JP5287390B2 - 半導体装置、伝送システム、半導体装置の製造方法及び伝送システムの製造方法 - Google Patents
半導体装置、伝送システム、半導体装置の製造方法及び伝送システムの製造方法 Download PDFInfo
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- JP5287390B2 JP5287390B2 JP2009063564A JP2009063564A JP5287390B2 JP 5287390 B2 JP5287390 B2 JP 5287390B2 JP 2009063564 A JP2009063564 A JP 2009063564A JP 2009063564 A JP2009063564 A JP 2009063564A JP 5287390 B2 JP5287390 B2 JP 5287390B2
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- 230000005540 biological transmission Effects 0.000 title claims description 258
- 239000004065 semiconductor Substances 0.000 title claims description 231
- 238000004519 manufacturing process Methods 0.000 title claims description 27
- 239000000758 substrate Substances 0.000 claims description 67
- 238000000034 method Methods 0.000 claims description 27
- 239000003822 epoxy resin Substances 0.000 claims description 4
- 229920000647 polyepoxide Polymers 0.000 claims description 4
- 229920002803 thermoplastic polyurethane Polymers 0.000 claims description 4
- 239000004925 Acrylic resin Substances 0.000 claims description 3
- 229920000178 Acrylic resin Polymers 0.000 claims description 3
- 239000004642 Polyimide Substances 0.000 claims description 3
- 239000003989 dielectric material Substances 0.000 claims description 3
- 229920001721 polyimide Polymers 0.000 claims description 3
- 229920001296 polysiloxane Polymers 0.000 claims description 3
- 230000001681 protective effect Effects 0.000 claims 2
- 239000011347 resin Substances 0.000 description 60
- 229920005989 resin Polymers 0.000 description 60
- 238000007789 sealing Methods 0.000 description 57
- 238000004088 simulation Methods 0.000 description 30
- 230000008054 signal transmission Effects 0.000 description 21
- 239000000853 adhesive Substances 0.000 description 10
- 230000001070 adhesive effect Effects 0.000 description 10
- 239000000463 material Substances 0.000 description 9
- 229910052782 aluminium Inorganic materials 0.000 description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 7
- 230000006866 deterioration Effects 0.000 description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 102220646157 Actin-like protein 7A_S12A_mutation Human genes 0.000 description 3
- 102220521910 THAP domain-containing protein 1_S21C_mutation Human genes 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 3
- 239000012777 electrically insulating material Substances 0.000 description 3
- 102220328583 rs111822347 Human genes 0.000 description 3
- 102200084388 rs121918345 Human genes 0.000 description 3
