JP5265181B2 - 保護膜製造方法 - Google Patents
保護膜製造方法 Download PDFInfo
- Publication number
- JP5265181B2 JP5265181B2 JP2007315770A JP2007315770A JP5265181B2 JP 5265181 B2 JP5265181 B2 JP 5265181B2 JP 2007315770 A JP2007315770 A JP 2007315770A JP 2007315770 A JP2007315770 A JP 2007315770A JP 5265181 B2 JP5265181 B2 JP 5265181B2
- Authority
- JP
- Japan
- Prior art keywords
- oxide film
- anodic oxide
- temperature
- film
- water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000001681 protective effect Effects 0.000 title claims abstract description 20
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 80
- 239000010407 anodic oxide Substances 0.000 claims description 62
- 238000011282 treatment Methods 0.000 claims description 28
- 229910052782 aluminium Inorganic materials 0.000 claims description 19
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 18
- 239000007864 aqueous solution Substances 0.000 claims description 13
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 8
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 claims description 8
- 239000003513 alkali Substances 0.000 claims description 5
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 claims description 4
- 229910021529 ammonia Inorganic materials 0.000 claims description 4
- 238000000280 densification Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 15
- 238000005260 corrosion Methods 0.000 abstract description 13
- 230000007797 corrosion Effects 0.000 abstract description 13
- 239000010408 film Substances 0.000 description 84
- 238000010438 heat treatment Methods 0.000 description 27
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 21
- 238000007789 sealing Methods 0.000 description 18
- 230000000052 comparative effect Effects 0.000 description 16
- 239000008151 electrolyte solution Substances 0.000 description 16
- 230000003647 oxidation Effects 0.000 description 13
- 238000007254 oxidation reaction Methods 0.000 description 13
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 10
- 239000000463 material Substances 0.000 description 10
- 235000006408 oxalic acid Nutrition 0.000 description 7
- 229910000838 Al alloy Inorganic materials 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 238000007743 anodising Methods 0.000 description 4
- 238000009835 boiling Methods 0.000 description 4
- 239000011148 porous material Substances 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 description 3
- 229910001593 boehmite Inorganic materials 0.000 description 3
- FAHBNUUHRFUEAI-UHFFFAOYSA-M hydroxidooxidoaluminium Chemical compound O[Al]=O FAHBNUUHRFUEAI-UHFFFAOYSA-M 0.000 description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 235000011114 ammonium hydroxide Nutrition 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000005868 electrolysis reaction Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- BJEPYKJPYRNKOW-REOHCLBHSA-N (S)-malic acid Chemical compound OC(=O)[C@@H](O)CC(O)=O BJEPYKJPYRNKOW-REOHCLBHSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- BJEPYKJPYRNKOW-UHFFFAOYSA-N alpha-hydroxysuccinic acid Natural products OC(=O)C(O)CC(O)=O BJEPYKJPYRNKOW-UHFFFAOYSA-N 0.000 description 1
