JP5296991B2 - 振動ダンパ - Google Patents

振動ダンパ Download PDF

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Publication number
JP5296991B2
JP5296991B2 JP2006551909A JP2006551909A JP5296991B2 JP 5296991 B2 JP5296991 B2 JP 5296991B2 JP 2006551909 A JP2006551909 A JP 2006551909A JP 2006551909 A JP2006551909 A JP 2006551909A JP 5296991 B2 JP5296991 B2 JP 5296991B2
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JP
Japan
Prior art keywords
vibration damper
damper according
flange
pump
bellows device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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JP2006551909A
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English (en)
Japanese (ja)
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JP2007524033A5 (enExample
JP2007524033A (ja
Inventor
バリー ダドリー ブルースター
Original Assignee
エドワーズ リミテッド
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Application filed by エドワーズ リミテッド filed Critical エドワーズ リミテッド
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Publication of JP2007524033A5 publication Critical patent/JP2007524033A5/ja
Application granted granted Critical
Publication of JP5296991B2 publication Critical patent/JP5296991B2/ja
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
    • F16F15/06—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs
    • F16F15/067—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs using only wound springs

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Vibration Prevention Devices (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Glass Compositions (AREA)
  • Buildings Adapted To Withstand Abnormal External Influences (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Compressor (AREA)
  • Surgical Instruments (AREA)
  • Fluid-Damping Devices (AREA)
  • Springs (AREA)
  • Pipeline Systems (AREA)
JP2006551909A 2004-02-06 2005-02-02 振動ダンパ Expired - Lifetime JP5296991B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GBGB0402625.8A GB0402625D0 (en) 2004-02-06 2004-02-06 Vibration damper
GB0402625.8 2004-02-06
PCT/GB2005/000354 WO2005078288A1 (en) 2004-02-06 2005-02-02 Vibration damper

Publications (3)

Publication Number Publication Date
JP2007524033A JP2007524033A (ja) 2007-08-23
JP2007524033A5 JP2007524033A5 (enExample) 2008-05-01
JP5296991B2 true JP5296991B2 (ja) 2013-09-25

Family

ID=31985772

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006551909A Expired - Lifetime JP5296991B2 (ja) 2004-02-06 2005-02-02 振動ダンパ

Country Status (8)

Country Link
US (1) US8181944B2 (enExample)
EP (1) EP1711711B1 (enExample)
JP (1) JP5296991B2 (enExample)
AT (1) ATE479022T1 (enExample)
DE (1) DE602005023122D1 (enExample)
GB (1) GB0402625D0 (enExample)
IL (1) IL177137A (enExample)
WO (1) WO2005078288A1 (enExample)

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GB0620723D0 (en) * 2006-10-19 2006-11-29 Boc Group Plc Vibration isolator
DE102007027711A1 (de) 2007-06-15 2008-12-18 Pfeiffer Vacuum Gmbh Verfahren zum Betreiben einer Anordnung mit Vakuumpumpe und Anordnung mit einer Vakuumpumpe
NZ574584A (en) * 2008-01-31 2010-10-29 Resmed Ltd Respiratory Apparatus including a flow generator with two impellers and a directional stator
KR101262894B1 (ko) 2011-06-09 2013-05-09 김계철 진동체용 댐핑장치
GB2512019B (en) * 2012-12-03 2015-08-12 Dyson Technology Ltd A hand dryer
AU2014213021B2 (en) * 2013-01-30 2016-12-15 Vale S.A. Pneumatic suspension and vibration isolation system employing low friction cable isolators
US9850974B1 (en) * 2013-03-14 2017-12-26 Hrl Laboratories, Llc Buckling column load switch spring
US9568133B2 (en) 2013-03-14 2017-02-14 Lockheed Martin Corporation Large diameter pipe flexible connection
DE102013010418A1 (de) * 2013-06-21 2014-12-24 Audi Ag Torsionsfederelement
DE102014212433A1 (de) * 2014-06-27 2015-12-31 Zf Friedrichshafen Ag Stabilisator
CN104638817B (zh) * 2015-02-15 2018-05-29 莱克电气股份有限公司 吸尘器的电机降噪结构及吸尘器
DE202015008803U1 (de) 2015-12-23 2017-03-24 Leybold Gmbh Verbindungseinrichtung
GB2552324B (en) * 2016-07-18 2019-06-12 Edwards Ltd Vibration damping connector systems
TR201712064A2 (tr) * 2017-08-15 2019-03-21 Arcelik As Titreşim Ve Gürültü Seviyesi Azaltılan Bir Kompresör
EP3447298B1 (de) * 2017-08-21 2022-02-09 Pfeiffer Vacuum Gmbh Dämpfungskörper zur verbindung eine vakuumpumpe
JP7228612B2 (ja) 2020-03-27 2023-02-24 株式会社Kokusai Electric 基板処理装置、半導体装置の製造方法、基板処理方法及びプログラム
CN112360922A (zh) * 2020-11-27 2021-02-12 珠海格力电器股份有限公司 支撑型减振结构
US11832728B2 (en) * 2021-08-24 2023-12-05 Sleep Number Corporation Controlling vibration transmission within inflation assemblies
CN113700795A (zh) * 2021-09-03 2021-11-26 山东汽车制造有限公司 一种具有准零度刚度特性的轻卡驾驶室隔振方法及装置
JP2025519470A (ja) * 2022-06-07 2025-06-26 メタセイズミック インク． 衝撃と振動から保護する３つの適応装置
GB2625056A (en) * 2022-12-01 2024-06-12 Edwards Ltd Connector for connecting a vacuum pump and/or abatement apparatus to a fluid line
JP2024085234A (ja) * 2022-12-14 2024-06-26 住友重機械工業株式会社 クライオポンプ、クライオポンプの製造方法および使用方法
US20250121387A1 (en) * 2023-10-16 2025-04-17 Glorymakeup Inc. Programmable Air Supply System with Liquid Cooling and Noise Suppression
US20250271002A1 (en) * 2024-02-28 2025-08-28 Kla Corporation Three-axis tuned mass damper for turbo molecular pump

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US3000389A (en) * 1960-05-27 1961-09-19 Leslie E Alsager Control means comprising a resilient coupling for cooling system elements
JPS4835268A (enExample) * 1971-09-08 1973-05-24
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HU173990B (hu) * 1976-06-29 1979-10-28 Eroemue Es Halozattervezoe Kompensator teplovogo rasshirenija s ehlastichnoj shtangovoj sistemoj
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US4755025A (en) * 1986-09-26 1988-07-05 The United States Department Of Energy Apparatus and method of preloading vibration-damping bellows
FR2629863B1 (fr) * 1988-04-12 1991-02-08 Dubois Jacques Accouplement d'echappement flexible
FR2645939B1 (fr) 1989-04-18 1991-06-21 Tubest Sa Moyens de raccordement articule pour tuyaux
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JPH10252963A (ja) * 1997-03-12 1998-09-22 Toofure Kk 防振用ベローズ管継手
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JP3343581B2 (ja) * 1997-10-27 2002-11-11 独立行政法人産業技術総合研究所 真空防振継手
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JP2002303294A (ja) * 2001-04-06 2002-10-18 Boc Edwards Technologies Ltd 真空ポンプ
DE10119075A1 (de) * 2001-04-19 2002-10-24 Leybold Vakuum Gmbh Vakuumleitung
JP4250353B2 (ja) * 2001-06-22 2009-04-08 エドワーズ株式会社 真空ポンプ
JP2003083249A (ja) 2001-09-17 2003-03-19 Boc Edwards Technologies Ltd 真空ポンプ
JP3092699U (ja) * 2002-09-10 2003-03-20 有限会社ブイ・アイ・シーインターナショナル 除振ダンパ
US7300261B2 (en) * 2003-07-18 2007-11-27 Applied Materials, Inc. Vibration damper with nested turbo molecular pump
DE60304870T2 (de) * 2003-11-18 2006-11-30 Varian S.P.A., Leini Vakuumpumpe mit Schwingungsdämpfer

Also Published As

Publication number Publication date
WO2005078288A1 (en) 2005-08-25
DE602005023122D1 (de) 2010-10-07
US20080023896A1 (en) 2008-01-31
GB0402625D0 (en) 2004-03-10
EP1711711B1 (en) 2010-08-25
IL177137A0 (en) 2006-12-10
IL177137A (en) 2012-09-24
US8181944B2 (en) 2012-05-22
JP2007524033A (ja) 2007-08-23
EP1711711A1 (en) 2006-10-18
ATE479022T1 (de) 2010-09-15

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