- 102220247850 rs1421233354 Human genes 0.000 description 3
- 102200048773 rs2224391 Human genes 0.000 description 3
- 102220240346 rs764757062 Human genes 0.000 description 3
- 102220070930 rs794728599 Human genes 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q21/00—Antenna arrays or systems
- H01Q21/0006—Particular feeding systems
- H01Q21/0075—Stripline fed arrays
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- H—ELECTRICITY
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- H01L23/00—Details of semiconductor or other solid state devices
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- H01L23/64—Impedance arrangements
- H01L23/66—High-frequency adaptations
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- H01L24/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/04—Fixed joints
- H01P1/047—Strip line joints
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P5/00—Coupling devices of the waveguide type
- H01P5/08—Coupling devices of the waveguide type for linking dissimilar lines or devices
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0213—Electrical arrangements not otherwise provided for
- H05K1/0237—High frequency adaptations
- H05K1/025—Impedance arrangements, e.g. impedance matching, reduction of parasitic impedance
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- H01L2223/6627—Waveguides, e.g. microstrip line, strip line, coplanar line
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- H01L2223/6633—Transition between different waveguide types
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- H01L2223/6661—High-frequency adaptations for passive devices
- H01L2223/6677—High-frequency adaptations for passive devices for antenna, e.g. antenna included within housing of semiconductor device
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- H01L2224/056—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
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- H01L2224/056—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05638—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
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- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
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Description
体回路素子を形成する工程と、電気信号を伝送する伝送線路と、伝送線路の方向に関して
対称な形状を有するインピーダンス整合パターンとを基板に形成する工程と、基板上に半
導体回路素子を設ける工程と、伝送線路と半導体回路素子とをワイヤを介して接続する工
程とを有するものであって、前記伝送路と前記インピーダンス整合パターンとを基板に形成する工程により、伝送線路の一端と前記インピーダンス整合パターンとの距離に応じて前記インピーダンス整合パターンの共振周波数をシフトさせて、所望の周波数の前記電気信号を伝送できるようにする半導体装置の製造方法である。
1.第1の実施の形態(半導体装置1:構成例、特性例、製造例)
2.第2の実施の形態(半導体装置2:構成例、特性例)
3.第3の実施の形態(半導体装置3:構成例、特性例)
