inside the sliding means through the receiving port, and closing the receiving port; An opening / closing means for opening and closing; and an urging means for urging the opening / closing means in a predetermined direction,
The opening / closing means is urged by the urging means in a direction to always open the irradiation port, and opens and closes the irradiation port following the movement of the slide unit. 前記開閉手段は、前記スライド手段の移動方向に沿って前記光照射ユニットを中間に挟むように配置された第１及び第２の開閉手段を含み、これら開閉手段は、前記スライド手段が紫外線照射待機位置から紫外線照射完了位置に向かって照射口を横断する際に、第１の開閉手段が照射口を次第に開放する方向に移動する一方、第２の開閉手段が照射口を次第に閉塞する方向に移動することを特徴とする請求項１記載の光照射装置。   The opening / closing means includes first and second opening / closing means arranged so as to sandwich the light irradiation unit in the middle along the moving direction of the sliding means, and the opening / closing means includes the sliding means waiting for ultraviolet irradiation. When crossing the irradiation port from the position toward the ultraviolet irradiation completion position, the first opening / closing means moves in the direction of gradually opening the irradiation port, while the second opening / closing means moves in the direction of gradually closing the irradiation port. The light irradiation apparatus according to claim 1. 前記開閉手段は、前記光照射ユニットの側方に単一配置とされ、当該開閉手段は、前記スライド手段が紫外線照射待機位置から紫外線照射完了位置に向かって照射口を横断する際に、前記照射口を次第に開放する方向に移動することを特徴とする請求項１記載の光照射装置。   The opening / closing means is a single arrangement on the side of the light irradiation unit, and the opening / closing means is adapted to emit the irradiation when the slide means crosses the irradiation port from the ultraviolet irradiation standby position toward the ultraviolet irradiation completion position. The light irradiation apparatus according to claim 1, wherein the mouth gradually moves in a direction of opening. 前記開閉手段の位置を検出する位置検出手段を含み、前記照射口の開閉が適性に行われないときに、所定の信号を外部に出力することを特徴とする請求項１、２又は３記載の光照射装置。   The position detection means for detecting the position of the opening / closing means is provided, and when the opening / closing of the irradiation port is not properly performed, a predetermined signal is output to the outside. Light irradiation device.
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