- -1 aluminum ions Chemical class 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical group [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910001680 bayerite Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000011162 core material Substances 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- WMWXXXSCZVGQAR-UHFFFAOYSA-N dialuminum;oxygen(2-);hydrate Chemical compound O.[O-2].[O-2].[O-2].[Al+3].[Al+3] WMWXXXSCZVGQAR-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- LMYQFCDLMRNPLY-UHFFFAOYSA-L hydroxy(oxo)alumane Chemical compound O[Al]=O.O[Al]=O LMYQFCDLMRNPLY-UHFFFAOYSA-L 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000001630 malic acid Substances 0.000 description 1
- 235000011090 malic acid Nutrition 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
- C25D11/18—After-treatment, e.g. pore-sealing
- C25D11/24—Chemical after-treatment
- C25D11/246—Chemical after-treatment for sealing layers
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Chemical Treatment Of Metals (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007315770A JP5265181B2 (ja) | 2007-12-06 | 2007-12-06 | 保護膜製造方法 |
| KR1020107010913A KR101222921B1 (ko) | 2007-12-06 | 2008-12-04 | 보호막 제조방법 |
| PCT/JP2008/072024 WO2009072546A1 (ja) | 2007-12-06 | 2008-12-04 | 保護膜製造方法 |
| CN2008801191634A CN101889108B (zh) | 2007-12-06 | 2008-12-04 | 保护膜制造方法 |
| TW097147427A TWI481748B (zh) | 2007-12-06 | 2008-12-05 | 保護膜之製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007315770A JP5265181B2 (ja) | 2007-12-06 | 2007-12-06 | 保護膜製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009138229A JP2009138229A (ja) | 2009-06-25 |
| JP2009138229A5 JP2009138229A5 (zh) | 2010-09-16 |
| JP5265181B2 true JP5265181B2 (ja) | 2013-08-14 |
Family
ID=40717723
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007315770A Active JP5265181B2 (ja) | 2007-12-06 | 2007-12-06 | 保護膜製造方法 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP5265181B2 (zh) |
| KR (1) | KR101222921B1 (zh) |
| CN (1) | CN101889108B (zh) |
| TW (1) | TWI481748B (zh) |
| WO (1) | WO2009072546A1 (zh) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5361627B2 (ja) * | 2009-09-14 | 2013-12-04 | 株式会社アルバック | 真空用バルブ筐体及び真空用バルブ |
| WO2011149317A2 (ko) * | 2010-05-28 | 2011-12-01 | 성균관대학교산학협력단 | 수분 및/또는 산소 투과 방지를 위한 유연성 유/무기 복합 보호막, 그의 제조방법, 및 상기 유연성 유/무기 복합 보호막을 포함하는 전자소자 |
| DE102012204636A1 (de) * | 2012-03-22 | 2013-09-26 | Nanogate Ag | Behandlung einer anodisch oxidierten Oberfläche |
| CN102660763B (zh) * | 2012-05-07 | 2014-09-03 | 复旦大学 | 一种高催化性质TiO2纳米管阵列薄膜的制备方法及应用 |
| US9702053B2 (en) | 2012-06-29 | 2017-07-11 | Apple Inc. | Elimination of crazing in anodized layers |
| JP6562500B2 (ja) * | 2015-03-31 | 2019-08-21 | 地方独立行政法人山口県産業技術センター | 表面処理アルミニウム材とその製造方法 |
| KR20180025909A (ko) * | 2015-07-30 | 2018-03-09 | 후지필름 가부시키가이샤 | 알루미늄판 및 알루미늄판의 제조 방법 |
| TWI588300B (zh) * | 2016-04-08 | 2017-06-21 | 科閎電子股份有限公司 | 利用真空與噴射蒸氣對陽極氧化膜封孔的封孔設備及其方法 |
| US11312107B2 (en) * | 2018-09-27 | 2022-04-26 | Apple Inc. | Plugging anodic oxides for increased corrosion resistance |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB965837A (en) * | 1962-06-19 | 1964-08-06 | Charles Calvin Cohn | Treatment of aluminum oxide coatings |
| JPS5273140A (en) * | 1975-12-15 | 1977-06-18 | Matsushita Electric Ind Co Ltd | Production process for alumite products |
| DE2960565D1 (en) * | 1978-05-22 | 1981-11-05 | Alcan Res & Dev | Process for sealing anodised aluminium and product so obtained |
