JP5218325B2 - 液滴吐出装置の吐出重量測定方法、及び、液滴吐出装置 - Google Patents

液滴吐出装置の吐出重量測定方法、及び、液滴吐出装置 Download PDF

Info

Publication number
JP5218325B2
JP5218325B2 JP2009185550A JP2009185550A JP5218325B2 JP 5218325 B2 JP5218325 B2 JP 5218325B2 JP 2009185550 A JP2009185550 A JP 2009185550A JP 2009185550 A JP2009185550 A JP 2009185550A JP 5218325 B2 JP5218325 B2 JP 5218325B2
Authority
JP
Japan
Prior art keywords
discharge
droplet discharge
unit
head
weight
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2009185550A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009255093A5 (https=
JP2009255093A (ja
Inventor
健嗣 小島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2009185550A priority Critical patent/JP5218325B2/ja
Publication of JP2009255093A publication Critical patent/JP2009255093A/ja
Publication of JP2009255093A5 publication Critical patent/JP2009255093A5/ja
Application granted granted Critical
Publication of JP5218325B2 publication Critical patent/JP5218325B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
JP2009185550A 2009-08-10 2009-08-10 液滴吐出装置の吐出重量測定方法、及び、液滴吐出装置 Active JP5218325B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009185550A JP5218325B2 (ja) 2009-08-10 2009-08-10 液滴吐出装置の吐出重量測定方法、及び、液滴吐出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009185550A JP5218325B2 (ja) 2009-08-10 2009-08-10 液滴吐出装置の吐出重量測定方法、及び、液滴吐出装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2007190436A Division JP4497181B2 (ja) 2007-07-23 2007-07-23 液滴吐出方法、及び液滴吐出装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2013045121A Division JP5423917B2 (ja) 2013-03-07 2013-03-07 液滴吐出装置の吐出重量測定方法、及び、液滴吐出装置

Publications (3)

Publication Number Publication Date
JP2009255093A JP2009255093A (ja) 2009-11-05
JP2009255093A5 JP2009255093A5 (https=) 2010-09-02
JP5218325B2 true JP5218325B2 (ja) 2013-06-26

Family

ID=41383208

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009185550A Active JP5218325B2 (ja) 2009-08-10 2009-08-10 液滴吐出装置の吐出重量測定方法、及び、液滴吐出装置

Country Status (1)

Country Link
JP (1) JP5218325B2 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5621276B2 (ja) * 2010-03-01 2014-11-12 セイコーエプソン株式会社 液滴吐出装置
JP5621277B2 (ja) * 2010-03-03 2014-11-12 セイコーエプソン株式会社 液滴吐出装置
JP5849459B2 (ja) * 2011-06-27 2016-01-27 セイコーエプソン株式会社 処理装置及び処理方法
WO2024248016A1 (ja) * 2023-05-30 2024-12-05 武蔵エンジニアリング株式会社 吐出状態検査方法、吐出状態検査装置および液滴検査システム

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11248925A (ja) * 1998-03-03 1999-09-17 Seiko Epson Corp フィルター製造装置とフィルター製造方法
JP2004209429A (ja) * 2003-01-07 2004-07-29 Seiko Epson Corp 液滴吐出システム、液滴吐出ヘッドの吐出量測定方法、液滴吐出ヘッドの吐出量適正化方法、電気光学装置、電気光学装置の製造方法および電子機器
JP4639751B2 (ja) * 2004-10-21 2011-02-23 セイコーエプソン株式会社 機能液供給装置、これに用いられる機能液タンクおよび機能液補充ユニット、液滴吐出装置、並びに電気光学装置の製造方法
JP2006239621A (ja) * 2005-03-04 2006-09-14 Seiko Epson Corp ワイピング装置およびこれを備えた液滴吐出装置、並びに電気光学装置の製造方法、電気光学装置および電子機器
JP2007111592A (ja) * 2005-10-18 2007-05-10 Ulvac Japan Ltd 吐出ノズルの検査方法、インクの塗布方法及びインク塗布装置

Also Published As

Publication number Publication date
JP2009255093A (ja) 2009-11-05

Similar Documents

Publication Publication Date Title
JP4497181B2 (ja) 液滴吐出方法、及び液滴吐出装置
JP4328614B2 (ja) マイクロデポジション装置
KR101696251B1 (ko) 액적 토출 장치 및 액적 토출 장치의 제어 방법
JP5218325B2 (ja) 液滴吐出装置の吐出重量測定方法、及び、液滴吐出装置
JP2007256449A (ja) 液滴噴射検査装置、液滴噴射装置及び塗布体の製造方法
JP4058453B2 (ja) 液滴塗布装置
CN102189061A (zh) 液滴排出装置
JP5131450B2 (ja) 液滴吐出量調整方法及びパターン形成装置
JP5018842B2 (ja) 液滴吐出装置
JP5423917B2 (ja) 液滴吐出装置の吐出重量測定方法、及び、液滴吐出装置
CN1974027B (zh) 溶液涂敷装置及溶液供给量的计量方法、溶液的供给方法
JP2009045547A (ja) 吐出重量測定方法、液滴吐出ヘッドの保守方法、液滴吐出装置、及び液滴吐出方法
JP2009095740A (ja) 液滴吐出ヘッドの液滴吐出量調整方法及びパターン形成装置
JP2009045546A (ja) 液滴吐出方法、及び液滴吐出装置
JP2009090211A (ja) 液滴吐出ヘッドの液滴吐出量検出方法
JP4905140B2 (ja) 重量測定方法及び液滴吐出装置
JP5272427B2 (ja) 液滴吐出方法
JP2011177679A (ja) 液滴吐出装置および液滴吐出装置の制御方法
JP4529755B2 (ja) ドット径補正係数取得方法、ドット径測定方法およびドット径異常検出方法、並びにドット径測定装置、ドット径異常検出装置および液滴吐出装置
JP5915234B2 (ja) 液滴吐出装置
JP2009112972A (ja) 膜形成方法、膜形成装置、液晶装置の製造方法、及び液晶装置の製造装置
KR20260025811A (ko) 기판 처리 장치 및 방법
JP5655880B2 (ja) 液滴吐出装置
JP2011104475A (ja) 液滴吐出方法及び液滴吐出装置
JP2010099570A (ja) 液滴吐出装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100721

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20100721

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120221

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120420

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20130205

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20130218

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20160315

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Ref document number: 5218325

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313113

R360 Written notification for declining of transfer of rights

Free format text: JAPANESE INTERMEDIATE CODE: R360

R360 Written notification for declining of transfer of rights

Free format text: JAPANESE INTERMEDIATE CODE: R360

R371 Transfer withdrawn

Free format text: JAPANESE INTERMEDIATE CODE: R371

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313113

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250