JP5238072B2 - 単結晶太陽電池セルの製造方法 - Google Patents
単結晶太陽電池セルの製造方法 Download PDFInfo
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- JP5238072B2 JP5238072B2 JP2011507883A JP2011507883A JP5238072B2 JP 5238072 B2 JP5238072 B2 JP 5238072B2 JP 2011507883 A JP2011507883 A JP 2011507883A JP 2011507883 A JP2011507883 A JP 2011507883A JP 5238072 B2 JP5238072 B2 JP 5238072B2
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- solar cell
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 16
- 239000013078 crystal Substances 0.000 title claims description 15
- 229910052751 metal Inorganic materials 0.000 claims abstract description 21
- 239000002184 metal Substances 0.000 claims abstract description 21
- 230000005496 eutectics Effects 0.000 claims abstract description 20
- 239000000463 material Substances 0.000 claims abstract description 16
- 239000000758 substrate Substances 0.000 claims abstract description 10
- 238000005245 sintering Methods 0.000 claims abstract description 8
- 239000002245 particle Substances 0.000 claims abstract description 6
- 239000011248 coating agent Substances 0.000 claims abstract 2
- 238000000576 coating method Methods 0.000 claims abstract 2
- 238000002161 passivation Methods 0.000 claims description 24
- 239000010408 film Substances 0.000 claims description 23
- 238000000034 method Methods 0.000 claims description 22
- 239000010409 thin film Substances 0.000 claims description 18
- 229910052782 aluminium Inorganic materials 0.000 claims description 15
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 15
- 229910052709 silver Inorganic materials 0.000 claims description 14
- 239000004332 silver Substances 0.000 claims description 14
- 238000007639 printing Methods 0.000 claims description 6
- 238000007650 screen-printing Methods 0.000 claims description 6
- 229910052710 silicon Inorganic materials 0.000 claims description 6
- 239000010703 silicon Substances 0.000 claims description 6
- 239000004020 conductor Substances 0.000 claims description 5
- 230000008018 melting Effects 0.000 claims description 4
- 238000002844 melting Methods 0.000 claims description 4
- 238000004544 sputter deposition Methods 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 3
- 238000007740 vapor deposition Methods 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 abstract description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 13
- 239000004065 semiconductor Substances 0.000 description 8
- 229910000789 Aluminium-silicon alloy Inorganic materials 0.000 description 7
- 238000001465 metallisation Methods 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 230000004927 fusion Effects 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 101001073212 Arabidopsis thaliana Peroxidase 33 Proteins 0.000 description 1
- 101001123325 Homo sapiens Peroxisome proliferator-activated receptor gamma coactivator 1-beta Proteins 0.000 description 1
- 102100028961 Peroxisome proliferator-activated receptor gamma coactivator 1-beta Human genes 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- -1 aluminum-silver Chemical compound 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000001953 recrystallisation Methods 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
- H01L31/022433—Particular geometry of the grid contacts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
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- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Sustainable Energy (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Photovoltaic Devices (AREA)
Description
Claims (10)
- パシベーションされた後面と後面コンタクト構造とを有する
単結晶太陽電池セルの製造方法において、
誘電性のパシベーション層をセル後面の全面にわたって塗布するステップ、
前記パシベーション層のうちバスバーおよびローカルコンタクトとなるべき領域のみを局所的に除去するステップ、