| CN1003656B (zh) * | 1986-07-09 | 1989-03-22 | 国家海洋局海洋技术研究所 | 阳极氧化铝的封闭方法 |
| JP2614133B2 (ja) * | 1990-04-20 | 1997-05-28 | 富士写真フイルム株式会社 | 印刷版用支持体の表面処理装置 |
| JPH04141600A (ja) * | 1990-10-01 | 1992-05-15 | Showa Alum Corp | アルミニウム製品の陽極酸化皮膜封孔処理法 |
| JP2767727B2 (ja) * | 1991-11-05 | 1998-06-18 | 富士写真フイルム株式会社 | 平版印刷版用支持体の封孔処理方法及び装置 |
| US6447665B1 (en) * | 1997-08-22 | 2002-09-10 | Henkel Corporation | Faster two-step sealing of anodized aluminum surfaces |
-
2007
- 2007-12-06 JP JP2007315770A patent/JP5265181B2/ja active Active
-
2008
- 2008-12-04 KR KR1020107010913A patent/KR101222921B1/ko active IP Right Grant
- 2008-12-04 CN CN2008801191634A patent/CN101889108B/zh active Active
- 2008-12-04 WO PCT/JP2008/072024 patent/WO2009072546A1/ja active Application Filing
- 2008-12-05 TW TW097147427A patent/TWI481748B/zh active
Also Published As
| Publication number | Publication date |
|---|---|
| CN101889108A (zh) | 2010-11-17 |
| CN101889108B (zh) | 2012-07-04 |
| WO2009072546A1 (ja) | 2009-06-11 |
| KR101222921B1 (ko) | 2013-01-17 |
| TWI481748B (zh) | 2015-04-21 |
| JP2009138229A (ja) | 2009-06-25 |
| KR20100072084A (ko) | 2010-06-29 |
| TW200938663A (en) | 2009-09-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5265181B2 (ja) | 保護膜製造方法 | |
| CN101031674B (zh) | 铝或铝合金的耐腐蚀处理方法 | |
| TWI248991B (en) | Aluminum alloy member superior in corrosion resistance and plasma resistance | |
| TWI421373B (zh) | 一種金屬母材之鎢塗層方法 | |
| CN101603194B (zh) | 耐腐蚀处理材料及其制造方法 | |
| SE447396B (sv) | Elektrod, i synnerhet for elektrolys av vattenlosningar, forfarande for framstellning av elektroden samt anvendning av densamma | |
| CN107604342B (zh) | 金属构件其制造方法及具有金属构件的处理室 | |
| KR20040098575A (ko) | 전해용 전극 및 이의 제조방법 | |
| JP4656405B2 (ja) | アルミニウム又はその合金の表面処理方法 | |
| JPH06192887A (ja) | 高温で使用される金属部品のための保護被覆 | |
| JP5369083B2 (ja) | 高耐電圧性を有する表面処理アルミニウム部材およびその製造方法 | |
| JP3803353B2 (ja) | 表面処理アルミニウム材とその製造方法 | |
| JPH09184094A (ja) | 表面処理アルミニウム材及びその製造方法 | |
| CN108431934A (zh) | 半导体处理设备的耐腐蚀性涂层 | |
| WO2022181300A1 (ja) | 構造体及び構造体の製造方法 | |
| JP5352204B2 (ja) | 真空機器用表面処理アルミニウム材 | |
| JP6562500B2 (ja) | 表面処理アルミニウム材とその製造方法 | |
| CN113622003B (zh) | 一种氧化氛围下用耐高温抗冲刷钨或钨合金表面涂层及其制备方法 | |
| CN114737233B (zh) | 一种铝材产品 | |
| JPH05285735A (ja) | 黒鉛製電解加工用電極 | |
| JP5334125B2 (ja) | 真空機器向け表面処理アルミニウム材の製造方法 | |
| JP2010077464A (ja) | 部分的電解めっき方法 | |
| JP2023036913A (ja) | アルミニウムまたはアルミニウム合金の陽極酸化処理法及び陽極酸化皮膜の封孔処理法 | |
| Zeng et al. | Research on the optimal design of surface treatment process for Al-B4C composite by the method of orthogonal experiment | |
| CN114959737A (zh) | 一种质子交换膜电解水制氢用钛双极板的制备方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100728 Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20100728 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20100728 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130205 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130403 Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20130403 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20130423 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130501 |
|
| R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 Ref document number: 5265181 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |