JP5305741B2 - 測定方法 - Google Patents

測定方法 Download PDF

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Publication number
JP5305741B2
JP5305741B2 JP2008140559A JP2008140559A JP5305741B2 JP 5305741 B2 JP5305741 B2 JP 5305741B2 JP 2008140559 A JP2008140559 A JP 2008140559A JP 2008140559 A JP2008140559 A JP 2008140559A JP 5305741 B2 JP5305741 B2 JP 5305741B2
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JP
Japan
Prior art keywords
measured
shape
measurement
region
interference fringes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2008140559A
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English (en)
Japanese (ja)
Other versions
JP2009288051A (ja
JP2009288051A5 (enExample
Inventor
裕貴 大島
賢治 山添
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2008140559A priority Critical patent/JP5305741B2/ja
Priority to US12/473,626 priority patent/US8243282B2/en
Publication of JP2009288051A publication Critical patent/JP2009288051A/ja
Publication of JP2009288051A5 publication Critical patent/JP2009288051A5/ja
Application granted granted Critical
Publication of JP5305741B2 publication Critical patent/JP5305741B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP2008140559A 2008-05-29 2008-05-29 測定方法 Expired - Fee Related JP5305741B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2008140559A JP5305741B2 (ja) 2008-05-29 2008-05-29 測定方法
US12/473,626 US8243282B2 (en) 2008-05-29 2009-05-28 Interferometric shape measurement of different signs of curvature

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008140559A JP5305741B2 (ja) 2008-05-29 2008-05-29 測定方法

Publications (3)

Publication Number Publication Date
JP2009288051A JP2009288051A (ja) 2009-12-10
JP2009288051A5 JP2009288051A5 (enExample) 2011-07-14
JP5305741B2 true JP5305741B2 (ja) 2013-10-02

Family

ID=41379387

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008140559A Expired - Fee Related JP5305741B2 (ja) 2008-05-29 2008-05-29 測定方法

Country Status (2)

Country Link
US (1) US8243282B2 (enExample)
JP (1) JP5305741B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7880897B2 (en) * 2007-12-28 2011-02-01 Fujinon Corporation Light wave interferometer apparatus
JP5591063B2 (ja) * 2009-11-12 2014-09-17 キヤノン株式会社 測定方法及び測定装置
JP5955001B2 (ja) * 2012-01-25 2016-07-20 キヤノン株式会社 非球面形状計測方法、形状計測プログラム及び形状計測装置
CN104315973A (zh) * 2014-10-31 2015-01-28 中国科学院长春光学精密机械与物理研究所 一种双波长斐索激光干涉仪标准参考镜
JP6685741B2 (ja) * 2015-02-16 2020-04-22 キヤノン株式会社 形状計測方法、形状計測装置、プログラム、記録媒体及び光学素子の製造方法
EP3133369B1 (en) * 2015-08-19 2017-12-20 Mitutoyo Corporation Methods for measuring a height map of multiple fields of view and combining them to a composite height map with minimized sensitivity to instrument drift

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62126305A (ja) * 1985-11-27 1987-06-08 Kyocera Corp 表面形状測定方法および装置
DE3836564A1 (de) * 1988-10-27 1990-05-03 Zeiss Carl Fa Verfahren zur pruefung von optischen elementen
JPH03156305A (ja) * 1989-11-14 1991-07-04 Matsushita Electric Works Ltd 非球面形状測定装置
JP3336640B2 (ja) * 1992-10-02 2002-10-21 富士写真光機株式会社 干渉計装置
JP3455264B2 (ja) * 1993-12-28 2003-10-14 ペンタックス株式会社 干渉計
US6781700B2 (en) 2001-06-20 2004-08-24 Kuechel Michael Scanning interferometer for aspheric surfaces and wavefronts
US6956657B2 (en) 2001-12-18 2005-10-18 Qed Technologies, Inc. Method for self-calibrated sub-aperture stitching for surface figure measurement
JP4062606B2 (ja) * 2003-01-20 2008-03-19 フジノン株式会社 低可干渉測定／高可干渉測定共用干渉計装置およびその測定方法
JP4794902B2 (ja) * 2005-05-11 2011-10-19 キヤノン株式会社 表面計測方法および装置
JP2008089356A (ja) * 2006-09-29 2008-04-17 Fujinon Corp 非球面測定用素子、該非球面測定用素子を用いた光波干渉測定装置と方法、非球面の形状補正方法、およびシステム誤差補正方法

Also Published As

Publication number Publication date
US8243282B2 (en) 2012-08-14
US20090296101A1 (en) 2009-12-03
JP2009288051A (ja) 2009-12-10

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