前記セル後面を均等にコーティングして未パターニングの薄膜金属層を設け、前記パシベーション層を有さない領域で該薄膜金属層と基板材料の表面とが接触するようにするステップ、
前記バスバーおよびローカルコンタクトとなるべき領域に導電性ペーストから成る厚膜層を形成するステップ、
共晶温度を上回る温度で前記厚膜層をシンタリングし、前記薄膜金属層と前記基板材料の表面と前記厚膜層の前記導電性ペーストの粒子との低オームの共晶結合を形成するステップ
を有する
ことを特徴とする単結晶太陽電池セルの製造方法。 - 前記パシベーション層はケイ素酸化物もしくはアルミニウム酸化物から成る、請求項1記載の単結晶太陽電池セルの製造方法。
- 前記薄膜金属層を、アルミニウムを含む材料のスパッタリングまたは蒸着により形成する、請求項1または2記載の単結晶太陽電池セルの製造方法。
- 厚膜プリンティング法またはスクリーンプリンティング法により前面に導体路およびバスバーを形成する、請求項1から3までのいずれか1項記載の単結晶太陽電池セルの製造方法。
- 前記後面の前記バスバーおよびローカルコンタクトとなるべき領域に前記厚膜層をプリンティング法またはスクリーンプリンティング法によって形成する、請求項1から4までのいずれか1項記載の単結晶太陽電池セルの製造方法。
- 前記厚膜層を共通の熱処理ステップにおいてシンタリングする、請求項4または5記載の単結晶太陽電池セルの製造方法。
- 前記導電性ペーストは銀を含む、請求項1から6までのいずれか1項記載の単結晶太陽電池セルの製造方法。
- 前記シンタリングを、アルミニウムとケイ素との共晶温度である577℃を上回りアルミニウムの溶融温度である660℃を下回る温度で行う、請求項1から7までのいずれか1項記載の単結晶太陽電池セルの製造方法。
- 前記シンタリングを、580℃を上回り660℃を下回る温度範囲内で行う、請求項8記載の単結晶太陽電池セルの製造方法。
- セル後面の全面にわたって塗布された誘電性のパシベーション層のうちバスバーおよびローカルコンタクトとなるべき領域のみが局所的に除去され、前記セル後面が均等にコーティングされて未パターニングの薄膜金属層が設けられ、前記パシベーション層を有さない領域で該薄膜金属層と基板材料の表面とが接触し、前記バスバーおよびローカルコンタクトとなるべき領域に導電性ペーストから成る厚膜層が形成され、共晶温度を上回る温度で前記厚膜層がシンタリングされ、前記薄膜金属層と前記基板材料の表面と前記厚膜層の前記導電性ペーストの粒子との低オームの共晶結合が形成されている
ことを特徴とする単結晶太陽電池セル。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102008022574 | 2008-05-07 | ||
DE102008022574.6 | 2008-05-07 | ||
DE102008033169.4 | 2008-07-15 | ||
DE102008033169A DE102008033169A1 (de) | 2008-05-07 | 2008-07-15 | Verfahren zur Herstellung einer monokristallinen Solarzelle |
PCT/EP2009/055372 WO2009135819A2 (de) | 2008-05-07 | 2009-05-05 | Verfahren zur herstellung einer monokristallinen solarzelle |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011520277A JP2011520277A (ja) | 2011-07-14 |
JP5238072B2 true JP5238072B2 (ja) | 2013-07-17 |
Family
ID=41152801
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011507883A Expired - Fee Related JP5238072B2 (ja) | 2008-05-07 | 2009-05-05 | 単結晶太陽電池セルの製造方法 |
Country Status (9)
Country | Link |
---|---|
US (1) | US20110120552A1 (ja) |
EP (1) | EP2289109B1 (ja) |
JP (1) | JP5238072B2 (ja) |
KR (1) | KR101484355B1 (ja) |
CN (1) | CN102067322B (ja) |
AT (1) | ATE550787T1 (ja) |
DE (1) | DE102008033169A1 (ja) |
ES (1) | ES2381176T3 (ja) |
WO (1) | WO2009135819A2 (ja) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2504843A1 (en) | 2009-11-25 | 2012-10-03 | E.I. Du Pont De Nemours And Company | Process for the formation of a silver back electrode of a passivated emitter and rear contact silicon solar cell |
DE102010028189B4 (de) | 2010-04-26 | 2018-09-27 | Solarworld Industries Gmbh | Solarzelle |
EP2398071B1 (en) * | 2010-06-17 | 2013-01-16 | Imec | Method for forming a doped region in a semiconductor layer of a substrate and use of such method |
US20130061918A1 (en) * | 2011-03-03 | 2013-03-14 | E. I. Dupont De Nemours And Company | Process for the formation of a silver back electrode of a passivated emitter and rear contact silicon solar cell |
DE102011052256B4 (de) * | 2011-07-28 | 2015-04-16 | Hanwha Q.CELLS GmbH | Verfahren zur Herstellung einer Solarzelle |
DE102011055143A1 (de) * | 2011-11-08 | 2013-05-08 | Hanwha Q.CELLS GmbH | Beidseitig kontaktierte Halbleiterwafer-Solarzelle mit oberflächenpassivierter Rückseite |
WO2014084795A1 (en) * | 2012-11-30 | 2014-06-05 | Trina Solar Energy Development Pte Ltd | Selectively doped layer for interdigitated back-contact solar cells and method of fabricating the same |
CN104037242B (zh) * | 2013-03-06 | 2016-03-16 | 中美硅晶制品股份有限公司 | 光伏元件及其制造方法 |
WO2015085534A1 (en) * | 2013-12-12 | 2015-06-18 | Ablestik (Shanghai) Limited | Electrically conductive inks |
DE102013111748A1 (de) * | 2013-10-24 | 2015-04-30 | Hanwha Q Cells Gmbh | Solarmodul und Solarmodulherstellungsverfahren |
