JP5217069B2 - 感光性セラミックス組成物及びセラミックス基板 - Google Patents

感光性セラミックス組成物及びセラミックス基板 Download PDF

Info

Publication number
JP5217069B2
JP5217069B2 JP2001252542A JP2001252542A JP5217069B2 JP 5217069 B2 JP5217069 B2 JP 5217069B2 JP 2001252542 A JP2001252542 A JP 2001252542A JP 2001252542 A JP2001252542 A JP 2001252542A JP 5217069 B2 JP5217069 B2 JP 5217069B2
Authority
JP
Japan
Prior art keywords
weight
hollow structure
inorganic
powder
sio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2001252542A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003055036A5 (enExample
JP2003055036A (ja
Inventor
智也 山舗
孝樹 正木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toray Industries Inc
Original Assignee
Toray Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Industries Inc filed Critical Toray Industries Inc
Priority to JP2001252542A priority Critical patent/JP5217069B2/ja
Publication of JP2003055036A publication Critical patent/JP2003055036A/ja
Publication of JP2003055036A5 publication Critical patent/JP2003055036A5/ja
Application granted granted Critical
Publication of JP5217069B2 publication Critical patent/JP5217069B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Materials For Photolithography (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
JP2001252542A 2001-08-23 2001-08-23 感光性セラミックス組成物及びセラミックス基板 Expired - Fee Related JP5217069B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001252542A JP5217069B2 (ja) 2001-08-23 2001-08-23 感光性セラミックス組成物及びセラミックス基板

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001252542A JP5217069B2 (ja) 2001-08-23 2001-08-23 感光性セラミックス組成物及びセラミックス基板

Publications (3)

Publication Number Publication Date
JP2003055036A JP2003055036A (ja) 2003-02-26
JP2003055036A5 JP2003055036A5 (enExample) 2008-09-25
JP5217069B2 true JP5217069B2 (ja) 2013-06-19

Family

ID=19080998

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001252542A Expired - Fee Related JP5217069B2 (ja) 2001-08-23 2001-08-23 感光性セラミックス組成物及びセラミックス基板

Country Status (1)

Country Link
JP (1) JP5217069B2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011125546A1 (ja) 2010-03-31 2011-10-13 京セラ株式会社 インターポーザー及びそれを用いた電子装置
JP5618651B2 (ja) * 2010-06-30 2014-11-05 富士フイルム株式会社 感光性組成物、パターン形成材料、並びに、これを用いた感光性膜、パターン形成方法、パターン膜、低屈折率膜、反射防止膜、光学デバイス、及び、固体撮像素子
JP5622564B2 (ja) * 2010-06-30 2014-11-12 富士フイルム株式会社 感光性組成物、パターン形成材料、並びに、これを用いた感光性膜、パターン形成方法、パターン膜、低屈折率膜、光学デバイス、及び、固体撮像素子
JP5662450B2 (ja) * 2010-07-30 2015-01-28 京セラ株式会社 絶縁シート、その製造方法及びその絶縁シートを用いた構造体の製造方法
JP5647910B2 (ja) * 2011-01-31 2015-01-07 富士フイルム株式会社 感光性組成物、パターン形成材料、並びに、これを用いた感光性膜、パターン形成方法、パターン膜、低屈折率膜、光学デバイス、及び、固体撮像素子
WO2024185060A1 (ja) * 2023-03-08 2024-09-12 株式会社レゾナック 感光性樹脂組成物、感光性樹脂フィルム、多層プリント配線板及び半導体パッケージ、並びに多層プリント配線板の製造方法
WO2025115581A1 (ja) * 2023-11-28 2025-06-05 Agc株式会社 セラミックス基板及びセラミックスグリーンシート

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3275326B2 (ja) * 1990-04-24 2002-04-15 株式会社日立製作所 多層セラミック焼結体の製造方法
JP3128910B2 (ja) * 1991-12-26 2001-01-29 東レ株式会社 セラミックス・グリ−ンシ−ト

Also Published As

Publication number Publication date
JP2003055036A (ja) 2003-02-26

Similar Documents

Publication Publication Date Title
KR100861857B1 (ko) 감광성 세라믹스 조성물 및 그것을 이용한 다층 기판의제조방법
EP0845445B1 (en) Photosensitive ceramic green sheet, ceramic package,process for producing the same and its use in preparing a ceramic package with a fired board
US6004705A (en) Photosensitive ceramics green sheet
JP5217069B2 (ja) 感光性セラミックス組成物及びセラミックス基板
EP0602252B1 (en) Ceramic green sheet
JP2002148786A (ja) 感光性セラミックス組成物
JP4061958B2 (ja) 感光性セラミックス組成物及びその現像方法
JP3885285B2 (ja) パターン形成したセラミックスグリーンシートの製造法
JP3324259B2 (ja) セラミックス・グリーンシート
JPH10265270A (ja) 感光性セラミック組成物
JP4538946B2 (ja) 感光性セラミックス組成物
JP4161683B2 (ja) 感光性セラミックス組成物
JP2010018478A (ja) 感光性セラミックス組成物及び感光性セラミックスシート並びに感光性セラミックスシートの製造方法
JP3128910B2 (ja) セラミックス・グリ−ンシ−ト
JP2005249998A (ja) 感光性セラミックス組成物およびそれを用いたセラミックス多層基板
JP2004307275A (ja) 感光性セラミックス組成物
JP2007086268A (ja) 感光性シート
JP2005242096A (ja) 感光性セラミックス組成物
JP5162814B2 (ja) 感光性セラミックスシートの加工方法
JP4352663B2 (ja) 感光性セラミックス組成物
JP2007197312A (ja) 拘束シートおよび焼結体の製造方法
JP2004067398A (ja) ガラスセラミックスグリーンシートの積層体、及びそれを用いた多層基板の製造方法
JP2006083014A (ja) セラミックス焼結体およびそれを用いたセラミックス多層基板
JP4284935B2 (ja) セラミックス多層基板とその製造方法
JP2003318313A (ja) セラミックス基板の製造方法

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080811

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20080811

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20100816

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20111129

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120116

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120731

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120906

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20121120

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20121218

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20130205

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20130218

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20160315

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20160315

Year of fee payment: 3

LAPS Cancellation because of no payment of annual fees