JP6681446B2 - 緩衝体 - Google Patents

緩衝体 Download PDF

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Publication number
JP6681446B2
JP6681446B2 JP2018153383A JP2018153383A JP6681446B2 JP 6681446 B2 JP6681446 B2 JP 6681446B2 JP 2018153383 A JP2018153383 A JP 2018153383A JP 2018153383 A JP2018153383 A JP 2018153383A JP 6681446 B2 JP6681446 B2 JP 6681446B2
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JP
Japan
Prior art keywords
recipient
pump
flange
buffer
protective element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2018153383A
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English (en)
Japanese (ja)
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JP2019035409A (ja
JP2019035409A5 (enExample
Inventor
ヤン・ホフマン
ミルコ・メコタ
ミヒャエル・シル
トビアス・シュトル
Original Assignee
プファイファー・ヴァキューム・ゲーエムベーハー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication of JP2019035409A publication Critical patent/JP2019035409A/ja
Publication of JP2019035409A5 publication Critical patent/JP2019035409A5/ja
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L27/00—Adjustable joints; Joints allowing movement
    • F16L27/10—Adjustable joints; Joints allowing movement comprising a flexible connection only
    • F16L27/107—Adjustable joints; Joints allowing movement comprising a flexible connection only the ends of the pipe being interconnected by a flexible sleeve
    • F16L27/11—Adjustable joints; Joints allowing movement comprising a flexible connection only the ends of the pipe being interconnected by a flexible sleeve the sleeve having the form of a bellows with multiple corrugations
    • F16L27/111—Adjustable joints; Joints allowing movement comprising a flexible connection only the ends of the pipe being interconnected by a flexible sleeve the sleeve having the form of a bellows with multiple corrugations the bellows being reinforced
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Fluid-Damping Devices (AREA)
  • Sealing Devices (AREA)
  • Diaphragms And Bellows (AREA)
JP2018153383A 2017-08-21 2018-08-17 緩衝体 Active JP6681446B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP17187107.2A EP3447298B1 (de) 2017-08-21 2017-08-21 Dämpfungskörper zur verbindung eine vakuumpumpe
EP17187107.2 2017-08-21

Publications (3)

Publication Number Publication Date
JP2019035409A JP2019035409A (ja) 2019-03-07
JP2019035409A5 JP2019035409A5 (enExample) 2020-01-23
JP6681446B2 true JP6681446B2 (ja) 2020-04-15

Family

ID=59677149

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018153383A Active JP6681446B2 (ja) 2017-08-21 2018-08-17 緩衝体

Country Status (2)

Country Link
EP (1) EP3447298B1 (enExample)
JP (1) JP6681446B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI834063B (zh) * 2020-09-30 2024-03-01 荷蘭商Ａｓｍｌ荷蘭公司 減輕幫浦故障造成之損害之真空系統
CN112762245A (zh) * 2021-01-19 2021-05-07 衡水瑟林科技有限公司 一种波纹钢管抗滑移装置
CN114562621A (zh) * 2022-03-03 2022-05-31 上海精测半导体技术有限公司 一种离子泵隔振装置及其使用方法
CN114791059A (zh) * 2022-05-27 2022-07-26 河南中烟工业有限责任公司 一种机械连接法兰
CN115978133A (zh) * 2022-12-26 2023-04-18 北京中科科仪股份有限公司 一种用于电子显微镜的真空减震装置
KR102821857B1 (ko) * 2023-02-14 2025-06-17 주식회사 유니온기업 디커플러 어셈블리

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2741418B1 (fr) * 1995-11-21 1998-01-16 Westaflex Automobile Dispositif de liaison souple de deux conduits rigides
DE19745185A1 (de) * 1997-10-13 1999-04-15 Leybold Ag Vorrichtung zum vakuumdichten Verbinden von zwei Körpern aus unterschiedlichen Materialien
JP2002303294A (ja) * 2001-04-06 2002-10-18 Boc Edwards Technologies Ltd 真空ポンプ
JP4250353B2 (ja) * 2001-06-22 2009-04-08 エドワーズ株式会社 真空ポンプ
JP2004108434A (ja) * 2002-09-17 2004-04-08 Nikon Corp ショックアブソーバユニット、ショックアブソーバ及びそれを有する露光装置
JP2005030423A (ja) * 2003-07-07 2005-02-03 Kazuya Shimizu 除振装置
GB0402625D0 (en) * 2004-02-06 2004-03-10 Boc Group Plc Vibration damper
JP4925781B2 (ja) * 2006-10-05 2012-05-09 エドワーズ株式会社 真空ポンプとその振動吸収ダンパ
JP2015132373A (ja) * 2014-01-15 2015-07-23 株式会社サンケイ技研 可撓性管継手およびそれを用いた継手構造

Also Published As

Publication number Publication date
JP2019035409A (ja) 2019-03-07
EP3447298A1 (de) 2019-02-27
EP3447298B1 (de) 2022-02-09

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