4.第4の実施の形態(半導体装置4:構成例)
5.第5の実施の形態(伝送システム5:構成例)
6.第6の実施の形態(伝送システム6:構成例、組立例)
[半導体装置1の構成例]
図1乃至3に示すように、本実施の形態に係る半導体装置1は、所定の周波数、例えばミリ波帯域の周波数を有する電気信号を処理する半導体回路素子である回路基板10と、ワイヤ部12を介して回路基板10に接続され、電気信号を伝送する伝送線路14とで構成される。伝送線路14には、当該伝送線路の方向に関して対称な形状を有するインピーダンス整合パターンである共振パターン15が設けられる。半導体装置1は、さらに、伝送線路14及び共振パターン15が形成される基板17を備える。
次に半導体装置1のミリ波の信号伝送に関するシミュレーション結果について説明する。図4に示すように、このシミュレーションは、横軸をミリ波の電気信号の周波数(GHz)とし、縦軸をSパラメータ強度(dB)としたとき、図1乃至3に示した半導体装置1を用いて、表2のようなパラメータによって算出されたものである。図4の実線は伝達特性S12A,S21Aを示し、破線は反射特性S11A,S22Aを示す。
次に半導体装置1の製造方法について説明する。図7に示すように、半導体装置1は、誘電体層17a,17c及び接地層17bで構成された基板17の所定の面(図7では上面)に端子部13、伝送線路14、共振パターン15及びアンテナ部16が形成される。端子部13、伝送線路14、共振パターン15及びアンテナ部16は、例えば、エッチングにより形成される。
[半導体装置2の構成例]
本実施の形態では、回路基板上の伝送線路に共振パターンを設けた半導体装置について説明する。第2の実施の形態について、前述の第1の実施の形態と同じ名称及び符号のものは同じ機能を有するので、その説明を省略する。
次に半導体装置2のミリ波の信号伝送に関するシミュレーション結果について説明する。図12に示すように、このシミュレーションは、横軸をミリ波の電気信号の周波数(GHz)とし、縦軸をSパラメータ強度(dB)としたとき、図10及び11に示した半導体装置2を用いて、表3のようなパラメータによって算出されたものである。図12の実線は伝達特性S12B,S21Bを示し、破線は反射特性S11B,S22Bを示す。
[半導体装置3の構成例]
本実施の形態では、半導体装置1の封止樹脂18を削除した半導体装置について説明する。第3の実施の形態について、前述の第1の実施の形態と同じ名称及び符号のものは同じ機能を有するので、その説明を省略する。
次に半導体装置3のミリ波の信号伝送に関するシミュレーション結果について説明する。図15に示すように、このシミュレーションは、横軸をミリ波の電気信号の周波数(GHz)とし、縦軸をSパラメータ強度(dB)としたとき、図13乃至14に示した半導体装置3を用いて、表4のようなパラメータによって算出されたものである。図15の実線は伝達特性S12C,S21Cを示し、破線は反射特性S11C,S22Cを示す。
[半導体装置4の構成例]
本実施の形態では、アンテナ部29を設けたプリント基板35を有した半導体装置4について説明する。第4の実施の形態について、前述の第1の実施の形態と同じ名称及び符号のものは同じ機能を有するので、その説明を省略する。
[伝送システム5の構成例]
本実施の形態では、第1の実施の形態で説明した半導体装置1を2つ使用して、半導体装置間にミリ波を伝送させるようにした伝送システム5について説明する。前述の第1の実施の形態と同じ名称及び符号のものは同じ機能を有するので、その説明を省略する。
[伝送システム6の構成例]
本実施の形態では、上述の伝送システム5に誘電体伝送路40を設けて、半導体装置間にミリ波を伝送させるようにした伝送システム6について説明する。前述の第5の実施の形態と同じ名称及び符号のものは同じ機能を有するので、その説明を省略する。
次に、伝送システム6の製造方法について説明する。図7乃至9で説明した半導体装置1の製造方法によって半導体装置1A,1Bが作製されることを前提とする。
Claims (16)
- 所定の周波数を有する電気信号を処理する半導体回路素子と、
ワイヤを介して前記半導体回路素子に接続され、前記電気信号を伝送する伝送線路とを備え、
前記伝送線路には、
当該伝送線路の方向に関して対称な円形状を有するインピーダンス整合パターンが設けられ、
前記伝送線路の一端と前記インピーダンス整合パターンとの距離に応じて前記インピーダンス整合パターンの共振周波数がシフトして、所望の周波数の前記電気信号を伝送する半導体装置。 - 前記伝送線路は、
前記半導体回路素子に設けられる請求項1に記載の半導体装置。 - 前記半導体回路素子は所定の誘電率を有する絶縁性の保護部材で覆われ、
前記保護部材の誘電率に応じて前記インピーダンス整合パターンの共振周波数がシフトして、所望の周波数の前記電気信号を伝送する請求項1に記載の半導体装置。 - 前記所定の周波数はミリ波帯域である請求項1に記載の半導体装置。
- 前記伝送線路には複数の接地電極が設けられ、
前記複数の接地電極は、
前記伝送線路の方向に関して対称に設けられる請求項1に記載の半導体装置。 - 所定の周波数を有する電気信号を処理する第1の半導体回路素子と、ワイヤを介して前記第1の半導体回路素子に接続され、前記電気信号を伝送する第1の伝送線路と、前記第1の伝送線路から伝送された前記電気信号を電磁波の信号に変換して送信する第1のアンテナ部とを備える第1の半導体装置と、
前記第1のアンテナ部から送信された前記電磁波の信号を受信して前記所定の周波数を有する電気信号に変換する第2のアンテナ部と、前記第2のアンテナ部によって変換された前記電気信号を伝送する第2の伝送線路と、前記第2の伝送線路とワイヤを介して接続され、前記第2の伝送線路で伝送された前記電気信号を処理する第2の半導体回路素子とを備える第2の半導体装置とで構成され、
前記第1及び第2の伝送線路には、
当該第1及び第2の伝送線路の方向に関して対称な円形状を有するインピーダンス整合パターンが設けられ、
当該第1及び第2の伝送線路のそれぞれの一端と前記インピーダンス整合パターンとの距離に応じて前記インピーダンス整合パターンの共振周波数がシフトして、所望の周波数の前記電気信号を伝送する伝送システム。 - 前記第1の半導体装置と前記第2の半導体装置との間に設けられ、所定の誘電率を有し、前記電気信号を前記第1の半導体装置から前記第2の半導体装置へ伝送する誘電体伝送路をさらに備える請求項6に記載の伝送システム。
- 前記第1及び第2の半導体装置と前記誘電体伝送路との間には、所定の誘電率を有する粘弾性部材が設けられる請求項7に記載の伝送システム。
- 前記誘電体伝送路及び前記粘弾性部材には、
少なくとも、アクリル樹脂系、ウレタン樹脂系、エポキシ樹脂系、シリコーン系及びポリイミド系のうち1つ以上の誘電体素材が使用される請求項7又は8に記載の伝送システム。 - 前記所定の周波数はミリ波帯域である請求項6に記載の伝送システム。
- 前記伝送線路には複数の接地電極が設けられ、
前記複数の接地電極は、
前記伝送線路の方向に関して対称に設けられる請求項6に記載の伝送システム。 - 所定の周波数を有する電気信号を処理する半導体回路素子を形成する工程と、
前記電気信号を伝送する伝送線路と、前記伝送線路の方向に関して対称な円形状を有するインピーダンス整合パターンとを基板に形成する工程と、
前記基板上に前記半導体回路素子を設ける工程と、
前記伝送線路と前記半導体回路素子とをワイヤを介して接続する工程とを有し、
前記伝送路と前記インピーダンス整合パターンとを基板に形成する工程により、前記伝送線路の一端と前記インピーダンス整合パターンとの距離に応じて前記インピーダンス整合パターンの共振周波数をシフトさせて、所望の周波数の前記電気信号を伝送できるようにする半導体装置の製造方法。 - 前記基板に所定の誘電率を有する絶縁性の保護部材を形成する工程をさらに有する請求項12に記載の半導体装置の製造方法。
- 所定の周波数を有する電気信号を処理する第1の半導体回路素子を形成し、前記電気信号を伝送する第1の伝送線路と、前記第1の伝送線路の方向に関して対称な円形状を有するインピーダンス整合パターンとを第1の基板に形成し、前記第1の基板上に第1の半導体回路素子を設け、前記第1の伝送線路と前記第1の半導体回路素子とをワイヤを介して接続し、前記第1の半導体装置を作製する工程と、
所定の周波数を有する電気信号を処理する第2の半導体回路素子を形成し、前記電気信号を伝送する第2の伝送線路と、前記第2の伝送線路の方向に関して対称な円形状を有するインピーダンス整合パターンとを第2の基板に形成し、前記第2の基板上に第2の半導体回路素子を設け、前記第2の伝送線路と前記第2の半導体回路素子とをワイヤを介して接続し、第2の半導体装置を作製する工程と、
前記第1の半導体装置と前記第2の半導体装置とを接続させる工程とを有し、
前記第1の半導体装置及び前記第2の半導体装置を作成する工程により、前記第1及び第2の伝送線路のそれぞれの一端と前記インピーダンス整合パターンとの距離に応じて前記インピーダンス整合パターンの共振周波数をシフトさせて、所望の周波数の前記電気信号を伝送できるようにする伝送システムの製造方法。 - 所定の誘電率を有し、前記電気信号を前記第1の半導体装置から前記第2の半導体装置へ伝送する誘電体伝送路を前記第1の半導体装置と前記第2の半導体装置との間に形成する工程をさらに有する請求項14に記載の伝送システムの製造方法。
- 所定の誘電率を有する粘弾性部材を前記第1及び第2の半導体装置と前記誘電体伝送路との間に形成する工程をさらに有する請求項15に記載の伝送システムの製造方法。
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-
2009
- 2009-03-16 JP JP2009063564A patent/JP5287390B2/ja not_active Expired - Fee Related
-
2010
- 2010-03-05 EP EP10002328A patent/EP2230712A3/en not_active Withdrawn
- 2010-03-09 CN CN201010129272.3A patent/CN101840911B/zh not_active Expired - Fee Related
- 2010-03-09 US US12/720,237 patent/US20100231320A1/en not_active Abandoned
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2014
- 2014-09-16 US US14/487,711 patent/US9748664B2/en active Active
Also Published As
Publication number | Publication date |
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US20100231320A1 (en) | 2010-09-16 |
CN101840911B (zh) | 2014-01-08 |
JP2010219816A (ja) | 2010-09-30 |
CN101840911A (zh) | 2010-09-22 |
EP2230712A3 (en) | 2010-10-27 |
EP2230712A2 (en) | 2010-09-22 |
US9748664B2 (en) | 2017-08-29 |
US20150002360A1 (en) | 2015-01-01 |
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