US9178104B2 (en) | 2013-12-20 | 2015-11-03 | Sunpower Corporation | Single-step metal bond and contact formation for solar cells |
CN106104812A (zh) * | 2014-05-14 | 2016-11-09 | 应用材料意大利有限公司 | 太阳能电池装置及制造太阳能电池装置的方法 |
KR101569417B1 (ko) | 2014-07-07 | 2015-11-16 | 엘지전자 주식회사 | 태양 전지 |
JP6339754B1 (ja) * | 2016-09-28 | 2018-06-06 | 京セラ株式会社 | 太陽電池素子 |
CN111559142A (zh) * | 2020-05-22 | 2020-08-21 | 天津耀皮汽车玻璃有限公司 | 一种带有镂空膜层的镀膜加热玻璃 |
Family Cites Families (18)
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KR900702573A (ko) * | 1988-06-10 | 1990-12-07 | 버나드 엠. 길레스피에 | 개량된 태양전지용 접촉구의 제조방법 |
JPH0690014A (ja) * | 1992-07-22 | 1994-03-29 | Mitsubishi Electric Corp | 薄型太陽電池及びその製造方法,エッチング方法及び自動エッチング装置,並びに半導体装置の製造方法 |
JP3625081B2 (ja) * | 1994-11-25 | 2005-03-02 | 株式会社村田製作所 | 太陽電池の製造方法 |
JP4468494B2 (ja) * | 1998-03-26 | 2010-05-26 | 信越化学工業株式会社 | 太陽電池及び太陽電池の製造方法 |
JP2002083983A (ja) * | 2000-09-08 | 2002-03-22 | Shin Etsu Handotai Co Ltd | 太陽電池セルの製造方法およびこの方法で製造された太陽電池セル |
JP2002246625A (ja) * | 2001-02-21 | 2002-08-30 | Sharp Corp | 太陽電池の製造方法 |
JP2002270869A (ja) * | 2001-03-12 | 2002-09-20 | Shin Etsu Handotai Co Ltd | 太陽電池 |
JP2004006565A (ja) * | 2002-04-16 | 2004-01-08 | Sharp Corp | 太陽電池とその製造方法 |
US7388147B2 (en) * | 2003-04-10 | 2008-06-17 | Sunpower Corporation | Metal contact structure for solar cell and method of manufacture |
JP4155899B2 (ja) * | 2003-09-24 | 2008-09-24 | 三洋電機株式会社 | 光起電力素子の製造方法 |
JP2005150609A (ja) * | 2003-11-19 | 2005-06-09 | Sharp Corp | 太陽電池の製造方法 |
US20060060238A1 (en) | 2004-02-05 | 2006-03-23 | Advent Solar, Inc. | Process and fabrication methods for emitter wrap through back contact solar cells |
JP3926822B2 (ja) * | 2005-02-03 | 2007-06-06 | 三菱電機株式会社 | 半導体装置及び半導体装置の製造方法 |
EP1763086A1 (en) * | 2005-09-09 | 2007-03-14 | Interuniversitair Micro-Elektronica Centrum | Photovoltaic cell with thick silicon oxide and silicon nitride passivation and fabrication method |
JP2007214372A (ja) * | 2006-02-09 | 2007-08-23 | Sharp Corp | 太陽電池およびその製造方法 |
NO20061668L (no) * | 2006-04-12 | 2007-10-15 | Renewable Energy Corp | Solcelle og fremgangsmate for fremstilling av samme |
DE102006041424A1 (de) * | 2006-09-04 | 2008-03-20 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur simultanen Dotierung und Oxidation von Halbleitersubstraten und dessen Verwendung |
US7820540B2 (en) * | 2007-12-21 | 2010-10-26 | Palo Alto Research Center Incorporated | Metallization contact structures and methods for forming multiple-layer electrode structures for silicon solar cells |
-
2008
- 2008-07-15 DE DE102008033169A patent/DE102008033169A1/de not_active Withdrawn
-
2009
- 2009-05-05 US US12/990,962 patent/US20110120552A1/en not_active Abandoned
- 2009-05-05 EP EP09742037A patent/EP2289109B1/de not_active Not-in-force
- 2009-05-05 CN CN2009801163408A patent/CN102067322B/zh not_active Expired - Fee Related
- 2009-05-05 WO PCT/EP2009/055372 patent/WO2009135819A2/de active Application Filing
- 2009-05-05 KR KR1020107027345A patent/KR101484355B1/ko active IP Right Grant
- 2009-05-05 ES ES09742037T patent/ES2381176T3/es active Active
- 2009-05-05 JP JP2011507883A patent/JP5238072B2/ja not_active Expired - Fee Related
- 2009-05-05 AT AT09742037T patent/ATE550787T1/de active
Also Published As
Publication number | Publication date |
---|---|
EP2289109A2 (de) | 2011-03-02 |
KR101484355B1 (ko) | 2015-01-20 |
CN102067322A (zh) | 2011-05-18 |
WO2009135819A3 (de) | 2010-11-18 |
WO2009135819A2 (de) | 2009-11-12 |
CN102067322B (zh) | 2013-03-27 |
ES2381176T3 (es) | 2012-05-23 |
KR20110005898A (ko) | 2011-01-19 |
US20110120552A1 (en) | 2011-05-26 |
ATE550787T1 (de) | 2012-04-15 |
DE102008033169A1 (de) | 2009-11-12 |
EP2289109B1 (de) | 2012-03-21 |
JP2011520277A (ja) | 2011-07-14 |
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