DE602005023122D1 - Schwingungsdämpfer - Google Patents

Schwingungsdämpfer

Info

Publication number
DE602005023122D1
DE602005023122D1 DE602005023122T DE602005023122T DE602005023122D1 DE 602005023122 D1 DE602005023122 D1 DE 602005023122D1 DE 602005023122 T DE602005023122 T DE 602005023122T DE 602005023122 T DE602005023122 T DE 602005023122T DE 602005023122 D1 DE602005023122 D1 DE 602005023122D1
Authority
DE
Germany
Prior art keywords
vibration
evacuation
pump
apparatus during
compressed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005023122T
Other languages
English (en)
Inventor
Barrie Brewster
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Publication of DE602005023122D1 publication Critical patent/DE602005023122D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
    • F16F15/06—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs
    • F16F15/067—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs using only wound springs

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Vibration Prevention Devices (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Surgical Instruments (AREA)
  • Buildings Adapted To Withstand Abnormal External Influences (AREA)
  • Glass Compositions (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Springs (AREA)
  • Fluid-Damping Devices (AREA)
  • Compressor (AREA)
  • Pipeline Systems (AREA)
DE602005023122T 2004-02-06 2005-02-02 Schwingungsdämpfer Active DE602005023122D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0402625.8A GB0402625D0 (en) 2004-02-06 2004-02-06 Vibration damper
PCT/GB2005/000354 WO2005078288A1 (en) 2004-02-06 2005-02-02 Vibration damper

Publications (1)

Publication Number Publication Date
DE602005023122D1 true DE602005023122D1 (de) 2010-10-07

Family

ID=31985772

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005023122T Active DE602005023122D1 (de) 2004-02-06 2005-02-02 Schwingungsdämpfer

Country Status (8)

Country Link
US (1) US8181944B2 (de)
EP (1) EP1711711B1 (de)
JP (1) JP5296991B2 (de)
AT (1) ATE479022T1 (de)
DE (1) DE602005023122D1 (de)
GB (1) GB0402625D0 (de)
IL (1) IL177137A (de)
WO (1) WO2005078288A1 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0620723D0 (en) 2006-10-19 2006-11-29 Boc Group Plc Vibration isolator
DE102007027711A1 (de) 2007-06-15 2008-12-18 Pfeiffer Vacuum Gmbh Verfahren zum Betreiben einer Anordnung mit Vakuumpumpe und Anordnung mit einer Vakuumpumpe
US8667962B2 (en) * 2008-01-31 2014-03-11 Resmed Limited Respiratory apparatus
KR101262894B1 (ko) 2011-06-09 2013-05-09 김계철 진동체용 댐핑장치
GB2512019B (en) * 2012-12-03 2015-08-12 Dyson Technology Ltd A hand dryer
WO2014117237A1 (en) * 2013-01-30 2014-08-07 Vale S.A. Pneumatic suspension and vibration isolation system employing low friction cable isolators
US9850974B1 (en) * 2013-03-14 2017-12-26 Hrl Laboratories, Llc Buckling column load switch spring
US9568133B2 (en) * 2013-03-14 2017-02-14 Lockheed Martin Corporation Large diameter pipe flexible connection
DE102013010418A1 (de) * 2013-06-21 2014-12-24 Audi Ag Torsionsfederelement
DE102014212433A1 (de) * 2014-06-27 2015-12-31 Zf Friedrichshafen Ag Stabilisator
CN104638817B (zh) * 2015-02-15 2018-05-29 莱克电气股份有限公司 吸尘器的电机降噪结构及吸尘器
DE202015008803U1 (de) 2015-12-23 2017-03-24 Leybold Gmbh Verbindungseinrichtung
GB2552324B (en) * 2016-07-18 2019-06-12 Edwards Ltd Vibration damping connector systems
TR201712064A2 (tr) * 2017-08-15 2019-03-21 Arcelik As Titreşim Ve Gürültü Seviyesi Azaltılan Bir Kompresör
EP3447298B1 (de) * 2017-08-21 2022-02-09 Pfeiffer Vacuum Gmbh Dämpfungskörper zur verbindung eine vakuumpumpe
JP7228612B2 (ja) 2020-03-27 2023-02-24 株式会社Kokusai Electric 基板処理装置、半導体装置の製造方法、基板処理方法及びプログラム
US11832728B2 (en) * 2021-08-24 2023-12-05 Sleep Number Corporation Controlling vibration transmission within inflation assemblies
CN113700795A (zh) * 2021-09-03 2021-11-26 山东汽车制造有限公司 一种具有准零度刚度特性的轻卡驾驶室隔振方法及装置
US12000449B2 (en) * 2022-06-07 2024-06-04 METAseismic, Inc. Tri-adaptive apparatus for shock and vibration protection
GB2625056A (en) * 2022-12-01 2024-06-12 Edwards Ltd Connector for connecting a vacuum pump and/or abatement apparatus to a fluid line

Family Cites Families (26)

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Publication number Priority date Publication date Assignee Title
US2578773A (en) * 1948-04-20 1951-12-18 Garrett Corp Control for cabin pressure regulators
US2695167A (en) * 1951-02-07 1954-11-23 American Steel Foundries Snubbed spring group
US3000389A (en) * 1960-05-27 1961-09-19 Leslie E Alsager Control means comprising a resilient coupling for cooling system elements
JPS4835268A (de) * 1971-09-08 1973-05-24
DE2424004C3 (de) * 1974-05-17 1978-10-26 Klein, Schanzlin & Becker Ag, 6710 Frankenthal Verspannungsvorrichtung für Kompensatoren
HU173990B (hu) * 1976-06-29 1979-10-28 Eroemue Es Halozattervezoe Kompensator teplovogo rasshirenija s ehlastichnoj shtangovoj sistemoj
DE7805710U1 (de) * 1978-02-25 1981-12-10 Industrie-Werke Karlsruhe Augsburg Ag, 7500 Karlsruhe Kompensator
JPS595179B2 (ja) * 1979-05-18 1984-02-03 富士通株式会社 真空機器の防振構造
JPS5664195A (en) * 1979-10-25 1981-06-01 Jeol Ltd Exhaust system in electron microscope or the like
DE7933066U1 (de) * 1979-11-23 1980-02-21 Industrie-Werke Karlsruhe Augsburg Ag, 7500 Karlsruhe Kompensator
US4755025A (en) * 1986-09-26 1988-07-05 The United States Department Of Energy Apparatus and method of preloading vibration-damping bellows
FR2629863B1 (fr) * 1988-04-12 1991-02-08 Dubois Jacques Accouplement d'echappement flexible
FR2645939B1 (fr) 1989-04-18 1991-06-21 Tubest Sa Moyens de raccordement articule pour tuyaux
US5992896A (en) * 1995-12-08 1999-11-30 Senior Engineering Investments Ag Flexible coupler apparatus
AU6030598A (en) * 1997-01-17 1998-08-07 Senior Engineering Investments Ag Flexible coupler apparatus
JPH10252963A (ja) * 1997-03-12 1998-09-22 Toofure Kk 防振用ベローズ管継手
US5799456A (en) * 1997-06-02 1998-09-01 Construction Specialties, Inc. Expansion joint cover installation
JP3343581B2 (ja) * 1997-10-27 2002-11-11 独立行政法人産業技術総合研究所 真空防振継手
DE10001509A1 (de) 2000-01-15 2001-07-19 Leybold Vakuum Gmbh Vakuumpumpe mit Schwingungsdämpfer
JP2002303294A (ja) * 2001-04-06 2002-10-18 Boc Edwards Technologies Ltd 真空ポンプ
DE10119075A1 (de) * 2001-04-19 2002-10-24 Leybold Vakuum Gmbh Vakuumleitung
JP4250353B2 (ja) * 2001-06-22 2009-04-08 エドワーズ株式会社 真空ポンプ
JP2003083249A (ja) 2001-09-17 2003-03-19 Boc Edwards Technologies Ltd 真空ポンプ
JP3092699U (ja) * 2002-09-10 2003-03-20 有限会社ブイ・アイ・シーインターナショナル 除振ダンパ
US7300261B2 (en) * 2003-07-18 2007-11-27 Applied Materials, Inc. Vibration damper with nested turbo molecular pump
DE60304870T2 (de) * 2003-11-18 2006-11-30 Varian S.P.A., Leini Vakuumpumpe mit Schwingungsdämpfer

Also Published As

Publication number Publication date
JP5296991B2 (ja) 2013-09-25
US20080023896A1 (en) 2008-01-31
IL177137A (en) 2012-09-24
IL177137A0 (en) 2006-12-10
EP1711711B1 (de) 2010-08-25
JP2007524033A (ja) 2007-08-23
ATE479022T1 (de) 2010-09-15
EP1711711A1 (de) 2006-10-18
WO2005078288A1 (en) 2005-08-25
GB0402625D0 (en) 2004-03-10
US8181944B2 (en) 2012-05-22

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