JP5201042B2 - エキシマランプ - Google Patents
エキシマランプ Download PDFInfo
- Publication number
- JP5201042B2 JP5201042B2 JP2009069406A JP2009069406A JP5201042B2 JP 5201042 B2 JP5201042 B2 JP 5201042B2 JP 2009069406 A JP2009069406 A JP 2009069406A JP 2009069406 A JP2009069406 A JP 2009069406A JP 5201042 B2 JP5201042 B2 JP 5201042B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- excimer lamp
- discharge vessel
- light
- discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000007787 solid Substances 0.000 claims description 22
- 238000012544 monitoring process Methods 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 239000010419 fine particle Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 238000000638 solvent extraction Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
Images
Landscapes
- Vessels And Coating Films For Discharge Lamps (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Plasma & Fusion (AREA)
- Manufacturing & Machinery (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009069406A JP5201042B2 (ja) | 2009-03-23 | 2009-03-23 | エキシマランプ |
TW099100704A TWI449083B (zh) | 2009-03-23 | 2010-01-12 | Excimer lamp |
KR1020100011944A KR101301806B1 (ko) | 2009-03-23 | 2010-02-09 | 엑시머 램프 |
CN201010150661A CN101847564A (zh) | 2009-03-23 | 2010-03-23 | 准分子灯 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009069406A JP5201042B2 (ja) | 2009-03-23 | 2009-03-23 | エキシマランプ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010225343A JP2010225343A (ja) | 2010-10-07 |
JP5201042B2 true JP5201042B2 (ja) | 2013-06-05 |
Family
ID=42772126
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009069406A Active JP5201042B2 (ja) | 2009-03-23 | 2009-03-23 | エキシマランプ |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5201042B2 (zh) |
KR (1) | KR101301806B1 (zh) |
CN (1) | CN101847564A (zh) |
TW (1) | TWI449083B (zh) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3491532B2 (ja) * | 1998-07-01 | 2004-01-26 | 東亞合成株式会社 | シャドウマスク製造時の裏止め材用硬化型組成物 |
JP5376410B2 (ja) * | 2011-03-11 | 2013-12-25 | ウシオ電機株式会社 | エキシマランプ |
JP5287928B2 (ja) * | 2011-05-17 | 2013-09-11 | ウシオ電機株式会社 | エキシマランプ |
JP5898891B2 (ja) * | 2011-09-13 | 2016-04-06 | 浜松ホトニクス株式会社 | 発光装置 |
JP5891804B2 (ja) * | 2012-01-23 | 2016-03-23 | ウシオ電機株式会社 | エキシマランプ |
JP6016059B2 (ja) * | 2012-03-30 | 2016-10-26 | ウシオ電機株式会社 | エキシマランプ |
JP6232782B2 (ja) * | 2013-07-01 | 2017-11-22 | ウシオ電機株式会社 | エキシマランプ |
KR102219742B1 (ko) * | 2013-07-31 | 2021-02-23 | 가부시키가이샤 지에스 유아사 | 방전 램프 |
JP6201925B2 (ja) * | 2013-07-31 | 2017-09-27 | 株式会社Gsユアサ | 放電ランプ |
JP6191870B2 (ja) * | 2013-11-22 | 2017-09-06 | ウシオ電機株式会社 | エキシマランプ |
JP5892189B2 (ja) * | 2014-04-11 | 2016-03-23 | ウシオ電機株式会社 | エキシマランプおよびエキシマランプ装置 |
JP7106945B2 (ja) * | 2018-04-02 | 2022-07-27 | ウシオ電機株式会社 | エキシマランプ、光照射装置、及び、オゾン発生装置 |
TWI841791B (zh) * | 2019-10-07 | 2024-05-11 | 日商牛尾電機股份有限公司 | 紫外線照射裝置 |
TWI747073B (zh) * | 2019-11-01 | 2021-11-21 | 崇翌科技股份有限公司 | 準分子燈 |
JP7384090B2 (ja) | 2020-03-26 | 2023-11-21 | ウシオ電機株式会社 | エキシマランプ、光照射装置 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3149780B2 (ja) * | 1995-03-31 | 2001-03-26 | ウシオ電機株式会社 | 外部電極式蛍光放電管 |
JPH10188910A (ja) * | 1996-12-25 | 1998-07-21 | Ushio Inc | 外部電極型蛍光ランプ |
JP2004111326A (ja) * | 2002-09-20 | 2004-04-08 | Japan Storage Battery Co Ltd | エキシマランプ |
JP4221561B2 (ja) * | 2002-10-02 | 2009-02-12 | 株式会社ジーエス・ユアサコーポレーション | エキシマランプ |
JP2004178882A (ja) * | 2002-11-26 | 2004-06-24 | Iwasaki Electric Co Ltd | 放電ランプ |
JP2005259380A (ja) * | 2004-03-09 | 2005-09-22 | Japan Storage Battery Co Ltd | 紫外線照射処理装置 |
JP4561448B2 (ja) * | 2004-04-07 | 2010-10-13 | 株式会社Gsユアサ | 誘電体バリア放電ランプ及び紫外線照射装置 |
KR100717704B1 (ko) * | 2004-04-07 | 2007-05-11 | 가부시키가이샤 지에스 유아사 코포레이션 | 유전체 배리어 방전 램프 |
JP4396415B2 (ja) * | 2004-06-24 | 2010-01-13 | ウシオ電機株式会社 | 光照射装置 |
JP4400469B2 (ja) * | 2005-02-02 | 2010-01-20 | ウシオ電機株式会社 | 希ガス蛍光ランプ |
JP4857939B2 (ja) * | 2006-06-19 | 2012-01-18 | ウシオ電機株式会社 | 放電ランプ |
JP4848879B2 (ja) * | 2006-07-28 | 2011-12-28 | ウシオ電機株式会社 | 希ガス蛍光ランプ |
JP5019156B2 (ja) * | 2006-08-21 | 2012-09-05 | ウシオ電機株式会社 | エキシマランプ装置 |
JP2008059888A (ja) * | 2006-08-31 | 2008-03-13 | Ushio Inc | エキシマランプ |
JP4900011B2 (ja) * | 2006-11-24 | 2012-03-21 | ウシオ電機株式会社 | 放電ランプ |
JP4946552B2 (ja) * | 2007-03-19 | 2012-06-06 | ウシオ電機株式会社 | 外部電極型希ガス蛍光ランプ |
JP4424394B2 (ja) * | 2007-08-31 | 2010-03-03 | ウシオ電機株式会社 | エキシマランプ |
-
2009
- 2009-03-23 JP JP2009069406A patent/JP5201042B2/ja active Active
-
2010
- 2010-01-12 TW TW099100704A patent/TWI449083B/zh active
- 2010-02-09 KR KR1020100011944A patent/KR101301806B1/ko active IP Right Grant
- 2010-03-23 CN CN201010150661A patent/CN101847564A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
JP2010225343A (ja) | 2010-10-07 |
TWI449083B (zh) | 2014-08-11 |
KR20100106207A (ko) | 2010-10-01 |
CN101847564A (zh) | 2010-09-29 |
TW201036028A (en) | 2010-10-01 |
KR101301806B1 (ko) | 2013-08-29 |
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