JP2019035409A5 - - Google Patents
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- Publication number
- JP2019035409A5 JP2019035409A5 JP2018153383A JP2018153383A JP2019035409A5 JP 2019035409 A5 JP2019035409 A5 JP 2019035409A5 JP 2018153383 A JP2018153383 A JP 2018153383A JP 2018153383 A JP2018153383 A JP 2018153383A JP 2019035409 A5 JP2019035409 A5 JP 2019035409A5
- Authority
- JP
- Japan
- Prior art keywords
- flange
- recipient
- pump
- shock absorber
- fixed position
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000006096 absorbing agent Substances 0.000 claims description 57
- 230000035939 shock Effects 0.000 claims description 57
- 230000001681 protective effect Effects 0.000 claims description 50
- 239000000872 buffer Substances 0.000 claims description 38
- 239000013536 elastomeric material Substances 0.000 claims description 6
- 230000008878 coupling Effects 0.000 claims description 5
- 238000010168 coupling process Methods 0.000 claims description 5
- 238000005859 coupling reaction Methods 0.000 claims description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 58
- 229910052742 iron Inorganic materials 0.000 description 29
- 239000000463 material Substances 0.000 description 15
- 235000000396 iron Nutrition 0.000 description 7
- 230000005540 biological transmission Effects 0.000 description 5
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP17187107.2A EP3447298B1 (de) | 2017-08-21 | 2017-08-21 | Dämpfungskörper zur verbindung eine vakuumpumpe |
| EP17187107.2 | 2017-08-21 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019035409A JP2019035409A (ja) | 2019-03-07 |
| JP2019035409A5 true JP2019035409A5 (enExample) | 2020-01-23 |
| JP6681446B2 JP6681446B2 (ja) | 2020-04-15 |
Family
ID=59677149
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018153383A Active JP6681446B2 (ja) | 2017-08-21 | 2018-08-17 | 緩衝体 |
Country Status (2)
| Country | Link |
|---|---|
| EP (1) | EP3447298B1 (enExample) |
| JP (1) | JP6681446B2 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI834063B (zh) * | 2020-09-30 | 2024-03-01 | 荷蘭商Ａｓｍｌ荷蘭公司 | 減輕幫浦故障造成之損害之真空系統 |
| CN112762245A (zh) * | 2021-01-19 | 2021-05-07 | 衡水瑟林科技有限公司 | 一种波纹钢管抗滑移装置 |
| CN114562621A (zh) * | 2022-03-03 | 2022-05-31 | 上海精测半导体技术有限公司 | 一种离子泵隔振装置及其使用方法 |
| CN114791059A (zh) * | 2022-05-27 | 2022-07-26 | 河南中烟工业有限责任公司 | 一种机械连接法兰 |
| CN115978133A (zh) * | 2022-12-26 | 2023-04-18 | 北京中科科仪股份有限公司 | 一种用于电子显微镜的真空减震装置 |
| KR102821857B1 (ko) * | 2023-02-14 | 2025-06-17 | 주식회사 유니온기업 | 디커플러 어셈블리 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2741418B1 (fr) * | 1995-11-21 | 1998-01-16 | Westaflex Automobile | Dispositif de liaison souple de deux conduits rigides |
| DE19745185A1 (de) * | 1997-10-13 | 1999-04-15 | Leybold Ag | Vorrichtung zum vakuumdichten Verbinden von zwei Körpern aus unterschiedlichen Materialien |
| JP2002303294A (ja) * | 2001-04-06 | 2002-10-18 | Boc Edwards Technologies Ltd | 真空ポンプ |
| JP4250353B2 (ja) * | 2001-06-22 | 2009-04-08 | エドワーズ株式会社 | 真空ポンプ |
| JP2004108434A (ja) * | 2002-09-17 | 2004-04-08 | Nikon Corp | ショックアブソーバユニット、ショックアブソーバ及びそれを有する露光装置 |
| JP2005030423A (ja) * | 2003-07-07 | 2005-02-03 | Kazuya Shimizu | 除振装置 |
| GB0402625D0 (en) * | 2004-02-06 | 2004-03-10 | Boc Group Plc | Vibration damper |
| JP4925781B2 (ja) * | 2006-10-05 | 2012-05-09 | エドワーズ株式会社 | 真空ポンプとその振動吸収ダンパ |
| JP2015132373A (ja) * | 2014-01-15 | 2015-07-23 | 株式会社サンケイ技研 | 可撓性管継手およびそれを用いた継手構造 |
-
2017
- 2017-08-21 EP EP17187107.2A patent/EP3447298B1/de active Active
-
2018
- 2018-08-17 JP JP2018153383A patent/JP6681446B2/ja active Active
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